TWI761140B - Memmory chip - Google Patents
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Abstract
Description
本發明是有關於一種記憶體裝置。 The present invention relates to a memory device.
物理不可仿製功能(Physically Unclonable Function,PUF)是記憶體晶片(memory chip)中一個重要的功能區塊,其主要的貢獻是在安全性方面。記憶體晶片的PUF區塊能夠為記憶體晶片提供安全且獨特的PUF編碼(PUF code),此編碼例如可以用做加密/解密時的安全金鑰。有鑑於使用者對於安全性越來越重視,PUF將成為未來記憶體晶片研發的重要課題之一。 Physically Unclonable Function (PUF) is an important functional block in a memory chip, and its main contribution is in terms of security. The PUF block of the memory chip can provide the memory chip with a secure and unique PUF code (PUF code), which can be used as a security key for encryption/decryption, for example. As users pay more and more attention to security, PUF will become one of the important topics in future memory chip research and development.
本發明實施例係揭露一種記憶體晶片。記憶體晶片包括一物理不可仿製區塊。物理不可仿製區塊包括多條位元線多條源極線及多個記憶胞。記憶胞劃分為多列及多行,其中第i行第j列的記憶胞耦接至第i條源極線及第j條位元線,i、j為正整數。對於各記憶胞,包括一電晶體、一第一電阻器及一第二電阻器,電晶體的一第一端耦接至對應於記憶胞的源極線,電晶體的一第二端耦接至對應於記憶胞的位元線,第一電阻器的一第一端耦接至電晶體的第一端,第一電阻器的一第二端耦接至電晶體的一第 三端,第二電阻器的一第一端耦接至電晶體的第三端,第二電阻器的一第二端耦接至電晶體的第二端。 An embodiment of the present invention discloses a memory chip. The memory chip includes a physically non-replicable block. The physical non-copyable block includes a plurality of bit lines, a plurality of source lines and a plurality of memory cells. The memory cells are divided into multiple columns and multiple rows, wherein the memory cells in the ith row and the jth column are coupled to the ith source line and the jth bit line, and i and j are positive integers. Each memory cell includes a transistor, a first resistor and a second resistor. A first end of the transistor is coupled to the source line corresponding to the memory cell, and a second end of the transistor is coupled to To the bit line corresponding to the memory cell, a first end of the first resistor is coupled to the first end of the transistor, and a second end of the first resistor is coupled to a first end of the transistor Three terminals, a first terminal of the second resistor is coupled to the third terminal of the transistor, and a second terminal of the second resistor is coupled to the second terminal of the transistor.
為了對本發明之上述及其他方面有更佳的瞭解,下文特舉實施例,並配合所附圖式詳細說明如下: In order to have a better understanding of the above-mentioned and other aspects of the present invention, the following specific examples are given and described in detail in conjunction with the accompanying drawings as follows:
10:記憶體晶片 10: Memory chip
102:PUF區塊 102:PUF block
104:控制電路 104: Control circuit
C11~Cmn、Cij:記憶胞 C11~Cmn, Cij: memory cells
BL1~BLn、BLj:位元線 BL1~BLn, BLj: bit line
SL1~SLm、SLi:源極線 SL1~SLm, SLi: source line
Tij:電晶體 Tij: Transistor
Ra-ij:第一電阻器 Ra-ij: first resistor
Rb-ij:第二電阻器 Rb-ij: second resistor
Dij:二極體 Dij: Diode
30:結構 30: Structure
G:閘極金屬 G: gate metal
S:源極層 S: source layer
D:汲極層 D: drain layer
M1-1~M1-3:第一金屬層 M1-1~M1-3: The first metal layer
M2-1~M2-3:第二金屬層 M2-1~M2-3: The second metal layer
M3:第三金屬層 M3: third metal layer
VA1:第一導孔 VA1: The first pilot hole
VA2:第二導孔 VA2: Second via hole
Ra:第一電阻層 Ra: first resistive layer
Rb:第二電阻層 Rb: second resistive layer
第1圖繪示根據本發明一實施例的記憶體晶片的方塊圖。 FIG. 1 shows a block diagram of a memory chip according to an embodiment of the present invention.
第2圖繪示根據本發明一實施例的PUF區塊的記憶胞的方塊圖。 FIG. 2 is a block diagram illustrating a memory cell of a PUF block according to an embodiment of the present invention.
第3圖繪示根據本發明一實施例的PUF區塊的記憶胞的積體電路佈局結構的剖面圖。 FIG. 3 is a cross-sectional view illustrating an IC layout structure of a memory cell of a PUF block according to an embodiment of the present invention.
第4圖繪示根據本發明另一實施例的PUF區塊的記憶胞的方塊圖。 FIG. 4 is a block diagram illustrating a memory cell of a PUF block according to another embodiment of the present invention.
請參照第1圖,第1圖繪示跟據本發明一實施例的記憶體晶片的方塊圖。記憶體晶片10包括一物理不可仿製功能區塊102及一控制電路104。為了說明的簡潔性,物理不可仿製功能(Physically Unclonable Function,PUF)區塊於下文中將被簡稱為PUF區塊。PUF區塊102包括多個記憶胞C11~Cmn、多條源極線SL1~SLm以及多條位元線BL1~BLn,其中m、n為正整數。此些記憶胞C11~Cmn劃分為多個行及多個列,其中第i行的記憶胞耦接至第i條源極線SLi,第j列的記憶胞耦接至第j條位元線BLj,其中i、j為正整數且i=1~m,j=1~n。在一實施例中,此些記憶胞C11~Cmn是唯讀的(read only)。控制電路104被配置用以操作PUF區塊102。
Please refer to FIG. 1. FIG. 1 is a block diagram of a memory chip according to an embodiment of the present invention. The
請參照第2圖,第2圖繪示根據本發明一實施例的PUF區塊的記憶胞的方塊圖。本實施例以第i行第j列的記憶胞Cij為例進行說明。記憶胞Cij包括一電晶體Tij、一第一電阻器Ra-ij以及一第二電阻器Rb-ij。電晶體Tij的一第一端(例如汲極)耦接至源極線SLi,電晶體Tij的一第二端(例如源極)耦接至位元線BLj。第一電阻器Ra-ij的一第一端耦接至電晶體Tij的第一端以及源極線SLi,第一電阻器Ra-ij的一第二端耦接至電晶體Tij的一第三端(例如閘極)。第二電阻器Rb-ij的一第一端耦接至電晶體Tij的第三端,第一電阻器Ra-ij的一第二端耦接至電晶體Tij的第二端以及位元線BLj。 Please refer to FIG. 2, which illustrates a block diagram of a memory cell of a PUF block according to an embodiment of the present invention. This embodiment is described by taking the memory cell Cij in the i-th row and the j-th column as an example. The memory cell Cij includes a transistor Tij, a first resistor Ra-ij and a second resistor Rb-ij. A first end (eg, drain) of the transistor Tij is coupled to the source line SLi, and a second end (eg, the source) of the transistor Tij is coupled to the bit line BLj. A first end of the first resistor Ra-ij is coupled to the first end of the transistor Tij and the source line SLi, and a second end of the first resistor Ra-ij is coupled to a third end of the transistor Tij terminal (eg gate). A first end of the second resistor Rb-ij is coupled to the third end of the transistor Tij, and a second end of the first resistor Ra-ij is coupled to the second end of the transistor Tij and the bit line BLj .
操作原理詳述如後。當要讀取記憶胞Cij時,一偏壓電壓Vb會控制電路104被施加於位元線BLj,且源極線SLi參考接地。此時,電晶體Tij的第三端的電壓Vg=Vb*Ra-ij/(Ra-ji+Rb-ij)。電晶體Tij的第三端的電壓Vg做為電晶體Tij的閘極電壓,會決定流過電晶體Tij的第二端的電流(即汲極電流)Id的大小。在一實施例中,根據電晶體Tij的特性,例如閘極電壓與汲極電流的關係,決定一參考電壓值Vref及/或一參考電流值Vref。當閘極電壓Vg大於或等於參考電壓值Vref時,汲極電流Id會大於或等於參考電流值Iref;當閘極電壓Vg小於參考電壓值Vref時,汲極電流Id會小於參考電流值Iref。藉由適當的配置Vd,第一電阻器Ra-ij與第二電阻器Rb-ij之間的電阻值的比例關係或大小關係可以被體現在汲極電流Id與參考電流值Iref之間的大小關係上。在一實施例中,將偏壓電壓Vd為電晶體Tij的一閾值電壓Vt的兩倍(即Vd=2*Vt),參考電壓值Vref為電晶體Tij的閾值電壓Vt的電壓值(例
如0.6伏特),參考電流值Iref為閘極電壓為閾值電壓時對應到的汲極電流(例如1微安培)。於是,當第一電阻器Ra-ij的電阻值大於或等於第二電阻器Rb-ij的電阻值時,閘極電壓Vg會大於或等於Vt,汲極電流Id會大於或等於參考電壓值Iref,並判斷記憶胞Cij儲存的是一第一值(例如1);當第一電阻器Ra-ij的電阻值大於或等於第二電阻器Rb-ij的電阻值時,閘極電壓Vg會小於Vt,汲極電流Id會小於參考電壓值Iref,並判斷記憶胞Cij儲存的是一第二值(例如0)。第一電阻器Ra-ij與第二電阻器Rb-ij例如是分別以一層導電薄膜來實現。實際上,由於製程技術的極限,第一電阻器Ra-ij與第二電阻器Rb-ij的電阻值通常無法完全與預期的理想值相同。也就是說,雖然理想狀況是第一電阻器Ra-ij與第二電阻器Rb-ij的電阻值的電阻值相等,然而實際上卻會因製程技術的極限而使得第一電阻器Ra-ij與第二電阻器Rb-ij的電阻值難以相等,且對於不同的記憶胞而言,第一電阻器Ra-ij與第二電阻器Rb-ij的電阻值之間的大小關係是難以靠人為控制的。換言之,對於每個記憶胞來說,第一電阻器Ra-ij與第二電阻器Rb-ij之間的電阻值大小關係是隨機決定的。於是,對於不同記憶體晶片的PUF區塊來說,此些記憶胞所儲存的值便可構成隨機形成的一個數值圖樣(pattern)。基於此數值圖樣生成的隨機性,其難以藉由人為的力量進行預測及複製,符合物理不可仿製功能的核心精神。
The operating principle is detailed below. When the memory cell Cij is to be read, a bias voltage Vb is applied to the bit line BLj by the
需要注意的是,電晶體Tij可以是NMOS,也可以是PMOS,本發明不加以限定。 It should be noted that the transistor Tij may be an NMOS or a PMOS, which is not limited in the present invention.
請參照第3圖,第3圖繪示根據本發明一實施例的PUF區塊的記憶胞的積體電路佈局的剖面圖。第3圖中的結構30顯示的是PUF區塊中一個記憶胞Cij的積體電路佈局結構的剖面圖。結構30包括一電晶體結構區域302、多個第一金屬層M1-1~M1-3、多個第二金屬層M2-1~M2~3、一第一電阻層Ra、一第二電阻層Rb及一第三金屬層M3。
Please refer to FIG. 3 , which is a cross-sectional view illustrating an integrated circuit layout of a memory cell of a PUF block according to an embodiment of the present invention.
電晶體結構區域302包括一汲極層D、一源極層S以及一閘極金屬層G。第一金屬層M1-1~M1-33互相絕緣且分別設置/堆疊於汲極層D、源極層S以及閘極金屬層G之上,並分別通過一導電材料連接至以及汲極層D、源極層S以及閘極金屬層G。第二金屬層M2-1~M2-33互相絕緣且分別設置/堆疊於第一金屬層M1-1~M1-3之上,並分別通過一第一導孔VA1及導電材料連接至第一金屬層M1-1~M1-3。第一電阻層Ra設置/堆疊於第二金屬層M2-3、第一金屬層M1-3及源極層S之上,並通過一第二導孔VA2及導電材料連接至第二金屬層M2-1。第二電阻層Rb設置/堆疊於第二金屬層M2-1、第一金屬層M1-1及汲極層D之上,並通過另一第二導孔VA2及導電材料連接至第二金屬層M2-1。第三金屬層M3設置/堆疊於第一電阻層Ra以及第二電阻層Rb之上,並通過導電材料連接第一電阻層Ra極第二電阻層Rb,並且通過又一第二導孔VA2以及導電材料連接至第二金屬層M2-2。在結構30中,第一金屬層M1-1被當作位元線BLj使用,第二金屬層M2-3被當作源極線SLi使用。
The
需要注意的是,本領域中為人所熟知的任何電晶體結構皆可用以實現電晶體區域結構302,並且本發明不限定其製程方式。
It should be noted that any transistor structure known in the art can be used to realize the
請參照第4圖,第4圖繪示根據本發明一實施例的PUF區塊的記憶胞的方塊圖。記憶胞C’ij與記憶胞Cij類似,差別在於記憶胞C’ij進一步包括一二極體Dij。二極體Dij的一端耦接至電晶體Tij的第一端,二極體Dij的一第二端耦接至第一電阻器Ra-ij的第一端。一般而言,記憶體晶片在運作的過程中溫度可能會隨著運作的時間而升高,而溫度變化會造成電晶體Tij的閾值電壓Vt隨之改變。在溫度變化對元件的影響上,電晶體為具有正溫度係數的元件,而二極體為具有負溫度係數的元件,因此藉由將二極體Dij串接電晶體Tij,能夠補償溫度變化的對電晶體Tij造成的影響,有助於提升記憶胞C’ij的可靠性。 Please refer to FIG. 4 . FIG. 4 illustrates a block diagram of a memory cell of a PUF block according to an embodiment of the present invention. The memory cell C'ij is similar to the memory cell Cij, except that the memory cell C'ij further includes a diode Dij. One end of the diode Dij is coupled to the first end of the transistor Tij, and a second end of the diode Dij is coupled to the first end of the first resistor Ra-ij. Generally speaking, the temperature of the memory chip may increase with the operation time during the operation, and the temperature change will cause the threshold voltage Vt of the transistor Tij to change accordingly. In terms of the influence of temperature change on the components, the transistor is a component with a positive temperature coefficient, and the diode is a component with a negative temperature coefficient. Therefore, by connecting the diode Dij to the transistor Tij in series, the temperature change can be compensated. The impact on the transistor Tij helps to improve the reliability of the memory cell C'ij.
在替代的實施例中,為補償溫度變化造成的影響,記憶體晶片的控制電路104可根據記憶體晶片的溫度調整偏壓電壓Vb。詳細來說,根據電晶體Tij的閾值電壓Vt與溫度的關係,可得知閾值電壓Vt會如何隨著溫度變化,亦即可得知在特定溫度下的閾值電壓Vt的大小。因此,在替代的實施例中是藉由配合記憶體晶片的溫度改變偏壓電壓Vb,使得偏壓電壓Vb與閾值電壓Vt之間維持預設的比例關係,也就是臨界點Vg=Vt=Vb*A/(A+B)的比例關係,其中A為第一電阻器的理想電阻值,B為第二電阻器的理想電阻值。需要注意的是,此處的第一電阻器的理想電阻值/第二電阻器的理想電阻值與實際上記憶胞中的第一電阻器的電阻值/第二電阻器的電阻值是不同的,由於製程技術的限制,第一電阻器與第二電阻器的實際電阻值不一定會相等於其理想電阻值,這也是致使其具有物理不可仿製特性的原因。
In an alternative embodiment, in order to compensate for the effects of temperature changes, the
在一實施例中,記憶體晶片在出廠之前,會針對PUF區塊進行多次讀取測試,藉以找出PUF區塊中不可靠的記憶胞。舉例來說,測試時,可對PUF區塊中的該些記憶胞執行多次(例如一千次)讀取操作,並將輸出的數值不是皆為1或0的記憶胞記錄到一記錄表,由於此些記憶胞的輸出可能因讀取次數的增加而有變動,故而被視為不可靠的記憶胞。在記憶體晶片出廠後由使用者操作時,記錄表中記錄的記憶胞會在有關PUF區塊的安全性操作中被排除。例如,在基於PUF區塊產生一硬體安全金鑰時,將不會使用記錄表中記錄的不可靠的記憶胞。 In one embodiment, before the memory chip is shipped from the factory, multiple read tests are performed on the PUF block, so as to find unreliable memory cells in the PUF block. For example, during testing, the memory cells in the PUF block can be read multiple times (for example, a thousand times), and the memory cells whose output values are not all 1 or 0 can be recorded in a record table , since the output of these memory cells may change with the increase of the number of reads, they are regarded as unreliable memory cells. When the memory chip is operated by the user after leaving the factory, the memory cells recorded in the record table will be excluded from the security operation of the PUF block. For example, when generating a hardware security key based on a PUF block, the unreliable memory cells recorded in the record table will not be used.
在替代的實施例中,為了找出不可靠的記憶胞,可為參考電流值Iref設定一上限值及一下限值。對於各個記憶胞,執行讀取操作一或多次,並觀察在參考電流值Iref的上限值與下限值之間是否輸出的皆為1或0,若否則判斷為不可靠的記憶胞。舉例來說,假設參考電流值Iref的上限值為10uA,下限值為1uA,某個記憶胞經讀取操作後得到的汲極電流Id為9uA,對於參考電流值Iref的範圍1uA~10uA而言,9uA並非恆大於或等於參考電流值Iref也非恆小於參考電流值Iref,代表此記憶胞在可能的參考電流值範圍中可能被判斷其儲存的是1,也可能被判斷其儲存的是0,因此會被視為不可靠的記憶胞。也就是說,當讀取操作時,電晶體的汲極電流並非皆落於參考電流的上限值與下限值形成的範圍之外,該記憶胞為不可靠的。 In an alternative embodiment, in order to find unreliable memory cells, an upper limit value and a lower limit value can be set for the reference current value Iref. For each memory cell, perform read operation one or more times, and observe whether the output between the upper limit value and the lower limit value of the reference current value Iref is all 1 or 0, otherwise it is judged as an unreliable memory cell. For example, assuming that the upper limit value of the reference current value Iref is 10uA, the lower limit value is 1uA, the drain current Id obtained by a certain memory cell after the read operation is 9uA, and the range of the reference current value Iref is 1uA~10uA For example, 9uA is not always greater than or equal to the reference current value Iref, nor is it always less than the reference current value Iref, which means that the memory cell may be judged to store 1 in the range of possible reference current values, or it may be judged that it stores is 0 and thus is considered an unreliable memory cell. That is, during the read operation, the drain current of the transistor does not all fall outside the range formed by the upper limit value and the lower limit value of the reference current, and the memory cell is unreliable.
本發明提出了一種PUF區塊的記憶胞的電路與積體電路佈局結構,有效利用製程技術的極限來產生記憶胞儲存的數值的隨 機性。此外,本發明亦提供了多種有效提升PUF區塊的可靠度的方式。在記憶體晶片中配置本發明提出的PUF區塊,相當於使得記憶體晶片具有一個隨機生成的數值圖樣,且此數值圖樣由於製程技術的極限的存在而難以被人為複製。在應用上,可以藉由特定電路及/或演算法(例如雜湊函數)取出全部或部分的數值圖樣來根據需要產生硬體金鑰。硬體金鑰可以使用於加密/解密記憶體晶片及將記憶體晶片與其他硬體相互連結/鎖定等安全性用途。 The present invention proposes a circuit and an integrated circuit layout structure of a memory cell of a PUF block, which effectively utilizes the limit of the process technology to generate a random variation of the value stored in the memory cell. organic. In addition, the present invention also provides various ways to effectively improve the reliability of the PUF block. Disposing the PUF block proposed by the present invention in the memory chip is equivalent to making the memory chip have a randomly generated numerical pattern, and the numerical pattern is difficult to be copied artificially due to the limitations of the process technology. In application, the hardware key can be generated as required by extracting all or part of the numerical pattern through a specific circuit and/or algorithm (eg, a hash function). Hardware keys can be used for security purposes such as encrypting/decrypting memory chips and connecting/locking memory chips with other hardware.
綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。 To sum up, although the present invention has been disclosed by the above embodiments, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the appended patent application.
Cij:記憶胞 Cij: memory cell
BLj:位元線 BLj: bit line
SLi:源極線 SLi: source line
Tij:電晶體 Tij: Transistor
Ra-ij:第一電阻器 Ra-ij: first resistor
Rb-ij:第二電阻器 Rb-ij: second resistor
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| US20180151224A1 (en) * | 2016-11-29 | 2018-05-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Rram-based authentication circuit |
| US10103895B1 (en) * | 2017-10-13 | 2018-10-16 | Macronix International Co., Ltd. | Method for physically unclonable function-identification generation and apparatus of the same |
| EP3576341A1 (en) * | 2018-05-29 | 2019-12-04 | eMemory Technology Inc. | Random code generator and associated random code generating method |
| TW202001891A (en) * | 2018-06-08 | 2020-01-01 | 台灣積體電路製造股份有限公司 | Method and device to speed-up leakage based PUF generators under extreme operation conditions |
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| US20180151224A1 (en) * | 2016-11-29 | 2018-05-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Rram-based authentication circuit |
| US10103895B1 (en) * | 2017-10-13 | 2018-10-16 | Macronix International Co., Ltd. | Method for physically unclonable function-identification generation and apparatus of the same |
| EP3576341A1 (en) * | 2018-05-29 | 2019-12-04 | eMemory Technology Inc. | Random code generator and associated random code generating method |
| TW202001891A (en) * | 2018-06-08 | 2020-01-01 | 台灣積體電路製造股份有限公司 | Method and device to speed-up leakage based PUF generators under extreme operation conditions |
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