Grummon et al., 1996 - Google Patents
Thermotracttve Titanium-Nickel thin Films Formicroelectromechanical Systems and Active CompositesGrummon et al., 1996
- Document ID
- 16308453152544811210
- Author
- Grummon D
- Pence T
- Publication year
- Publication venue
- MRS Online Proceedings Library
External Links
Snippet
Thin films of thermoelastic titanium-nickel are of interest as a material basis for force- producing elements in microelectromechanical systems, and for active phases in mechanically-adaptive composite materials. The successful introduction of this material …
- 239000010409 thin film 0 title abstract description 24
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/10—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of nickel or cobalt or alloys based thereon
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