Dubourg et al., 2012 - Google Patents
Optimization of the performances of SU-8 organic microcantilever resonators by tuning the viscoelastic properties of the polymerDubourg et al., 2012
View PDF- Document ID
- 9370945285780313700
- Author
- Dubourg G
- Dufour I
- Pellet C
- Ayela C
- Publication year
- Publication venue
- Sensors and Actuators B: Chemical
External Links
Snippet
This paper describes a promising method to improve the performances of organic resonant microcantilevers. This method is based on the tuning of the viscoelastic properties of the material by controlling internally the temperature of the structure. Actuation of the SU-8 free …
- 229920001486 SU-8 photoresist 0 title abstract description 53
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on micro-sensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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