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Chang et al., 1993 - Google Patents

Phase-measuring profilometry using sinusoidal grating

Chang et al., 1993

Document ID
11092524679870682077
Author
Chang M
Ho C
Publication year
Publication venue
Experimental mechanics

External Links

Snippet

When a sinusoidal amplitude grating is projected on an object, the surface-height distribution of the object is translated to a phase distribution of the deformed grating image. In this paper, two algorithms developed for phase acquisition of such images are presented …
Continue reading at link.springer.com (other versions)

Classifications

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    • G01B11/00—Measuring arrangements characterised by the use of optical means
    • G01B11/24—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2536—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings with variable grating pitch, projected on the object with the same angle of incidence
    • G—PHYSICS
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    • G01B9/00—Instruments as specified in the subgroups and characterised by the use of optical measuring means
    • G01B9/02—Interferometers for determining dimensional properties of, or relations between, measurement objects
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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    • G—PHYSICS
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    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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    • G01B2210/40—Caliper-like sensors
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