TWI661498B - 基板之搬送方法 - Google Patents

基板之搬送方法 Download PDF

Info

Publication number: TWI661498B
Authority: TW; Taiwan
Prior art keywords: unit; substrate; section; moving; cassette
Prior art date: 2012-04-13

Application number

TW106132627A

Other languages

English (en)

Chinese (zh)

Other versions

TW201810492A (zh

Inventor

Tomohide Hamada

濱田智秀

Tomonari Suzuki

鈴木智也

Original Assignee

Nikon Corporation

日商尼康股份有限公司

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2012-04-13

Filing date

2012-12-17

Publication date

2019-06-01

2012-12-17 Application filed by Nikon Corporation, 日商尼康股份有限公司 filed Critical Nikon Corporation

2018-03-16 Publication of TW201810492A publication Critical patent/TW201810492A/zh

2019-06-01 Application granted granted Critical

2019-06-01 Publication of TWI661498B publication Critical patent/TWI661498B/zh

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- H10P72/3218—
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H18/00—Winding webs
- B65H18/08—Web-winding mechanisms
- B65H18/10—Mechanisms in which power is applied to web-roll spindle
- B65H18/103—Reel-to-reel type web winding and unwinding mechanisms
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
- B65H23/182—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in unwinding mechanisms or in connection with unwinding operations
- B65H23/185—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in unwinding mechanisms or in connection with unwinding operations motor-controlled
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/18—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web
- B65H23/195—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in winding mechanisms or in connection with winding operations
- B65H23/198—Registering, tensioning, smoothing or guiding webs longitudinally by controlling or regulating the web-advancing mechanism, e.g. mechanism acting on the running web in winding mechanisms or in connection with winding operations motor-controlled (Controlling electrical drive motors therefor)
- H10P72/10—
- H10P72/3202—
- H10P72/3314—
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2220/00—Function indicators
- B65H2220/02—Function indicators indicating an entity which is controlled, adjusted or changed by a control process, i.e. output
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2513/00—Dynamic entities; Timing aspects
- B65H2513/10—Speed
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2513/00—Dynamic entities; Timing aspects
- B65H2513/10—Speed
- B65H2513/11—Speed angular
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2701/00—Handled material; Storage means
- B65H2701/10—Handled articles or webs
- B65H2701/11—Dimensional aspect of article or web
- B65H2701/113—Size
- B65H2701/1133—Size of webs
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2701/00—Handled material; Storage means
- B65H2701/10—Handled articles or webs
- B65H2701/17—Nature of material
- B65H2701/175—Plastic
- B65H2701/1752—Polymer film
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2801/00—Application field
- B65H2801/61—Display device manufacture, e.g. liquid crystal displays
- H10P72/00—

Landscapes

Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
General Physics & Mathematics (AREA)
Physics & Mathematics (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Condensed Matter Physics & Semiconductors (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Cleaning In General (AREA)
Replacement Of Web Rolls (AREA)
Cleaning By Liquid Or Steam (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Winding Of Webs (AREA)
Liquid Crystal (AREA)
Coating Apparatus (AREA)
Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)

TW106132627A 2012-04-13 2012-12-17 基板之搬送方法 TWI661498B (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JPJP2012-092132		2012-04-13
JP2012092132		2012-04-13

Publications (2)

Publication Number	Publication Date
TW201810492A TW201810492A (zh)	2018-03-16
TWI661498B true TWI661498B (zh)	2019-06-01

Family

ID=49327304

Family Applications (3)

Application Number	Title	Priority Date	Filing Date
TW108112834A TWI695445B (zh)	2012-04-13	2012-12-17	元件製造方法
TW106132627A TWI661498B (zh)	2012-04-13	2012-12-17	基板之搬送方法
TW101147753A TWI604550B (zh)	2012-04-13	2012-12-17	匣裝置、基板搬送裝置、基板處理裝置、及基板處理方法

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
TW108112834A TWI695445B (zh)	2012-04-13	2012-12-17	元件製造方法

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
TW101147753A TWI604550B (zh)	2012-04-13	2012-12-17	匣裝置、基板搬送裝置、基板處理裝置、及基板處理方法

Country Status (5)

Country	Link
JP (5)	JP6011615B2 (ja)
KR (6)	KR102042952B1 (ja)
CN (2)	CN104203785B (ja)
TW (3)	TWI695445B (ja)
WO (1)	WO2013153706A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI695445B (zh) *	2012-04-13	2020-06-01	日商尼康股份有限公司	元件製造方法
JP6264619B2 (ja) *	2015-02-09	2018-01-24	三菱重工機械システム株式会社	フロントストップ装置，シート積重装置，カウンタエゼクタ及び製函機
CN110773536B (zh) *	2018-07-31	2021-10-22	台湾积体电路制造股份有限公司	晶粒容器工作站、晶粒容器处理的系统及方法
CN110449432B (zh) *	2019-07-25	2024-02-23	老肯医疗科技股份有限公司	一种清洗机自动进出车控制系统及使用方法
DE102020208248A1 (de) *	2020-07-01	2022-01-05	Dürr Systems Ag	Behandlungsstation, Behandlungsanlage und Verfahren zum Behandeln von Werkstücken
JPWO2024105976A1 (ja) *	2022-11-15	2024-05-23

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JP5494124B2 (ja) *	2010-03-30	2014-05-14	大日本印刷株式会社	パターン形成方法、カラーフィルターの製造方法、およびパターン形成装置
KR101756628B1 (ko) *	2010-04-09	2017-07-26	가부시키가이샤 니콘	기판 처리 장치
JP5724564B2 (ja) *	2010-04-13	2015-05-27	株式会社ニコン	マスクケース、マスクユニット、露光装置、基板処理装置及びデバイス製造方法
JPWO2011158584A1 (ja) *	2010-06-18	2013-08-19	コニカミノルタ株式会社	薄膜ガラスの搬送装置、及び薄膜ガラスの搬送方法
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TWI695445B (zh) *	2012-04-13	2020-06-01	日商尼康股份有限公司	元件製造方法

2012
- 2012-12-17 TW TW108112834A patent/TWI695445B/zh active
- 2012-12-17 TW TW106132627A patent/TWI661498B/zh active
- 2012-12-17 JP JP2014510021A patent/JP6011615B2/ja active Active
- 2012-12-17 KR KR1020187036272A patent/KR102042952B1/ko active Active
- 2012-12-17 WO PCT/JP2012/082695 patent/WO2013153706A1/ja not_active Ceased
- 2012-12-17 CN CN201280072239.9A patent/CN104203785B/zh active Active
- 2012-12-17 KR KR1020177018378A patent/KR101787330B1/ko active Active
- 2012-12-17 CN CN201610622573.7A patent/CN106185413B/zh active Active
- 2012-12-17 KR KR1020177037338A patent/KR101868310B1/ko active Active
- 2012-12-17 KR KR1020147028039A patent/KR101816343B1/ko active Active
- 2012-12-17 KR KR1020197032482A patent/KR102126421B1/ko active Active
- 2012-12-17 TW TW101147753A patent/TWI604550B/zh active
- 2012-12-17 KR KR1020187011184A patent/KR101949113B1/ko active Active
2016
- 2016-07-06 JP JP2016134060A patent/JP6156555B2/ja active Active
- 2016-09-06 JP JP2016173506A patent/JP6304331B2/ja active Active
2017
- 2017-06-02 JP JP2017109952A patent/JP6249127B2/ja active Active
- 2017-08-14 JP JP2017156344A patent/JP6384580B2/ja active Active

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TW449527B (en) *	1999-01-25	2001-08-11	Ushio Electric Inc	Aligner for belt-like work

Also Published As

Publication number	Publication date
KR101949113B1 (ko)	2019-02-15
KR102042952B1 (ko)	2019-11-08
JPWO2013153706A1 (ja)	2015-12-17
JP6249127B2 (ja)	2017-12-20
TW201810492A (zh)	2018-03-16
JP2017175161A (ja)	2017-09-28
KR101816343B1 (ko)	2018-02-21
TWI695445B (zh)	2020-06-01
WO2013153706A1 (ja)	2013-10-17
KR20180003639A (ko)	2018-01-09
KR20170081752A (ko)	2017-07-12
JP6304331B2 (ja)	2018-04-04
JP6384580B2 (ja)	2018-09-05
CN106185413A (zh)	2016-12-07
KR101868310B1 (ko)	2018-07-17
KR102126421B1 (ko)	2020-06-24
JP2017004007A (ja)	2017-01-05
JP6011615B2 (ja)	2016-10-19
JP2018011065A (ja)	2018-01-18
KR20150002647A (ko)	2015-01-07
CN106185413B (zh)	2017-11-07
KR20180049114A (ko)	2018-05-10
KR101787330B1 (ko)	2017-10-18
KR20180136574A (ko)	2018-12-24
JP6156555B2 (ja)	2017-07-05
CN104203785A (zh)	2014-12-10
TW201351528A (zh)	2013-12-16
TWI604550B (zh)	2017-11-01
TW201929123A (zh)	2019-07-16
CN104203785B (zh)	2016-08-24
KR20190126455A (ko)	2019-11-11
JP2016172645A (ja)	2016-09-29

Publication	Publication Date	Title
JP6384580B2 (ja)	2018-09-05	デバイス製造方法
JP6593507B2 (ja)	2019-10-23	パターン形成装置
CN103384637B (zh)	2015-09-09	基板处理装置
JP6132060B2 (ja)	2017-05-24	露光装置
JP5929761B2 (ja)	2016-06-08	基板処理システム及び表示素子の製造方法
WO2012081605A1 (ja)	2012-06-21	基板保管装置