Yu et al., 2008 - Google Patents
Porous nylon with electro-active dopants as flexible sensors and actuatorsYu et al., 2008
View PDF- Document ID
- 16310222259275017355
- Author
- Yu S
- Chang D
- Tsao L
- Shih W
- Chang P
- Publication year
- Publication venue
- 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
External Links
Snippet
This paper presents rapid fabrication process and characterization of porous nylon with electro-active dopants for the applications of flexible tactile sensor array, moisture sensor, and actuator. Porous nylon was used as the matrix integrated on a flexible copper-PI film …
- 229920001778 nylon 0 title abstract description 50
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
- H01L41/35—Forming piezo-electric or electrostrictive materials
- H01L41/45—Organic materials
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L41/08—Piezo-electric or electrostrictive devices
- H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L41/02—Details
- H01L41/04—Details of piezo-electric or electrostrictive devices
- H01L41/047—Electrodes or electrical connection arrangements
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L41/16—Selection of materials
- H01L41/18—Selection of materials for piezo-electric or electrostrictive devices, e.g. bulk piezo-electric crystals
- H01L41/193—Macromolecular compositions, e.g. piezo-electric polymers
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9518878B2 (en) | Apparatus and method for nanocomposite sensors | |
| Parida et al. | Self-powered pressure sensor for ultra-wide range pressure detection | |
| US8431080B2 (en) | Soft MEMS | |
| Kim et al. | A novel method of manufacturing three-dimensional ionic polymer–metal composites (IPMCs) biomimetic sensors, actuators and artificial muscles | |
| US20100288635A1 (en) | Flexible deformation sensor | |
| CN106768520B (en) | Pressure sensor and preparation method thereof | |
| Rohtlaid et al. | Poly (3, 4‐ethylenedioxythiophene): poly (styrene sulfonate)/polyethylene oxide electrodes with improved electrical and electrochemical properties for soft microactuators and microsensors | |
| Lee et al. | Gradual electrical‐double‐layer modulation in ion‐polymer networks for flexible pressure sensors with wide dynamic range | |
| KR101691910B1 (en) | Strain Sensor and Manufacturing Method of The Same | |
| CN112014007A (en) | Array type flexible pressure sensor with high mechanical strength and preparation method thereof | |
| Karuthedath et al. | Characterization of carbon black filled PDMS-composite membranes for sensor applications | |
| Engel et al. | Multi-layer embedment of conductive and non-conductive PDMS for all-elastomer MEMS | |
| Huang et al. | Flexible Porous Carbon Black-Polymer Composites with a High Gauge Factor. | |
| Yu et al. | Porous nylon with electro-active dopants as flexible sensors and actuators | |
| CN107898463B (en) | A flexible electronic pressure sensor and preparation method thereof | |
| Kobayashi et al. | Deformation behaviors of ionic-polymer–metal composite actuator with palladium electrodes for various solvents, temperatures, and frequencies | |
| Delille et al. | Novel compliant electrodes based on platinum salt reduction | |
| Du et al. | Tunable electrical and mechanical responses of PDMS and polypyrrole nanowire composites | |
| Cheng et al. | A novel highly-twistable tactile sensing array using extendable spiral electrodes | |
| Tsao et al. | Fabrication and characterization of electro-active polymer for flexible tactile sensing array | |
| Tsao et al. | Flexible Temperature Sensor Array Using Electro-Resistive Polymer Forhumanoid Artificial Skin | |
| US11204292B1 (en) | Deformable pressure sensor and methods of use thereof | |
| Panda et al. | Synthesis and development of gold polypyrrole actuator for underwater application | |
| Na et al. | Capacitive force sensor with wide dynamic range using wrinkled micro structures as dielectric layer | |
| Kilmartin et al. | PEDOT-PSS/MWCNT coatings on PET for conducting polymer actuators |