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Masse et al., 2006 - Google Patents

Stability and effect of annealing on the optical properties of plasma-deposited Ta2O5 and Nb2O5 films

Masse et al., 2006

Document ID
7001878966567391005
Author
Masse J
Szymanowski H
Zabeida O
Amassian A
Klemberg-Sapieha J
Martinu L
Publication year
Publication venue
Thin Solid Films

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Tantalum and niobium oxide optical thin films were prepared at room temperature by plasma- enhanced chemical vapor deposition using tantalum and niobium pentaethoxide (M (OC2H5) 5) precursors. We studied the evolution of their optical and microstructural …
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