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MX2015004982A - Ensambles metalizadores en linea y sistema transportadores para el revestimiento de partes que incorporan los mismos. - Google Patents

Ensambles metalizadores en linea y sistema transportadores para el revestimiento de partes que incorporan los mismos.

Info

Publication number
MX2015004982A
MX2015004982A MX2015004982A MX2015004982A MX2015004982A MX 2015004982 A MX2015004982 A MX 2015004982A MX 2015004982 A MX2015004982 A MX 2015004982A MX 2015004982 A MX2015004982 A MX 2015004982A MX 2015004982 A MX2015004982 A MX 2015004982A
Authority
MX
Mexico
Prior art keywords
parts
same
rotating actuator
conveyor systems
systems incorporating
Prior art date
Application number
MX2015004982A
Other languages
English (en)
Other versions
MX386755B (es
Inventor
Joseph W Gresik
Jeffrey J Black
Stanton A Brooks
John H Shaw
Lawrence J Zuckerman
Original Assignee
Marca Machinery Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/655,912 external-priority patent/US9051650B2/en
Application filed by Marca Machinery Llc filed Critical Marca Machinery Llc
Publication of MX2015004982A publication Critical patent/MX2015004982A/es
Publication of MX386755B publication Critical patent/MX386755B/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)

Abstract

Los ensambles metalizadores en línea pueden incluir un intercambiador de accionador giratorio externo que puede funcionar para intercambiar una o más partes entre un sistema transportador y una cámara de vacío, y un intercambiador de accionador giratorio interno dentro de la cámara de vacío que puede funcionar para recibir a la una o más partes desde el intercambiador de accionador giratorio externo, la transición de la una o más partes hacia un revestidor de bombardeo iónico integrado con la cámara de vacío para metalizar, y regresar la una o más partes metalizadas al intercambiador de accionador giratorio externo de tal manera que el intercambiador de accionador giratorio externo pueda regresar la una o más partes metalizadas al sistema transporador.
MX2015004982A 2012-10-19 2013-10-18 Ensambles metalizadores en línea y sistemas transportadores para el revestimiento de partes que incorporan los mismos. MX386755B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/655,912 US9051650B2 (en) 2009-01-16 2012-10-19 In-line metallizer assemblies and part-coating conveyor systems incorporating the same
PCT/US2013/065632 WO2014063023A1 (en) 2012-10-19 2013-10-18 In-line metallizer assemblies and part-coating conveyor systems incorporating the same

Publications (2)

Publication Number Publication Date
MX2015004982A true MX2015004982A (es) 2015-12-01
MX386755B MX386755B (es) 2025-03-19

Family

ID=50488780

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015004982A MX386755B (es) 2012-10-19 2013-10-18 Ensambles metalizadores en línea y sistemas transportadores para el revestimiento de partes que incorporan los mismos.

Country Status (5)

Country Link
EP (1) EP2909357B1 (es)
CA (1) CA2888751C (es)
ES (1) ES2747351T3 (es)
MX (1) MX386755B (es)
WO (1) WO2014063023A1 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114457315B (zh) * 2021-12-28 2023-07-25 凯盛信息显示材料(洛阳)有限公司 一种玻璃磁控溅射镀膜系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5709785A (en) * 1995-06-08 1998-01-20 First Light Technology Inc. Metallizing machine
US6730194B2 (en) * 1997-11-05 2004-05-04 Unaxis Balzers Aktiengesellschaft Method for manufacturing disk-shaped workpieces with a sputter station
NL1010531C2 (nl) * 1998-11-11 2000-05-15 Vacumetal B V Inrichting en werkwijze voor het door middel van opdampen (PVD) op voorwerpen aanbrengen van een laag.
US9297064B2 (en) 2009-01-16 2016-03-29 Marca Machinery, Llc In-line metallizer assemblies and part-coating conveyor systems incorporating the same
ITMI20110432A1 (it) * 2011-03-18 2012-09-19 Tapematic Spa Macchina e metodo per la metallizzazione di oggetti tridimensionali di piccole dimensioni

Also Published As

Publication number Publication date
EP2909357A1 (en) 2015-08-26
EP2909357B1 (en) 2019-07-24
CA2888751C (en) 2021-01-26
WO2014063023A1 (en) 2014-04-24
ES2747351T3 (es) 2020-03-10
EP2909357A4 (en) 2016-03-16
MX386755B (es) 2025-03-19
CA2888751A1 (en) 2014-04-24

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Legal Events

Date Code Title Description
HH Correction or change in general