Remtema et al., 2001 - Google Patents
Active frequency tuning for micro resonators by localized thermal stressing effectsRemtema et al., 2001
View PDF- Document ID
- 4937182990551820729
- Author
- Remtema T
- Lin L
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
External Links
Snippet
A method of active frequency tuning on comb-shape micro resonators has been successfully demonstrated by means of localized stressing effects. A mechanical beam structure that can be resistively heated to generate thermal stress, is integrated as part of the comb-shape …
- 230000000694 effects 0 title abstract description 20
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Remtema et al. | Active frequency tuning for micro resonators by localized thermal stressing effects | |
| Mestrom et al. | Modelling the dynamics of a MEMS resonator: simulations and experiments | |
| Kim et al. | Temperature dependence of quality factor in MEMS resonators | |
| Syms | Electrothermal frequency tuning of folded and coupled vibrating micromechanical resonators | |
| Hajjaj et al. | Multiple internal resonances in MEMS arch resonators | |
| Jha et al. | Thermal isolation of encapsulated MEMS resonators | |
| Vyas et al. | A microresonator design based on nonlinear 1: 2 internal resonance in flexural structural modes | |
| Abdolvand et al. | Quality factor in trench-refilled polysilicon beam resonators | |
| Daeichin et al. | Dynamic response of a tunable MEMS accelerometer based on repulsive force | |
| Joachim et al. | Characterization of selective polysilicon deposition for MEMS resonator tuning | |
| Davis et al. | Design, fabrication and testing of a novel MEMS resonator for mass sensing applications | |
| Boyd et al. | Measurement of the temperature coefficient of Young's modulus of single crystal silicon and 3C silicon carbide below 273 K using micro-cantilevers | |
| Alcheikh et al. | Dynamics of V-shaped electrothermal MEMS-based resonators | |
| Alcheikh et al. | Electrothermally actuated tunable clamped-guided resonant microbeams | |
| Sehr et al. | Time constant and lateral resonances of thermal vertical bimorph actuators | |
| Sahai et al. | Thermomechanical transitions in doubly-clamped micro-oscillators | |
| Rezazadeh et al. | Mechanical behavior of a bi-layer cantilever micro-beam subjected to electrostatic force, mechanical shock and thermal moment | |
| Kazmi et al. | Highly tunable electrostatic nanomechanical resonators | |
| Palaniapan et al. | Nonlinear behavior of SOI free-free micromechanical beam resonator | |
| Mehdizadeh et al. | Atomic resolution disk resonant force and displacement sensors for measurements in liquid | |
| Pierron et al. | Methodology for low-and high-cycle fatigue characterization with kHz-frequency resonators | |
| Cao et al. | Actuation dependency of frequency tuning in MEMS resonators | |
| Pons-Nin et al. | Design and test of resonators using PiezoMUMPS technology | |
| Zou et al. | High-sensitivity thermal sensing based on a single strain-assisted resonator | |
| Gaspar et al. | Electrostatically actuated thin-film amorphous silicon microbridge resonators |