[go: up one dir, main page]

Chisum et al., 2009 - Google Patents

Planar circuits for non-contact near-field microwave probing

Chisum et al., 2009

View PDF
Document ID
11184173586684353033
Author
Chisum J
Ramirez-Velez M
Popovic Z
Publication year
Publication venue
2009 European Microwave Conference (EuMC)

External Links

Snippet

This paper presents a planar microwave probe circuit for non-contact near-field probing of quasi-planar structures which can be made of metal, dielectric or semiconductor. The probe circuit demonstrated here consists of a high-Q resonator in the range between 900 MHz and …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/20—Arrangements or instruments for measuring magnetic variables involving magnetic resonance
    • G01R33/28—Details of apparatus provided for in groups G01R33/44 - G01R33/64
    • G01R33/32—Excitation or detection systems, e.g. using radio frequency signals
    • G01R33/34—Constructional details, e.g. resonators, specially adapted to MR
    • G01R33/34015—Temperature-controlled RF coils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants; Measuring impedance or related variables
    • G01R27/2688—Measuring quality factor or dielectric loss, e.g. loss angle, or power factor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants; Measuring impedance or related variables
    • G01R27/2617—Measuring dielectric properties, e.g. constants
    • G01R27/2635—Sample holders, electrodes or excitation arrangements, e.g. sensors or measuring cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating magnetic variables

Similar Documents

Publication Publication Date Title
Tabib-Azar et al. Non-destructive characterization of materials by evanescent microwaves
Tabib-Azar et al. Nondestructive superresolution imaging of defects and nonuniformities in metals, semiconductors, dielectrics, composites, and plants using evanescent microwaves
Wang et al. Improved-sensitivity resonant electric-field probes based on planar spiral stripline and rectangular plate structure
Golosovsky et al. Novel millimeter‐wave near‐field resistivity microscope
Tselev et al. Broadband dielectric microwave microscopy on micron length scales
Baker-Jarvis et al. Dielectric and magnetic measurements: A survey of nondestructive, quasi-nondestructive, and process-control techniques
Anlage et al. Scanning microwave microscopy of active superconducting microwave devices
Bagdad et al. Near-field scanning microwave microscope platform based on a coaxial cavity resonator for the characterization of semiconductor structures
Chisum et al. Planar circuits for non-contact near-field microwave probing
Cao et al. MilliKelvin microwave impedance microscopy in a dry dilution refrigerator
Talanov et al. Near-field scanning microwave microscope for interline capacitance characterization of nanoelectronics interconnect
Jacquart et al. Permeability measurement on composites made of oriented metallic wires from 0.1 to 18 GHz
Gaudestad et al. Space Domain Reflectometry for open failure localization
Reznik et al. Quantitative model for near-field scanning microwave microscopy: Application to metrology of thin film dielectrics
Wen et al. Recognizing Microwave Field Contrast of Invisible Microstrip Defects With High Accuracy by Quantum Wide-Field Microscope
Ma et al. The distribution measurement of the photo-induced plasma in semiconductor by near-field scanning microwave microscopy
Qu et al. Noncontact thickness measurement of cu film on silicon wafer using magnetic resonance coupling for stress free polishing application
Medina et al. Transmission and reflection mode scanning microwave microscopy (SMM): Experiments, calibration, and simulations
Zhuravel et al. Effect of LaAlO3 twin-domain topology on local dc and microwave properties of cuprate films
Wen et al. Recent Progress of Electromagnetic Field Characterization of Chip Surface
Córdoba-Erazo et al. Liquids characterization using a dielectric resonator-based microwave probe
JP4265606B2 (en) Non-contact conductivity measuring device
Kantor et al. Method of increasing spatial resolution of the scanning near-field microwave microscopy
US7501833B2 (en) Evanescent microwave microscopy probe and methodology
Wang et al. Compact near-field microwave microscope based on the multi-port technique