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US20020072206A1 - Patterned buried insulator - Google Patents

Patterned buried insulator Download PDF

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Publication number
US20020072206A1
US20020072206A1 US09/733,324 US73332400A US2002072206A1 US 20020072206 A1 US20020072206 A1 US 20020072206A1 US 73332400 A US73332400 A US 73332400A US 2002072206 A1 US2002072206 A1 US 2002072206A1
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Prior art keywords
buried
sti
regions
etching
apertures
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US09/733,324
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US6429091B1 (en
Inventor
Bomy Chen
Alexander Hirsch
Sundar Iyer
Nivo Rovedo
Hsing-Jen Wann
Ying Zhang
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Infineon Technologies AG
International Business Machines Corp
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International Business Machines Corp
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Priority to US09/733,324 priority Critical patent/US6429091B1/en
Assigned to INFINEON TECHNOLOGIES NORTH AMERICA CORP. reassignment INFINEON TECHNOLOGIES NORTH AMERICA CORP. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HIRSCH, ALEXANDER
Priority to CNB018202128A priority patent/CN1227724C/en
Priority to EP01996045A priority patent/EP1340249B1/en
Priority to DE60103181T priority patent/DE60103181T2/en
Priority to PCT/US2001/045195 priority patent/WO2002047144A2/en
Publication of US20020072206A1 publication Critical patent/US20020072206A1/en
Publication of US6429091B1 publication Critical patent/US6429091B1/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/113—Isolations within a component, i.e. internal isolations
    • H10D62/115—Dielectric isolations, e.g. air gaps
    • H10D62/116—Dielectric isolations, e.g. air gaps adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76205—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO in a region being recessed from the surface, e.g. in a recess, groove, tub or trench region
    • H01L21/7621—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO in a region being recessed from the surface, e.g. in a recess, groove, tub or trench region the recessed region having a shape other than rectangular, e.g. rounded or oblique shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/013—Manufacturing their source or drain regions, e.g. silicided source or drain regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0151—Manufacturing their isolation regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Definitions

  • the field of the invention is that of forming integrated circuits with a buried insulator, e.g. oxide, that is formed in selected areas.
  • a buried insulator e.g. oxide
  • the invention relates to an integrated circuit having buried insulator formed only under the sources and drains of transistors.
  • a feature of the invention is the implantation of a dopant species at a dose two orders of magnitude less than is required for oxygen implantation.
  • Another feature of the invention is the selective etching of the implanted areas after or during the shallow trench etch.
  • Yet another feature of the invention is the deposition of oxide in the buried etched cavities.
  • FIGS. 1 through 5 show various stages in the inventive process.
  • FIGS. 6 through 8 show stages in an alternative process.
  • FIG. 9 shows a stage in another alternative process.
  • FIG. 1 there is shown in cross section a portion of an integrated circuit in which p-type substrate 10 has a pad nitride/oxide layer 15 deposited, is patterned with resist 18 over the areas that will become transistor bodies and is then implanted with a dopant species, such as boron or phosphorous to form areas 32 below the transistor body 20 at the prospective source/drain regions of the transistor.
  • a dopant species such as boron or phosphorous
  • the depth of the implant will be set as required by the transistor designer. If a thicker buried layer is desired than results from the natural straggling of the implant, the implant voltage will be varied to produce the desired thickness.
  • the type of the dopant doesn't matter, so long as it makes the silicon easier to etch. Boron can be used to form a p + region and phosphorous to form an n + region.
  • FIG. 2 shows the same area after stripping the resist, patterning a new layer of resist to define the shallow trench isolation (STI) and etching the STI in a conventional directional reactive ion etch (RIE) process.
  • STI shallow trench isolation
  • RIE reactive ion etch
  • FIG. 3 shows the result of a selective isotropic etch, illustratively HF(49%): HNO 3 (30%): CH 3 COOH(100%) (1:3:8 in volume).
  • the (more etchsusceptible) implanted area 34 has been etched while the silicon wall has been etched only slightly.
  • FIG. 4 shows the result of a light thermal oxidation that is required to passivate the walls of the STI (nominally 5 nm thick), followed by a conformal LPCVD oxide deposition (e.g. 500 nm) to fill both the etched regions 36 and the STI with oxide 112 and a chemical-mechanical (CMP) polish to planarize the oxide to either the pad nitride or to the silicon top surface.
  • a conformal LPCVD oxide deposition e.g. 500 nm
  • CMP chemical-mechanical
  • FIG. 5 shows the final transistor with a gate 42 formed over the body 20 .
  • Sidewall spacers 44 , source-drain 46 , first interlayer dielectric 60 , and contacts 52 have been formed by conventional processes.
  • the horizontal dimension of the implanted area is >200 nm
  • the depth of the implant is 250 nm
  • the thickness of the area is 70 nm.
  • the implant dose is 1 ⁇ 10 16 /cm 2 of Boron, compared with an illustrative dose of Oxygen of 1 ⁇ 10 18 /cm 2 to form implanted oxide. With a reduction of dose of a factor of 100, there will be less damage in the transistor device layer.
  • FIG. 6 shows the implantation of areas 32 ′ with Boron ions in a process similar to that of FIG. 1.
  • the dose is 1 ⁇ 10 16 /cm 2 .
  • the wafer has a blanket implant of H, illustratively 1 ⁇ 10 13 /cm 2 , to make it n-type.
  • FIG. 6 also shows the result of electrolysis in a HF bath.
  • This process forms a region of porous silicon corresponding to the implanted region 32 ′, as described in, e.g. “Porous Silicon techniques for SOI structures”, Sylvia S. Tsao, IEEE Circuits and Devices, Nov 1987, p.3.
  • the oxidation step that oxidizes the STI walls also fills the areas 36 ′ to form an oxide region 111 .
  • the electrolysis current and HF concentration in the solution during electrolysis are selected so that the porous silicon regions 32 ′ have a density that is 45% of the bulk silicon.
  • the expansion upon oxidation just fills the cavity, resulting in a final buried oxide that does not exert stress on the nearby regions.
  • the porosity could be set lower or higher, so that the buried oxide does exert stress or strain, respectively, on the S/D and body to improve electron mobility in the channel.
  • FIG. 9 there is shown another alternative embodiment of the invention that combines the steps of FIGS. 2 and 3 in a single step with a sequence of etch recipes.
  • a dry etch using halogen chemistry to first etch vertically the trench and then to etch laterally the heavily doped implanted region.
  • Doped (n-type) silicon can be etched between 1.3 and 30 times faster than undoped or p-type silicon, depending on the dopant species and concentration and the plasma parameters.
  • the initial vertical etch may use Cl 2 , HBR, O 2 and/or He with low process pressure (5-20 mTorr), high RF source power (250 W-600 W) and high RF bias power of about 50 W-200 W.
  • the doped n-type regions may be etched with the same chemistry and RF source power, but with higher process pressures (20-60 mTorr) and low RF bias power (0 W-20 W) is used that etches significantly in the horizontal direction (referred to herein as “non-directional”). That has the effect of etching the implanted area in preference to the silicon substrate, thereby eliminating the separate isotropic etch shown in FIG. 3.
  • a SiGe or silicon on insulator substrate can be used instead of bulk silicon; the implantation can also be formed under diodes, capacitors, or first level interconnects; and/or the sequence can be changed, with the implantation being formed after the STI etch.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Element Separation (AREA)
  • Thin Film Transistor (AREA)

Abstract

A patterned buried insulator is formed beneath the source and drain by forming a mask over the body area and implanting a dose of n or p type ions in the areas where the source and drains will be formed, then etching the STI and etching out the implanted area. A light oxidation is followed by a conformal oxide deposition in the STI and also in the etched area, thereby forming the buried oxide only where desired.

Description

    FIELD OF THE INVENTION
  • The field of the invention is that of forming integrated circuits with a buried insulator, e.g. oxide, that is formed in selected areas. [0001]
    • BACKGROUND OF THE INVENTION
  • The advantages of circuits with buried oxide are well known, as are the problems associated with having the transistor body isolated from the substrate and with the extra cost associated with the long time required to perform the implant. [0002]
  • Extensive work has gone into various schemes for forming body contacts to alleviate the problems, but they all have problems, usually excessive consumption of silicon area. [0003]
  • It has been suggested to implant the oxygen ions in a patterned fashion and subject the wafer to high temperature annealing, but that still has the extra cost associated with the high dose implant and isolation of defects and oxygen precipitates from the device area. [0004]
    • SUMMARY OF THE INVENTION
  • The invention relates to an integrated circuit having buried insulator formed only under the sources and drains of transistors. [0005]
  • A feature of the invention is the implantation of a dopant species at a dose two orders of magnitude less than is required for oxygen implantation. [0006]
  • Another feature of the invention is the selective etching of the implanted areas after or during the shallow trench etch. [0007]
  • Yet another feature of the invention is the deposition of oxide in the buried etched cavities.[0008]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIGS. 1 through 5 show various stages in the inventive process. [0009]
  • FIGS. 6 through 8 show stages in an alternative process. [0010]
  • FIG. 9 shows a stage in another alternative process.[0011]
    • DESCRIPTION OF THE PREFERRED EMBODIMENT
  • Referring to FIG. 1, there is shown in cross section a portion of an integrated circuit in which p-[0012] type substrate 10 has a pad nitride/oxide layer 15 deposited, is patterned with resist 18 over the areas that will become transistor bodies and is then implanted with a dopant species, such as boron or phosphorous to form areas 32 below the transistor body 20 at the prospective source/drain regions of the transistor. The depth of the implant will be set as required by the transistor designer. If a thicker buried layer is desired than results from the natural straggling of the implant, the implant voltage will be varied to produce the desired thickness. The type of the dopant doesn't matter, so long as it makes the silicon easier to etch. Boron can be used to form a p+ region and phosphorous to form an n+ region.
  • FIG. 2 shows the same area after stripping the resist, patterning a new layer of resist to define the shallow trench isolation (STI) and etching the STI in a conventional directional reactive ion etch (RIE) process. The edges of the doped [0013] areas 32 are now exposed in the wall of the STI aperture and ready to be etched. Those skilled in the art are well aware that STI is formed about a transistor area, extending both in front of and behind the plane of the drawing. The STI thus defines a set of islands in the silicon substrate in which the transistors will be formed.
  • FIG. 3 shows the result of a selective isotropic etch, illustratively HF(49%): HNO[0014] 3(30%): CH3COOH(100%) (1:3:8 in volume). The (more etchsusceptible) implanted area 34 has been etched while the silicon wall has been etched only slightly.
  • FIG. 4 shows the result of a light thermal oxidation that is required to passivate the walls of the STI (nominally 5 nm thick), followed by a conformal LPCVD oxide deposition (e.g. 500 nm) to fill both the [0015] etched regions 36 and the STI with oxide 112 and a chemical-mechanical (CMP) polish to planarize the oxide to either the pad nitride or to the silicon top surface. Advantageously, the light oxidation that is formed on the STI walls anyway exerts minimal stress on the silicon in the transistor body. The oxide deposition does not contribute any stress because there is no volume expansion associated with it. Some voids may be formed in the small cavities, but they will only change the amount of capacitance slightly, within the bounds of ordinary manufacturing tolerances. In any event, voids reduce the capacitive coupling to the substrate.
  • FIG. 5 shows the final transistor with a [0016] gate 42 formed over the body 20. Sidewall spacers 44, source-drain 46, first interlayer dielectric 60, and contacts 52 have been formed by conventional processes. In an illustrative process having 120 nm ground rules, the horizontal dimension of the implanted area is >200 nm, the depth of the implant is 250 nm, and the thickness of the area is 70 nm. The implant dose is 1×1016/cm2 of Boron, compared with an illustrative dose of Oxygen of 1×1018/cm2 to form implanted oxide. With a reduction of dose of a factor of 100, there will be less damage in the transistor device layer.
  • Conventional steps such as blanket threshold adjust implants, well formation, annealing and the like may be performed as is well known in the art, and will be referred to in the claims as “preparing the substrate”. The circuit is completed with additional transistors, conventional back end interconnect, aluminum or copper, to form the desired circuit, which will be referred to as “completing the circuit”. [0017]
  • Continuing with FIGS. 6 through 8, there are shown selected steps in an alternative embodiment. In this case, FIG. 6, corresponding to FIG. 2, shows the implantation of [0018] areas 32′ with Boron ions in a process similar to that of FIG. 1. Illustratively the dose is 1×1016/cm2. The wafer has a blanket implant of H, illustratively 1×1013/cm2, to make it n-type.
  • FIG. 6 also shows the result of electrolysis in a HF bath. This process forms a region of porous silicon corresponding to the implanted [0019] region 32′, as described in, e.g. “Porous Silicon techniques for SOI structures”, Sylvia S. Tsao, IEEE Circuits and Devices, Nov 1987, p.3. The oxidation step that oxidizes the STI walls also fills the areas 36′ to form an oxide region 111. Advantageously, the electrolysis current and HF concentration in the solution during electrolysis are selected so that the porous silicon regions 32′ have a density that is 45% of the bulk silicon. In that case, the expansion upon oxidation just fills the cavity, resulting in a final buried oxide that does not exert stress on the nearby regions. If desired, the porosity could be set lower or higher, so that the buried oxide does exert stress or strain, respectively, on the S/D and body to improve electron mobility in the channel.
  • Referring now to FIG. 9, there is shown another alternative embodiment of the invention that combines the steps of FIGS. 2 and 3 in a single step with a sequence of etch recipes. In this embodiment, a dry etch using halogen chemistry to first etch vertically the trench and then to etch laterally the heavily doped implanted region. Doped (n-type) silicon can be etched between 1.3 and 30 times faster than undoped or p-type silicon, depending on the dopant species and concentration and the plasma parameters. For example, the initial vertical etch may use Cl[0020] 2, HBR, O2 and/or He with low process pressure (5-20 mTorr), high RF source power (250 W-600 W) and high RF bias power of about 50 W-200 W. After the vertical etch, the doped n-type regions may be etched with the same chemistry and RF source power, but with higher process pressures (20-60 mTorr) and low RF bias power (0 W-20 W) is used that etches significantly in the horizontal direction (referred to herein as “non-directional”). That has the effect of etching the implanted area in preference to the silicon substrate, thereby eliminating the separate isotropic etch shown in FIG. 3.
  • While the invention has been described in terms of three embodiments, those skilled in the art will recognize that the invention can be practiced in various versions within the spirit and scope of the following claims. For example, a SiGe or silicon on insulator substrate can be used instead of bulk silicon; the implantation can also be formed under diodes, capacitors, or first level interconnects; and/or the sequence can be changed, with the implantation being formed after the STI etch. [0021]

Claims (11)

We claim:
1. A method of forming an integrated circuit comprising the steps of:
preparing a semiconductor substrate having a substrate surface;
implanting a set of source/drain areas in said substrate with a dopant species to form a set of buried doped regions;
etching STI apertures about said buried doped regions, thereby defining transistor regions and exposing a surface of said buried doped regions in walls of said STI apertures;
etching said set of buried doped regions in an isotropic etch to form buried cavities;
filling said STI apertures and said buried cavities conformally with an STI insulator;
forming transistors having sources and drains disposed above said buried cavities; and
connecting said transistors to form said integrated circuit.
2. A method according to claim 1, in which:
said STI insulator is LPCVD oxide.
3. A method according to claim 2, in which:
said dopant species is Boron.
4. A method according to claim 2, in which:
said dopant species is Phosphorous.
5. A method of forming an integrated circuit comprising the steps of:
preparing a semiconductor substrate having a substrate surface;
implanting a set of source/drain areas in said substrate with a dopant species to form a set of buried doped regions;
etching STI apertures about said buried doped regions, thereby defining transistor regions and exposing a surface of said buried doped regions in walls of said STI apertures;
forming regions of porous silicon in said buried doped regions by electrolysis;
oxidizing said walls of said STI apertures and said porous material to form buried oxide regions;
filling said STI apertures conformally with an STI insulator;
forming transistors having sources and drains disposed above said buried cavities and transistor bodies disposed between said sources and drains; and
connecting said transistors to form said integrated circuit.
6. A method according to claim 5, in which:
said regions of porous silicon have a porosity of about 45%, whereby said buried oxide regions in said buried cavities exert substantially zero stress on said sources drains and said transistor bodies.
7. A method according to claim 5, in which:
said regions of porous silicon have a porosity of less than 45%, whereby said buried oxide regions in said buried cavities exert stress on said sources drains and said transistor bodies.
8. A method according to claim 5, in which:
said regions of porous silicon have a porosity of greater than 45%, whereby said buried oxide regions in said buried cavities exert strain on said sources drains and said transistor bodies.
9. A method according to claim 1, in which said step of etching STI apertures and said step of etching said buried doped regions are performed with the same etching chemistry.
10. A method according to claim 9, in which said step of etching STI apertures is performed with halogen-based chemistry, low process pressure and high RF bias power; and said non-directional step of etching said buried doped regions is performed with said halogen-based etching chemistry, higher process power and low RF bias power.
11. A method according to claim 10, in which said step of etching STI apertures is performed with chlorine-based chemistry, process pressure in the range from about 5 mTorr to about 20 mTorr and RF bias power in the range from about 50 W to about 200 W; and
said non-directional step of etching said buried doped regions is performed with said halogen-based etching chemistry, higher process power in the range from about 20 mTorr to about 60 mTorr and low RF bias power in the range from about 0 W to about 20 W.
US09/733,324 2000-12-08 2000-12-08 Patterned buried insulator Expired - Fee Related US6429091B1 (en)

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US09/733,324 US6429091B1 (en) 2000-12-08 2000-12-08 Patterned buried insulator
PCT/US2001/045195 WO2002047144A2 (en) 2000-12-08 2001-11-29 Patterned buried insulator
DE60103181T DE60103181T2 (en) 2000-12-08 2001-11-29 STRUCTURED VERGRABEN ISOLATOR
EP01996045A EP1340249B1 (en) 2000-12-08 2001-11-29 Patterned buried insulator
CNB018202128A CN1227724C (en) 2000-12-08 2001-11-29 patterned buried insulator

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US20050176219A1 (en) * 2004-02-06 2005-08-11 Min-Sang Kim Methods of forming MOSFETs using crystalline sacrificial structures and MOSFETs so formed
US20050277262A1 (en) * 2004-06-14 2005-12-15 Taiwan Semiconductor Manufacturing Company, Ltd. Method for manufacturing isolation structures in a semiconductor device
US20070099391A1 (en) * 2005-10-28 2007-05-03 International Business Machines Corporation Methods for forming semiconductor structures with buried isolation collars and semiconductor structures formed by these methods
US20110278580A1 (en) * 2010-05-13 2011-11-17 International Business Machines Corporation Methodology for fabricating isotropically source regions of cmos transistors
US8716798B2 (en) 2010-05-13 2014-05-06 International Business Machines Corporation Methodology for fabricating isotropically recessed source and drain regions of CMOS transistors
US11233140B2 (en) 2019-04-23 2022-01-25 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device and manufacturing method thereof
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US6429091B1 (en) 2002-08-06
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EP1340249B1 (en) 2004-05-06

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