Kaeding et al., 2006 - Google Patents
Realization of high hole concentrations in Mg doped semipolar (101 1) GaNKaeding et al., 2006
View HTML- Document ID
- 2642841511831870011
- Author
- Kaeding J
- Asamizu H
- Sato H
- Iza M
- Mates T
- DenBaars S
- Speck J
- Nakamura S
- Publication year
- Publication venue
- Applied physics letters
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Snippet
The authors report on the growth of Mg doped semipolar (10 1 1) GaN layers on vicinal (100) Mg Al 2 O 4 substrates miscut in the⟨ 011⟩ direction by metal-organic chemical vapor deposition. A maximum hole concentration of 2.4× 10 18 cm− 3 and a maximum mobility of 8 …
- 229910002601 GaN 0 title abstract description 51
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- H01L21/02612—Formation types
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