TWM570950U - Particle detection module - Google Patents

Abstract

A particle detecting module includes: a base having a detecting channel and a beam path therein; a detecting component disposed in the base and including a laser device and a particle sensor, the laser device The emission beam is projected into the beam path, and the particle sensor is correspondingly disposed to the detection channel and the beam path is orthogonal to the beam path; a micro pump is carried in the base and covers the air guiding groove; wherein the micro pump is received The driving adsorption guides the gas outside the pedestal into the detecting channel, and the gas passes through the detecting channel and is orthogonal to the beam path, and is irradiated by the laser to project a light spot to the particle sensor, and the particle sensor detects the gas. The size and concentration of suspended particles contained.

Description

Particle detection module

The present invention relates to a particle detecting module, and more particularly to a particle detecting module that can be combined with a thin portable device for gas monitoring.

Suspension particles refer to solid particles or droplets contained in the air. Because of their very small particle size, they easily enter the lungs of the human body through the nasal hair in the nasal cavity, thus causing inflammation, asthma or cardiovascular disease in the lungs. Contaminants adhere to the suspended particles, which will increase the harm to the respiratory system. In recent years, air pollution problems have become more and more serious, especially the concentration data of fine aerosols (such as PM2.5 or PM10) are often too high, and the monitoring of airborne particulate concentration is gaining attention, but because air will follow wind direction and air volume. Unquantitative flow, and the current air quality monitoring stations for detecting suspended particles are mostly fixed points, so it is impossible to confirm the concentration of suspended particles in the current week. Therefore, a micro-friendly portable gas detecting device is needed for users to be able to use them all the time, anytime, anywhere. Detecting the concentration of suspended particles around.

In view of this, how to monitor the concentration of suspended particulates anytime and anywhere is an urgent problem to be solved.

The main purpose of the present invention is to provide a particle detecting module, which uses a detecting channel and a beam channel of a thin base to configure a laser detector and a particle sensor for positioning and detecting components to detect the passage through the detection channel and the beam path. The size and concentration of suspended particles contained in the gas at the orthogonal position, and the micro-pump is used to quickly extract the gas outside the pedestal into the detection channel to detect the concentration of suspended particles in the gas, so that the application is assembled in the portable electronic device and wearable The accessories are used to form a mobile particle detection module, so that the user can monitor the concentration of suspended particles at any time and any place.

A generalized embodiment of the present invention is a particle detecting module comprising: a base having a detecting component carrying area, a micro pump carrying area, a detecting channel and a beam path, the micro pump carrying area Having a gas guiding groove, the micro pump bearing area is in communication with the detecting channel, the detecting component carrying area is in communication with the beam path, and the detecting channel and the beam path are orthogonally disposed; a detecting component, a laser device and a particle sensor are disposed, the laser device is disposed on the detecting component carrying area of the base, and the emitted light beam is projected into the beam channel, and the particle sensor is correspondingly disposed to the detecting channel and The microchannel pump is carried in the micropump carrying area of the pedestal and covers the air guiding groove; wherein the micropump is driven to adsorb and direct the gas outside the pedestal to be quickly introduced into the In the detecting channel, the gas passes through the detecting channel and is orthogonal to the beam path, and is irradiated by the laser to project a light spot to the particle sensor, and the particle sensor detects the suspended micro-bubble contained in the gas. The size and concentration.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various embodiments, and is not intended to limit the scope of the invention.

Referring to FIG. 1 to FIG. 4 , the present invention provides a particle detecting module comprising a base 1 , a detecting component 2 , and a micro pump 3 . In order to be able to be assembled and applied to a portable electronic device and a wearable accessory, the base 1 has a length L, a width W and a height H, for the purpose of detecting the component 2 and The micro-pump 3 is equipped with the current optimized configuration and conforms to the thin and miniaturized design. The length L of the base 1 is configured to be 10 to 60 mm, the length L is 34 to 36 mm, and the width W is configured to be 10 to 50 mm. The width W is preferably 29~31mm, and the height H is configured to be 1~7mm, and the height H is 4.5~5.5mm. The whole particle detection module is designed to be convenient to carry.

Referring to FIGS. 1 to 4, the susceptor 1 has a first surface 1a and a second surface 1b. The first surface 1a and the second surface 1b are opposite surfaces. The inner portion has a detecting component carrying area 11 , a micro pump carrying area 12 , a detecting channel 13 and a beam path 14 , wherein the micro pump carrying area 12 is disposed on the first surface 1 a and has an air guiding groove 121 . The detecting component carrying area 11, the detecting channel 13 and the beam path 14 respectively penetrate the first surface 1a and the second surface 1b, and the micro pump carrying area 12 communicates with the detecting channel 13 to detect the component carrying area 11 and the beam path 14 is connected, and the detecting channel 13 and the beam path 14 are orthogonally disposed, and the side of the base 1 has an intake inlet 15 and an exhaust outlet 16 , and the intake inlet 15 communicates with the detection channel 13 to exhaust The outlet 16 is in communication with the air guiding groove 121.

Referring to FIG. 2, the detecting component 2 includes a detecting driving circuit board 21, a particle sensor 22, a laser lighter 23, and a microprocessor 24. The particle sensor 22, the laser device 23 and the microprocessor 24 are packaged on the detection driving circuit board 21, and the detecting driving circuit board 21 is sealed on the second surface 1b of the base 1 and the laser device 23 is provided. Correspondingly disposed in the detecting component carrying area 11 and capable of emitting a light beam projected into the beam path 14, and the particle sensor 22 is correspondingly disposed to the detecting channel 13 and the beam path 14 orthogonally, so that the microprocessor 24 controls the laser lighter 23 and the driving of the particle sensor 22, the laser beam emitted by the laser device 23 is irradiated to the gas in the beam path 14 through the detection channel 13 and the beam channel 14 at the position orthogonal to the beam channel 14, and the gas generating projection light spot is projected on the particle sensor 22, the particle The sensor 22 detects the size and concentration of the suspended particles contained in the gas and outputs a detection signal, and the microprocessor 24 receives the detection signal output by the particle sensor 22 for analysis to output the detection data. The laser illuminator 23 includes a light locating component 231 and a laser emitting component 232. The light locating component 231 is disposed on the detecting driving circuit board 21, and the laser emitting component 232 is embedded in the light locating component 231. The detection driving circuit board 21 is electrically connected to be driven by the microprocessor 24, and the emitted light beam is irradiated into the beam path 14. The particle sensor 22 is a PM2.5 sensor or a PM10 sensor.

Please continue to refer to FIG. 2, the particle detecting module further includes an insulating plate member 4, which is capped on the first surface 1a of the base 1, so that the gas outside the base 1 is as shown in FIG. The gas inlet 15 is introduced into the detecting passage 13 and then passed through the air guiding groove 12 of the micro pump bearing area 12, and then the exhaust outlet 16 is outside the base 1 to form a gas guiding path. As shown in FIG. 2 and FIG. 7, the particle detecting module further includes a base outer cover member 5, which is placed on the insulating plate member 4 to close the first surface 1a of the base 1 to form an electronic interference. The pedestal outer cover member 5 corresponding to the intake inlet 15 of the base 1 also has an intake inlet 51 for corresponding communication, and the base outer cover member 5 corresponds to the exhaust outlet 16 of the base 1. The position also has an exhaust outlet 52 for corresponding communication.

Referring to FIG. 2, FIG. 4, FIG. 5A and FIG. 5B, the micropump 3 described above is carried in the micropump carrying area 12 of the base 1 and covers the air guiding groove 121. The micropump 3 is composed of a flow plate 31, a resonance plate 32, a piezoelectric actuator 33, a first insulating sheet 34, a conductive sheet 35 and a second insulating sheet 36. The inlet plate 31 has at least one inlet hole 31a, at least one bus bar groove 31b and a confluence chamber 31c. The inlet hole 31a is for introducing a gas, the inlet hole 31a corresponds to the through bus groove 31b, and the bus bar groove 31b. The flow is merged into the confluence chamber 31c, so that the gas introduced into the inlet hole 31a is converged into the confluence chamber 31c. In the present embodiment, the number of the inlet holes 31a and the bus bar grooves 31b is the same, and the number of the inlet holes 31a and the bus bar grooves 31b are respectively four, which is not limited thereto, and the four inlet holes 31a are respectively penetrated. Four bus bar slots 31b, and four bus bar slots 31b merge into the confluence chamber 31c.

Referring to FIG. 5A, FIG. 5B and FIG. 6A, the resonant plate 32 is assembled to the inflow plate 31 by a bonding method, and the resonant plate 32 has a hollow hole 32a and a movable portion 32b. a fixing portion 32c, the hollow hole 32a is located at the center of the resonance piece 32, and corresponds to the confluence chamber 31c of the inlet plate 31, and the movable portion 32b is disposed around the hollow hole 32a and opposed to the confluence chamber 31c. The fixing portion 32c is provided on the outer peripheral edge portion of the resonance piece 32 and is attached to the inlet plate 31.

Continuing to refer to FIG. 5A, FIG. 5B and FIG. 6A, the piezoelectric actuator 33 includes a suspension plate 33a, an outer frame 33b, at least one bracket 33c, a piezoelectric element 33d, and at least one gap. 33e and a convex portion 33f. Wherein, the suspension plate 33a is a square-shaped suspension plate, and the suspension plate 33a adopts a square shape, which is compared with the design of the circular suspension plate. The structure of the square suspension plate 33a obviously has the advantage of power saving, and operates at the resonance frequency. The capacitive load, the power consumption increases with the increase of the frequency, and because the resonant frequency of the side-length square suspension plate 33a is significantly lower than that of the circular suspension plate, the relative power consumption is also significantly lower, that is, the case The suspension plate 33a of the square design has the advantage of power saving advantage; the outer frame 33b is disposed around the outer side of the suspension plate 33a; at least one bracket 33c is connected between the suspension plate 33a and the outer frame 33b to provide the elastic support suspension plate 33a. And a piezoelectric element 33d having a side length which is less than or equal to one side of the suspension plate 33a, and the piezoelectric element 33d is attached to one surface of the suspension plate 33a for applying a voltage to drive the suspension The plate 33a is bent and vibrated; and the suspension plate 33a, the outer frame 33b and the bracket 33c form at least one gap 33e for gas to pass therethrough; and the convex portion 33f is attached to the suspension plate 33a to attach the piezoelectric element 33d. In the present embodiment, the convex portion 33f can also be integrally formed on the opposite surface of the surface of the attached piezoelectric element 33d by an etching process through the suspension plate 33a. Convex structure.

Please refer to FIG. 5A, FIG. 5B and FIG. 6A for the above-mentioned inlet plate 31, the resonance plate 32, the piezoelectric actuator 33, the first insulating sheet 34, the conductive sheet 35 and the second insulating sheet 36. The stacking combination is sequentially arranged, wherein a cavity space 37 is formed between the suspension plate 33a and the resonant plate 32, and the cavity space 37 can be filled with a gap between the resonant plate 32 and the outer frame 33b of the piezoelectric actuator 33. The material is formed, for example, a conductive paste, but not limited thereto, so that a certain depth can be maintained between the resonant plate 32 and the suspension plate 33a to form the chamber space 37, thereby guiding the gas to flow more rapidly, and the suspension plate 33a maintains an appropriate distance from the resonator piece 32 to reduce mutual contact interference, and the noise generation can be reduced. Of course, in the embodiment, the resonance plate 32 can be reduced by the height of the frame 33b of the piezoelectric actuator 33 being raised. The gap between the outer frame 33b of the piezoelectric actuator 33 is filled with the thickness of the conductive adhesive, so that the overall structure of the micropump 3 is not indirectly affected by the hot pressing temperature and the cooling temperature due to the filling material of the conductive adhesive, and the conductive is avoided. The filling material of the rubber is affected by the expansion and contraction factors after molding. Room space 37 of the actual spacing, but not limited thereto.

In addition, the chamber space 37 will affect the transmission effect of the micropump 3, so maintaining a fixed chamber space 37 is important for providing stable transmission efficiency for the micropump 3, so that as shown in Fig. 6B, other piezoelectrics are shown. In the embodiment of the actuator 33, the suspension plate 33a may be press-formed to extend outwardly by a distance, and the outward extension distance may be adjusted by at least one bracket 33c formed between the suspension plate 33a and the outer frame 33b. The surface of the convex portion 33f on the suspension plate 33a and the surface of the outer frame 33b form a non-coplanar, that is, the surface of the convex portion 33f will be lower than the surface of the outer frame 33b, and is applied to the assembled surface of the outer frame 33b. A small amount of filling material, for example, a conductive adhesive, is attached to the fixing portion 32c of the resonator piece 32 by heat pressing, so that the piezoelectric actuator 33 can be combined with the resonator piece 32, The structure of the suspension plate 33a of the piezoelectric actuator 33 is formed by press forming to form a chamber space 37, and the required chamber space 37 is formed by the suspension plate 33a of the piezoelectric actuator 33. The distance is completed, which effectively simplifies the adjustment Spatial design chamber 37, but also to achieve a simplified manufacturing process, to shorten the processing time and the like. In addition, the first insulating sheet 34, the conductive sheet 35, and the second insulating sheet 36 are all thin frame-shaped sheets, and are sequentially stacked on the piezoelectric actuator 33 to form an overall structure of the micropump 3.

In order to understand the output operation mode of the micropump 3 for gas transmission, please refer to FIGS. 6C to 6E. Referring to FIG. 6C, the piezoelectric element 33d of the piezoelectric actuator 33 is applied with a driving voltage. The deformation causes the suspension plate 33a to be displaced downward. At this time, the volume of the chamber space 37 is increased, and a negative pressure is formed in the chamber space 37, so that the gas in the confluence chamber 31c is taken into the chamber space 37, and the resonance piece is simultaneously 32 is synchronously displaced downward by the influence of the resonance principle, and the volume of the confluence chamber 31c is increased, and the gas in the confluence chamber 31c enters the chamber space 37, causing the same in the confluence chamber 31c. Further, the gas is sucked into the confluence chamber 31c through the inlet hole 31a and the bus bar groove 31b. Referring to FIG. 6D, the piezoelectric element 33d drives the suspension plate 33a to move upward, compressing the chamber space 37, and the same resonance. The sheet 32 is displaced upward by the suspension plate 33a due to resonance, forcing the gas in the synchronous pushing chamber space 37 to pass downward through the gap 33e to achieve the effect of transporting gas; finally, see Fig. 6E, when the suspension plate 33a When the downward direction is driven, the resonator piece 32 is also driven to be displaced downward, and the resonator piece 32 at this time will move the gas in the compression chamber space 37 toward the gap 33e, and raise the volume in the confluence chamber 31c to allow the gas. It can be continuously collected in the confluence chamber 31c through the inlet hole 31a and the bus bar groove 31b, and the micropump 3 is provided by continuously repeating the micropump 3 shown in the above FIGS. 6C to 6E to make the micropump 3 The gas can be continuously flowed from the inlet hole 31a into the flow path formed by the inlet plate 31 and the resonance plate 32 to generate a pressure gradient, and then transmitted downward by the gap 33e to flow the gas at a high speed to achieve the operation of the micropump 3 to transmit the gas output.

Continuing to refer to FIG. 6A, the inlet plate 31 of the micropump 3, the resonator piece 32, the piezoelectric actuator 33, the first insulating sheet 34, the conductive sheet 35, and the second insulating sheet 36 are all permeable to the microelectromechanical surface. The micromachining process reduces the volume of the micropump 3 to form a micropump 3 of a microelectromechanical system.

As can be seen from the above description, in the specific implementation of the present invention, when the micropump 3 is driven by the gas adsorbing and guiding the outside of the susceptor 1 into the detection channel 13, the gas passes through the detection channel 13 and the beam path. At 14 orthogonal positions, the spot is projected by the laser lighter 23 to the particle sensor 22, and the particle sensor 22 detects the size and concentration of the suspended particles contained in the gas. Therefore, the particle detection module provided in the present invention can be applied to a portable electronic device to form a mobile particle detection module. The portable device comprises one of a mobile phone, a tablet computer, a wearable device and a notebook computer. Or the particle detection module provided in the present application can be applied to the wearable accessory to form a mobile particle detection module. The wearing accessory comprises one of a charm, a button, a pair of glasses and a watch.

In summary, the particle detection module provided by the present invention utilizes a detection channel of a thin pedestal and a beam path and a laser and a particle sensor configured with a positioning detecting component to detect the passage through the detection channel. The size and concentration of suspended particles contained in the gas at the orthogonal position of the beam channel, and the micro-pump is used to quickly extract the gas outside the pedestal into the detection channel to detect the concentration of suspended particles in the gas, and the device is very suitable for application and assembly. The portable electronic device and the wearable accessory form a mobile particle detecting module, so that the user can monitor the concentration of suspended particles at any time and any place, and has great industrial applicability and advancement.

1‧‧‧Base

1a‧‧‧ first surface

1b‧‧‧ second surface

11‧‧‧Detecting component bearing area

12‧‧‧Micro pump bearing area

121‧‧‧ air guiding groove

13‧‧‧Detection channel

14‧‧‧beam channel

15‧‧‧Intake inlet

16‧‧‧Exhaust outlet

2‧‧‧Detecting parts

21‧‧‧Detection driver board

22‧‧‧Particle sensor

23‧‧‧Raylight

231‧‧‧Light positioning parts

232‧‧‧Laser emitting elements

24‧‧‧Microprocessor

3‧‧‧Micropump

31‧‧‧Intake plate

31a‧‧‧ Inlet

31b‧‧‧ busbar slot

31c‧‧‧ confluence chamber

32‧‧‧Resonance film

32a‧‧‧ hollow hole

32b‧‧‧movable department

32c‧‧‧ fixed department

33‧‧‧ Piezoelectric Actuator

33a‧‧‧suspension plate

33b‧‧‧ frame

33c‧‧‧ bracket

33d‧‧‧Piezoelectric components

33e‧‧‧ gap

33f‧‧‧ convex

34‧‧‧First insulation sheet

35‧‧‧Conductor

36‧‧‧Second insulation sheet

37‧‧‧Case space

4‧‧‧Insulation board

5‧‧‧Base cover parts

51‧‧‧Intake inlet

52‧‧‧Exhaust outlet

H‧‧‧ Height

L‧‧‧ length

W‧‧‧Width

Figure 1 shows the appearance of the particle detection module of the present case. Figure 2 is a schematic exploded view of the relevant components of the particle detection module of the present invention. Figure 3 shows the base of the particle detection module of the present invention. Figure 4 is a schematic diagram showing the detection implementation of the particle detection module of the present invention. FIG. 5A is a schematic exploded view of the micropump related components of the particle detecting module of the present invention viewed from a plan view. FIG. 5B is a schematic exploded view of the micropump related components of the particle detecting module of the present invention as viewed from a bottom view. Figure 6A is a cross-sectional view showing the micropump of the particle detecting module of the present invention. FIG. 6B is a cross-sectional view showing another embodiment of the piezoelectric actuator of the micropump of the particle detecting module of the present invention. 6C to 6E are schematic views showing the operation of the micropump of the particle detecting module of the present invention in Fig. 6A. Figure 7 is a view showing the appearance of the base cover member of the particle detecting module of the present invention.

Claims (18)

A particle detecting module includes: a base having a detecting component carrying area, a micro pump carrying area, a detecting channel and a beam path; the micro pump carrying area has an air guiding groove, The micro pump bearing area is in communication with the detecting channel, the detecting component carrying area is in communication with the beam path, and the detecting channel is orthogonal to the beam path; a detecting component comprising a laser and a particle a sensor, the laser is disposed on the detecting component carrying area of the base, and the emitted light beam is projected into the beam path, and the particle sensor is correspondingly disposed to the detecting channel and the beam path orthogonally; a micropump is carried in the micropump carrying area of the pedestal and covers the air guiding groove; wherein the micro pump is driven to adsorb and guide a gas outside the pedestal to be quickly introduced into the detecting channel, The gas passes through the detection channel and is orthogonal to the beam path, and is irradiated by the laser to project a light spot to the particle sensor. The particle sensor detects the size and concentration of the suspended particles contained in the gas. degree. The particle detection module of claim 1, wherein the particle sensor is a PM2.5 sensor. The particle detecting module of claim 1, wherein the base has a first surface and a second surface, and the micro pump bearing area is disposed on the first surface, the detecting component carrying area, The detection channel and the beam path respectively penetrate the first surface and the second surface, and the side of the base has an intake inlet and an exhaust outlet, and the intake inlet is in communication with the detection channel, An exhaust outlet is connected to the air guiding groove, and the micro pump is driven to attract the gas outside the base to be quickly introduced into the detecting channel from the air inlet, and is orthogonal to the beam path through the detecting channel After the position, it enters the air guiding groove and is discharged from the outside of the base by the exhaust outlet. The particle detecting module of claim 3, wherein the detecting component comprises a detecting driving circuit board and a microprocessor, and the laser light detector and the particle sensor are packaged on the detecting driving circuit board And the detection driving circuit board is capped on the second surface of the base, and the laser light device is correspondingly disposed in the detecting component carrying area, and the particle sensor is correspondingly disposed to the detecting channel Aligning with the beam path, the microprocessor is packaged on the detection driving circuit board to control the driving of the laser device and the particle sensor, so that the laser beam emitted by the laser beam passes through the beam channel The detection channel is adjacent to the beam channel, and the gas generates a projection spot to be projected on the particle sensor. The particle sensor detects the size and concentration of the suspended particles contained in the gas, and outputs a detection signal. And the microprocessor receives the detection signal output by the particle sensor for analysis to output the detection data. The particle detecting module of claim 4, further comprising an insulating plate member covering the first surface of the base, such that the gas outside the base is introduced from the air inlet In the detecting channel, the air guiding groove of the micro pump bearing area is further discharged from the exhausting outlet to form a gas guiding path. The particle detecting module of claim 5, further comprising a base outer cover member mounted on the insulating plate member to close the first surface of the base to form an electronic interference protection function The base outer cover member also has an air inlet inlet corresponding to the air inlet inlet position of the base, and the base outer cover member also has a position corresponding to the exhaust outlet of the base. The exhaust outlets are connected in communication. The particle detecting module of claim 4, wherein the laser device comprises an optical positioning component and a laser emitting component, wherein the optical positioning component is disposed on the detecting driving circuit board, and the optical positioning component is disposed on the detecting driving circuit board. The laser emitting component is embedded in the optical positioning component and electrically connected to the detecting driving circuit board to be driven by the microprocessor, and the emitted light beam is irradiated into the beam path. The particle detection module of claim 1, wherein the micropump comprises: a flow plate having at least one inlet hole, at least one bus bar groove, and a confluence chamber, wherein the inlet a flow hole for introducing the gas, the inlet hole correspondingly penetrating through the bus bar groove, and the bus bar groove is merged into the confluence chamber, so that the gas introduced into the inlet hole can be merged into the confluence chamber; a sheet, joined to the inflow plate, having a hollow hole, a movable portion and a fixing portion, the hollow hole being located at a center of the resonance piece and corresponding to the confluence chamber of the inflow plate, and the movable portion a region disposed around the hollow hole and opposite to the confluence chamber, wherein the fixing portion is disposed on the outer peripheral portion of the resonator plate to be attached to the inflow plate; and a piezoelectric actuator coupled to the Correspondingly disposed on the resonant plate; wherein the resonant plate has a chamber space between the piezoelectric actuator and the piezoelectric actuator to enable the gas to flow from the inlet plate when the piezoelectric actuator is driven Hole introduction, collected into the confluence chamber through the bus trough Then flowing through the hollow hole of the resonant sheet, made of the piezoelectric actuator with the resonant plate of the movable portion of the transmission resonance of the gas. The particle detecting module of claim 8, wherein the piezoelectric actuator comprises: a suspension plate having a square shape for bending vibration; and an outer frame surrounding the suspension plate An outer side; at least one bracket connected between the suspension plate and the outer frame to provide elastic support of the suspension plate; and a piezoelectric element having a side length which is less than or equal to one side length of the suspension plate, and The piezoelectric element is attached to a surface of the suspension plate for applying a voltage to drive the suspension plate to bend and vibrate. The particle detecting module of claim 8, wherein the micropump further comprises a first insulating sheet, a conductive sheet and a second insulating sheet, wherein the inlet plate, the resonant sheet, and the pressure The electric actuator, the first insulating sheet, the conductive sheet and the second insulating sheet are sequentially stacked and combined. The particle detecting module of claim 9, wherein the floating plate comprises a convex portion disposed on the opposite surface of the surface of the floating plate to which the piezoelectric element is attached. The particle detecting module of claim 11, wherein the convex portion is integrally formed by an etching process to protrude from the opposite surface of the surface of the floating plate to which the piezoelectric element is attached. structure. The particle detecting module of claim 8, wherein the piezoelectric actuator comprises: a suspension plate having a square shape for bending vibration; and an outer frame surrounding the suspension plate An outer side; at least one bracket is formed between the suspension plate and the outer frame to provide elastic support of the suspension plate, and a surface of one of the suspension plates and a surface of the outer frame are formed into a non-coplanar structure, and Holding a surface of one of the suspension plates and the resonator plate with a cavity; and a piezoelectric element having a length of one side smaller than or equal to one side of the suspension plate, and the piezoelectric element is attached to the suspension On one of the surfaces of the board, a voltage is applied to drive the suspension plate to bend and vibrate. The particle detecting module of claim 1, wherein the micro pump is a micro pump of a micro electro mechanical system. The particle detection module of claim 1, wherein the particle detection module is assembled on a portable electronic device to form a mobile particle detection module. The particle detection module of claim 15, wherein the portable device is one of a mobile phone, a tablet computer, a wearable device, and a notebook computer. The particle detection module of claim 1, wherein the particle detection module is assembled on a wearable accessory to form a mobile particle detection module. The particle detecting module of claim 17, wherein the wearing accessory is one of a charm, a button, a pair of glasses, and a watch.