Zhu et al., 2016 - Google Patents
A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplificationZhu et al., 2016
- Document ID
- 7160312937902570144
- Author
- Zhu W
- Zhu Z
- Shi Y
- Chen X
- He Y
- Ehmann K
- Ju B
- Publication year
- Publication venue
- Review of Scientific Instruments
External Links
Snippet
This article presents a novel two-degrees-of-freedom (2-DoF) piezo-actuated parallel- kinematic micro/nano-positioning stage with multi-level amplification. The mirror symmetric stage consists of four leverage mechanisms, two Scott-Russell mechanisms, and a Z …
- 230000003321 amplification 0 title abstract description 46
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