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Zanio et al., 1988 - Google Patents

HgCdTe photovoltaic detectors on Si substrates

Zanio et al., 1988

Document ID
18176981832121752574
Author
Zanio K
Bean R
Publication year
Publication venue
Infrared detectors and arrays

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Snippet

HgCdTe photovoltaic detectors have been fabricated on Si substrates through intermediate CdTe/GaAs layers. Encapsulation of the GaAs between the CdTe and Si prevents uninten tional doping of the HgCdTe by Ga and As. Uniform epitaxial GaAs is grown on three inch …
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    • H01L21/02367Substrates
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    • H01L21/02381Silicon, silicon germanium, germanium
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