Chang, 2001 - Google Patents
Neutralization theory of static surface charges by an ionizer under wide gas pressure environmentsChang, 2001
- Document ID
- 6858674613575803268
- Author
- Chang J
- Publication year
- Publication venue
- IEEE Transactions on Industry Applications
External Links
Snippet
The neutralization of static charges by an ionizer under wide gas pressure environments has been investigated theoretically, where the time required for the surface charge neutralization and the value of charge in-balance were predicted in terms of Knudsen numbers (Kn: mean …
- 230000005591 charge neutralization 0 title abstract description 18
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
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