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Konstantelos et al., 2022 - Google Patents

Fab-Wide Scheduling of Semiconductor Plants: A Large-Scale Industrial Deployment Case Study

Konstantelos et al., 2022

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Document ID
13289542900491776709
Author
Konstantelos I
Wiebe J
Moss R
Steele S
Xenos D
O'Donnell T
Feely S
Publication year
Publication venue
2022 Winter Simulation Conference (WSC)

External Links

Snippet

This paper presents a novel fab-wide scheduling approach for large semiconductor manufacturing plants. The challenge lies in the scale and complexity of the problem at hand; thousands of wafers must be scheduled on hundreds of machines across several steps …
Continue reading at simulation.su (PDF) (other versions)

Classifications

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