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Chen et al., 2013 - Google Patents

Reliability of MEM relays for zero leakage logic

Chen et al., 2013

Document ID
9359245147230991940
Author
Chen Y
Nathanael R
Yaung J
Hutin L
Liu T
Publication year
Publication venue
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII

External Links

Snippet

Micro-electro-mechanical (MEM) relays are an intriguing alternative to transistors for ultra- low-power digital logic applications [1]. This paper investigates various failure modes for logic relays. Experimental results are presented to show that structural fatigue, dielectric …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/02—Details

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