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Basset et al., 2009 - Google Patents

A batch-fabricated and electret-free silicon electrostatic vibration energy harvester

Basset et al., 2009

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Document ID
12351051026293979950
Author
Basset P
Galayko D
Paracha A
Marty F
Dudka A
Bourouina T
Publication year
Publication venue
Journal of Micromechanics and Microengineering

External Links

Snippet

This paper presents a novel silicon-based and batch-processed MEMS electrostatic transducer for harvesting and converting the energy of vibrations into electrical energy without using an electret layer. Effective conversion from the mechanical-to-electric domains …
Continue reading at www.academia.edu (HTML) (other versions)

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines

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