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Deineka et al., 2001 - Google Patents

Ellipsometric investigations of the refractive index depth profile in PZT thin films

Deineka et al., 2001

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Document ID
17125508814743006073
Author
Deineka A
Jastrabik L
Suchaneck G
Gerlach G
Publication year
Publication venue
physica status solidi (a)

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Optical investigations of self‐polarized PbZr0. 235Ti0. 765O3 (PZT) films deposited onto Si/SiO2/adhesion layer/(111) Pt substrate by RF sputtering are presented in this work. Measurements were performed with a spectral ellipsometer working in rotating analyzer …
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

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