[go: up one dir, main page]

Sharaf et al., 2022 - Google Patents

Design analysis and simulation of a digital RF MEMS varactor with high capacitive ratio

Sharaf et al., 2022

Document ID
722329376699484271
Author
Sharaf A
Nasr A
Elshurafa A
Serry M
Publication year
Publication venue
Microsystem Technologies

External Links

Snippet

This work presents a variable RF MEMS capacitor based on five cantilever shunt switches for the first time. Conceptually, the proposed varactor design comprises five identical cantilever shunt switches, which allow the creation of 32 discrete capacitance values …
Continue reading at link.springer.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/38—Multiple capacitors, e.g. ganged

Similar Documents

Publication Publication Date Title
Xiao et al. Micromachined variable capacitors with wide tuning range
KR101424297B1 (en) Electronic device, variable capacitor, microswitch, method of driving microswitch, MEMS type electronic device, microactuator and MEMS optical device
Rangra et al. Symmetric toggle switch—a new type of rf MEMS switch for telecommunication applications: design and fabrication
Seok et al. A novel linearly tunable MEMS variable capacitor
Sravani et al. Role of dielectric layer and beam membrane in improving the performance of capacitive RF MEMS switches for Ka-band applications
Kumar et al. Performance analysis of series: shunt configuration based RF MEMS switch for satellite communication applications
US6490147B2 (en) High-Q micromechanical device and method of tuning same
Sharaf et al. Design analysis and simulation of a digital RF MEMS varactor with high capacitive ratio
Ma et al. A novel design of a low-voltage low-loss T-match RF-MEMS capacitive switch
Sailaja et al. Design and analysis of serpentine meander asymmetric cantilever RF-MEMS shunt capacitive switch
Sotoudeh et al. Design and simulation of a wide-range variable MEMS capacitor using electrostatic and piezoelectric actuators
Savin et al. Design and manufacturing of X-band RF MEMS switches
Angira High performance capacitive RF-MEMS switch based on HfO2 dielectric
US9734951B2 (en) MEMS electrostatic actuator
Hah Analytical design of MEMS variable capacitors based on shaped-finger comb-drives
Chand et al. Analytical model and analysis of RF MEMS switch for Ka-band applications
Gurbuz Design and Simulation of Microelectromechanical SystemCapacitive Shunt Switches
Hailu High quality factor RF MEMS tunable capacitor
Karthick et al. Review on radio frequency micro electro mechanical systems (RF-MEMS) switch
Gong et al. Optimization of a MEMS variable capacitor with high linearity and large tuning ratio
Ramli et al. Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer
Razaghpour et al. A new electrostatic tunable capacitor for wide ranges of applications
Chand et al. Electromechanical modelling and stress analysis of RF MEMS capacitive shunt switch
Aghaei et al. A low voltage vertical comb RF MEMS switch
He et al. A lateral RF MEMS capacitive switch utilizing parylene as dielectric