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Mechanical objects that are fabricated in the same general manner as integrated circuits

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  • mechanical objects that are fabricated in the same general manner as integrated circuits (en)
  • Bauelemente mit Abmessungen von wenigen bis mehreren 100 µm. (de)
  • 小型機械の一つ (ja)
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  • Micromachinery (en)
  • آلة دقيقة (ar)
  • Mikromechanik (de)
  • マイクロマシン (ja)
  • Micromáquina (pt)
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