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Smith et al., 1997 - Google Patents

Excimer laser crystallization and doping of silicon films on plastic substrates

Smith et al., 1997

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Document ID
4047777707552737036
Author
Smith P
Carey P
Sigmon T
Publication year
Publication venue
Applied physics letters

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Snippet

We report the pulsed laser recrystallization and doping of thin film amorphous silicon deposited on oxide-coated polyester substrates. Although our heat-flow simulation of the laser recrystallization process indicates that the plastic is briefly subjected to temperatures …
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    • H01L29/66742—Thin film unipolar transistors
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