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TWI901665B - Copper paste, capillary structure forming method and heat pipe - Google Patents

Copper paste, capillary structure forming method and heat pipe

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Publication number
TWI901665B
TWI901665B TW110112394A TW110112394A TWI901665B TW I901665 B TWI901665 B TW I901665B TW 110112394 A TW110112394 A TW 110112394A TW 110112394 A TW110112394 A TW 110112394A TW I901665 B TWI901665 B TW I901665B
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Taiwan
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copper
copper particles
diameter
mass
capillary structure
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TW110112394A
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Chinese (zh)
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TW202140691A (en
Inventor
中子偉夫
江尻芳則
石川大
名取美智子
根岸征央
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日商力森諾科股份有限公司
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Publication of TWI901665B publication Critical patent/TWI901665B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/02Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers
    • B22F7/04Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers with one or more layers not made from powder, e.g. made from solid metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Powder Metallurgy (AREA)
  • Conductive Materials (AREA)

Abstract

一種銅糊,是熱管的毛細結構形成用銅糊,含有銅粒子、熱分解性樹脂及分散介質,銅粒子含有體積平均粒徑為10 μm~50 μm的大徑銅粒子及體積平均粒徑為0.1 μm~2.0 μm的小徑銅粒子。A copper paste is used for forming the capillary structure of a heat pipe. It contains copper particles, thermally decomposable resin, and a dispersion medium. The copper particles contain large-diameter copper particles with a volume average particle size of 10 μm to 50 μm and small-diameter copper particles with a volume average particle size of 0.1 μm to 2.0 μm.

Description

銅糊、毛細結構的形成方法及熱管Copper paste, capillary structure formation methods and heat pipes

本發明是有關於一種銅糊、毛細結構的形成方法及熱管。This invention relates to a copper paste, a method for forming capillary structures, and a heat pipe.

熱管是利用了工作液體的蒸發及冷凝的被動傳熱元件,於密閉的空間內包括工作液體、以及被稱為「毛細結構」的產生毛細管泵作用的構件。熱管可以小的溫度差輸送大量的熱,因此作為智慧型手機等般的小型資訊設備用散熱器件受到關注。例如,於專利文獻1中,揭示了包括由多孔質的燒結粉末構成的毛細結構的熱管。於毛細結構由多孔質的燒結粉末構成的情況下,一般是如下方法:藉由於在規定部位堆積燒結性的金屬粉末(例如銅粉)後進行加壓壓縮,並進行煆燒來進行燒結。 [現有技術文獻] [專利文獻]A heat pipe is a passive heat transfer element that utilizes the evaporation and condensation of a working fluid. It comprises a working fluid and a component called a "capillary structure" that generates a capillary pump effect within a sealed space. Heat pipes can transfer large amounts of heat with small temperature differences, and are therefore attracting attention as heat dissipation devices for small information devices such as smartphones. For example, Patent 1 discloses a heat pipe comprising a capillary structure made of porous sintered powder. When the capillary structure is composed of porous sintered powder, the general method is as follows: sintering is achieved by depositing sinterable metal powder (e.g., copper powder) at specified locations, followed by compression and calcination. [Prior Art Documents] [Patent Documents]

專利文獻1:日本專利特開2003-222481號公報Patent Document 1: Japanese Patent Application Publication No. 2003-222481

[發明所欲解決之課題] 熱管的形狀以往大多使用管狀,但就小型化、與熱源的密接性等觀點而言,亦逐漸使用被稱為蒸氣室(vapor chamber)的平板狀的熱管。此種平板狀的熱管由於小型資訊設備的容積的限制,正在推進薄型化,要求毛細結構的厚度亦成形得薄。進而,於平板狀的熱管中,有時形成有毛細結構的面(毛細結構的形成面)具有凹凸形狀等複雜的形狀。然而,於毛細結構由多孔質的燒結粉末構成的情況下,先前的進行加壓壓縮的方法中,難以應對此種厚度薄的毛細結構及複雜形狀的毛細結構。[Problem to be Solved by the Invention] While heat pipes have traditionally been mostly tubular, flat heat pipes with a vapor chamber are increasingly used for miniaturization and better contact with the heat source. Due to volume limitations in small information devices, these flat heat pipes are being made increasingly thinner, requiring a thinner capillary structure. Furthermore, in flat heat pipes, the surfaces with capillary structures (the surfaces where the capillary structure forms) sometimes have complex shapes such as uneven surfaces. However, when the capillary structure is composed of porous sintered powder, previous compression methods are insufficient to handle the thinness and complex shapes of these capillary structures.

因此,本發明的目的之一在於提供一種毛細結構的新穎的形成方法,即使於作為目標的毛細結構的厚度薄的情況下及於作為目標的毛細結構的形成面具有複雜的形狀的情況下,亦可簡單地形成毛細結構。Therefore, one of the objectives of this invention is to provide a novel method for forming capillary structures, which can easily form capillary structures even when the target capillary structure is thin or when the forming surface of the target capillary structure has a complex shape.

[解決課題之手段] 本發明者等人研究的結果發現,藉由使用將粒徑不同的兩種銅粒子與熱分解性樹脂組合而成的銅糊,可藉由印刷來形成毛細結構,從而完成了本發明。[Methods for Solving the Problem] The inventors and others have discovered that by using a copper paste made of two copper particles of different sizes and thermally decomposable resin, a capillary structure can be formed by printing, thus completing the present invention.

即,本發明的一方面是有關於以下所示的熱管的毛細結構形成用銅糊。That is, one aspect of the present invention relates to copper paste for forming the capillary structure of the heat pipe as shown below.

[1]一種銅糊,是熱管的毛細結構形成用銅糊,含有銅粒子、熱分解性樹脂及分散介質,所述銅粒子含有體積平均粒徑為10 μm~50 μm的大徑銅粒子及體積平均粒徑為0.1 μm~2.0 μm的小徑銅粒子。[1] A copper paste for forming the capillary structure of a heat pipe, comprising copper particles, thermally decomposable resin and a dispersion medium, wherein the copper particles comprise large-diameter copper particles with a volume average particle size of 10 μm to 50 μm and small-diameter copper particles with a volume average particle size of 0.1 μm to 2.0 μm.

[2]如[1]所述的銅糊,其中所述熱分解性樹脂的95%熱分解溫度為350℃以下。[2] The copper paste as described in [1], wherein the thermally decomposable resin has a 95% thermal decomposition temperature of 350°C or less.

[3]如[1]或[2]所述的銅糊,其中以所述銅粒子的總質量為基準,所述大徑銅粒子的含量為40質量%~90質量%,以所述銅粒子的總質量為基準,所述小徑銅粒子的含量為10質量%~60質量%。[3] The copper paste as described in [1] or [2], wherein the content of large-diameter copper particles is 40% to 90% by mass based on the total mass of the copper particles, and the content of small-diameter copper particles is 10% to 60% by mass based on the total mass of the copper particles.

[4]如[1]~[3]中任一項所述的銅糊,其中相對於所述銅粒子100質量份,所述熱分解性樹脂的含量為1質量份~20質量份。[4] The copper paste as described in any of [1] to [3], wherein the content of the thermally decomposable resin is 1 to 20 parts by mass relative to 100 parts by mass of the copper particles.

[5]如[1]~[4]中任一項所述的銅糊,其中所述大徑銅粒子的振實密度為1.0 g/cm3 ~4.5 g/cm3[5] The copper paste as described in any of [1] to [4], wherein the tap density of the large-diameter copper particles is 1.0 g/ cm3 to 4.5 g/ cm3 .

[6]如[1]~[5]中任一項所述的銅糊,其中所述銅糊的黏度為10 Pa·s~120 Pa·s。[6] The copper paste as described in any of [1] to [5], wherein the viscosity of the copper paste is 10 Pa·s to 120 Pa·s.

根據所述銅糊,可藉由印刷來形成毛細結構,因此即使於毛細結構的厚度薄(例如為70 μm以下的厚度)的情況下及毛細結構的形成面具有複雜的形狀的情況下,亦可簡單地形成毛細結構。According to the copper paste, capillary structures can be formed by printing, so even if the thickness of the capillary structure is thin (e.g., less than 70 μm) and the forming surface of the capillary structure has a complex shape, the capillary structure can be easily formed.

本發明的另一方面是有關於一種毛細結構的形成方法,是熱管的毛細結構的形成方法,包括:印刷如所述[1]~[6]中任一項所述的銅糊的步驟;以及燒結所述銅糊的步驟。Another aspect of the present invention relates to a method for forming a capillary structure, which is a method for forming a capillary structure of a heat pipe, comprising: a step of printing copper paste as described in any one of [1] to [6]; and a step of sintering the copper paste.

本發明的另一方面是有關於一種熱管,包括含有如所述[1]~[6]中任一項所述的銅糊的燒結體的毛細結構。Another aspect of the invention relates to a heat pipe comprising a capillary structure of a sintered body containing copper paste as described in any of [1] to [6].

[發明的效果] 根據本發明,可提供一種毛細結構的新穎的形成方法,即使於作為目標的毛細結構的厚度薄的情況下及於作為目標的毛細結構的形成面具有複雜的形狀的情況下,亦可簡單地形成毛細結構。[Effects of the Invention] According to the present invention, a novel method for forming capillary structures can be provided, which can easily form capillary structures even when the thickness of the target capillary structure is thin and when the forming surface of the target capillary structure has a complex shape.

本說明書中,使用「~」表示的數值範圍表示包含「~」的前後所記載的數值來分別作為最小值及最大值的範圍。本說明書中階段性地記載的數值範圍中,某階段的數值範圍的上限值或下限值亦可置換為其他階段的數值範圍的上限值或下限值。另外,本說明書中例示的材料只要無特別說明,則可單獨使用一種或者組合使用兩種以上。本說明書中,關於組成物中的各成分的含量,於組成物中存在多種相當於各成分的物質的情況下,只要無特別說明,則是指存在於組成物中的該多種物質的合計量。In this specification, the numerical range indicated by "~" represents the range of minimum and maximum values recorded before and after "~". The upper or lower limit of a numerical range recorded in stages in this specification can be replaced with the upper or lower limit of another numerical range. Furthermore, unless otherwise specified, the materials exemplified in this specification can be used alone or in combination with two or more. Regarding the content of each component in the composition, in cases where multiple substances equivalent to each component are present in the composition, unless otherwise specified, the content refers to the total amount of those multiple substances present in the composition.

以下,對本發明的較佳的實施形態進行說明。其中,本發明並不受下述實施形態的任何限定。The preferred embodiments of the present invention will now be described. However, the present invention is not limited to any of the embodiments described below.

<銅糊> 一實施方式的銅糊是用於形成熱管的毛細結構的毛細結構形成用銅糊。銅糊含有銅粒子、熱分解性樹脂及分散介質。以下,對銅糊中所含的各成分進行說明。<Copper Paste> One embodiment of the copper paste is a capillary structure forming copper paste used to form the capillary structure of a heat pipe. The copper paste contains copper particles, thermally decomposable resin, and a dispersion medium. The components contained in the copper paste are described below.

(銅粒子) 銅粒子含有體積平均粒徑為10 μm~50 μm的銅粒子(大徑銅粒子)及體積平均粒徑為0.1 μm~2.0 μm的銅粒子(小徑銅粒子)。此處,體積平均粒徑可使用光散射法粒度分佈測定裝置來求出。(Copper particles) Copper particles contain copper particles with a volume average size of 10 μm to 50 μm (large-diameter copper particles) and copper particles with a volume average size of 0.1 μm to 2.0 μm (small-diameter copper particles). The volume average size can be determined using a light scattering particle size distribution measurement device.

就容易獲得較佳尺寸的空孔(例如10 μm以上的空孔)的觀點而言,大徑銅粒子的體積平均粒徑為10 μm以上,為15 μm以上,亦可為20 μm以上。就煆燒後容易獲得厚度更薄的毛細結構(例如70 μm以下的厚度的毛細結構)的觀點而言,大徑銅粒子的體積平均粒徑為50 μm以下,為45 μm以下,亦可為40 μm以下。就所述觀點而言,大徑銅粒子的體積平均粒徑可為10 μm~40 μm、20 μm~50 μm或20 μm~40 μm。From the viewpoint that it is easy to obtain pores of a better size (e.g., pores of 10 μm or more), the volume average particle size of the large-diameter copper particles is 10 μm or more, 15 μm or more, or 20 μm or more. From the viewpoint that it is easy to obtain a thinner capillary structure after calcination (e.g., a capillary structure with a thickness of 70 μm or less), the volume average particle size of the large-diameter copper particles is 50 μm or less, 45 μm or less, or 40 μm or less. From the aforementioned viewpoint, the volume average particle size of the large-diameter copper particles can be 10 μm to 40 μm, 20 μm to 50 μm, or 20 μm to 40 μm.

就煆燒後容易獲得厚度更薄的毛細結構(例如70 μm以下的厚度的毛細結構)的觀點而言,大徑銅粒子的最大徑(大徑銅粒子中具有最大粒徑的銅粒子的該粒徑)可為70 μm以下、60 μm以下或50 μm以下。大徑銅粒子的最大徑是藉由篩分法測定而得的值。From the perspective that a thinner capillary structure (e.g., a capillary structure less than 70 μm thick) can be easily obtained after calcination, the maximum diameter of large-diameter copper particles (the diameter of the copper particle with the largest diameter among large-diameter copper particles) can be less than 70 μm, less than 60 μm, or less than 50 μm. The maximum diameter of large-diameter copper particles is a value obtained by sieving.

作為大徑銅粒子的最大徑的判定方法,亦有如下方法:依照日本工業標準(Japanese Industrial Standard,JIS)Z 8815:1994,使用在利用63 μm的篩子孔徑的篩子的試驗中進行篩分所得的大徑銅粒子的篩上物百分率的方法。就煆燒後容易獲得厚度更薄的毛細結構(例如70 μm以下的厚度的毛細結構)的觀點而言,利用該方法獲得的大徑銅粒子的篩上物百分率可為5.0質量%以下。One method for determining the maximum diameter of large-diameter copper particles is as follows: According to Japanese Industrial Standard (JIS) Z 8815:1994, this method involves determining the percentage of large-diameter copper particles on the sieve obtained by sieving using a sieve with a sieve aperture of 63 μm. Considering that a thinner capillary structure (e.g., a capillary structure with a thickness of 70 μm or less) can be easily obtained after calcination, the percentage of large-diameter copper particles on the sieve obtained using this method can be 5.0% by mass or less.

就容易獲得較佳尺寸的空孔(例如10 μm以上的空孔)的觀點而言,大徑銅粒子的最小徑(大徑銅粒子中具有最小粒徑的銅粒子的該粒徑)可為0.04 μm以上、0.06 μm以上或0.1 μm以上。大徑銅粒子的最小徑與最大徑同樣地進行測定。From the viewpoint that it is easy to obtain pores of a better size (e.g., pores larger than 10 μm), the minimum diameter of large-diameter copper particles (the diameter of the smallest copper particle among large-diameter copper particles) can be 0.04 μm or larger, 0.06 μm or larger, or 0.1 μm or larger. The minimum diameter of large-diameter copper particles is measured in the same way as the maximum diameter.

大徑銅粒子可為例如球狀、塊狀、針狀、片狀、樹枝狀、大致球狀等,亦可為不定形。於使用不定形的大徑銅粒子的情況下,容易獲得空孔率高、具有適度大的空孔的毛細結構。因此,於使用不定形的大徑銅粒子的情況下,毛細結構的毛細管力容易提高。就所述觀點而言,大徑銅粒子的振實密度可為0.5 g/cm3 以上、0.8 g/cm3 以上或1.0 g/cm3 以上,可為4.5 g/cm3 以下、4.3 g/cm3 以下或4.0 g/cm3 以下,可為1.0 g/cm3 ~4.5 g/cm3 或1.0 g/cm3 ~4.0 g/cm3 。此種銅粒子存在具有不定形的傾向。大徑銅粒子的振實密度是按照JIS Z 2512:2012測定而得的值。Large-diameter copper particles can be, for example, spherical, blocky, needle-like, sheet-like, branch-like, or roughly spherical, and can also be amorphous. When using amorphous large-diameter copper particles, it is easy to obtain capillary structures with high porosity and moderately large pores. Therefore, when using amorphous large-diameter copper particles, the capillary force of the capillary structure is easily improved. From the aforementioned perspective, the tap density of large-diameter copper particles can be 0.5 g/ cm³ or higher, 0.8 g/cm³ or higher , or 1.0 g/cm³ or higher; it can be 4.5 g/cm³ or lower , 4.3 g/cm³ or lower , or 4.0 g/cm³ or lower ; or it can be between 1.0 g/ cm³ and 4.5 g/ cm³ or between 1.0 g/ cm³ and 4.0 g/ cm³ . These copper particles tend to be amorphous. The tap density of large-diameter copper particles is a value measured according to JIS Z 2512:2012.

就確保更佳的空孔率及空孔尺寸的觀點而言,以銅粒子的總質量為基準,大徑銅粒子的含量可為40質量%以上、60質量%以上、70質量%以上、75質量%或80質量%以上。就與小徑銅粒子的添加量的平衡變得良好的觀點而言,以銅粒子的總質量為基準,大徑銅粒子的含量可為90質量%以下、87質量%以下、85質量%以下或80質量%以下。就所述觀點而言,以銅粒子的總質量為基準,大徑銅粒子的含量可為40質量%~90質量%、60質量%~87質量%、70質量%~85質量%、75質量%~80質量%或80質量%~85質量%。From the perspective of ensuring better porosity and pore size, based on the total mass of copper particles, the content of large-diameter copper particles can be 40% or more by mass, 60% or more by mass, 70% or more by mass, 75% or more by mass, or 80% or more by mass. From the perspective of achieving a good balance with the addition of small-diameter copper particles, based on the total mass of copper particles, the content of large-diameter copper particles can be 90% or less by mass, 87% or less by mass, 85% or less by mass, or 80% or less by mass. From the aforementioned perspective, based on the total mass of copper particles, the content of large-diameter copper particles can be 40% to 90% by mass, 60% to 87% by mass, 70% to 85% by mass, 75% to 80% by mass, or 80% to 85% by mass.

就分散性及成本的觀點而言,小徑銅粒子的體積平均粒徑為0.1 μm以上,為0.15 μm以上,亦可為0.2 μm以上。就顯現出充分的燒結性的觀點而言,小徑銅粒子的體積平均粒徑為2.0 μm以下,為1.5 μm以下,亦可為1.2 μm以下。就所述觀點而言,小徑銅粒子的體積平均粒徑可為0.1 μm~1.2 μm、0.2 μm~2.0 μm或0.2 μm~1.2 μm。From the perspective of dispersibility and cost, the volume average particle size of the small-diameter copper particles is 0.1 μm or more, 0.15 μm or more, or 0.2 μm or more. From the perspective of exhibiting sufficient sinterability, the volume average particle size of the small-diameter copper particles is 2.0 μm or less, 1.5 μm or less, or 1.2 μm or less. From the aforementioned perspective, the volume average particle size of the small-diameter copper particles can be 0.1 μm to 1.2 μm, 0.2 μm to 2.0 μm, or 0.2 μm to 1.2 μm.

就分散性及成本的觀點而言,小徑銅粒子的最大徑(小徑銅粒子中具有最大粒徑的銅粒子的該粒徑)可為0.1 μm以上、0.15 μm以上或0.2 μm以上。就顯現出充分的燒結性的觀點而言,小徑銅粒子的最大徑可為2.0 μm以下、1.5 μm以下或1.2 μm以下。小徑銅粒子的最大徑是與大徑銅粒子的最大徑同樣地測定而得的值。From the perspective of dispersibility and cost, the maximum diameter of small-diameter copper particles (the diameter of the copper particle with the largest diameter among small-diameter copper particles) can be 0.1 μm or more, 0.15 μm or more, or 0.2 μm or more. From the perspective of exhibiting sufficient sinterability, the maximum diameter of small-diameter copper particles can be 2.0 μm or less, 1.5 μm or less, or 1.2 μm or less. The maximum diameter of small-diameter copper particles is a value measured in the same manner as the maximum diameter of large-diameter copper particles.

就分散性及成本的觀點而言,小徑銅粒子的最小徑(小徑銅粒子中具有最小粒徑的銅粒子的該粒徑)可為0.04 μm以上、0.06 μm以上或0.1 μm以上。小徑銅粒子的最小徑與最大徑同樣地進行測定。From the perspective of dispersibility and cost, the minimum diameter of small-diameter copper particles (the diameter of the smallest copper particle among small-diameter copper particles) can be 0.04 μm or more, 0.06 μm or more, or 0.1 μm or more. The minimum diameter of small-diameter copper particles is measured in the same way as the maximum diameter.

小徑銅粒子的形狀可為例如球狀、塊狀、針狀、片狀、樹枝狀、大致球狀等。小徑銅粒子可為具有該些形狀的銅粒子的凝聚體。就分散性及填充性的觀點而言,小徑銅粒子的形狀可為球狀、大致球狀、片狀。就燃燒性的觀點、以及於大徑銅粒子為所述不定形時與大徑銅粒子的混合性變得良好的觀點而言,小徑銅粒子的形狀可為球狀或大致球狀。The shape of small-diameter copper particles can be, for example, spherical, blocky, needle-like, sheet-like, branch-like, or roughly spherical. Small-diameter copper particles can be aggregates of copper particles having these shapes. From the viewpoint of dispersibility and filling properties, the shape of small-diameter copper particles can be spherical, roughly spherical, or sheet-like. From the viewpoint of combustibility, and from the viewpoint that the mixing with large-diameter copper particles becomes better when the large-diameter copper particles are the aforementioned amorphous shapes, the shape of small-diameter copper particles can be spherical or roughly spherical.

就燒結體的接著力及形狀保持力優異的觀點而言,以銅粒子的總質量為基準,小徑銅粒子的含量可為10質量%以上、15質量%以上或20質量%以上。就提高空孔率及控制空孔尺寸的觀點而言,以銅粒子的總質量為基準,小徑銅粒子的含量可為60質量%以下、30質量%以下、27質量%以下或25質量%以下。就所述觀點而言,以銅粒子的總質量為基準,小徑銅粒子的含量可為10質量%~60質量%、15質量%~30質量%或20質量%~27質量%或20質量%~25質量%。From the viewpoint of excellent adhesion and shape retention of the sintered body, the content of small-diameter copper particles can be 10% by mass or more, 15% by mass or more, or 20% by mass or more, based on the total mass of copper particles. From the viewpoint of improving porosity and controlling void size, the content of small-diameter copper particles can be 60% by mass or less, 30% by mass or less, 27% by mass or less, or 25% by mass or less, based on the total mass of copper particles. From the aforementioned viewpoint, the content of small-diameter copper particles can be 10% by mass to 60% by mass, 15% by mass to 30% by mass, or 20% by mass to 27% by mass, or 20% by mass to 25% by mass, based on the total mass of copper particles.

就燒結體的接著力及形狀保持力優異的觀點而言,小徑銅粒子的含量相對於大徑銅粒子的含量的質量比(小徑銅粒子的含量/大徑銅粒子的含量)可為0.1以上、0.18以上或0.25以上。就提高空孔率及控制空孔尺寸的觀點而言,所述質量比(小徑銅粒子的含量/大徑銅粒子的含量)可為1.0以下、0.6以下或0.45以下。就所述觀點而言,所述質量比可為0.1~1.0、0.18~0.6或0.25~0.45。From the viewpoint of excellent adhesion and shape retention of the sintered body, the mass ratio of small-diameter copper particles to large-diameter copper particles (content of small-diameter copper particles/content of large-diameter copper particles) can be 0.1 or more, 0.18 or more, or 0.25 or more. From the viewpoint of improving porosity and controlling void size, the mass ratio (content of small-diameter copper particles/content of large-diameter copper particles) can be 1.0 or less, 0.6 or less, or 0.45 or less. From the aforementioned viewpoint, the mass ratio can be 0.1 to 1.0, 0.18 to 0.6, or 0.25 to 0.45.

就黏度調整變得容易的觀點及印刷性更優異的觀點而言,以銅糊的總質量為基準,銅粒子的含量可為70質量%以上、75質量%以上或80質量%以上。就黏度調整變得容易的觀點及印刷性更優異的觀點而言,以銅糊的總質量為基準,銅粒子的含量可為90質量%以下、88質量%以下或85質量%以下。就所述觀點而言,以銅糊的總質量為基準,銅粒子的含量可為70質量%~90質量%、75質量%~88質量%或80質量%~85質量%。From the perspective of easier viscosity adjustment and improved printability, the copper particle content can be 70% by mass or more, 75% by mass or more, or 80% by mass or more, based on the total mass of the copper paste. From the perspective of easier viscosity adjustment and improved printability, the copper particle content can be 90% by mass or less, 88% by mass or less, or 85% by mass or less, based on the total mass of the copper paste. From the aforementioned perspective, the copper particle content can be 70% to 90% by mass, 75% to 88% by mass, or 80% to 85% by mass, based on the total mass of the copper paste.

(熱分解性樹脂) 作為熱分解性樹脂,可使用具備可於燒結溫度下分解且無殘渣地分解的熱分解性的樹脂。熱分解性樹脂的95%熱分解溫度可為350℃以下、300℃以下或250℃以下。再者,所謂95%熱分解溫度,是指於熱重/差熱分析(Thermogravimetric/Differential Thermal Analysis,TG/DTA)測定中測定的95%重量減少溫度。該溫度是並非於如空氣般的氧化環境下,而是於含有氫、甲酸等的還原環境下或去除了氧的惰性氣體環境下測定而得的溫度。(Thermolytic Resins) As thermolytic resins, resins that decompose at sintering temperatures without residue can be used. The 95% thermal decomposition temperature of thermolytic resins can be below 350°C, below 300°C, or below 250°C. Furthermore, the 95% thermal decomposition temperature refers to the 95% weight reduction temperature measured in thermogravimetric/differential thermal analysis (TG/DTA). This temperature is not measured in an oxidizing environment like air, but in a reducing environment containing hydrogen, formic acid, etc., or in an inert gas environment where oxygen has been removed.

熱分解性樹脂的熱分解後的殘渣越少,銅粒子的燒結性越提高。相對於熱分解前的樹脂質量,燒結溫度下的殘渣的量(灰分)通常為5質量%以下,可為3質量%以下,就可獲得更高的燒結性的觀點而言,亦可為2質量%以下。熱分解性樹脂的熱分解後的殘渣量可作為於含3質量%~5質量%氫的鈍氣(氮或氬)中藉由熱分解性樹脂的TG/DTA於燒結溫度下保持燒結時間後的重量變化量來測定。再者,空氣中的TG/DTA測定中推進氧化分解,殘渣量與還原環境中的殘渣量相比會變少,因此欠佳。The less residue left after the thermal decomposition of a thermally decomposable resin, the better the sinterability of the copper particles. The amount of residue (ash content) at the sintering temperature relative to the resin mass before thermal decomposition is typically below 5% by mass, and can be below 3% by mass for even better sinterability, or even below 2% by mass. The amount of residue after the thermal decomposition of a thermally decomposable resin can be determined by measuring the weight change of the TG/DTA of the resin in a passivating atmosphere (nitrogen or argon) containing 3% to 5% by mass of hydrogen, after maintaining the sintering temperature for a specified time. Furthermore, the TG/DTA determination in air involves oxidative decomposition, resulting in less residue compared to that in a reducing environment, which is undesirable.

熱分解性樹脂相對於後述的分散介質而言可具有溶解性。作為於分散介質中具有溶解性的熱分解性樹脂,可列舉聚碳酸酯、聚(甲基)丙烯酸、聚(甲基)丙烯酸酯、聚酯等。該些中,就於有機溶媒中的溶解性、成本及熱分解性的觀點而言,可選擇聚甲基丙烯酸酯。再者,本說明書中,所謂「(甲基)丙烯酸」,是指丙烯酸及與其對應的甲基丙烯酸的至少一者。Thermally degradable resins may be soluble in the dispersion medium described later. Examples of thermally degradable resins that are soluble in the dispersion medium include polycarbonate, poly(meth)acrylic acid, poly(meth)acrylate, and polyester. Among these, poly(meth)acrylate is preferred from the perspectives of solubility in organic solvents, cost, and thermal degradability. Furthermore, in this specification, "(meth)acrylic acid" refers to at least one of acrylic acid and its corresponding methacrylic acid.

就進行印刷且進行乾燥後的形狀保持力優異的觀點而言,相對於銅粒子100質量份,熱分解性樹脂的含量可為1質量份以上、2質量份以上或3質量份以上。就黏度調整變得容易的觀點及燒結性優異的觀點而言,相對於銅粒子100質量份,熱分解性樹脂的含量可為20質量份以下、15質量份以下或12質量份以下。就所述觀點而言,相對於銅粒子100質量份,熱分解性樹脂的含量可為1質量份~20質量份、2質量份~15質量份或3質量份~12質量份。From the viewpoint of excellent shape retention after printing and drying, the content of thermally degradable resin can be 1 part by mass or more, 2 parts by mass or more, or 3 parts by mass or more, relative to 100 parts by mass of copper particles. From the viewpoint of easy viscosity adjustment and excellent sintering properties, the content of thermally degradable resin can be 20 parts by mass or less, 15 parts by mass or less, or 12 parts by mass or less, relative to 100 parts by mass of copper particles. From the aforementioned viewpoints, the content of thermally degradable resin can be 1 to 20 parts by mass, 2 to 15 parts by mass, or 3 to 12 parts by mass, relative to 100 parts by mass of copper particles.

(分散介質) 分散介質並無特別限定,例如可為揮發性的分散介質。作為揮發性的分散介質,例如可列舉:戊醇、己醇、庚醇、辛醇、癸醇、乙二醇、二乙二醇、丙二醇、丁二醇、α-萜品醇、二氫萜品醇、異冰片基環己醇(MTPH)等一元醇及多元醇類;乙二醇丁醚、乙二醇苯醚、二乙二醇甲醚、二乙二醇乙醚、二乙二醇丁醚、二乙二醇異丁醚、二乙二醇己醚、三乙二醇甲醚、二乙二醇二甲醚、二乙二醇二乙醚、二乙二醇二丁醚、二乙二醇丁基甲醚、二乙二醇異丙基甲醚、三乙二醇二甲醚、三乙二醇丁基甲醚、丙二醇丙醚、二丙二醇甲醚、二丙二醇乙醚、二丙二醇丙醚、二丙二醇丁醚、二丙二醇二甲醚、三丙二醇甲醚、三丙二醇二甲醚等醚類;乙二醇乙醚乙酸酯、乙二醇丁醚乙酸酯、二乙二醇乙醚乙酸酯、二乙二醇丁醚乙酸酯、二丙二醇甲醚乙酸酯(Dipropylene Glycol Methyl Ether Acetate,DPMA)、乳酸乙酯、乳酸丁酯、γ-丁內酯、碳酸伸丙酯等酯類;N-甲基-2-吡咯啶酮、N,N-二甲基乙醯胺、N,N-二甲基甲醯胺等酸醯胺;環己烷、辛烷、壬烷、癸烷、十一烷等脂肪族烴;苯、甲苯、二甲苯等芳香族烴;具有碳數1~18的烷基的硫醇類;具有碳數5~7的環烷基的硫醇類等。作為具有碳數1~18的烷基的硫醇類,例如可列舉:乙基硫醇、正丙基硫醇、異丙基硫醇、正丁基硫醇、異丁基硫醇、第三丁基硫醇、戊基硫醇、己基硫醇及十二基硫醇。作為具有碳數5~7的環烷基的硫醇類,例如可列舉:環戊基硫醇、環己基硫醇及環庚基硫醇。(Dispersion Medium) There are no particular limitations on the dispersion medium; for example, it can be a volatile dispersion medium. Examples of volatile dispersion media include: pentanol, hexanol, heptanol, octanol, decanol, ethylene glycol, diethylene glycol, propylene glycol, butanediol, α-terpineol, dihydroterpineol, isoborneol cyclohexanol (MTPH), and other monohydric and polyhydric alcohols; ethylene glycol butyl ether, ethylene glycol phenyl ether, diethylene glycol methyl ether, diethylene glycol ethyl ether, diethylene glycol butyl ether, diethylene glycol isobutyl ether, diethylene glycol hexyl ether, triethylene glycol methyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, and diethylene glycol. Ethers such as dibutyl ether, diethylene glycol butyl methyl ether, diethylene glycol isopropyl methyl ether, triethylene glycol dimethyl ether, triethylene glycol butyl methyl ether, propylene glycol propyl ether, dipropylene glycol methyl ether, dipropylene glycol ethyl ether, dipropylene glycol propyl ether, dipropylene glycol butyl ether, dipropylene glycol dimethyl ether, tripropylene glycol methyl ether, and tripropylene glycol dimethyl ether; ethylene glycol ethyl ether acetate, ethylene glycol butyl ether acetate, diethylene glycol ethyl ether acetate, diethylene glycol butyl ether acetate, and dipropylene glycol methyl ether acetate (Dipropylene glycol methyl ether acetate). Esters such as methyl ethyl ester (DPMA), ethyl lactate, butyl lactate, γ-butyrolactone, and propyl carbonate; acid amines such as N-methyl-2-pyrrolidone, N,N-dimethylacetamide, and N,N-dimethylformamide; aliphatic hydrocarbons such as cyclohexane, octane, nonane, decane, and undecane; aromatic hydrocarbons such as benzene, toluene, and xylene; thiols having alkyl groups with 1 to 18 carbon atoms; and thiols having cycloalkyl groups with 5 to 7 carbon atoms. Examples of thiols having alkyl groups with 1 to 18 carbon atoms include: ethyl thiol, n-propyl thiol, isopropyl thiol, n-butyl thiol, isobutyl thiol, tributyl thiol, pentyl thiol, hexyl thiol, and dodecyl thiol. Examples of thiols that are cycloalkyl groups having 5 to 7 carbon atoms include cyclopentyl thiols, cyclohexyl thiols, and cycloheptyl thiols.

相對於銅粒子100質量份,分散介質的含量可為例如5質量份~50質量份。若分散介質的含量為所述範圍內,則可將銅糊調整為更適當的黏度,另外不易阻礙銅粒子的燒結。For every 100 parts by mass of copper particles, the content of the dispersion medium can be, for example, 5 to 50 parts by mass. If the content of the dispersion medium is within the range described above, the copper paste can be adjusted to a more suitable viscosity, and the sintering of the copper particles will not be easily hindered.

(其他) 銅糊亦可進而包含銅粒子以外的其他金屬粒子。作為其他金屬粒子,例如可列舉:鎳、銀、金、鈀、鉑等粒子。以銅糊中所含的金屬粒子的總質量為基準,其他金屬粒子的含量可為0質量%,亦可為0質量%以上且未滿20質量%,亦可為0質量%~10質量%,亦可為0質量%~5質量%。再者,於銅糊包含其他金屬粒子的情況下,本說明書中,相對於銅粒子100質量份的含量可替換為相對於金屬粒子100質量份的含量,以銅粒子的總質量為基準的含量可替換為以金屬粒子的總質量為基準的含量。(Other) Copper paste may also contain other metal particles besides copper particles. Examples of other metal particles include nickel, silver, gold, palladium, and platinum. Based on the total mass of the metal particles in the copper paste, the content of other metal particles can be 0% by mass, or more than 0% by mass but less than 20% by mass, or 0% to 10% by mass, or 0% to 5% by mass. Furthermore, when the copper paste contains other metal particles, the content relative to 100 parts by mass of copper particles in this specification can be replaced with the content relative to 100 parts by mass of metal particles, and the content based on the total mass of copper particles can be replaced with the content based on the total mass of metal particles.

銅糊中視需要亦可適宜地添加有機酸(例如月桂酸)、有機胺等分散性提高劑、非離子系界面活性劑、氟系界面活性劑等濕潤性提高劑;矽酮油等消泡劑;無機離子交換體等離子捕捉劑等。As needed, dispersants such as organic acids (e.g., lauric acid), dispersants such as organic amines, wettability enhancers such as nonionic surfactants and fluorinated surfactants, defoamers such as silicone oil, and ion scavengers such as inorganic ion exchangers can also be added to the copper paste.

就印刷性的觀點而言,銅糊的黏度可為10 Pa·s~120 Pa·s。再者,所述黏度是藉由E型黏度計於25℃、轉速2.5 rpm的條件下測定而得的值。作為E型黏度計,例如可使用東機產業股份有限公司製造,產品名:黏度計(VISCOMETER)-TV33型黏度計。作為錐形轉子的測定用夾具,例如可適用3°×R14、SPP。From a printability perspective, the viscosity of the copper paste can range from 10 Pa·s to 120 Pa·s. Furthermore, this viscosity is measured using a Type E viscometer at 25°C and a rotation speed of 2.5 rpm. For example, a Type E viscometer can be used, such as the VISCOMETER-TV33 model manufactured by Toki Kogyo Co., Ltd. As a fixture for measuring tapered rotors, a 3°×R14, SPP material is suitable.

銅糊的觸變指數(Trixtropy Index)(以下,亦稱為TI值)可為2.0~20,可為3.0~15,亦可為4.0~10。若銅糊的TI值為所述範圍內,則銅糊容易因剪切力而低黏度化,因此於印刷前利用手動操作或攪拌裝置(例如自轉公轉型攪拌裝置(行星式真空攪拌機(Planetary Vacuum Mixer)ARV-310,新基(Thinky)股份有限公司製造)等)進行攪拌,藉此容易印刷。另外,於銅糊附著於作為被黏物的構件後,藉由靜置而黏度容易恢復,因此可抑制印刷物的過度的潤濕擴展。再者,TI值是使用利用E型黏度計於25℃、轉速0.5 rpm的條件下測定而得的黏度μ0.5 、以及於25℃、轉速5 rpm的條件下測定而得的黏度μ5 且利用下式算出的值。 TI值=μ0.55 The thixotropic index (TI value) of the copper paste can be 2.0–20, 3.0–15, or 4.0–10. If the TI value of the copper paste is within the range described above, the copper paste easily becomes less viscous due to shear force. Therefore, it is easily printed by stirring manually or with a stirring device (such as a planetary vacuum mixer ARV-310, manufactured by Thinky Co., Ltd.) before printing. In addition, after the copper paste adheres to the component that is to be bonded, its viscosity easily recovers by resting, thus suppressing excessive wetting and spreading of the printed material. Furthermore, the TI value is the viscosity μ <sub>0.5</sub> measured using a type E viscometer at 25°C and 0.5 rpm, and the viscosity μ <sub>5 </sub> measured at 25°C and 5 rpm, calculated using the following formula: TI value = μ<sub>0.5</sub> / μ<sub>5</sub>

所述銅糊可將大徑銅粒子、小徑銅粒子、熱分解性樹脂、分散介質及其他成分混合來製備。銅糊例如可藉由於使熱分解性樹脂溶解於分散介質中後,添加大徑銅粒子及小徑銅粒子進行分散處理來製備,亦可將使熱分解性樹脂溶解於分散介質中所得的溶液、與使大徑銅粒子及小徑銅粒子混合於分散介質中進行分散處理所得的分散液混合來製備。亦可於各成分的混合後進行攪拌處理。亦可藉由分級操作來調整分散液的最大徑。The copper paste can be prepared by mixing large-diameter copper particles, small-diameter copper particles, thermally degradable resin, a dispersion medium, and other components. For example, the copper paste can be prepared by dissolving the thermally degradable resin in a dispersion medium and then adding large-diameter and small-diameter copper particles for dispersion treatment. Alternatively, it can be prepared by mixing a solution obtained by dissolving the thermally degradable resin in a dispersion medium with a dispersion obtained by mixing large-diameter and small-diameter copper particles in a dispersion medium for dispersion treatment. The mixture can also be stirred after mixing. The maximum diameter of the dispersion can also be adjusted by fractionation.

分散處理可使用分散機或攪拌機進行。作為分散處理中可使用的分散機及攪拌機,例如可列舉:石川式攪拌機、希爾文森攪拌機(Silverson mixer)、空穴攪拌機(cavitation mixer)、自轉公轉型攪拌裝置、超薄膜高速旋轉式分散機、超音波分散機、擂潰機、雙軸混練機、珠磨機(beads mill)、球磨機(ball mill)、三輥研磨機(three-rod roll mill)、均質攪拌機(homomixer)、行星式混合機(planetary mixer)、超高壓型分散機及薄層剪切分散機。Dispersion processing can be carried out using a disperser or a mixer. Examples of dispersers and mixers that can be used in dispersion processing include: Ishikawa mixer, Silverson mixer, cavitation mixer, rotary mixer, ultra-thin film high-speed rotary disperser, ultrasonic disperser, pounder, twin-shaft mixer, bead mill, ball mill, three-rod roll mill, homogenizer, planetary mixer, ultra-high pressure disperser, and thin-layer shear disperser.

攪拌處理可使用攪拌機進行。作為攪拌處理中可使用的攪拌機,例如可列舉:石川式攪拌機、自轉公轉型攪拌裝置、擂潰機、雙軸混煉機、三輥研磨機及行星式混合機。Mixing can be performed using a mixer. Examples of mixers that can be used in mixing include: Ishikawa mixers, rotary mixers, pounders, twin-shaft mixers, three-roll mills, and planetary mixers.

分級操作例如可使用過濾、自然沈降、離心分離等來進行。過濾用過濾器(filter)例如可列舉:水梳、金屬篩網(metal mesh)、金屬過濾器(metal filter)及尼龍篩網(nylon mesh)。Classification operations can be carried out using methods such as filtration, natural sedimentation, and centrifugation. Examples of filters used for filtration include: water combs, metal mesh, metal filters, and nylon mesh.

<毛細結構的形成方法> 一實施形態的毛細結構的形成方法包括印刷銅糊的步驟及燒結該銅糊的步驟。於該方法中,可使用所述實施形態的銅糊。藉由燒結銅糊,可獲得含有銅糊的燒結體的毛細結構。<Method for Forming a Capillary Structure> A method for forming a capillary structure in one embodiment includes steps of printing copper paste and sintering the copper paste. In this method, the copper paste of the embodiment described above can be used. By sintering the copper paste, a capillary structure of a sintered body containing copper paste can be obtained.

銅糊的印刷方法並無特別限定。例如可使用網版印刷(screen printing)、轉印印刷、平版印刷(offset printing)、噴射印刷法(jet printing method)、分注器(dispenser)、噴射分注器(jet dispenser)、針分注器(needle dispenser)、缺角輪塗佈機(comma coater)、狹縫塗佈機(slit coater)、模塗機(die coater)、凹版塗佈機(gravure coater)、狹縫塗佈(slit coat)、凸版印刷、凹版印刷、凹版印刷(gravure printing)、模版印刷(stencil printing)、軟微影(soft lithography)、棒式塗佈(bar coat)、敷料器(applicator)、粒子堆積法、噴霧塗佈機(spray coater)、旋轉塗佈機(spin coater)、浸漬塗佈機(dip coater)、電沈積塗裝等來印刷銅糊。There are no particular restrictions on the printing method of copper paste. For example, you can use screen printing, transfer printing, offset printing, jet printing, dispenser, jet dispenser, needle dispenser, comma coater, slit coater, die coater, gravure coater, slit coat, letterpress printing, gravure printing, stencil printing, soft lithography, bar coat, applicator, particle stacking, spray coater, spin coater. Copper paste is printed using methods such as coating machines, dip coaters, and electroplating.

銅糊的燒結方法並無特別限定。例如可藉由使用加熱板、溫風乾燥機、溫風加熱爐、氮乾燥機、紅外線乾燥機、紅外線加熱爐、遠紅外線加熱爐、微波加熱裝置、雷射加熱裝置、電磁加熱裝置、加熱器加熱裝置、蒸氣加熱爐等對銅糊進行加熱處理(煆燒)而使銅糊燒結。There are no particular limitations on the sintering method for copper paste. For example, the copper paste can be sintered by heating it using a heating plate, a warm air dryer, a warm air furnace, a nitrogen dryer, an infrared dryer, an infrared furnace, a far-infrared furnace, a microwave heating device, a laser heating device, an electromagnetic heating device, a heater heating device, or a steam furnace.

就抑制所得的燒結體的氧化的觀點而言,加熱處理時的氣體環境可為無氧環境。就去除銅糊中的銅粒子的表面氧化物的觀點而言,加熱處理時的氣體環境可為還原環境。作為無氧環境,例如可列舉:氮、稀有氣體等環境、真空環境等。作為還原環境,例如可列舉:純氫氣環境、以合成氣體為代表的氫及氮的混合氣體環境、包含甲酸氣體的氮環境、氫及稀有氣體的混合氣體環境、包含甲酸氣體的稀有氣體環境等。From the perspective of suppressing the oxidation of the resulting sintered body, the gas environment during heating treatment can be an oxygen-free environment. From the perspective of removing surface oxides from copper particles in copper paste, the gas environment during heating treatment can be a reducing environment. Examples of oxygen-free environments include: nitrogen, rare gas environments, and vacuum environments. Examples of reducing environments include: pure hydrogen environments, mixed gas environments of hydrogen and nitrogen (represented by syngas), nitrogen environments containing formic acid gas, mixed gas environments of hydrogen and rare gases, and rare gas environments containing formic acid gas.

就減少對各構件的熱損傷及提高良率的觀點而言,加熱處理時的到達最高溫度可為150℃~700℃,亦可為200℃~600℃,亦可為250℃~550℃。若到達最高溫度為150℃以上,則存在如下傾向:於到達最高溫度保持時間為60分鐘以下燒結充分地進行。From the perspective of reducing heat damage to components and improving yield, the maximum temperature reached during heat treatment can be 150℃~700℃, 200℃~600℃, or 250℃~550℃. If the maximum temperature is above 150℃, there is a tendency for sintering to be fully carried out when the maximum temperature is held for less than 60 minutes.

就使分散介質全部揮發的觀點、以及提高良率的觀點而言,到達最高溫度保持時間可為1分鐘~60分鐘,亦可為1分鐘以上且未滿40分鐘,亦可為1分鐘以上且未滿30分鐘。From the perspective of ensuring complete evaporation of the dispersion medium and improving yield, the holding time at the highest temperature can be from 1 minute to 60 minutes, or more than 1 minute but less than 40 minutes, or more than 1 minute but less than 30 minutes.

所述毛細結構的形成方法亦可進而包括在燒結銅糊的步驟之前使銅糊乾燥的步驟。乾燥時的氣體環境可為大氣中,亦可為氮、稀有氣體等無氧環境中,亦可為氫、甲酸等還原環境中。乾燥方法可為利用常溫放置的乾燥,可為加熱乾燥,亦可為減壓乾燥。加熱乾燥及減壓乾燥中例如可使用加熱板(hot plate)、溫風乾燥機、溫風加熱爐、氮乾燥機、紅外線乾燥機、紅外線加熱爐、遠紅外線加熱爐、微波加熱裝置、雷射加熱裝置、電磁加熱裝置、加熱器加熱裝置、蒸氣加熱爐、熱板壓製裝置等。乾燥的條件(溫度及時間)可根據所使用的分散介質的種類及量而適宜調整。乾燥的條件(溫度及時間)例如可為以50℃~180℃乾燥1分鐘~120分鐘的條件。The method for forming the capillary structure may further include a step of drying the copper paste before sintering it. The gas environment during drying can be the atmosphere, an oxygen-free environment such as nitrogen or rare gases, or a reducing environment such as hydrogen or formic acid. The drying method can be room temperature drying, heated drying, or depressurized drying. Heated drying and depressurized drying may utilize, for example, hot plates, warm air dryers, warm air furnaces, nitrogen dryers, infrared dryers, infrared furnaces, far-infrared furnaces, microwave heating devices, laser heating devices, electromagnetic heating devices, heater heating devices, steam furnaces, hot plate pressing devices, etc. The drying conditions (temperature and time) can be adjusted according to the type and amount of dispersion medium used. For example, the drying conditions (temperature and time) can be 50°C to 180°C for 1 minute to 120 minutes.

根據以上說明的毛細結構的形成方法,使用銅糊並藉由印刷來形成毛細結構,因此即使於毛細結構的形成面具有複雜的形狀(例如凹凸形狀、彎曲形狀、具有V字狀的凹部的形狀等)的情況下,亦可簡單地形成毛細結構。另外,於所述方法中,由於銅粒子含有大徑銅粒子及小徑銅粒子,因此於燒結時即使不進行加壓亦可獲得充分的燒結性及形狀保持性。因此,所述方法與先前的需要加壓的方法相比,可獲得高生產性。另外,於所述方法中,由於可形成的毛細結構的形狀的自由度高,因此例如可形成膜更薄的毛細結構,另外,容易形成更複雜的形狀(例如具有曲線部分的形狀)的毛細結構。According to the capillary formation method described above, capillary structures are formed using copper paste and by printing. Therefore, even when the formation surface of the capillary structure has complex shapes (e.g., concave-convex shapes, curved shapes, shapes with V-shaped concave portions, etc.), capillary structures can be easily formed. Furthermore, in this method, since the copper particles contain both large-diameter and small-diameter copper particles, sufficient sinterability and shape retention can be obtained during sintering even without pressure. Therefore, this method offers higher productivity compared to previous methods that required pressure. Furthermore, in the method, since the shape of the capillary structure that can be formed has a high degree of freedom, for example, a thinner capillary structure can be formed, and it is also easy to form a more complex capillary structure (e.g., a shape with curved portions).

<熱管> 一實施方式的熱管包括含有所述實施形態的銅糊的燒結體的毛細結構。除了毛細結構以外的熱管的結構可設為與現有公知的熱管(蒸氣室等)相同的結構。含有銅糊的燒結體的毛細結構可按照所述實施方式的毛細結構的形成方法形成。即,熱管的製造方法除了毛細結構的形成步驟以外,可利用與現有公知的熱管相同的方法製造。以下,一邊參照圖式一邊對熱管的一例進行說明。<Heat Pipe> One embodiment of the heat pipe includes a capillary structure of a sintered body containing copper paste of the embodiment. The structure of the heat pipe, except for the capillary structure, can be the same as that of conventionally known heat pipes (such as steam chambers). The capillary structure of the sintered body containing copper paste can be formed according to the method for forming the capillary structure of the embodiment. That is, the heat pipe can be manufactured using the same method as conventionally known heat pipes, except for the step of forming the capillary structure. Hereinafter, an example of a heat pipe will be described with reference to the drawings.

圖1是表示一實施形態的熱管的示意剖面圖。熱管1包括劃定密閉空間S的容器(container)2、容納於容器2的空間S中的毛細結構3及工作液體。於由容器2劃定的空間S中,以藉由熱源而氣化的工作液體的氣化物可流通的方式確保了氣相空間A。雖未圖示,但工作液體例如是水或有機溶媒,含浸於毛細結構3中。Figure 1 is a schematic cross-sectional view of a heat pipe embodiment. The heat pipe 1 includes a container 2 defining a sealed space S, a capillary structure 3 contained within the space S of the container 2, and a working fluid. A vapor phase space A is ensured within the space S defined by the container 2 by allowing the vaporized working fluid, which is vaporized by a heat source, to flow through. Although not shown, the working fluid, such as water or an organic solvent, is contained within the capillary structure 3.

容器2的形狀並無特別限定,可為管狀、平板狀等。於容器2的形狀為平板狀的情況下,例如可利用以下方法形成熱管。首先,於表面形成有凹部的第一基材的該凹部印刷銅糊,而形成毛細結構。繼而,將第一基材及表面形成有凹部的第二基材以凹部彼此相向的方式貼合。藉此,可獲得包括平板狀的容器2的熱管1。The shape of container 2 is not particularly limited and can be tubular, flat, etc. When container 2 is flat, a heat pipe can be formed, for example, using the following method: First, copper paste is printed into the recesses of a first substrate with recesses formed on its surface to form a capillary structure. Then, the first substrate and a second substrate with recesses formed on its surface are bonded together with the recesses facing each other. This yields a heat pipe 1 comprising a flat container 2.

就熱傳導率、耐壓性、氣體遮蔽性、加工性等觀點而言,容器2的材質可為金屬。作為金屬,例如可使用銅、銅合金、鋁、不鏽鋼、碳鋼等。From the perspectives of thermal conductivity, pressure resistance, gas shielding, and processability, the material of container 2 can be metal. For example, copper, copper alloys, aluminum, stainless steel, carbon steel, etc. can be used as metals.

毛細結構3配置於容器2的內壁面。毛細結構3是將所述實施形態的銅糊燒結而成的多孔質體。因此,毛細結構3含有所述實施形態的銅糊的燒結體。毛細結構3可與容器2一體形成,亦可為預先形成者(另外配置者)。The capillary structure 3 is disposed on the inner wall surface of the container 2. The capillary structure 3 is a porous body formed by sintering the copper paste of the embodiment described above. Therefore, the capillary structure 3 contains a sintered body of the copper paste of the embodiment described above. The capillary structure 3 can be integrally formed with the container 2, or it can be pre-formed (disposed separately).

就毛細管現象引起的工作液體的流通容易性的觀點而言,以毛細結構的體積為基準,毛細結構3的空孔率(燒結體的空孔率)可為40體積%以上、45體積%以上或50體積%以上。毛細結構3的空孔率(燒結體的空孔率)並無特別限定,例如以毛細結構的體積為基準,可為90體積%以下或80體積%以下。即,例如以毛細結構的體積為基準,毛細結構3的空孔率(燒結體的空孔率)可為40體積%~80體積%、45體積%~80體積%或50體積%~80體積%。空孔率可藉由使用圖像解析軟體對利用掃描式電子顯微鏡、掃描式離子顯微鏡等觀察而得的毛細結構的剖面圖像進行分析而獲得。另外,於知曉構成毛細結構的金屬材料的組成的情況下,亦可根據毛細結構的體積與毛細結構中的金屬的體積之差求出。金屬的體積例如可藉由如下方式獲得:根據毛細結構的體積及利用精密天平測定的毛細結構的重量求出視密度M1 (g/cm3 ),使用所求出的M1 與金屬的密度(例如銅的密度為8.96 g/cm3 ),根據下述式(A)來求出體積比例。 金屬的體積比例(體積%)=[(M1 )/(金屬的密度)]×100···(A)From the perspective of the ease of flow of the working fluid caused by capillary phenomenon, based on the volume of the capillary structure, the porosity of the capillary structure 3 (porosity of the sintered body) can be 40% or more, 45% or more, or 50% or more. The porosity of the capillary structure 3 (porosity of the sintered body) is not particularly limited; for example, based on the volume of the capillary structure, it can be 90% or less or 80% or less. That is, for example, based on the volume of the capillary structure, the porosity of the capillary structure 3 (porosity of the sintered body) can be 40% to 80% or 45% to 80% or 50% to 80% of the volume. Porosity can be obtained by analyzing cross-sectional images of capillary structures observed using scanning electron microscopes, scanning ion microscopes, etc., using image analysis software. Alternatively, if the composition of the metallic material constituting the capillary structure is known, it can be calculated based on the difference between the volume of the capillary structure and the volume of the metal within it. The volume of the metal can be obtained, for example, by calculating the apparent density M1 (g/ cm³ ) based on the volume of the capillary structure and its weight measured using a precision balance. Using the calculated M1 and the density of the metal (e.g., the density of copper is 8.96 g/ cm³ ), the volume ratio is calculated according to the following formula (A). The volume percentage of a metal (volume %) = [( M1 ) / (density of the metal)] × 100··· (A)

就流動阻力與毛細管力的平衡變得良好的觀點而言,毛細結構3的平均空孔徑可為10 μm以上、15 μm以上或20 μm以上。就流動阻力與毛細管力的平衡變得良好的觀點及毛細結構的薄化變得容易的觀點而言,毛細結構3的平均空孔徑可為50 μm以下、45 μm以下或40 μm以下。就所述觀點而言,毛細結構3的平均空孔徑可為10 μm~50 μm、15 μm~45 μm或20 μm~40 μm。平均空孔徑可藉由對注型剖面加工後的剖面的SEM圖像中的空孔部進行測長而求出。From the perspective of achieving a good balance between flow resistance and capillary force, the average pore diameter of the capillary structure 3 can be 10 μm or more, 15 μm or more, or 20 μm or more. From the perspective of achieving a good balance between flow resistance and capillary force and facilitating the thinning of the capillary structure, the average pore diameter of the capillary structure 3 can be 50 μm or less, 45 μm or less, or 40 μm or less. From the aforementioned perspective, the average pore diameter of the capillary structure 3 can be 10 μm to 50 μm, 15 μm to 45 μm, or 20 μm to 40 μm. The average pore diameter can be determined by measuring the length of the pore portion in an SEM image of the cross-section after the injection molding process.

毛細結構3於藉由對注型剖面加工後的剖面的SEM圖像中的空孔部進行測長而求出的空孔徑分佈中可具有兩個以上的波峰。具體而言,例如可於0.5 μm~5 μm具有第一波峰,於10 μm~50 μm具有第二波峰。於具有此種空孔波峰的情況下,存在如下傾向:可藉由具有第一波峰的小的細孔獲得強大的毛細管力,可藉由具有第二波峰的大的空孔迅速地進行大量的液體輸送。The capillary structure 3, whose pore diameter distribution is determined by measuring the length of the pore portion in the SEM image of the cross-section after injection molding, may have two or more peaks. Specifically, for example, a first peak may be present at 0.5 μm to 5 μm, and a second peak may be present at 10 μm to 50 μm. In the case of such pore peaks, there is a tendency for strong capillary force to be obtained through small pores with the first peak, and for large pores with the second peak to be used for rapid transport of large quantities of liquid.

以上說明的熱管例如於容器的外壁設置有散熱構件的狀態下使用。熱管例如可較佳地用作智慧型手機、平板電腦等小型資訊設備用散熱器件。 [實施例]The heat pipes described above are used, for example, when a heat dissipation component is installed on the outer wall of a container. Heat pipes are particularly suitable as heat dissipation devices for small information devices such as smartphones and tablets. [Example]

以下,使用實施例及比較例來對本發明的內容進行更詳細的說明,但本發明並不限定於以下的實施例。The present invention will be described in more detail below using embodiments and comparative examples, but the present invention is not limited to the following embodiments.

<實施例1> [銅糊的製備] 將作為分散介質的二氫萜品醇(日本萜烯化學股份有限公司製造)11.7 g、作為熱分解性樹脂的KFA-2000(丙烯酸系樹脂的二氫萜品醇溶液,固體成分量:24質量%,95%熱分解溫度=330℃,互應化學製造)3.0 g、及作為添加劑(分散性提高劑)的月桂酸0.3 g放入至塑膠瓶中,利用自轉公轉型攪拌裝置(行星式真空攪拌機(Planetary Vacuum Mixer)ARV-310,新基(Thinky)股份有限公司製造)進行混合。向該分散液中添加作為小徑銅粒子的CH-0200(三井金屬礦業股份有限公司製造,體積平均粒徑:0.36 μm)17.0 g及作為大徑銅粒子的CuAtW-250(福田金屬箔粉工業製造,體積平均粒徑:27 μm)68 g,使用自轉公轉型攪拌裝置(行星式真空攪拌機(Planetary Vacuum Mixer)ARV-310,新基(Thinky)股份有限公司製造)以2000 rpm攪拌1分鐘。然後,利用藥勺將整體攪拌一次,確認並無固體物,於減壓下,以2000 rpm攪拌1分鐘,獲得銅糊。再者,CuAtW-250具有不定形,振實密度為3.9 g/cm3 。另外,銅糊的黏度為32 Pa·s。黏度使用安裝有SPP轉子的E型黏度計(黏度計(VISCOMETER)TV-33 東機產業製造),於溫度25℃下、轉速2.5轉/min的條件下進行測定。黏度值是自測定開始經過144秒後的黏度值(JIS3284)。<Example 1> [Preparation of Copper Paste] 11.7 g of dihydroterpene alcohol (manufactured by Japan Terpene Chemical Co., Ltd.) as a dispersion medium, 3.0 g of KFA-2000 (dihydroterpene alcohol solution of acrylic resin, solid content: 24% by mass, 95% thermal decomposition temperature = 330°C, manufactured by Mutual Chemicals) as a thermally decomposable resin, and 0.3 g of lauric acid as an additive (dispersibility improver) were placed into a plastic bottle and mixed using a rotational stirring device (planetary vacuum mixer ARV-310, manufactured by Thinky Co., Ltd.). 17.0 g of CH-0200 (manufactured by Mitsui Metals Industry Co., Ltd., volume average particle size: 0.36 μm) as small-diameter copper particles and 68 g of CuAtW-250 (manufactured by Fukuda Metal Foil Powder Industry Co., Ltd., volume average particle size: 27 μm) as large-diameter copper particles were added to the dispersion. The mixture was stirred at 2000 rpm for 1 minute using a planetary vacuum mixer (ARV-310, manufactured by Thinky Co., Ltd.). Then, the mixture was stirred once with a spatula to confirm the absence of solids. Under reduced pressure, the mixture was stirred at 2000 rpm for 1 minute to obtain a copper paste. Furthermore, CuAtW-250 is amorphous with a tap density of 3.9 g/ cm³ . Additionally, the copper paste has a viscosity of 32 Pa·s. Viscosity was measured using an E-type viscometer (VISCOMETER TV-33, manufactured by Toki Kogyo) equipped with an SPP rotor at a temperature of 25°C and a rotation speed of 2.5 rpm. The viscosity value is the value after 144 seconds from the start of measurement (JIS 3284).

<實施例2~實施例4及比較例1> 將大徑銅粒子的調配量及小徑銅粒子的調配量變更為表1所示的量,除此以外,與實施例1同樣地製作銅糊。再者,本實施例中,表中所示的調配量(單位:質量份)為固體成分量。<Examples 2 to 4 and Comparative Example 1> The amounts of large-diameter copper particles and small-diameter copper particles were changed to those shown in Table 1. Otherwise, the copper paste was prepared in the same manner as in Example 1. Furthermore, in this embodiment, the amounts (unit: parts by mass) shown in the table are the amounts of solid components.

<實施例5> 將大徑銅粒子的調配量、小徑銅粒子及月桂酸的調配量變更為表2所示的量,作為分散介質,使用表2所示的量的萜品醇C(α-萜品醇、β-萜品醇、γ-萜品醇的異構體混合物,日本萜烯化學股份有限公司製造,商品名)代替二氫萜品醇,且作為熱分解性樹脂,使用表2所示的量的M-6003(分子量Mn=189300,95%熱分解溫度=284℃,根上工業股份有限公司製造,商品名)的溶液(藉由於規定量的萜品醇C中溶解M-6003而製作的溶液)代替KFA-2000,除此以外,與實施例1同樣地製作銅糊。與實施例1同樣地測定的銅糊的黏度為63 Pa·s。<Example 5> The amounts of large-diameter copper particles, small-diameter copper particles, and lauric acid were changed to those shown in Table 2. As a dispersion medium, the amount of terpineol C (a mixture of isomers of α-terpineol, β-terpineol, and γ-terpineol, manufactured by Nippon Terpene Chemical Co., Ltd., trade name) shown in Table 2 was used instead of dihydroterpineol. As a thermally decomposable resin, a solution of M-6003 (molecular weight Mn=189300, 95% thermal decomposition temperature=284°C, manufactured by Nejou Kogyo Co., Ltd., trade name) shown in Table 2 was used instead of KFA-2000. Otherwise, the copper paste was prepared in the same manner as in Example 1. The viscosity of the copper paste was measured to be 63 Pa·s, the same as in Example 1.

<實施例6> 將大徑銅粒子的調配量及月桂酸的調配量變更為表2所示的量,作為小徑銅粒子,使用表2所示的量的CT-0500(三井金屬礦業股份有限公司製造,體積平均粒徑:1.11 μm)代替CH-0200,作為分散介質,使用表2所示的量的萜品醇C(α-萜品醇、β-萜品醇、γ-萜品醇的異構體混合物,日本萜烯化學股份有限公司製造,商品名)代替二氫萜品醇,且作為熱分解性樹脂,使用表2所示的量的M-6003(分子量Mn=189300,95%分解溫度=284℃,根上工業股份有限公司製造,商品名)的溶液(藉由於規定量的萜品醇C中溶解M-6003而製作的溶液)代替KFA-2000,除此以外,與實施例1同樣地製作銅糊。<Example 6> The amounts of large-diameter copper particles and lauric acid were changed to those shown in Table 2 to create small-diameter copper particles. The amounts of CT-0500 (manufactured by Mitsui Metals Industry Co., Ltd., volume average particle size: 1.11) shown in Table 2 were used. Instead of CH-0200, terpineol C (a mixture of isomers of α-terpineol, β-terpineol, and γ-terpineol, manufactured by Nippon Terpene Chemical Co., Ltd., trade name) was used as the dispersion medium, and instead of dihydroterpineol, the amount of terpineol C shown in Table 2 was used as the thermally decomposable resin, and instead of KFA-2000, a solution of M-6003 (molecular weight Mn=189300, 95% decomposition temperature=284°C, manufactured by Nejou Kogyo Co., Ltd., trade name) was used. Otherwise, the copper paste was prepared in the same manner as in Example 1.

<實施例7> 將作為分散介質的萜品醇C(α-萜品醇、β-萜品醇、γ-萜品醇的異構體混合物,日本萜烯化學股份有限公司製造,商品名)162.4 g與作為熱分解性樹脂的M-6003(根上工業製造)26.6 g混合,利用使用了攪拌翼的混合轉子攪拌3小時而使其完全溶解,從而獲得樹脂溶液。向該樹脂溶液中加入作為小徑銅粒子的CT-0500(三井金屬礦業股份有限公司製造,體積平均粒徑:1.11 μm)162.0 g,使用行星式混合機(T.k。HIVIS MIX fmodel.03,譜萊密克司(PRIMIX)製造),以50 rpm混合15分鐘。然後,添加作為大徑銅粒子的CuAtW-250(福田金屬箔粉工業製造,體積平均粒徑:27 μm)567 g、以及FC-115(樹狀銅粉,福田金屬箔粉工業製造,體積平均粒徑:21 μm、振實密度:1.2 g/cm3 )81 g,使用行星式混合機,以50 rpm混合15分鐘。進而進行減壓,以50 rpm混合15分鐘,而獲得銅糊。與實施例1同樣地測定的銅糊的黏度為50 Pa·s。<Example 7> 162.4 g of terpineol C (a mixture of isomers of α-terpineol, β-terpineol, and γ-terpineol, manufactured by Nippon Terpene Chemical Co., Ltd., trade name) as a dispersion medium was mixed with 26.6 g of M-6003 (manufactured by Negami Kogyo) as a thermally decomposable resin. The mixture was stirred for 3 hours using a mixing rotor with stirring blades until completely dissolved, thereby obtaining a resin solution. 162.0 g of CT-0500 (manufactured by Mitsui Metals Mining Co., Ltd., volume average particle size: 1.11 μm) as small-diameter copper particles was added to the resin solution, and the mixture was mixed at 50 rpm for 15 minutes using a planetary mixer (Tk. HIVIS MIX fmodel.03, manufactured by PRIMIX). Then, 567 g of CuAtW-250 (manufactured by Fukuda Metal Foil Powder Industry, volume average particle size: 27 μm) and 81 g of FC-115 (dendritic copper powder, manufactured by Fukuda Metal Foil Powder Industry, volume average particle size: 21 μm, tap density: 1.2 g/ cm³ ) as large-diameter copper particles were added, and the mixture was mixed at 50 rpm for 15 minutes using a planetary mixer. The mixture was then depressurized and mixed at 50 rpm for 15 minutes to obtain a copper paste. The viscosity of the copper paste was measured to be 50 Pa·s, as in Example 1.

<比較例2> 將大徑銅粒子、小徑銅粒子及月桂酸的調配量變更為表2所示的值,作為分散介質,使用表2所示的量的萜品醇C(α-萜品醇、β-萜品醇、γ-萜品醇的異構體混合物,日本萜烯化學股份有限公司製造,商品名)代替二氫萜品醇,且不使用熱分解性樹脂(KFA-2000),除此以外,與實施例1同樣地製作銅糊。<Comparative Example 2> The amounts of large-diameter copper particles, small-diameter copper particles, and lauric acid were changed to the values shown in Table 2 as the dispersion medium. The amount of terpineol C (a mixture of isomers of α-terpineol, β-terpineol, and γ-terpineol, manufactured by Nippon Terpene Chemical Co., Ltd., trade name) shown in Table 2 was used instead of dihydroterpineol, and thermally decomposable resin (KFA-2000) was not used. Otherwise, the copper paste was prepared in the same manner as in Example 1.

<比較例3及比較例4> 使用MA-C25(三井金屬礦業股份有限公司製造,體積平均粒徑:8 μm)或1400YF(三井金屬礦業股份有限公司製造,體積平均粒徑:5 μm)代替作為大徑銅粒子的CuAtW-250(福田金屬箔粉工業製造,體積平均粒徑:27 μm),除此以外,與實施例6同樣地製作銅糊。<Comparative Examples 3 and 4> MA-C25 (manufactured by Mitsui Metals Co., Ltd., volume average particle size: 8 μm) or 1400YF (manufactured by Mitsui Metals Co., Ltd., volume average particle size: 5 μm) was used instead of CuAtW-250 (manufactured by Fukuda Metal Foil Powder Industry Co., Ltd., volume average particle size: 27 μm) as the large-diameter copper particles. Otherwise, the copper paste was prepared in the same manner as in Example 6.

<評價> [銅糊的印刷性評價(1)] 將霍爾槽(Hull cell)銅板3等分,準備縱30 mm×橫67 mm×厚300 μm的銅板。於該銅板上載置設置有2處25 mm×5 mm的開口的厚度70 μm的SUS遮罩,使用金屬刮漿板印刷銅糊。此時,將可獲得無飛白、斑點、且均勻厚度的塗佈面的情況設為印刷性A,將可獲得有幾條條紋狀的飛白及/或斑點的塗佈面的情況設為印刷性B,將於塗佈面的整個面產生了可看見基板的程度的飛白及/或斑點的情況設為印刷性C。作為印刷性(1),將結果示於表1及表2中。<Evaluation> [Evaluation of the printability of copper paste (1)] A Hull cell copper plate was divided into 3 equal parts, and a copper plate with a length of 30 mm × width of 67 mm × thickness of 300 μm was prepared. A SUS mask with a thickness of 70 μm and two openings of 25 mm × 5 mm was placed on the copper plate, and copper paste was printed using a metal squeegee. At this time, the case in which a coating surface with no fly-white, spots and uniform thickness can be obtained is defined as printability A, the case in which a coating surface with several stripes of fly-white and/or spots can be obtained is defined as printability B, and the case in which fly-white and/or spots to the extent that the substrate can be seen on the entire surface of the coating surface is defined as printability C. As for printability (1), the results are shown in Tables 1 and 2.

[銅糊的印刷性評價(2)] 將銅糊放入至武藏高科技(Musashi Engineering)股份有限公司製造的5 mL塑膠注射器中。將裝有銅糊的注射器設置於空壓分配器(ML-505X,武藏高科技(Musashi Engineering)製造),於注射器的前端安裝寬幅印刷用針,於1 kgf/cm2 (=98 kPa)的壓力下噴出至銅板(將霍爾槽銅板3等分而成者,縱30 mm×橫67 mm×厚300 μm)上。此時,將可連續且均勻地噴出並進行印刷的情況設為印刷性A,將噴出為間歇性或非常慢的情況設為印刷性B,將無法噴出或於噴出過程中停止噴出的情況設為印刷性C。作為印刷性(2),將結果示於表1及表2中。[Evaluation of the printability of copper paste (2)] Copper paste was placed into a 5 mL plastic syringe manufactured by Musashi Engineering Co., Ltd. The syringe containing copper paste was placed in an air compressor (ML-505X, manufactured by Musashi Engineering), and a wide printing needle was installed at the front end of the syringe. The paste was sprayed onto a copper plate (a Hall channel copper plate divided into 3 equal parts, 30 mm in length × 67 mm in width × 300 μm in thickness) under a pressure of 1 kgf/cm 2 (=98 kPa). At this point, the situation where printing can be carried out continuously and uniformly is defined as printability A, the situation where printing is intermittent or very slow is defined as printability B, and the situation where printing cannot be carried out or stops during the printing process is defined as printability C. As for printability (2), the results are shown in Tables 1 and 2.

[燒結前形狀保持性評價] 利用70 μm厚的鏤花模版(stencil plate)印刷實施例及比較例的銅糊,並進行乾燥。藉由利用手指摩擦所得的燒結前的印刷物,評價燒結前的形狀保持性。將即使利用手指摩擦亦不會破壞印刷形狀的情況設為燒結前形狀保持性A,將利用手指摩擦時印刷物破壞成粉狀而無法維持形狀的情況設為燒結前形狀保持性C。將結果示於表1及表2中。[Evaluation of Shape Retention Before Sintering] Copper paste for both the experimental and comparative examples was printed using a 70 μm thick stencil plate and then dried. The shape retention before sintering was evaluated by examining the prints obtained through finger rubbing. Shape retention before sintering was defined as A, where the print shape remained intact even with finger rubbing; and C, where the print broke into powder and could not maintain its shape when rubbed with a finger. The results are shown in Tables 1 and 2.

[銅糊的煆燒] 將印刷有所述銅糊的印刷性評價(1)及(2)中獲得的銅糊的銅板載置於加熱至90℃的加熱板上,於空氣中乾燥10分鐘,製成煆燒樣品。將樣品載置於管狀爐(AVC股份有限公司製造)的玻璃托盤上,設置於管狀爐中。於減壓後,流通氫100 sccm及氮900 sccm,恢復至常壓後,於600℃、升溫20分鐘、保持60分鐘的條件下進行了煆燒。然後,停止氣體,一邊減壓一邊強制空冷,冷卻30分鐘以上。於利用氬氣恢復至常壓後,將煆燒後的樣品取出至空氣中。藉此,獲得銅糊的燒結體。於以下的評價中,使用了利用印刷性評價(1)中獲得的銅糊而獲得的樣品(燒結體)。[Calming of Copper Paste] A copper plate printed with the copper paste obtained in the printability evaluations (1) and (2) was placed on a heating plate heated to 90°C and dried in air for 10 minutes to prepare a calcination sample. The sample was placed on a glass tray of a tubular furnace (manufactured by AVC Corporation) and placed in the tubular furnace. After depressurization, hydrogen was passed through at 100 sccm and nitrogen at 900 sccm. After returning to atmospheric pressure, calcination was carried out at 600°C for 20 minutes and maintained for 60 minutes. Then, the gas was stopped, and forced air cooling was performed while depressurization for more than 30 minutes. After restoring to normal pressure using argon, the calcined sample was taken out into the air. In this way, a sintered body of copper paste was obtained. The sample (sintered body) obtained using the copper paste obtained in the printability evaluation (1) was used in the following evaluation.

[密接性評價(膠帶剝離試驗)] 於所述獲得的燒結體上貼附米其邦(Nichiban)股份有限公司製造的寬16 mm的玻璃膠帶(Cellotape)(註冊商標),利用指尖好生地摩擦膠帶約10秒。然後,於30秒以上且5分鐘以內,以儘量接近60°的角度抓住膠帶的端部,於0.5秒~1.0秒內撕下,確認膠帶上的附著物。將無附著物的情況判定為A,將部分有少量的附著物的情況判定為B,將整個面生成附著物的情況判定為C。將結果示於表1及表2中。[Adhesion Evaluation (Tape Peeling Test)] A 16 mm wide glass tape (Cellotape, registered trademark) manufactured by Nichiban Co., Ltd. was applied to the obtained sintered body. The tape was rubbed vigorously with fingertips for approximately 10 seconds. Then, after 30 seconds to 5 minutes, the end of the tape was grasped at an angle as close to 60° as possible and peeled off within 0.5 to 1.0 seconds. The adhesion on the tape was then examined. No adhesion was classified as A, a small amount of adhesion was classified as B, and adhesion formed on the entire surface was classified as C. The results are shown in Tables 1 and 2.

[空孔率的測定] 將所述獲得的樣品放入至塑膠杯中,流入注型樹脂(愛坡曼特(epomount),立發科技(Refine Tec)股份有限公司製造),於真空乾燥器內靜置,進行減壓而加以脫泡。然後,於室溫下放置10小時而使注型樹脂硬化。使用裝有樹脂黏接磨輪的立發鋸·艾克賽爾(Refine Saw Excel)(立發科技(Refine Tec)股份有限公司製造),於注型的樣品的要觀察的剖面附近切斷。利用裝有耐水研磨紙(碳馬克紙(carbon Mac paper),立發科技(Refine Tec)股份有限公司製造)的研磨裝置(立發拋光機(Refine Polisher)Hv,立發科技(Refine Tec)股份有限公司製造)切削剖面,使用氧化鋁研磨液進行拋光研磨。藉由SEM裝置(TM-1000,日立高新技術(Hitachi High-technologies)股份有限公司製造)於施加電壓15 kV、各種倍率下觀察該樣品。將觀察圖像藉由影像(Image)J進行二值化,根據白色部與黑色部的點數比求出燒結體(毛細結構)的空孔率(單位:體積%)。將結果示於表1及表2中。[Determination of Porosity] The obtained sample was placed in a plastic cup, and injection molding resin (epomount, manufactured by Refine Tec Co., Ltd.) was poured in. The sample was then placed in a vacuum dryer and depressurized to remove bubbles. The resin was then allowed to harden at room temperature for 10 hours. Using a Refine Saw Excel (manufactured by Refine Tec Co., Ltd.) equipped with a resin bonding grinding wheel, the sample was cut near the section to be observed. The sample was polished using a cutting profile cut with a polishing device (Refine Polisher Hv, manufactured by Refine Tec Co., Ltd.) equipped with water-resistant polishing paper (carbon mac paper, manufactured by Refine Tec Co., Ltd.). The sample was then polished using an alumina polishing slurry. The sample was observed using a SEM device (TM-1000, manufactured by Hitachi High-technologies Co., Ltd.) at an applied voltage of 15 kV and various magnifications. The observed images were binarized using ImageJ, and the porosity (unit: volume %) of the sintered body (capillary structure) was calculated based on the ratio of white to black area points. The results are shown in Tables 1 and 2.

[平均空孔徑的測定] 藉由影像(Image)J對所述[空孔率的測定]中取得的500倍的SEM像的空孔進行測長,藉由20處的平均,求出燒結體(毛細結構)的平均空孔徑。將結果示於表1及表2中。[Determination of Average Pore Diameter] The pore lengths of the 500x SEM images obtained in the [Determination of Porosity] section were measured using Image J. The average pore diameter of the sintered body (capillary structure) was determined by averaging 20 measurements. The results are shown in Tables 1 and 2.

[空孔徑分佈的測定] 使用所述[空孔率的測定]中取得的500倍的SEM像及10000倍的SEM像各3個圖像,藉由影像(Image)J對映在該圖像的空孔進行測長,藉由120處的尺寸分佈求出燒結體(毛細結構)的空孔徑分佈。圖2中表示實施例7的SEM圖像。圖2的(a)是500倍的SEM圖像,圖2的(b)是10000倍的SEM圖像。實施例1中,確認了於1.2 μm及20 μm處具有空孔徑波峰。實施例6中,確認了於1.0 μm及30 μm處具有空孔徑波峰。實施例7中,確認了於1.1 μm及30 μm處具有空孔徑波峰。[Determination of Pore Diameter Distribution] Using three 500x and three 10000x SEM images obtained in the [Determination of Porosity] section, the length of the pores mapped onto the image was measured using Image J, and the pore diameter distribution of the sintered body (capillary structure) was determined by the size distribution at 120°. Figure 2 shows the SEM image of Example 7. Figure 2(a) is a 500x SEM image, and Figure 2(b) is a 10000x SEM image. In Example 1, pore diameter peaks were confirmed at 1.2 μm and 20 μm. In Example 6, pore diameter peaks were confirmed at 1.0 μm and 30 μm. In Example 7, aperture peaks were confirmed at 1.1 μm and 30 μm.

[表1]    實施例1 實施例2 實施例3 實施例4 比較例1 大徑銅粒子 CuAtW-250 68 76.5 72.25 59.5 85 小徑銅粒子 CH-0200 17 8.5 12.75 25.5 0 熱分解性樹脂 KFA-2000 0.72 0.72 0.72 0.72 0.72 溶媒 二氫萜品醇 13.98 13.98 13.98 13.98 13.98 添加劑 月桂酸 0.3 0.3 0.3 0.3 0.3 印刷性(1) A A A A B 印刷性(2) A A A A B 燒結前形狀保持性 A A A A A 密接性 A B A A C 空孔率(體積%) 49 48 44 41 - 平均空孔徑(μm) 20 20 20 15 - [Table 1] Implementation Example 1 Implementation Example 2 Implementation Example 3 Implementation Example 4 Comparative example 1 Large-diameter copper particles CuAtW-250 68 76.5 72.25 59.5 85 Small-diameter copper particles CH-0200 17 8.5 12.75 25.5 0 Thermally decomposable resins KFA-2000 0.72 0.72 0.72 0.72 0.72 solvent dihydroterpenol 13.98 13.98 13.98 13.98 13.98 Additives Lauric acid 0.3 0.3 0.3 0.3 0.3 Printability (1) A A A A B Printability (2) A A A A B Shape retention before sintering A A A A A Tightness A B A A C Porosity (volume %) 49 48 44 41 - Average pore diameter (μm) 20 20 20 15 -

[表2]    實施例5 實施例6 實施例7 比較例2 比較例3 比較例4 大徑銅粒子 CuAtW-250 64.8 66.4 56.7 64.8 - - FC-115 - - 8.1 - - - 小徑銅粒子 CH-0200 16.2 - - 16.2 - - CT-0500 - 16.6 16.2 - 16.6 16.6 其他銅粒子 MA-C25 - - - - 66.4 - 1400YF - - - - - 66.4 熱分解性樹脂 KFA-2000 - - - - - - M-6003 3.8 2.38 2.66 - 2.38 2.38 溶媒 萜品醇C 14.82 14.535 16.245 18.62 14.535 14.535 添加劑 月桂酸 0.38 0.085 0.095 0.38 0.085 0.085 印刷性(1) A A A C A A 印刷性(2) A A A C A A 燒結前形狀保持性 A A A C A A 密接性 A B A - A A 空孔率(%) 48 36 50 - 30 34 平均空孔徑(μm) 25 30 30 - 1 3 [Table 2] Implementation Example 5 Implementation Example 6 Implementation Example 7 Comparative example 2 Comparative example 3 Comparative example 4 Large-diameter copper particles CuAtW-250 64.8 66.4 56.7 64.8 - - FC-115 - - 8.1 - - - Small-diameter copper particles CH-0200 16.2 - - 16.2 - - CT-0500 - 16.6 16.2 - 16.6 16.6 Other copper particles MA-C25 - - - - 66.4 - 1400YF - - - - - 66.4 Thermally decomposable resins KFA-2000 - - - - - - M-6003 3.8 2.38 2.66 - 2.38 2.38 solvent Terpineol C 14.82 14.535 16.245 18.62 14.535 14.535 Additives Lauric acid 0.38 0.085 0.095 0.38 0.085 0.085 Printability (1) A A A C A A Printability (2) A A A C A A Shape retention before sintering A A A C A A Tightness A B A - A A Porosity (%) 48 36 50 - 30 34 Average pore diameter (μm) 25 30 30 - 1 3

[毛細結構的製作] 關於使用實施例的銅糊製作的燒結體,確認了使用所得的燒結體構成熱管,燒結體作為毛細結構發揮功能。另一方面,使用比較例1的銅糊製作的燒結體如所述評價結果所示,密接性不充分,比較例1的銅糊不適合作為毛細結構形成用銅糊。另外,比較例2的銅糊缺乏印刷性,比較例2的銅糊無法製作燒結體。另外,關於使用比較例3及比較例4的銅糊製作的燒結體,燒結體未作為毛細結構發揮功能。[Capillary Structure Fabrication] Regarding the sintered body fabricated using the copper paste of the embodiments, it was confirmed that the resulting sintered body constitutes a heat pipe and functions as a capillary structure. On the other hand, as shown in the evaluation results above, the sintered body fabricated using the copper paste of Comparative Example 1 lacks sufficient adhesion, and the copper paste of Comparative Example 1 is unsuitable as a copper paste for capillary structure formation. In addition, the copper paste of Comparative Example 2 lacks printability, and the copper paste of Comparative Example 2 cannot be used to fabricate a sintered body. Furthermore, regarding the sintered bodies fabricated using the copper pastes of Comparative Examples 3 and 4, the sintered bodies did not function as a capillary structure.

1:熱管 2:容器 3:毛細結構 A:氣相空間 S:密閉空間1: Heat pipe 2: Container 3: Capillary structure A: Vapor phase space S: Enclosed space

圖1是表示一實施形態的熱管的示意剖面圖。 圖2的(a)、(b)是表示實施例的燒結體(毛細結構)的剖面掃描式電子顯微鏡(Scanning Electron Microscope,SEM)圖像的圖。Figure 1 is a schematic cross-sectional view showing one embodiment of the heat pipe. Figures 2(a) and (b) are scanning electron microscope (SEM) images showing cross-sectional views of the sintered body (capillary structure) of the embodiment.

1:熱管 1: Heat pipe

2:容器 2: Container

3:毛細結構 3: Capillary Structure

A:氣相空間 A: Vapor phase space

S:密閉空間 S: Enclosed space

Claims (8)

一種銅糊,是熱管的毛細結構形成用銅糊,含有銅粒子、熱分解性樹脂及分散介質,所述銅粒子含有體積平均粒徑為10μm~50μm的大徑銅粒子及體積平均粒徑為0.1μm~2.0μm的小徑銅粒子。 A copper paste for forming the capillary structure of a heat pipe, comprising copper particles, a thermally decomposable resin, and a dispersion medium, wherein the copper particles comprise large-diameter copper particles with a volume average particle size of 10 μm to 50 μm and small-diameter copper particles with a volume average particle size of 0.1 μm to 2.0 μm. 如請求項1所述的銅糊,其中所述熱分解性樹脂的95%熱分解溫度為350℃以下。 The copper paste as described in claim 1, wherein the thermally decomposable resin has a 95% thermal decomposition temperature below 350°C. 如請求項1或請求項2所述的銅糊,其中以所述銅粒子的總質量為基準,所述大徑銅粒子的含量為40質量%~90質量%,以所述銅粒子的總質量為基準,所述小徑銅粒子的含量為10質量%~60質量%。 The copper paste as described in claim 1 or claim 2, wherein, based on the total mass of the copper particles, the content of large-diameter copper particles is 40% to 90% by mass, and the content of small-diameter copper particles is 10% to 60% by mass, based on the total mass of the copper particles. 如請求項1或請求項2所述的銅糊,其中相對於所述銅粒子100質量份,所述熱分解性樹脂的含量為1質量份~20質量份。 The copper paste as described in claim 1 or claim 2, wherein the content of the thermally decomposable resin is 1 to 20 parts by mass relative to 100 parts by mass of the copper particles. 如請求項1或請求項2所述的銅糊,其中所述大徑銅粒子的振實密度為1.0g/cm3~4.5g/cm3The copper paste as described in claim 1 or claim 2, wherein the tap density of the large-diameter copper particles is 1.0 g/ cm³ to 4.5 g/ cm³ . 如請求項1或請求項2所述的銅糊,其中所述銅糊的黏度為10Pa.s~120Pa.s。 The copper paste as described in claim 1 or claim 2, wherein the viscosity of the copper paste is 10 Pa·s to 120 Pa·s. 一種毛細結構的形成方法,是熱管的毛細結構的形成方法,包括:印刷如請求項1至請求項6中任一項所述的銅糊的步驟;以 及燒結所述銅糊的步驟。 A method for forming a capillary structure, specifically a method for forming the capillary structure of a heat pipe, comprising: a step of printing copper paste as described in any one of claims 1 to 6; and a step of sintering the copper paste. 一種熱管,包括含有如請求項1至請求項6中任一項所述的銅糊的燒結體的毛細結構。 A heat pipe comprising a capillary structure of a sintered body containing copper paste as described in any one of claims 1 to 6.
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