Kozolobov et al., 2024 - Google Patents
Silicon integrated photonicsKozolobov et al., 2024
- Document ID
- 14278161915199918260
- Author
- Kozolobov S
- Pshenichnyuk I
- Taziev K
- Zemtsova A
- Zemtsov D
- Smirnov A
- Zhigunov D
- Drachev V
- Publication year
- Publication venue
- Phys. Uspekhi
External Links
Snippet
Technologies of silicon integrated photonics are the basis for the fabrication of a class of devices, such as optical modulators, photodetectors, optical filters and switches, multiplexers and demultiplexers, and optical transceivers. In many respects, silicon integrated photonics …
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon 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[Si] 0 title abstract description 8
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
- G02B6/1221—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/2935—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/12002—Three-dimensional structures
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/105—Light guides of the optical waveguide type having optical polarisation effects
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- G—PHYSICS
- G02—OPTICS
- G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/02—Optical fibre with cladding with or without a coating
- G02B6/02057—Optical fibre with cladding with or without a coating comprising gratings
- G02B6/02066—Gratings having a surface relief structure, e.g. repetitive variation in diameter of core or cladding
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- G—PHYSICS
- G02—OPTICS
- G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
- G02F1/35—Non-linear optics
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made
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- G—PHYSICS
- G02—OPTICS
- G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
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- G—PHYSICS
- G02—OPTICS
- G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/58—Multi-wavelength, e.g. operation of the device at a plurality of wavelengths
- G02F2203/585—Add/drop devices
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