Seki et al., 1997 - Google Patents
Thermal buckling actuator for micro relaysSeki et al., 1997
- Document ID
- 14461894799219716020
- Author
- Seki T
- Sakata M
- Nakajima T
- Matsumoto M
- Publication year
- Publication venue
- Proceedings of International Solid State Sensors and Actuators Conference (Transducers' 97)
External Links
Snippet
An actuator for micromachined relays has been investigated. The actuator is fabricated by the sealed-cavity process, a micromachining technology. It has a thin Si clamped-clamped beam which is deformed by buckling due to thermal SiO/sub 2/built-in stress and thermal …
- 238000000034 method 0 abstract description 16
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezo-electric relays
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
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