Majumdar et al., 2017 - Google Patents
Configurable post-release stress-engineering of surface micro-machined MEMS structuresMajumdar et al., 2017
View PDF- Document ID
- 6592230904228185615
- Author
- Majumdar R
- Paprotny I
- Publication year
- Publication venue
- Journal of Microelectromechanical Systems
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Snippet
Stress-engineering is the method for inducing curvature in initially planar micromachined structures by the deposition of a stressor layer. Post-release stress engineering occurs when the stressor layer is deposited and patterned after the release of the underlying structures. In …
- 238000011065 in-situ storage 0 abstract description 12
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