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Colace et al., 2006 - Google Patents

Waveguide photodetectors for the near-infrared in polycrystalline germanium on silicon

Colace et al., 2006

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Document ID
11394503911084908748
Author
Colace L
Altieri G
Assanto G
Publication year
Publication venue
IEEE photonics technology letters

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We demonstrate novel near-infrared waveguide photodetectors in polycrystalline germanium deposited on silicon-on-insulator at low temperatures. We present the design, fabrication, and characterization of two photodiodes and their comparison. Without …
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    • H01L31/08Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
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