[go: up one dir, main page]

Chuang et al., 2005 - Google Patents

An electrostatic actuator for fatigue testing of low-stress LPCVD silicon nitride thin films

Chuang et al., 2005

View PDF
Document ID
14448718489721710737
Author
Chuang W
Fettig R
Ghodssi R
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

An electrostatic actuator and mechanical-amplifier (MA) device has been designed and fabricated to study fatigue properties of low-stress LPCVD silicon nitride thin films. The device consists of two resonators connected serially with a common torsion bar. When …
Continue reading at www.umdmsal.com (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied

Similar Documents

Publication Publication Date Title
Zhu et al. A thermal actuator for nanoscale in situ microscopy testing: design and characterization
Muhlstein et al. Fatigue of polycrystalline silicon for microelectromechanical system applications: crack growth and stability under resonant loading conditions
Jiang et al. SiC cantilever resonators with electrothermal actuation
Potekin et al. A micromechanical mass sensing method based on amplitude tracking within an ultra-wide broadband resonance
Bachmann et al. Fabrication and characterization of folded SU-8 suspensions for MEMS applications
Hanna et al. Mechanical property measurement of carbon infiltrated carbon nanotube structures for compliant micromechanisms
Chuang et al. An electrostatic actuator for fatigue testing of low-stress LPCVD silicon nitride thin films
Duval et al. Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Kolesar et al. In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators
Buchaillot et al. Post-buckling dynamic behavior of self-assembled 3D microstructures
WO2016034940A1 (en) Multi-frequency excitation
Nabavi et al. Surface micromachined out-of-plane electrostatic MEMS actuator integrated with displacement sensor
Mehdizadeh et al. Atomic resolution disk resonant force and displacement sensors for measurements in liquid
Somà et al. Pull-in tests of MEMS specimens for characterization of elastic–plastic behavior
Pierron et al. Methodology for low-and high-cycle fatigue characterization with kHz-frequency resonators
Bachmann et al. Determination of the adhesion energy of MEMS structures by applying Weibull-type distribution function
Starman et al. Using micro-Raman spectroscopy to assess MEMS Si/SiO2 membranes exhibiting negative spring constant behavior
Ando et al. Design, fabrication and testing of new comb actuators realizing three-dimensional continuous motions
Chuang et al. Nano-scale fatigue study of LPCVD silicon nitride thin films using a mechanical-amplifier actuator
Shukla et al. Investigation to improve reliableness for health monitoring in different environments using MEMS based higher sensitive microcantilever array
US20070063613A1 (en) Thermoelastically actuated microresonator
Chen et al. Determination of elastic modulus of silicon carbide (SiC) thin diaphragms via mode-dependent duffing nonlinear resonances
Pustan et al. Design, fabrication and characterization of RF MEMS switches with robust contact
Hernando et al. Characterization and displacement control of low surface-stress AlN-based piezoelectric micro-resonators
Mahameed et al. Two-dimensional analysis of temperature-gradient actuation of cantilever beam resonators