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MX2015015411A - Dispositivo de deposicion y metodo para deposicion que usa el mismo. - Google Patents

Dispositivo de deposicion y metodo para deposicion que usa el mismo.

Info

Publication number
MX2015015411A
MX2015015411A MX2015015411A MX2015015411A MX2015015411A MX 2015015411 A MX2015015411 A MX 2015015411A MX 2015015411 A MX2015015411 A MX 2015015411A MX 2015015411 A MX2015015411 A MX 2015015411A MX 2015015411 A MX2015015411 A MX 2015015411A
Authority
MX
Mexico
Prior art keywords
cooling unit
main body
work pieces
film forming
refrigerant
Prior art date
Application number
MX2015015411A
Other languages
English (en)
Other versions
MX381171B (es
Inventor
Hirofumi Fujii
Toshiki Segawa
Atsushi Ishiyama
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of MX2015015411A publication Critical patent/MX2015015411A/es
Publication of MX381171B publication Critical patent/MX381171B/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Se suministran un dispositivo de deposición y un método de deposición capaces de incrementar la eficiencia de enfriamiento y que tienen riesgo reducido en gran medida de fugas de refrigerante. Este dispositivo de deposición 1 incluye: una unidad de enfriamiento 4 que enfría piezas de trabajo W en un espacio 2e de un compartimiento 2; un cuerpo principal de mesa giratoria 11 que gira alrededor de un eje vertical en un estado en el cual las piezas de trabajo W se colocan sobre la misma, y este cuerpo principal de mesa giratoria 11 tiene una porción de ubicación de unidad de enfriamiento 21 en la cual se coloca la unidad de enfriamiento 4 y porciones de ubicación de piezas de trabajo 22 que están dispuestas de modo que circundan la periferia de la porción de ubicación de la unidad de enfriamiento 21 y sobre las cuales se colocan respectivamente las piezas de trabajo W; un mecanismo de elevación 5 que sube y baja la unidad de enfriamiento 4, dentro del espacio 2e, entre una primera posición en la cual se coloca la unidad de enfriamiento sobre el cuerpo principal de la mesa giratoria 11 y una segunda posición en la cual se separa hacia arriba la unidad de enfriamiento del cuerpo principal de la mesa giratoria 11 y enfrenta superficies laterales de las piezas de trabajo W colocadas sobre las porciones de ubicación de la pieza de trabajo 22; y tubería de refrigerante 6 que está unida al compartimiento 2 y conectada de manera desprendible a la unidad de enfriamiento 4 para suministrar el refrigerante a la unidad de enfriamiento 4.
MX2015015411A 2013-05-27 2014-05-15 Dispositivo de deposicion y metodo para deposicion que usa el mismo. MX381171B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013110997A JP5941016B2 (ja) 2013-05-27 2013-05-27 成膜装置およびそれを用いた成膜方法
PCT/JP2014/062934 WO2014192551A1 (ja) 2013-05-27 2014-05-15 成膜装置およびそれを用いた成膜方法

Publications (2)

Publication Number Publication Date
MX2015015411A true MX2015015411A (es) 2016-03-15
MX381171B MX381171B (es) 2025-03-12

Family

ID=51988586

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015015411A MX381171B (es) 2013-05-27 2014-05-15 Dispositivo de deposicion y metodo para deposicion que usa el mismo.

Country Status (11)

Country Link
US (1) US10538842B2 (es)
EP (1) EP3006595B1 (es)
JP (1) JP5941016B2 (es)
KR (1) KR20160013128A (es)
CN (1) CN105247097B (es)
BR (1) BR112015029469B1 (es)
ES (1) ES2655452T3 (es)
MX (1) MX381171B (es)
PT (1) PT3006595T (es)
TW (1) TWI546396B (es)
WO (1) WO2014192551A1 (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3279364B1 (en) * 2016-08-03 2021-10-06 IHI Hauzer Techno Coating B.V. Apparatus for coating substrates
CN108085646B (zh) * 2017-10-31 2023-06-23 东莞市汇成真空科技有限公司 一种大型罐体内壁镀膜用真空阴极电弧镀膜机
CN108193185A (zh) * 2018-03-14 2018-06-22 嘉兴岱源真空科技有限公司 一种夹具冷却装置及纳米材料制作设备
CN110387531A (zh) * 2018-04-18 2019-10-29 北京创昱科技有限公司 气相沉积冷却装置
KR102453361B1 (ko) * 2018-05-18 2022-10-07 삼성전자주식회사 다중 경화 장치 및 다중 경화 장치를 이용한 반도체 칩의 제조 방법
CN111850501B (zh) * 2020-07-20 2022-09-27 江苏集萃有机光电技术研究所有限公司 一种基片架结构及真空蒸镀装置
CN112481596B (zh) * 2020-11-27 2022-01-14 厦门大学 一种工件旋转装置和离子束物理气相沉积装置
JP7710914B2 (ja) * 2021-07-29 2025-07-22 新明和工業株式会社 成膜装置用の基体回転装置
CN114134478A (zh) * 2021-11-26 2022-03-04 上海大学 一种快速冷却的镀膜样品台装置及其应用

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2598466A (en) * 1948-07-13 1952-05-27 Gen Motors Corp Electrostatic spray painting method and apparatus
US2730988A (en) * 1950-06-10 1956-01-17 Ransburg Electro Coating Corp Electrostatic coating apparatus
US3744449A (en) * 1971-04-28 1973-07-10 Nat Steel Corp Article hanging,conveying,and coating apparatus
US4628859A (en) * 1985-04-15 1986-12-16 Hines Andrew D Apparatus and workpiece fixture for electrostatic spray coating
JPH01136966A (ja) * 1987-11-24 1989-05-30 Kobe Steel Ltd 物理蒸着装置
US5131460A (en) * 1991-10-24 1992-07-21 Applied Materials, Inc. Reducing particulates during semiconductor fabrication
JPH0673538A (ja) * 1992-05-26 1994-03-15 Kobe Steel Ltd アークイオンプレーティング装置
DE69432165T2 (de) * 1993-03-15 2003-12-11 Kabushiki Kaisha Kobeseikosho, Kobe Vorrichtung und system zum lichtbogenionenplattieren
US5591264A (en) * 1994-03-22 1997-01-07 Sony Corporation Spin coating device
US6602348B1 (en) * 1996-09-17 2003-08-05 Applied Materials, Inc. Substrate cooldown chamber
US6276072B1 (en) * 1997-07-10 2001-08-21 Applied Materials, Inc. Method and apparatus for heating and cooling substrates
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US6949143B1 (en) * 1999-12-15 2005-09-27 Applied Materials, Inc. Dual substrate loadlock process equipment
TW480562B (en) * 1999-12-20 2002-03-21 Tokyo Electron Ltd Coating processing apparatus
JP2002043381A (ja) * 2000-07-19 2002-02-08 Tokyo Electron Ltd ウエハ温度制御装置
US6790484B2 (en) * 2001-12-14 2004-09-14 Carlton Mann Method and apparatus for cleaning electrostatic painting hooks
US6726772B2 (en) * 2002-03-07 2004-04-27 Illinois Tool Works Inc. Method and apparatus for securing articles to be coated to a conveyor
JP3369165B1 (ja) * 2002-04-09 2003-01-20 東京エレクトロン株式会社 縦型熱処理装置
US7150792B2 (en) * 2002-10-15 2006-12-19 Kobe Steel, Ltd. Film deposition system and film deposition method using the same
JP4600025B2 (ja) * 2004-12-16 2010-12-15 日新電機株式会社 コーティング装置
JP4612847B2 (ja) * 2005-02-10 2011-01-12 キヤノン株式会社 容器、及びそれを用いた露光装置
US20070240982A1 (en) * 2005-10-17 2007-10-18 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Arc ion plating apparatus
US7849812B2 (en) * 2006-02-28 2010-12-14 Csl Silicones Inc. Method and apparatus for automated coating of electrical insulators with a silicone composition
JP4110175B2 (ja) * 2006-03-22 2008-07-02 株式会社神戸製鋼所 アークイオンプレーティング方法
US8231771B2 (en) * 2007-08-31 2012-07-31 Honda Motor Co., Ltd. Coating system and method
KR101988391B1 (ko) * 2011-06-27 2019-06-12 솔레라스 리미티드 스퍼터링 타겟
JP5644706B2 (ja) * 2011-07-19 2014-12-24 株式会社豊田自動織機 電動圧縮機用の電子部品固定構造
WO2015053956A1 (en) * 2013-10-08 2015-04-16 United Technologies Corporation Cathodic arc deposition apparatus and method
US9527097B2 (en) * 2013-11-05 2016-12-27 Torrent Systems Llc Spray coating system and method
US9209062B1 (en) * 2014-05-28 2015-12-08 Spintrac Systems, Inc. Removable spin chamber with vacuum attachment

Also Published As

Publication number Publication date
JP5941016B2 (ja) 2016-06-29
BR112015029469A2 (pt) 2017-07-25
TW201446983A (zh) 2014-12-16
WO2014192551A1 (ja) 2014-12-04
PT3006595T (pt) 2018-01-12
US20160068946A1 (en) 2016-03-10
KR20160013128A (ko) 2016-02-03
US10538842B2 (en) 2020-01-21
MX381171B (es) 2025-03-12
BR112015029469B1 (pt) 2021-12-07
EP3006595A4 (en) 2017-01-25
CN105247097B (zh) 2017-08-04
JP2014227598A (ja) 2014-12-08
TWI546396B (zh) 2016-08-21
EP3006595A1 (en) 2016-04-13
ES2655452T3 (es) 2018-02-20
EP3006595B1 (en) 2017-12-27
CN105247097A (zh) 2016-01-13

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