[go: up one dir, main page]

Wu et al., 2009 - Google Patents

A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface

Wu et al., 2009

View PDF
Document ID
15114123115227002116
Author
Wu L
Pais A
Samuelson S
Guo S
Xie H
Publication year
Publication venue
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and Microsystems Conference

External Links

Snippet

We report a miniature mirror-tilt-insensitive (MTI) Fourier transform spectrometer. A large- vertical-displacement (LVD) MEMS mirror is used to generate large scan range for high spectral resolution. The LVD MEMS mirror is also reflective on both surfaces. The maximum …
Continue reading at engineering.purdue.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Instruments as specified in the subgroups and characterised by the use of optical measuring means
    • G01B9/02—Interferometers for determining dimensional properties of, or relations between, measurement objects
    • G01B9/02001—Interferometers for determining dimensional properties of, or relations between, measurement objects characterised by manipulating or generating specific radiation properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction

Similar Documents

Publication Publication Date Title
Wu et al. A large vertical displacement electrothermal bimorph microactuator with very small lateral shift
US8736843B2 (en) Opto-mechanical optical path retardation multiplier for optical MEMS applications
Jain et al. A thermal bimorph micromirror with large bi-directional and vertical actuation
US7796267B2 (en) System, method and apparatus for a micromachined interferometer using optical splitting
Yu et al. Micromachined Fourier transform spectrometer on silicon optical bench platform
Samuelson et al. A large piston displacement MEMS mirror with electrothermal ladder actuator arrays for ultra-low tilt applications
US20110139990A1 (en) Mems-based ftir spectrometer
US8531675B2 (en) Compensated MEMS FTIR spectrometer architecture
Wang et al. A compact Fourier transform spectrometer on a silicon optical bench with an electrothermal MEMS mirror
EP2545406A1 (en) A technique to determine mirror position in optical interferometers
Lukes et al. SU-8 2002 surface micromachined deformable membrane mirrors
Ataman et al. A Fourier transform spectrometer using resonant vertical comb actuators
Wu et al. A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface
Manzardo et al. Micro-sized Fourier spectrometer
Sandner et al. Translatory MEMS actuators for optical path length modulation in miniaturized Fourier-transform infrared spectrometers
Chai et al. A mems based fourier transform spectrometer and its scan stability study
US8508745B2 (en) System, method and apparatus for a micromachined interferometer using optical splitting
Wang et al. A bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift
Wu et al. A large-aperture, piston-tip-tilt micromirror for optical phase array applications
Hays et al. A hybrid MEMS–fiber optic tunable Fabry–Perot filter
Jung et al. A large-area high-reflectivity broadband monolithic single-crystal-silicon photonic crystal mirror MEMS scanner with low dependence on incident angle and polarization
Tang et al. A 2-AXIS SI/AL Bimorph-Based Electrothermal Micromirror Integrated with Piezoresistors for High Resolution Position Sensing
Keeler et al. Laterally deformable optical NEMS grating transducers for inertial sensing applications
Xie et al. Electrothermally actuated MEMS mirrors: Design, modeling, and applications
Bargiel et al. Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry