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Craciun et al., 2000 - Google Patents

Characteristics of ultraviolet-assisted pulsed-laser-deposited Y2O3 thin films

Craciun et al., 2000

Document ID
964364711626059501
Author
Craciun V
Lambers E
Bassim N
Singh R
Craciun D
Publication year
Publication venue
Journal of Materials Research

External Links

Snippet

The properties of thin Y2O3 films grown using an in situ ultraviolet (UV)-assisted pulsed laser deposition (PLD) technique were studied. With respect to Y2O3 films grown by conventional PLD under similar conditions but without UV illumination, the UVPLD-grown …
Continue reading at www.cambridge.org (other versions)

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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers
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