[go: up one dir, main page]

Krämer et al., 2023 - Google Patents

Detection of geometrical patterns of self-assembled gold nanospheres and top-down fabricated nanostructures using coherent Fourier scatterometry

Krämer et al., 2023

Document ID
1434409790810194219
Author
Krämer S
Kroth K
Sure T
Klar P
Publication year
Publication venue
Optical Measurement Systems for Industrial Inspection XIII

External Links

Snippet

Detection of nanoparticles gets more and more relevant in various fields of application, eg, semiconductor technology, medicine or biology. A fast and universal detection method of nanoparticles is essential for these leading-edge technologies. Classical imaging methods …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/23—Bi-refringence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N2021/653—Coherent methods [CARS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by the preceding groups
    • G01N33/48—Investigating or analysing materials by specific methods not covered by the preceding groups biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N2015/0038—Investigating nano particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical means

Similar Documents

Publication Publication Date Title
Roy et al. Radially polarized light for detection and nanolocalization of dielectric particles on a planar substrate
Heifetz et al. Photonic nanojets
US9013689B2 (en) Engineered SERS substrates employing nanoparticle cluster arrays with multiscale signal enhancement
Mino et al. Quantitative analysis of polarization-controlled tip-enhanced Raman imaging through the evaluation of the tip dipole
Alexander et al. Tip-enhanced Raman detection of antibody conjugated nanoparticles on cellular membranes
Sow et al. Revisiting surface-enhanced Raman scattering on realistic lithographic gold nanostripes
Jiang et al. Point spread function of objective-based surface plasmon resonance microscopy
Li et al. Photonic-dispersion neural networks for inverse scattering problems
Zhu et al. Sensing sub-10 nm wide perturbations in background nanopatterns using optical pseudoelectrodynamics microscopy (opem)
Pei et al. Optoplasmonic-enhanced imaging of monolayer polystyrene nanoparticle arrays by barium titanate glass microsphere-assisted microscopy: implications for nanoparticle characterization
Song et al. Identification of single nanoparticles
Krämer et al. Detection of geometrical patterns of self-assembled gold nanospheres and top-down fabricated nanostructures using coherent Fourier scatterometry
Zhang et al. Optical far-field detection of sub-λ/14 wide defects by conjugate structured light-field microscopy (c-SIM)
KR20080085790A (en) Automated process control method using optical metrology by optical nanojet, control system of manufacturing cluster and computer readable storage medium
Chein et al. New critical dimension optical metrology for submicron high-aspect-ratio structures using spectral reflectometry with supercontinuum laser illumination
Li et al. Mueller matrix measurement of asymmetric gratings
CN114858759A (en) Method for measuring in-plane optical anisotropy of low-dimensional material
CN105319196B (en) A super-resolution structure detection confocal fluorescence imaging device and imaging method thereof
Käseberg et al. Mueller matrix ellipsometry for enhanced optical form metrology of sub-lambda structures
You et al. 3D microscopy in industrial measurements
Sun et al. Reconstruction filters improving the spatial resolution and signal-to-noise ratio of surface plasmon resonance microscopy
Wang et al. Research on the DF-TSOM method for detecting subsurface defects of optical components
Takahashi et al. Study on nano thickness inspection for residual layer of nanoimprint lithography using near-field optical enhancement of metal tip
Faridian et al. Phase-sensitive structured illumination to detect nanosized asymmetries in silicon trenches
Zenkova et al. New methods for measuring of surface landscape