Itoh et al., 1995 - Google Patents
Preparation and evaluation of two‐dimensional polymer films by chemical modification of an alkanethiol self‐assembled monolayer for protection of copper against …Itoh et al., 1995
- Document ID
- 3552089855727479859
- Author
- Itoh M
- Nishihara H
- Aramaki K
- Publication year
- Publication venue
- Journal of the Electrochemical Society
External Links
Snippet
Chemical modification of an 11-mercapto-1-undecano1 (MUO) self-assembled monolayer chemisorbed on the copper surface with alkyltrichlorosilanes (C~ TCS) has improved the protective ability of the monolayers against corrosion of copper in aqueous and atmospheric …
- 239000010949 copper 0 title abstract description 127
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
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