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Crist et al., 2011 - Google Patents

Prioritising production and engineering lots in wafer fabrication facilities: a simulation study

Crist et al., 2011

Document ID
4775535241865425879
Author
Crist K
Uzsoy R
Publication year
Publication venue
International Journal of Production Research

External Links

Snippet

Due to the high cost of equipment, most semiconductor wafer fabrication facilities process both regular production lots which are shipped to customers and engineering lots that support product and process development efforts. The different objectives of the engineering …
Continue reading at www.tandfonline.com (other versions)

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