Villarrubia, 2004 - Google Patents
Tip characterization for dimensional nanometrologyVillarrubia, 2004
- Document ID
- 16793530123908520640
- Author
- Villarrubia J
- Publication year
- Publication venue
- Applied Scanning Probe Methods
External Links
Snippet
Technological trends are requiring dimensional metrology of features smaller than a micrometer in a number of industries. In some cases (eg, pharmaceuticals and other biological or medical applications) the nanometer size scale is determined by the fact that …
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/04—Display or data processing devices
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