[go: up one dir, main page]

Zhai et al., 2013 - Google Patents

Design and fabrication of independent-cavity FP tunable filter

Zhai et al., 2013

Document ID
5979250211395563128
Author
Zhai L
Xu J
Wu Y
Publication year
Publication venue
Optics Communications

External Links

Snippet

This paper presents a novel micro-electromechanical systems (MEMS) FP tunable filter with a FP cavity independent of electro-static actuator, which is fabricated by the bulk micromachining processes. The electro-static actuator based on the parallel-plate capacitive …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/2935—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colour
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Similar Documents

Publication Publication Date Title
US5628917A (en) Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures
US8334984B2 (en) Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers
EP1906159B1 (en) System, method and apparatus for a micromachined interferometer using optical splitting
Correia et al. Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range
EP3054580B1 (en) Optical module
Saadany et al. Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon
Sabry et al. Silicon micromirrors with three-dimensional curvature enabling lensless efficient coupling of free-space light
US9618323B2 (en) Method for manufacturing optical interferometer
CN102225739A (en) A fabrication method of tunable FP optical filter based on MEMS technology
Yun et al. A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon
CN106772752A (en) Based on MEMS tunable wave length FP optical fiber filters and preparation method thereof
Zhai et al. Design and fabrication of independent-cavity FP tunable filter
Yu et al. MEMS-based tunable grating coupler
Li et al. Tunable blazed gratings
CN107250858B (en) Miniature Optical Stage Devices with Height/Selectively Controllable Optical Surfaces
Othman et al. Deeply-etched MEMS slotted micromirrors with controlled transmittance
NL2027948B1 (en) Light source, mems optical switch, sensor and methods for manufacturing the same
Wecker et al. Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths
Yamanoi et al. A hybrid-assembled MEMS Fabry-Perot wavelength tunable filter
KR20040072406A (en) Tunable optical resonator and tunable optical filter using the same
Lipson et al. Free-space MEMS tunable optical filter on [110] silicon
Yu et al. Tunable optical bandpass filter with variable-aperture MEMS reflector
Stanimirović et al. Optical MEMS for Telecommunications: Some Reliability
Milne et al. MEMS-based tunable Fabry-Perot filters on silicon substrates
Helke et al. Nanostructured al SWG Reflectors on thin LP-Si 3 N 4 Membranes as (TiO 2/SiO 2) ³ Bragg Reflector Alternative for Vis Fabry-Pérot Interferometers