Coutu et al., 2011 - Google Patents
Electrostatically tunable meta-atoms integrated with in situ fabricated MEMS cantilever beam arraysCoutu et al., 2011
View PDF- Document ID
- 4669424791284677285
- Author
- Coutu R
- Collins P
- Moore E
- Langley D
- Jussaume M
- Starman L
- Publication year
- Publication venue
- Journal of microelectromechanical systems
External Links
Snippet
Two concentric split ring resonators (SRRs) or meta-atoms designed to have a resonant frequency of 14 GHz are integrated with microelectromechanical systems cantilever arrays to enable electrostatic tuning of the resonant frequency. The entire structure was fabricated …
- 238000011065 in-situ storage 0 title description 7
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01Q—AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction, or polarisation of waves radiated from an aerial, e.g. quasi-optical devices
- H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
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