TWI661240B - Lens element conveying mechanism, controller, optical axis adjustment device, optical module manufacturing equipment and manufacturing method thereof - Google Patents

Abstract

A method for manufacturing a camera module includes a transport step of individually transporting a sensor unit and a lens unit toward a specific place, a sensor mounting step for placing the sensor unit on a mounting platform, and Steps for applying a hardened resin to the installed sensor unit; Reference position detection steps to detect the reference position of the lens L; Reference position setting steps to set the reference position of the lens; Perform lens and image sensing An optical axis adjustment step of adjusting the optical axis of the sensor; and a fixing step (180) of fixing the lens unit LU to the sensor unit SU.

Description

Lens element conveying mechanism, controller, optical axis adjustment device, optical module manufacturing equipment and manufacturing method thereof

The present invention relates to a lens element transport mechanism, a lens driving device, an optical axis adjustment device, an optical module manufacturing equipment, and a manufacturing method thereof.

As for a camera module, there is conventionally known an article in which a lens element for imaging a captured image is integrally assembled with a semiconductor element (imaging element) such as a CCD and a CMOS. (For example, Japanese Patent Laid-Open No. 2010-114731). When assembling the camera module, a chart is shot with an imaging element through a lens element, and while viewing the image, the lens element is adjusted in position toward the optical axis with respect to the imaging element, and at a just focus position The lens element is fixed to the imaging element.

In addition, during the focusing of the imaging element and the lens element, the focusing step of focusing the "reference imaging element other than the imaging element" by the lens element was performed; the configuration was performed according to the positive focus position obtained by the focusing step. Steps to reproduce the positive focus position of the imaging element and the lens element; will be arranged at a specific position by the steps of the positive focus position reproduction. A step of fixing the position of the imaging element and the lens to each other.

In addition, in order to perform the optical axis matching of the two optical parts, an optical axis adjustment device is used. This optical axis adjustment device performs: uniform offset adjustment of the optical axes of two optical components in a specific plane; and coaxial adjustment of the optical axes of the two optical components (eg, Japanese Patent Application Laid-Open No. 2008-46630) Bulletin). According to the disclosed goniometer stage of this document, as long as the offset adjustment is performed on the optical parts arranged on the goniometer stage, the optical axes of the two optical parts can be aligned in a specific plane. , Perform tilt adjustment.

However, in Japanese Patent Application Laid-Open No. 2010-114731, the arrangement of the reference imaging element in the focusing step and the imaging element in the positive focus position reproduction step does not always match. Therefore, a manufacturing error occurs in the assembly of the camera module. In addition, if such a manufacturing error is to be eliminated, it is necessary to perform the position adjustment of the lens using the "lens driving device" in the focusing step and the positive focus position reproducing step, respectively. In this case, the time required for assembling the camera module becomes longer. In addition, since the adjustment of the optical axis of the actual imaging element and the lens element has not been performed, a high-precision camera module cannot be manufactured.

In addition, in the case where the goniometer platform of Japanese Patent Application Laid-Open No. 2008-46630 performs optical axis adjustment, each time an optical component that is the object of the optical axis adjustment is changed, the optical component must be offset adjusted. whole. Therefore, in the case of performing the optical axis adjustment of various kinds of optical parts, the benefits brought by using the goniometer platform are not many.

Even when the offset adjustment of the same optical component is performed, the placement position of the optical component on the goniometer platform may not always be constant. The reason is considered to be "the size of the optical component itself is uneven" and "the control of the robot arm device for placing the optical component on the goniometer platform is uneven."

Not only that, today's optical components are moving toward miniaturization at a remarkable speed. Once the optical components have progressed toward miniaturization as described above, the "variation in the size of the optical components themselves" and the "variation in the control of the mounting device" will greatly affect the position adjustment operation. As a result, the "benefits brought about by the use of a goniometer platform" has become even smaller in situations where the aforementioned "variation" cannot be tolerated.

In addition, there is also a demand for "tilting the optical axis of an optical component without performing optical axis adjustment". For example, when assembling a camera lens and an image sensor mounted on a mobile phone, it is desirable to adjust the optical axis of optical components whose directions are "the same as when the camera is used (the optical axis approaches a horizontal attitude)". demand. Having said that, once the goniometer platform is tilted, the tolerances of the constituent parts of the goniometer platform (such as the platform member and the platform moving member) will appear as errors in the adjustment of the optical axis.

In view of the above-mentioned actual situation, the present invention provides a lens element transfer mechanism, a lens driving device, an optical axis adjustment device, an optical module manufacturing device, and a manufacturing method thereof that can assemble a camera module in a shorter time than a conventional one.

The present invention for achieving the above object is to obtain a lens by mounting a lens element having a "lens that can be moved between a reference position and a retreat position retracted from the reference position by inputting electric power" to an optical element. The module's optical module manufacturing equipment is characterized by comprising: a basic position setting unit that inputs power to the lens element and adjusts the position of the lens toward the reference position; and an optical axis adjustment unit that is positioned by power input The optical axis of the lens at the reference position and the optical axis of the optical element coincide with each other; and a fixing unit fixes the lens element and the optical element after forming the consistent state.

The optical module manufacturing equipment is characterized in that the optical axis adjustment unit shifts the posture of the optical element, and forms the same state with the lens element.

The optical module manufacturing equipment further includes an output terminal that supplies power to the lens element and drives the lens between the reference position and the retracted position.

The optical module manufacturing equipment is characterized in that the output terminal supplies specific information to the lens element at least during a period from "the position adjustment of the lens until the lens is aligned with the optical axis of the optical element". Electricity.

Regarding the above optical module manufacturing equipment, it is characterized by: The reference position setting unit adjusts the position of the lens toward the reference position, and the reference position set point is different from the optical axis adjustment point where the optical axis adjustment unit generates the consistent state. The output terminal is moved to the reference position set point. And the aforementioned optical axis adjustment point.

The optical module manufacturing equipment is characterized in that the output terminal is from the time when the lens is aligned with the optical axis of the optical element to the time when the lens element and the optical element are fixed while maintaining the same state. A specific power is supplied to the lens element.

The optical module manufacturing equipment is characterized in that the optical axis adjustment unit is formed: at the component supply point, the optical element can be received from the outside, and the component supply point and the optical axis in the same state as the optical axis adjustment unit are generated. The adjustment point is different, and the optical axis adjustment unit moves the optical element from the element supply point to the optical axis adjustment point.

The optical module manufacturing equipment is characterized in that the reference position setting unit has a displacement meter for measuring the position of the lens.

The optical module manufacturing equipment is characterized in that the optical axis adjustment unit generates a consistent state between the optical axis of the lens and the optical axis of the optical element when the optical axis is in a non-vertical direction.

The optical module manufacturing equipment is characterized in that the optical axis adjustment unit generates a consistent state between the optical axis of the lens and the optical axis of the optical element when the optical axis is in a horizontal direction.

With regard to the above-mentioned optical module manufacturing equipment, the optical axis adjustment unit is characterized in that at least the optical element in which the optical axis is oriented in a vertical direction is displaced so that the optical axis is oriented in the non-vertical direction, generating the optical axis of the lens and the aforementioned The optical axis of the optical element forms a uniform state.

The optical module manufacturing equipment is characterized in that the optical axis adjustment unit is configured to at least shift the optical axis toward the lens in a vertical direction, and displace the optical axis toward the non-vertical direction to generate the optical axis of the lens and the optical axis. The optical axis of the element forms a uniform state.

The optical module manufacturing equipment is characterized in that the optical axis adjustment unit includes a mounting platform for mounting the optical element, a platform adjustment mechanism for adjusting the position and posture of the mounting platform, and A controller that controls the platform adjustment mechanism; the platform adjustment mechanism includes an offset unit that moves the mounting platform toward a specific direction, and a tilt unit that swings the mounting platform toward a specific axis.

The present invention for achieving the above-mentioned object is a lens element transfer mechanism for transferring a lens element having "a lens that can be moved between a reference position and a retreated position retracted from the reference position by inputting electric power." It is characterized by having a transfer unit that transfers the lens between a reference position set point for setting the position of the lens toward the reference position and an optical axis adjustment point for performing alignment between the lens element and the optical axis of the optical element. A lens element; and an output terminal provided in the transport unit and supplying power for driving the lens between the reference position and the retracted position; an input terminal provided in the lens element and the output The terminals are electrically connected at least during the transfer between the reference position set point and the optical axis adjustment point.

The lens element transfer mechanism is characterized in that power supply from the output terminal to the input terminal is continuously performed at least during the transfer between the reference position set point and the optical axis adjustment point.

The above-mentioned lens element transfer mechanism is characterized in that the above-mentioned transfer unit can be freely switched between "a holding state in which the holding of the lens element is performed" and "a holding release state in which the holding state is released", and in the holding state, The input terminal is electrically connected to the output terminal.

The lens element transfer mechanism is characterized in that: the transfer unit includes a pair of arms having the output terminals, and the lens element is held while the fixed surface of the lens element with respect to the optical element is opened; and the arm The moving mechanism is used to change the relative position of the pair of arms.

The present invention for achieving the above-mentioned object is to perform the adjustment of the lens position on a lens element having a "lens movable between a reference position and a retreated position retracted from the reference position", and toward the lens element The lens driving device that outputs specific power is characterized by having a "power output unit for outputting specific power to the lens element" and a "power control unit for controlling the power output unit". The power control unit is at least From "the reference position setting state in which the position of the aforementioned lens is aligned toward the aforementioned reference position" to "the execution of the interval between the aforementioned lens element and the optical element During the period until the state where the optical axis is aligned with the optical axis, the control of the power output unit is executed to maintain the lens at the reference position.

The lens driving device is characterized in that: the power control unit detects a power condition corresponding to the reference position in the reference position setting state, and at least from the reference position setting state to the optical axis adjustment state. During the period, the control of the power output unit is performed to maintain the power condition corresponding to the reference position.

The present invention for achieving the above object is to perform an optical axis adjustment using an optical element as a reference for a lens element having a "lens movable between a reference position and a retracted position retracted from the aforementioned reference position", and An optical module manufacturing method for manufacturing an optical module including the lens element and the optical element, the method includes a reference position in which the position of the lens is adjusted toward the reference position by inputting power conditions of the lens element. A setting step; and a reference position holding step of holding the lens at the reference position by inputting a power condition of the lens element; and a step of performing the same with the reference position holding step to generate an optical axis between the lens and the optical element. A step of adjusting the optical axis in which the optical axis forms a consistent state; and a fixing step of fixing the lens element and the optical element while maintaining the consistent state.

The present invention for achieving the above-mentioned object is an optical axis adjustment device for performing optical axis adjustment between a first optical component and a second optical component, and is characterized in that: Mounting platform "," Platform adjusting mechanism for adjusting the position and posture of the aforementioned placing platform "and" Controller for controlling the aforementioned platform adjusting mechanism " In the mounting platform, "a specific direction parallel to the mounting surface on which the first optical component is mounted" is defined as X, and a direction parallel to the mounting surface and orthogonal to the X is defined as Y. The direction in which X and T are orthogonal to each other is defined as Z, the plane parallel to the X and Y is defined as the XY plane, and the optical axis of the first optical component is placed on the mounting platform along the Z. The platform adjustment mechanism includes an offset unit that "moves the mounting platform toward the plane direction of the XY plane and moves in the Z-axis direction perpendicular to the XY plane" and "makes the mounting platform parallel to the XY plane. Around the X-axis, and around the Y-axis that is parallel to the XY plane and orthogonal to the X-axis. "The controller controls the offset unit and the tilt unit so that the optical axis of the first optical component and The optical axis of the second optical member is formed in parallel, and the controller maintains "the length from the reference position of the first optical component to the X axis, that is, the X-axis tilt radius" and "from the first optical component The length from the reference position to the Y-axis, that is, the Y-axis inclination radius ", and includes a tilt correction condition calculation unit for calculating" the optical axis of the first optical component and the light of the second optical component. The axis is parallel, the correction angle around the X axis and the correction angle around the Y axis; and the X tilt value conversion means using the correction angle around the X axis and the X axis calculated by the tilt correction condition calculation unit The inclination radius is used to calculate the X-axis rotation control value and the recovery control value when X is inclined. The X-axis rotation control value is used to make the aforementioned tilting unit shake around the X axis, and the X-axis recovery control value is When the tilting unit is shaken by using the correction angle around the X axis, in order to Offsetting the shift amount of the swing end of the X-axis tilt radius toward the Y-axis direction or the Z-axis direction, so that the shift unit moves toward the Y-axis direction or the Z-axis direction; and a Y tilt value conversion means Using the correction angle around the Y-axis and the Y-axis inclination radius calculated by the inclination correction condition calculation section to calculate the Y-axis rotation control value and the recovery control value when the Y-inclination is used, the Y-axis rotation control value is used to The tilting unit is caused to rock around the Y axis, and the recovery control value during the Y tilt is when the tilting unit is shaken by using the correction angle around the Y axis, in order to offset the swing end of the Y axis tilt radius toward The shift amount of the X-axis direction or the Z-axis direction, so that the shift unit moves toward the X-axis direction or the Z-axis direction, according to the X-axis rotation control value and the Y-axis rotation control value, the tilt The unit shakes the mounting platform, and according to the recovery control value during the X tilt and the recovery control value during the Y tilt, the offset unit causes the mounting platform to face the XY plane By moving in the Z-axis direction, the X-axis inclination radius and the Y-axis inclination radius of the rocking end remain substantially stationary at the reference position, and a correction angle based on the X-axis periphery and the Y-axis periphery is executed. Correct the tilt control of the angle.

The above-mentioned optical axis adjustment device is characterized in that the controller includes an offset correction condition calculating unit that calculates the XY for matching the optical axes of the first optical component and the second optical component on a specific plane. A correction movement amount in the plane; and an XY offset value conversion means, using the correction movement amount in the XY plane calculated by the deviation correction condition calculation unit, to calculate the offset unit to be in the XY XY plane movement control value for movement in the plane; according to the XY plane movement control value, the offset unit moves the mounting platform toward the XY plane direction, thereby executing an offset based on the correction movement amount in the XY plane control.

The optical axis adjustment device is characterized in that the controller includes a tilt radius calculation unit that calculates a position of the reference surface of the first optical component mounted on the mounting platform and calculates the tilt radius calculation unit. The X-axis tilt radius and the Y-axis tilt radius.

The optical axis adjustment device is characterized in that, when the optical axis adjustment is performed for the purpose, and a condition for correcting the position or posture of the mounting platform is defined as a correction condition of the mounting platform, the aforementioned The controller has a determination unit that executes a determination whether "the correction condition of the aforementioned mounting platform is within the movable range of the aforementioned platform adjustment mechanism", and determines that "the correction condition of the aforementioned mounting platform is outside the movable range of the aforementioned platform adjustment mechanism" In this case, the position or posture of the mounting platform is adjusted within the movable range of the platform adjustment mechanism.

The optical axis adjustment device further includes a platform attitude switching mechanism that causes the mounting platform and the platform adjustment mechanism to rotate in an angle range of 90 degrees.

The above-mentioned optical axis adjustment device is further characterized in that it can be switched between "holding the holding state of the first optical component placed on the mounting platform" and "holding the released state after the holding is released". Chuck mechanism.

According to the present invention, a camera module can be assembled with high accuracy and in a short time. In addition, according to the optical axis adjustment device of the present invention, it is possible to efficiently perform the optical axis adjustment of various optical components.

2‧‧‧ camera module assembly equipment

10‧‧‧ Loading platform

20‧‧‧ Sensor Unit Transfer Device

30‧‧‧Platform transfer device

40‧‧‧painting device

50‧‧‧ lens unit conveying device

60‧‧‧Optical axis adjustment device

61‧‧‧chart unit

62‧‧‧shaft alignment unit

63‧‧‧control unit

80‧‧‧controller

FIG. 1 is an explanatory diagram for explaining the outline of the first camera module assembling equipment.

FIG. 2 is an explanatory diagram for explaining the outline of the first camera module assembling equipment.

FIG. 3 is an explanatory diagram for explaining the outline of the first camera module assembling equipment.

FIG. 4: (A) is a cross-sectional view for explaining the outline of the lens unit where the lens is at the initial position, and (B) is a cross-sectional view for explaining the outline of the lens unit where the lens is at the reference position.

Fig. 5: (A) is a cross-sectional view for explaining the outline of the holder of "the state in which the holding of the lens unit is released", and (B) is an outline of the holder for explaining the "state in which the lens unit can be held" Section view.

Fig. 6 is an explanatory diagram for explaining the outline of the optical axis adjustment device.

Fig. 7 is an explanatory diagram for explaining the outline of a laser displacement gauge.

Fig. 8 is an explanatory diagram for explaining the outline of the laser displacement meter.

Fig. 9 is a diagram for explaining an outline of a method of manufacturing a camera module Mingtu.

Fig. 10 is an explanatory diagram for explaining the outline of the second camera module assembling equipment.

FIG. 11 is an explanatory diagram for explaining the outline of the second camera module assembling equipment.

Fig. 12 is an explanatory diagram for explaining the outline of the second camera module assembling equipment.

Fig. 13 is an explanatory diagram for explaining the outline of the second camera module assembling equipment.

Fig. 14: (A) is a plan view showing a test chart, and (B) is an explanatory view schematically showing "a state in which a test chart is captured by an image sensor".

Fig. 15: (A) to (D) are graphs showing changes in the difference in density of peripheral pixels of the image sensor, and (E) is a diagram for explaining the arrangement of peripheral pixels on the image sensor. F) and (G) are diagrams illustrating a trigonometric function for calculating a tilt correction amount.

Fig. 16: (A) is a block diagram showing the control structure of the setting section of the control unit, and (B) and (C) are the difference values of the gradations of the peripheral pixels A to D of the image sensor in the setting section (E) is a diagram for explaining the arrangement of peripheral pixels on the image sensor, and (F) and (G) are diagrams for describing a trigonometric function of "calculating the return control value when tilting". .

Fig. 17: (A) to (C) are diagrams for explaining changes in the optimal focus position by the tilt control from the first time to the third time.

Fig. 18 is a diagram for explaining the structure of a 6-axis calibration unit.

Fig. 19: (A) is a plan view for explaining the details of the holder of "the state in which the holding of the lens unit is released", and (B) is a detail for describing the details of the holder in the "state where the lens unit can be held" Top view.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the description of the present case, one of the directions in the horizontal plane is defined as the X direction, the direction orthogonal to the X direction in the horizontal plane is defined as the Y direction, and the direction orthogonal to the X direction and the Y direction is defined as the Z direction.

As shown in FIGS. 1 to 3, the camera module assembling device 2 includes a mounting platform 10 for mounting the sensor unit SU and a sensor for mounting the sensor unit SU on the mounting platform 10. Sensor unit transfer device 20; and platform transfer device 30 for transferring mounting platform 10; coating device 40 for coating sensor unit SU with hardening resin; and lens unit transfer for transferring lens unit LU Device 50; and an optical axis adjustment device 60 for performing optical axis adjustment of the sensor unit SU on the lens unit LU; and coating the sensor unit SU on the sensor unit SU in order to adhere the sensor unit SU to the lens unit LU And a distance measuring device 90; and a controller 80 that outputs a specific control signal in order to control each device.

The sensor unit transfer device 20 includes a holder 21 that can switch the holding of the sensor unit SU and the release of the holding, and a holder moving mechanism 22 that executes the movement of the holder 21. Controller 80 through hold The tool moving mechanism 22 executes the movement of the tool 21 in the X direction while the sensor unit SU is held.

The platform transfer device 30 includes a rail 31 extending in the X direction, and a slide member 32 that can move freely on the rail 31. The controller 80 executes the movement of the sliding member 32 along the rail 31 through the sliding member 32. The 6-axis calibration unit 62 of the optical axis adjustment device 60 is fixed to the sliding member 32, and the mounting platform 10 is supported by the 6-axis calibration unit 62. Therefore, as the sliding member 32 moves along the rail 31 in the X direction, the mounting platform 10 also moves in the X direction together with the 6-axis calibration unit 62. The platform transfer device 30, the optical axis adjustment device 60, and the like constitute an optical axis adjustment unit in the present invention. The details of the 6-axis calibration unit 62 will be described later.

The coating device 40 applies a curable resin to a coating surface (upper surface) of the sensor unit SU located on the mounting platform 10 under the control of the controller 80.

The lens unit transfer device 50 includes a holder 51 that can switch the holding and release of the lens unit LU, and a holder moving mechanism 52 that executes the movement of the holder 51. The controller 80 executes the movement of the holder 51 in the X direction while holding the lens unit LU through the holder moving mechanism 52. The details of the holder 51 will be described later. The lens unit transfer device 50 constitutes a lens element transfer mechanism in the present invention, and the holder moving mechanism 52 constitutes a transfer unit in the present invention. At the same time, the lens unit transfer device 50 constitutes a reference position adjustment unit in the present invention.

As shown in FIG. 4, the lens unit LU constitutes a lens element in the present invention and includes: a lens barrel LT; and a fixed lens LX fixed to the lens barrel LT; and an optical axis common to the fixed lens LX, And a focusing lens LF held by the lens barrel LT freely movable in the optical axis direction; and a lens driving motor LM that performs movement of the focusing lens LF in the optical axis direction; and formed in the lens barrel LT, An input terminal LN for supplying a specific power to the lens driving motor LM. Once a specific voltage is input to the input terminal LN, the lens driving motor LM executes the movement of the focus lens LF in accordance with the input voltage condition. For example, when the voltage is not input to the input terminal LN, the focus lens LF becomes the initial position (refer to FIG. 4 (A)). In addition, when the voltage input to the input terminal LN is V1, focus The lens LF becomes the INF position (infinity focal position) (refer to FIG. 4 (B)). Although the illustration is omitted, when the voltage input to the input terminal LN is V2, the focus lens LF is at another position (for example, a macro position).

As shown in FIG. 5, the holder 51 is a member that performs the holding of the lens unit LU in a state where the “adhesive surface LY (lower surface) of the sensor unit SU” is opened, and is provided with: The first and second arms 51A and 51B held by the unit LU; the arm moving portion 51M that can change the relative position of the first and second arms 51A and 51B; and the output terminal 51U for supplying specific power to the lens unit LU; and Under the control of the controller 80, a power controller 51P that outputs power of a specific condition from the output terminal 51U. The arm moving portion 51M constitutes an arm moving mechanism in the present invention, Change the relative positions of the first and second arms 51A, 51B between the state of the lens unit LU (refer to Figure 5 (B)) and the state in which the holding has been released (refer to Figure 5 (A)). When the first to second arms 51A and 51B can hold the lens unit LU (refer to FIG. 5 (B)), the output terminal 51U and the input terminal LN of the lens unit LU are electrically connected. The holder 51 preferably further includes: a pushing member 51T that pushes the second arm 51B toward a state capable of holding the lens unit LU (refer to FIG. 5 (B)). For example, the pushing member 51T is preferably provided in the arm moving portion 51M. By pushing the member 51T, the holding of the lens unit LU by the holder 51 can be performed more reliably.

The holder 51 preferably includes a pushing member 51S for pushing the output terminal 51U. As for the ejection member 51S, a conventional ejection member such as a coil spring and a leaf spring can be used. According to this spring pushing member 51S, when the first to second arms 51A and 51B are in a state capable of holding the lens unit LU (refer to FIG. 5 (B)), the output terminals 51U and the input terminals LN are electrically connected. Become true.

Another example of the structure of the holder 51 is shown in FIG. 19. The holder 51 includes: first to second arms 51A and 51B for holding the lens unit LU; and an arm moving part 51M capable of changing the relative position of the first to second arms 51A and 51B; and toward the lens unit LU An output terminal 51U that supplies specific power.

The first arm 51A is formed with a concave portion 51D for receiving a part of the lens unit LU, and is fixed to the base portion 51G. The second arm 51B forms a guide mechanism 51H that can follow a rail-like shape provided on the base portion 51G. The first arm 51A can move relatively freely, and can be relatively approached and separated from the first arm 51A. The arm moving portion 51M is integrally provided on the base portion 51G. In particular, the cam 51J can be rocked by a motor not shown in the drawing. By the raising operation of the cam 51J, the second arm 51B abutting on the cam 51J can move along the guide mechanism 51H. The urging member 51T is a tension spring, so that the second arm 51B and the cam 51J are always in close contact with each other.

Therefore, as shown in FIG. 19 (A), in a state where the second arm 51B has been separated from the first arm 51A, the lens unit LU is positioned on the concave portion 51D of the first arm 51A, and then as shown in FIG. 19 (B) As shown, the cam 51J is caused to swing, and the second arm 51B approaches the first arm 51A. As a result, the output terminal 51U contacts the input terminal of the lens unit LU, and the lens unit LU is held by the first arm 51A and the second arm 51B at the same time.

In this state, by using the holder moving mechanism 52 that can move in the X direction and / or Y direction, the holder 51 is moved in the X direction and / or Y direction, so that the lens unit LU can be set at the reference position and Move between optical axis adjustment points.

As shown in FIG. 6, the optical axis adjustment device 60 includes a chart unit 61, a 6-axis calibration unit 62, and a control unit 63.

The chart unit 61 uses the image sensor S of the sensor unit SU to capture an image of a test chart formed by the lens L of the lens unit LU. Here, the test chart may be built in the chart unit 61. In addition, the chart unit 61 performs specific image analysis on the captured image. Moreover, the chart unit 61 calculates the shift amount of the optical axis between the lens L and the image sensor S as the analysis result. In addition, the chart unit 61 Based on the calculated offset, a correction condition of the 6-axis calibration unit 62 is output. Here, the correction condition is used to perform the adjustment of the optical axis between the lens L and the image sensor S, and more specifically, the movement direction in the X direction, the Y direction, and the Z direction and the amount of movement thereof; and X-axis, Y-axis, Z-axis shaking directions and their shaking angles.

The chart unit 61 includes a built-in correction condition calculation device controlled by a computer not shown in the drawing, and a pattern plate for focus determination (sometimes referred to as a test chart). An image sensor of the sensor unit SU is used. S photographs the pattern plate for focus determination, and analyzes the output with the correction condition calculation device. An example of the focus determination pattern plate F is shown in FIG. 14 (A). A striped pattern F1 is drawn on the focus determination pattern plate F. In the image in which the stripe pattern F1 is captured, when the focus is consistent, the density of the image (the difference between light and dark between the black and white of the output signal) becomes larger, and when the focus is not consistent (blur), the density becomes smaller. Further, a cross pattern F2 for determining the center is drawn on the focus determination pattern plate F. In this way, the plate center F3 can be determined. In addition, the rotation angle around the Z axis can be determined by the angle of the striped pattern F1 or the cross pattern F2.

FIG. 14 (B) schematically shows a state in which the focus determination pattern plate F is captured by the image sensor S. Let G be the data area (frame) captured by the image sensor S, and define the screen center E of the data area G. With respect to the screen center E, a plurality of surrounding areas (here: The pixel group at 4) positions is defined as the surrounding pixels A to D. The correction condition calculation device calculates an error Gxs between the "screen center E" and the "plate center F3 displayed in the data area G" in the X-Y direction, Gys. In addition, an error Gzt around the Z axis is calculated based on the difference between the "cross pattern F2 displayed in the data area G" and the "screen reference lines KX, KY in the X and Y directions of the data area G". The above-mentioned errors Gxs, Gys, Gzt become: X offset, Y offset, and Z tilt used to align the center of the sensor unit SU with the center of the chart unit 61 (rotate around the Z axis; meaning around Z (Rotation of the shaft).

Although in the above description, the errors Gxs and Gys in the XY direction between the "screen center E" and the "plate center F3 displayed in the data area G" are used as the X offset and Y offset correction conditions, the present invention It is not limited to this. For example, the center of the lens L of the lens unit LU becomes the brightest position in the image of the image sensor S, and gradually darkens in a ring shape as it spreads toward the surroundings. Therefore, by analyzing the "image captured by the image sensor S", the brightest area in the data area G can be determined as the lens center FM, and the "the lens center FM" and the "data area G Errors Gxs and Gys in the X and Y directions between the center of the screen E ″ are used as correction conditions for the X offset and the Y offset. Such a method is effective when the center of the lens L of the lens unit LU does not coincide with the center of the focus determination pattern plate F.

In addition, with the 6-axis calibration unit 62, the sensor unit SU is raised in the Z-axis direction (moves in a positive direction to approach the lens L), and at the same time, in a plurality of positions in the Z-axis direction, the image sense is used The tester S captures the focus determination pattern F. The correction condition calculation device calculates the difference in lightness and darkness (difference in light and darkness) BW in the surrounding pixels A to D, and changes the output of the difference in lightness and darkness BW generated by the movement in the Z direction. And calculate the tilt error. Specifically, as shown in Figs. 15 (A) to (D), for each of the peripheral pixels A to D, the peak point (peak) of the difference in lightness and darkness (darkness difference) with the movement in the Z direction is determined. point) (also known as the best focus) in the Z direction (ie, the Z direction focus position) ZA, ZB, ZC, ZD. When the best focus timing is the focus position ZA, ZB, ZC, ZD in the Z direction, and when the peripheral pixels A to D are offset from each other, it can be defined as the optical axis of the image sensor S and the lens L Since the optical axis of the lens has an angular difference, in order to make the focus position in the Z direction be substantially the same for all the surrounding pixels A to D, the sensor unit SU is tilted around the Y axis and around the X axis.

For example, suppose the following case: As shown in FIG. 15 (E), pixel A and pixel B having an actual distance Xab in the X-axis direction are analyzed, and calculations are performed as shown in FIG. 15 (A), ( As shown in B), the difference between the in-focus position in the Z direction of the pixel A and the pixel B is the actual distance Zab (= ZA-ZB) in the Z-axis direction. Not only that, by calculating the inclination angle of the hypotenuse of the right triangle with the two actual distances Xab and Zab according to the relational expression of FIG. 15 (F), the optical axis around the Y axis is determined. Tilt offset Gyt. Similarly, suppose the following case: As shown in FIG. 15 (E), pixel A and pixel C having actual distance Yac in the Y-axis direction are analyzed, and calculations are performed as shown in FIGS. 15 (A) and (C). ), The difference between the in-focus position in the Z direction of the pixel A and the pixel C is the actual distance Zac (= ZA-ZC) in the Z-axis direction. In addition, as shown in Fig. 15 (G), by calculating these two actual distances Yac, Zac as right-angled triangles of adjacent sides The tilt angle of the hypotenuse determines the tilt offset Gxt of the optical axis around the X axis. The above-mentioned tilt shift amounts Gyt and Gxt are correction conditions for Y tilt and X tilt.

Here, an example in which the correction conditions for the X tilt and the Y tilt are calculated using the Z-direction in-focus positions ZA, ZB, and ZC of three pixels A to C will be described. That is, when the X tilt and the Y tilt are estimated, the calculation can be performed by using only three peripheral pixels A to C constituting the apex of the triangle. Alternatively, the calculation may be performed using four pixels A to D or four or more pixels. For example, as shown in FIG. 15 (E), "the average value of the Z-direction position of the pixel A and the pixel C at the same position in the X direction (ZA + ZC) / 2", and "the existence of The average value (ZB + ZD) / 2 of the Z-direction position of the pixel B and the pixel D at the same position in the X direction is used to calculate the tilt offset around the Y axis (the correction condition of the Y tilt). The same is true when calculating the tilt offset around the X axis.

In addition, the average value of the in-focus position in the Z direction of the peripheral pixels A to D becomes the setting condition Gzt of the final Z offset. On the other hand, the Z offset is an axis for a search operation in order to estimate other correction values. Therefore, the Z offset is not a concept of a so-called correction condition, but a final setting condition.

The above results can be used by the correction condition calculating means of the chart unit 61 to output the correction conditions for X offset, Y offset, Z offset, X tilt, Y tilt, and Z tilt (setting conditions for Z offset). Although in the above description, when determining the correction conditions of the X tilt and Y tilt, it is enumerated that the Where the trigonometric function of the difference and the distance to the pixel is calculated geometrically, but the present invention is not limited to this method.

The 6-axis calibration unit 62 is a member for supporting the mounting platform 10 and capable of individually adjusting the position and attitude of the mounting platform 10, and has an X offset mechanism 62XS that executes the movement of the mounting platform 10 in the X direction. ; Y offset mechanism 62YS that executes the movement of the placement platform 10 in the Y direction; Z offset mechanism 62ZS that executes the movement of the placement platform 10 in the Z direction; execution of the placement platform 10 in the "X-axis Ax extending in the X direction" (Refer to Fig. 7) X-tilt mechanism 62XT for posture adjustment of the "peripheral"; Y-tilt mechanism 62YT for posture adjustment of the mounting platform 10 "around the Y-axis Ay (refer to Fig. 8) extending in the Y direction" ; A Z tilt mechanism 62ZT that performs the posture adjustment of the mounting platform 10 "around the Z axis extending in the Z direction". The X-axis Ax and Y-axis Ay are set at locations separated from the image sensor S in the Z-axis direction.

FIG. 18 shows a specific configuration example of the 6-axis calibration unit 62. The 6-axis calibration unit 62 is fixed to the slide member 32 of the platform transfer device 30. The 6-axis calibration unit 62 includes a Z-offset mechanism 62ZS fixed to the slide member 32 and a slide member fixed to the Z-offset mechanism 62ZS X offset mechanism 62XS; Y offset mechanism 62YS fixed to the sliding member of the X offset mechanism 62XS; Z tilt mechanism 62ZT fixed to the sliding member of the Y offset mechanism 62YS; fixed to the Z tilt mechanism The Y tilt mechanism 62YT of the rotary table of 62ZT; and the X tilt mechanism 62XT fixed to the tilt table of the Y tilt mechanism 62YT. A mounting plate is provided on the tilt table of the X tilt mechanism 62XT. 台 10。 Taiwan 10. Therefore, the 6-axis calibration unit 62 is formed by stacking X and Y offset mechanisms 62XS and 62YS along the Z-axis direction; and X and Y tilt mechanisms 62XT and 62YT with a Z tilt mechanism 62ZT interposed therebetween.

In addition, for example, the driving mechanism of the X offset mechanism 62XS is an elastic member 65XS-B (such as a spring and rubber) that is connected between the base side and the sliding member and pushes the sliding member toward one of the sides; And a drive source 65XS-M (such as a servo motor and an electromagnetic coil) that drives the sliding member by a cam or the like against the elastic pushing of the elastic member 65XS-B. In addition, the driving mechanism of the Y tilting mechanism 62YT is an elastic member 65YT-B (such as a spring and rubber) connected between the base side and the tilting table to cause the tilting table to swing toward one of the sides; and A drive source 65YT-M (such as a servo motor and an electromagnetic coil) that opposes the elastic member 65YT-B and pushes the tilting table to the opposite side by a cam or the like. In this way, if the elastic member and the cam are assembled, the 6-axis calibration unit 62 can be driven with a very small overall structure. Although not shown in the drawing, the driving mechanism of the Y offset mechanism 62YS, the Z tilt mechanism 62ZT, and the X tilt mechanism 62XT also adopts the same structure.

According to the 6-axis calibration unit 62 of the present embodiment, the X and Y tilting mechanisms 62XT and 62YT are close to the mounting platform 10, so that the tilting radii R _X and R _Y can be reduced, and the offset error during tilt control described later can be reduced. In addition, each of the tilt axes Ax and Ay of the X and Y tilt mechanisms 62XT and 62YT is placed in a place separated from the Z axis direction with the center of the sensor unit SU as a reference, so that the deviation in the Z direction during tilt control can be reduced As a result, the "shift in the Z direction (searching range) for capturing a test chart" can be reduced stepwise in the iterative process of the "intermediate stage" described later.

The control unit 63 includes an input-output unit 63A, a determination unit 63B, a setting unit 63C, and a driving unit 63D.

The input / output unit 63A can input external control signals and can output specific control signals to the outside. The control signals input from the outside include, for example, specific control signals output by the controller 80 and correction conditions of the 6-axis calibration unit 62 output by the chart unit 61. The control signals output to the outside include, for example, a control signal indicating that the offset adjustment of the mounting platform 10 has ended, and a control signal indicating that the tilt adjustment of the mounting platform 10 has ended.

The determination section 63B performs determination processing. The determination processing is performed to determine whether or not the input correction conditions for the 6-axis calibration unit 62 are within the allowable range of light irradiation such as ultraviolet rays. In addition, the determination process executes a determination of "whether the input correction condition of the 6-axis calibration unit 62 is within the movable range of the 6-axis calibration unit 62". Here, the movable range of the so-called 6-axis calibration unit 62 means: the moving direction and the amount of movement in the X, Y, and Z directions; and the shaking directions and shaking around the X, Y, and Z axes angle.

The setting section 63C performs setting processing. The setting process is to set the driving conditions for the X offset mechanism 62XS, the Y offset mechanism 62YS, the Z offset mechanism 62ZS, the X tilt mechanism 62XT, the Y tilt mechanism 62YT, and the Z tilt mechanism 62ZT based on the determination result of the determination unit 63B. For example That is, when the correction condition of the 6-axis calibration unit 62 is determined by the determination unit 63B to fall within the movable range of the 6-axis calibration unit 62, the setting unit 63C sets the 6-axis calibration unit based on the correction conditions of the 6-axis calibration unit 62. Driving conditions of the calibration unit 62.

In addition, when "the correction condition of the 6-axis calibration unit 62 is determined by the determination unit 63B to fall outside the movable range of the 6-axis calibration unit 62", the setting unit 63C is within the movable range according to the 6-axis calibration unit 62's The correction conditions are set for the driving conditions of the 6-axis calibration unit 62. For example, in the case where "only the shaking angle around X in the correction conditions exceeds the movable range, and other correction conditions are in the movable range", the setting unit 63C is a predetermined X about the shaking around the X axis. The maximum value of the swing angle around the axis is replaced with new correction conditions. For the offset control of the X-axis to the Z-axis, and the swing around the Y-axis and the Z-axis, the 62YS of each mechanism is set according to the original correction conditions ~ 62ZT driving conditions.

In addition, the setting process is to maintain the state where the optical axis of the lens L and the optical axis of the image sensor S coincide with each other (hereinafter, " It is called a consistent state), and the driving conditions and driving order for each mechanism 62XS ~ 62ZT are set. The coincidence state of the optical axis referred to in this embodiment is a hypothetical state, which is a state in which the pixel center of the image sensor S and the center of the test chart taken are consistent, that is, used to perform tilting. Ready for adjustment. After that, for example, in a case where the swing of the mounting platform 10 is performed only by the X tilt mechanism 62XT, it is assumed that In the determination process, first, the amount of shift between the optical axis of the lens L and the optical axis of the image sensor S in a state (assuming a driving state) after the mounting platform 10 is shaken is calculated. Next, the driving conditions of the Y-offset mechanism 62YS and the Z-offset mechanism 62ZS that can eliminate the offset are calculated. In addition, the driving conditions of the entire 6-axis calibration unit 62 are set so that the driving of the X tilt mechanism 62XT and the driving of the Y offset mechanism 62YS and the Z offset mechanism 62ZS are performed simultaneously.

The detailed structure of the setting process in the setting unit 63C is shown in FIG. 16 (A). Here, the correction conditions (setting conditions) of the X offset, Y offset, Z offset, X tilt, Y tilt, and Z tilt obtained from the chart unit 61 are used, and they are converted and calculated for each mechanism 62XT ~ 62ZT Step of driving the indicated value (driving condition). The setting unit 63C includes X offset value conversion means 63Cxs that converts the input of the X offset into the drive instruction value, Y offset value conversion means 63Cys that converts the input of the Y offset into the drive instruction value, and Z offset value conversion means 63Czs that converts input into drive instruction value, X slope value conversion means 63Cxt that converts X slope input into drive instruction value, Y slope value conversion means 63Cyt that converts input into Y slope into drive instruction value The Z-tilt value conversion means 63Czt that converts the input of the Z-tilt into a driving instruction value. Each input of X offset, Y offset, Z offset, X tilt, Y tilt, and Z tilt can be an absolute value or a relative movement amount from a current value. In short, in the setting section 63C, the absolute value of X offset, Y offset, Z offset, X tilt, Y tilt, Z tilt, or the relative movement amount from the current value can be input, and the required value can be converted into Drive indicated value.

The X offset value conversion means 63Cxs directly converts the X offset correction condition Gxs of the input setting unit 63C into the X-direction movement control value Uxs of the X offset mechanism 62XS and outputs it. The Y offset value conversion means 63Cys directly converts the Y offset correction condition Gys into the Y-direction movement control value Uys of the Y offset mechanism 62YS and outputs it. The Z offset value conversion means 63Czs directly converts the Z offset correction condition Gzs into the Z-direction movement control value Uzs of the Z offset mechanism 62ZS and outputs it. Only in this embodiment, since the Z offset setting condition Gzs becomes "a required value as an absolute value", the Z-direction movement control value Uzs is also output as an absolute value.

The X tilt value conversion means 63Cxt directly converts the X tilt correction condition Gxt of the input setting unit 63C into the X axis rotation control value Uxt of the X tilt mechanism 62XT, and outputs it. Here, when the "X-axis rotation control value Uxt is positive (positive rotation)" means that the sensor surface SC moves toward the plus side in the Y direction. Therefore, in a case where the tilting radius of the X tilting mechanism 62XT is Rx (refer to FIG. 7 and will be described in detail later), if it is assumed that the X tilting mechanism 62XT only shakes the assumed driving state of the X-axis rotation control value Uxt, then As shown in FIG. 16 (B), the sensor surface SC located at the rocking end of the rocking radius is caused to move toward the positive side in the Y direction by a distance Hys. Therefore, the X tilt value conversion means 63Cxt outputs the Y-direction recovery control value Fys at the same time in order to offset the distance Hys that the shaking end moves toward the Y direction. This Y-direction recovery control value Fys becomes "-Hys", and Fys = -Rx * sin (Uxt) can be calculated geometrically. In addition, if it is assumed that the X tilt mechanism 62XT only shakes the assumed driving state of the X-axis rotation control value Uxt, it is as shown in FIG. 16 As shown in (B), the sensor surface SC located at the shaking end is caused to move toward the negative (minus) side of the Z direction by a distance of Hzs (x). Therefore, the X-slope value conversion means 63Cxt outputs the Z-direction recovery control value Fzs (x) at the same time in order to offset the distance Hzs (x) at which the shaking end moves in the Z direction. This Z-direction recovery distance Fzs (x) becomes "Hzs (x)", and Fzs (x) = Rx (1-cos (Uxt)) can be calculated geometrically. These Y-direction recovery control values Fys and Z-direction recovery control values Fzs (x) can be collectively defined as the recovery control values when X is tilted. In this embodiment, since the "X-axis Ax is separated from the image sensor S toward the Z-axis direction" and "the X-axis rotation control value Uxt is small", the value of the Z-direction restoration control value Fzs (x) becomes smaller Therefore, the control based on this value can also be omitted. In addition, even if the recovery control in the Z direction is not performed, the final positioning in the Z direction is only necessary to additionally adopt the finally determined Z direction correction conditions. As described above, the X tilt value conversion means 63Cxt outputs the X-axis rotation control value Uxt, the Y-direction recovery control value Fys, and the Z-direction recovery control value Fzs (x) according to the input of the X tilt correction condition Gxt.

The Y tilt value conversion means 63Cyt outputs the Y tilt correction condition Gyt of the input setting unit 63C as a Y-axis rotation control value Uyt of the Y tilt mechanism 62YT. Here, when the "y-axis rotation control value Uyt is positive (positive rotation)", it means that the sensor surface SC moves toward the plus side in the X direction. Therefore, in a case where the tilting radius of the Y tilting mechanism 62YT is taken as Ry (please refer to FIG. 8 and will be described in detail later), if it is assumed that the Y tilting mechanism 62YT only shakes the assumed driving state of the Y axis rotation control value Uyt, As shown in Figure 16 (C), The sensor surface SC at the shaking end moves toward the positive side in the X direction by a distance Hxs. Therefore, the Y tilt value conversion means 63Cyt outputs the X-direction recovery control value Fxs at the same time in order to offset the distance Hxs of the shaking end moving in the X direction. This X-direction recovery control value Fxs becomes "-Hxs", and Fxs = -Ry * sin (Uyt) can be calculated geometrically. In addition, if it is assumed that the Y tilting mechanism 62YT only shakes the hypothetical driving state of the Y-axis rotation control value Uyt, as shown in FIG. 16 (C), the sensor surface SC at the shaking end is caused to face the Z direction. The negative (minus) side forms a movement from Hzs (y). Therefore, the Y tilt value conversion means 63Cyt outputs the Z-direction recovery control value Fzs (y) at the same time in order to offset the amount of distance Hzs (y) that the shaking end moves toward the Z direction. This Z-direction recovery distance Fzs (y) becomes "Hzs (y)", and Fzs (y) = Ry (1-cos (Uyt)) can be calculated geometrically. These X-direction recovery control values Fxs and Z-direction recovery control values Fzs (y) can be collectively defined as the recovery control values when the Y is tilted. In this embodiment, since the "Y-axis Ay is separated from the image sensor S toward the Z-axis direction" and "the Y-axis rotation control value Uyt is small", the value of the Z-direction restoration control value Fzs (y) becomes smaller, Therefore, control based on this value may be omitted. As described above, the Y tilt value conversion means 63Cyt outputs the Y-axis rotation control value Uyt, the X-direction recovery control value Fxs, and the Z-direction recovery control value Fzs (y) according to the input of the Y tilt correction condition Gyt.

The Z tilt value conversion means 63Czt outputs the Z tilt correction condition Gzt of the input setting unit 63C as the Z axis rotation control value Uzt of the Z tilt mechanism 62ZT. In the case of X-axis rotation control, resume control System becomes unnecessary.

The driving section 63D controls each mechanism 62YS to 62ZT of the 6-axis calibration unit 62 according to the driving conditions set by the setting section 63C.

As shown in FIGS. 1 to 3, the distance measuring device 90 includes a laser displacement meter 92 and a laser displacement meter 95. A laser displacement meter can also serve as both laser displacement meter 92 and laser displacement meter 95.

As shown in FIGS. 7 to 8, the laser displacement meter 92 is used to calculate the inclination radii R _X and R _Y of the sensor surface SC of the sensor unit SU placed on the mounting platform 10. Let "the height from the X axis A _X to the laser displacement meter 92" be K _X and "the distance to the sensor surface SC of the sensor unit SU measured by the laser displacement meter 92" be H In this case, the inclination radius R _X of the sensor surface SC of the sensor unit SU using the X axis A _X as a reference is represented by (K _X -H) (refer to FIG. 7). Similarly, when "the height from the Y axis A _Y to the laser displacement meter 92" is used as K _Y , the inclination radius of the sensor surface SC of the sensor unit SU using the Y axis A _Y as a reference R _Y is represented by (K _Y -H) (please refer to Figure 8). The values of the inclination radii R _X and R _Y calculated by each of the image sensors S using the laser displacement meter 92 are held by the controller 80 or the control unit 63. Although the above lists the case where "the inclination radii R _X and R _{Y are} calculated for each of the mounted image sensors S", the controller can also be preset by the controller when the mounting error is small or the accuracy is not so required. 80 or the control unit 63 holds "the inclination radii R _X and R _{Y which} become a fixed value".

As shown in FIG. 4 (A), the laser displacement meter 95 is used to calculate the distance H _{LF to the} “focus lens LF of the lens unit LU held by the lens unit transporting device 50”. The controller 80 uses the laser displacement meter 95 and the power controller 51P of the holder 51 to set the voltage value of "setting the position of the focus lens LF of the lens unit LU to a specific position".

Next, a method 100 for manufacturing a camera module will be described with reference to FIG. 9.

A method 100 for manufacturing a camera module includes a transfer step 110 of individually transferring a sensor unit SU and a lens unit LU toward a specific place, and a sensor mounting step of placing the sensor unit SU on the mounting platform 10. 120; step 130 of applying a hardening resin to the mounted sensor unit SU; step 140 of calculating a tilt radius for calculating a tilt radius of the sensor surface SC; reference position detection of a reference position of the detection lens L Measurement step 150; Reference position setting step 160 for setting the reference position of the lens L; Optical axis adjustment step 170 for performing optical axis adjustment between the lens L and the image sensor S; Fixing the lens unit LU to the sensor unit SU Fixed step 180.

Next, a method 100 for manufacturing a camera module performed by the camera module assembling device 2 (refer to FIG. 1 and the like) will be described.

<Sensor placement procedure and painting procedure>

In FIG. 1, the sensor unit transporting device 20 transports the sensor unit SU toward the mounting platform 10, and places the sensor unit SU at a specific position on the mounting platform 10 (X-axis and Y At the intersection of the axes) (see Figure 2). In the optical axis adjustment device 60, the mounting platform 10 is connected The position of the sensor unit SU is defined as a "component supply point". In addition, the coating device 40 coats the sensor unit SU disposed on the mounting platform 10 with a specific curable resin.

<Calculation procedure of tilt radius>

The platform transfer device 30 transfers the mounting platform 10 from the component supply point to the vicinity of the laser displacement meter 92. At this time, the intersection point of the X-axis and the Y-axis is located on the optical axis 92A of the laser displacement meter 92 (refer to FIG. 7). After that, the laser displacement meter 92 measures the "distance H to the sensor surface SC of the sensor unit SU measured by the laser displacement meter 92", and then calculates the inclination of the sensor surface SC. Radius R _X , R _Y.

<Reference position detection procedure>

The lens unit transfer device 50 uses the first and second arms 51A and 51B to hold the lens unit LU (refer to Figure 5 (B)), and transfers the lens unit LU to the vicinity of the laser displacement meter 95 (refer to (Figure 2). Next, the controller 90 outputs a specific voltage V from the output terminal 51U through the power controller 51P. At this time, since the output terminal 51U is electrically connected to the input terminal LN of the lens unit LU, power is supplied to the lens unit LU, and the focus lens LF moves in response to the output voltage V. The laser displacement meter 95 measures "the distance H _LF to the focusing lens _LF ". The controller 90 determines whether the focus lens LF is located at the INF position according to the distance H _LF measured by the focus lens LF. When the position of the focus lens LF is determined to be a position other than the INF position, the controller 90 changes the “voltage output from the output terminal 51U” through the power controller 51P, and performs a determination as to whether the focus lens LF is located at the INF position. This voltage change and the position determination of the focus lens LF are repeatedly performed until the position of the focus lens LF is determined to be located at the INF position. The "reference position" or "INF position" in this embodiment is not limited to the so-called origin position. For example, it includes the concept of "target value" as long as the focus lens LF is positioned according to the specifications at the time of assembly. That is, when a desired offset is formed from the origin position and assembly is performed, an arbitrary offset position is defined as a so-called reference position.

<Reference position setting procedure>

When the position of the focus lens LF is determined to be the INF position, the controller 90 sets a voltage value corresponding to the INF position as the reference voltage value V1. After the reference position setting step 160 and at least the optical axis adjustment step 170 (in this embodiment, the fixed step 180), the controller 90 maintains the output of the reference voltage from the output terminal 51U through the power controller 51P State of value V1. A place where the "adjustment of the focus lens LR located in the lens unit LU toward the reference position" is performed is defined as a "reference position set point".

<Basic Position Holding Procedure and Optical Axis Adjustment Procedure>

The platform transfer device 30 transfers the mounting platform 10 to the vicinity of the optical axis adjustment device 60, and the lens unit transfer device 50 transfers the lens unit LU to the vicinity of the optical axis adjustment device 60 (refer to FIG. 3). Optical axis adjustment In terms of steps, the optical axis adjustment device 60 executes the light between the "lens L provided in the lens unit LU" and the "image sensor S provided in the sensor unit SU" using a specific test chart. Axis adjustment.

Meanwhile, in the reference position maintaining step, during the optical axis adjustment between the lens L and the image sensor S, the lens unit transporting device 50 holds the lens unit LU and maintains the "power condition supplied to the lens unit LU" , Keep the focus lens LF at the reference position continuously.

A place where the optical axis adjustment between the lens L and the image sensor S is performed is defined as an "optical axis adjustment point". In the optical axis adjustment step of this embodiment, instead of moving the lens unit LU, the sensor unit SU is positioned and the optical axis is adjusted. In this way, since the lens unit LU can be stopped, vibrations or resonances of the built-in spring and the built-in steel cable for holding the focus lens LF can be suppressed, and the positioning accuracy of the optical axis can be improved. In addition, by maintaining the power supply to the lens unit LU, it is also possible to maintain "the vibration suppression of the focus lens LF during the optical axis adjustment". In particular, when a lens unit LU, such as a mechanical shake correction mechanism, is built in, even a slight vibration will cause the focus lens LF and the like to vibrate. Therefore, if the lens unit LU is caused to move and the optical axis adjustment is performed at the same time, the error of the optical axis adjustment will increase.

<Fixing step>

After the optical axis is adjusted, the irradiation device 70 irradiates a specific light onto the curable resin coated on the sensor unit SU. In this way, the adhesive surface of the lens unit LU is adhered to the coating surface of the sensor unit SU, and the assembly can be performed. Camera module.

The power controller 51P maintains a state in which the reference voltage value V1 is output from the output terminal 51U from the reference position setting step 160 to at least the optical axis adjustment step 170 (up to the fixed step 180 in this embodiment). . Therefore, the focus lens LF maintains the reference position during the reference position setting step 160 to the fixing step 180. Accordingly, since the relative position between the lens unit LU and the sensor unit SU in the fixing step 180 is adjusted in the previous optical axis adjustment step 170, the "caused by positive The focus position reproduction step is misplaced ", and the camera module can be assembled. In other words, according to the present invention, a manufacturing error between the lens unit LU and the sensor unit SU can be made extremely small. In addition, since the setting of the reference position is completed once during the reference position setting step 160 to the fixing step 180, the shortest assembly time can be achieved.

In addition, since the energization of the lens unit LU is also maintained in the optical axis adjustment step 170, the vibration of the focus lens LF is suppressed, and the adjustment accuracy of the optical axis can be improved. In particular, since the optical axis is adjusted by positioning and controlling the sensor unit SU side while the lens unit LU is at a standstill, the accuracy of adjusting the optical axis can be greatly improved.

As described above, according to the present invention, the camera module can be assembled with high accuracy and in a short time.

In addition, in the focusing step described in Patent Document 1, the movement of the lens to the reference imaging element cannot be performed only by the direction of the optical axis of the lens, and cannot correspond to a direction crossing the optical axis direction and crossing the optical axis or the optical axis Tilt adjustment around the axis of direction. However, according to the present invention, the optical axis adjustment (to be described later) of the optical axis adjustment device 60 can perform offset adjustment in the X-axis to Z-axis directions and tilt adjustment in the periphery of the X-axis to Z-axis.

Next, the optical axis adjustment of the optical axis adjustment device 60 will be described.

As shown in FIG. 6, the chart unit 61 captures a specific test chart through the imaging window 61W and the lens L of the lens unit LU provided below.

<Initial stage>

In the initial stage, the image sensor S is not moved in the Z direction, but is stationary at a specific position in the Z direction, and a test chart is captured. Next, the chart unit 61 outputs an offset correction condition and a tilt correction condition of the 6-axis calibration unit 62 through image analysis of the captured image of the test chart. The offset correction condition of the 6-axis calibration unit 62 here is a condition that the optical axis of the lens L and the optical axis of the image sensor S coincide in a specific plane. For example, in a case where the optical axis of the lens L and the optical axis of the image sensor S are made to coincide with each other in the XY plane, the offset correction condition is: a movement direction in the X direction to a Y direction and a movement amount thereof X-offset correction conditions Gxs and Y-offset correction conditions Gys. In addition, the tilt correction condition is a condition in which the X-Y axis of the image sensor S and the X-Y axis of the test chart coincide, and is a Z tilt correction condition Gzt that is a rotation direction and a rotation amount around the X axis.

Offset of 6-axis calibration unit 62 output from chart unit 61 The shift correction condition and the tilt correction condition are input to the control unit 63. The control unit 63 executes the offset adjustment and the tilt adjustment of the mounting platform 10 through specific determination processing and setting processing according to the offset correction conditions of the 6-axis calibration unit 62. Specifically, "the X-direction movement control value Uxs obtained by the X offset value conversion means 63Cxs" and "the Y-direction movement control value Uys obtained by the Y offset value conversion means 63Cys" are used in the X direction and the Y direction The offset adjustment is performed to form a consistent state where the optical axis of the lens L and the optical axis of the image sensor S are aligned in a specific plane (for example, the XY plane). In addition, using the Z-axis rotation control value Uzt obtained by the Z tilt value conversion means 63Czt, the mounting platform 10 is tilt-adjusted in the Z direction to form a state in which the XY axis of the image sensor S and the XY axis of the test chart coincide. . After the offset adjustment and the tilt adjustment of the placement platform 10 are completed, the control unit 63 outputs a control signal indicating that the offset adjustment and the tilt adjustment of the placement platform 10 have ended to the chart unit 61. In this way, the X-offset adjustment, Y-offset adjustment, and Z-tilt adjustment performed in the initial stage are completed. Incidentally, in this initial stage, X tilt adjustment and Y tilt adjustment are not performed. That is, the coincidence state of the optical axes referred to in the present embodiment means a state in which the centers and X-Y coordinates of the chart unit 61 and the image sensor S are aligned.

<Intermediate stage>

Once a control signal indicating that the offset adjustment of the initial stage of the mounting platform 10 has been completed is input to the chart unit 61, the chart unit 61 will again perform shooting of a test chart for adjusting the X tilt, Y tilt, and Z offset. In this case, as shown in FIG. 15 (A), the mounting platform 10 is caused to move in the Z direction, and a test chart is captured at a plurality of positions in the Z direction. Next, the chart unit 61 calculates the tilt correction conditions of the 6-axis calibration unit 62 based on the image analysis of the shooting result. This tilt correction condition is to make the optical axis of the lens L and the optical axis of the image sensor S coaxial, and the condition for adjusting the posture of the mounting platform 10 is based on the aforementioned tilt radii R _X and R _Y Calculated. The graph unit 61 then outputs the calculated tilt correction conditions. The tilt correction conditions of the 6-axis calibration unit 62 are, for example, X tilt correction conditions Gxt and Y tilt correction conditions Gyt, which are the shaking directions around the X-Y axis and the amount of shaking, and the Z offset correction conditions are the Z direction. The Z-offset correction condition Gzs of the moving direction and moving amount of. The Z-offset correction condition Gzs is a value that is used only during the final positioning (final stage) of the image sensor S.

The tilt correction conditions of the 6-axis calibration unit 62 output from the chart unit 61 are input to the control unit 63. The control unit 63 controls the 6-axis calibration unit 62 based on the tilt correction condition. That is, the control unit 63 executes the tilt adjustment of the mounting platform 10 while maintaining a consistent state in accordance with the tilt correction conditions of the 6-axis calibration unit 62. Specifically, according to the input of the X tilt correction condition Gxt, the X-axis rotation control value Uxt and the Y-direction recovery control value Fys (preferably the Z-direction recovery control value Fzs (x)) obtained by the X-tilt value conversion means 63Cxt are used. By controlling the 6-axis calibration unit 62, the X tilt adjustment to maintain a consistent state is achieved. Similarly, according to the input of the Y tilt correction condition Gyt, the Y-axis rotation control values Uyt, X square obtained by the Y tilt value conversion means 63Cyt are used. By controlling the 6-axis calibration unit 62 toward the recovery control value Fxs (preferably, the Z-direction recovery control value Fzs (y)), the Y tilt adjustment is maintained in a consistent state.

After the tilt adjustment of the mounting platform 10 is completed, the control unit 63 outputs a control signal indicating "the tilt adjustment of the mounting platform 10 has ended" to the chart unit 61. Once a control signal indicating that the posture adjustment of the mounting platform 10 has ended is input to the chart unit 61, the chart unit 61 will return to the processing of <Intermediate Phase>, and perform the calculation of the same tilt correction conditions as before, and then The result is output to the control unit 63.

When the second tilt correction condition is input to the control unit 63, the determination unit 63B determines that the second tilt correction condition is within the allowable range of light irradiation. That is, it is determined whether the X-tilt correction amount Gxt and the Y-tilt correction amount Gyt (that is, the amount of shift between the lens L and the optical axis of the image sensor S) are within an allowable range. Although the determination may be performed using the X tilt correction amount Gxt and the Y tilt correction amount Gyt, the determination can also be made using the "shift amount of the Z-direction focus positions ZA to ZD analyzed by the chart unit 61".

When the second tilt correction condition is determined to fall within the light irradiation allowable range, the tilt adjustment of the mounting platform 10 is not performed according to the second tilt correction condition, but enters the <final stage>.

<Final stage>

After the final positioning in the Z direction of the image sensor S is performed using the Z-offset correction condition Gzs which is an absolute value, a table is output to the controller 80 The control signals indicating that the tilt adjustment and offset adjustment of the mounting platform 10 have ended. The controller 80 uses the input of the control signal as a condition, and outputs a control signal of "irradiation start" to the irradiation device 70. The irradiation device 70 irradiates ultraviolet rays to the curable resin coated on the sensor unit SU under the condition of the input of a control signal of "irradiation start".

In the case where the second tilt correction condition is determined to fall outside the allowable range of light irradiation, the processing of <intermediate stage> is continued, and the 6-axis calibration unit 62 executes the load according to the second tilt correction condition. Set the tilt of the platform 10. After that, the control unit 63 outputs to the chart unit 61 a control signal indicating that "the second tilt adjustment of the mounting platform 10 has ended". Then, it returns to the process of <intermediate stage>, and performs recalculation of a tilt correction condition with respect to the mounting platform 10 which completed the 2nd tilt adjustment. From then on, until the recalculated tilt correction condition is judged to be within the allowable range of light irradiation and can enter the <final stage>, (1) the execution of specific judgment processing and setting processing for the recalculated tilt correction condition (2) The tilt adjustment of the mounting platform 10 that reflects the determination process and the setting process, and (3) the recalculation of the tilt correction conditions.

FIG. 17 shows a diagram in which “in the middle stage, the Z-direction focus positions of the peripheral pixels A to D analyzed by the chart unit 61” are superimposed and displayed. Figure 17 (A) is the first intermediate stage, Figure 17 (B) is the second intermediate stage, and Figure 17 (c) is the third intermediate stage. Although the focus position ZA ~ ZD in the Z direction is greatly shifted in the first time, the focus position ZA ~ ZD in the Z direction is shifted once in the second time. Anxiously approached. In the third time, the Z-direction focus positions ZA to ZD almost coincided. In the third time, the shift amount of the focus position ZA to ZD in the Z direction falls within the range of the specific range AP, so it enters the <final stage>. It can be seen from FIG. 17 that, in the intermediate stage, the search range Zsr that moves the image sensor S in the Z direction and captures images is necessary to set a wide range for the first time. Fortunately, setting the "average of the Z-direction focus positions ZA to ZD" as the center to make it narrower can shorten the shooting time.

As described above, in the control unit 63, the setting unit 63C sets the driving conditions and driving order of each mechanism 62XS ~ 62ZT in order to maintain a consistent state. Therefore, even if the tilt adjustment of the mounting platform 10 by each mechanism 62XT ~ 62ZT is performed, The position of the optical center of the image sensor of the sensor unit SU can also be fixed. In other words, when the tilt adjustment is performed, the offset amount in the XY plane direction generated by the tilt adjustment is calculated and offset control is performed in advance to cancel it. Therefore, during the tilt adjustment, the position of the swing end of the tilt radius becomes almost stationary. Can shorten the time required for tilt adjustment.

In addition, the control unit 63 sets the driving conditions of each mechanism 62XS ~ 62ZT of the 6-axis calibration unit 62 in accordance with the correction conditions of the 6-axis calibration unit 62 and the range outside the movable range by the determination unit 63B and the setting unit 63C This prevents "accidents such as the sensor unit SU coming into contact with surrounding devices and parts due to driving conditions outside the movable range."

Although in the above embodiment, the control unit 63 has a judgment Section 63B, but the present invention is not limited to this, and the determination section 63B may be omitted.

Although in the above embodiment, when the second tilt correction condition is input to the control unit 63, the determination unit 63B determines that the second tilt correction condition is within the allowable range of light irradiation, but the present invention is not limited to this In this case, when the first tilt correction condition is input to the control unit 63, the determination unit 63B may determine whether the first tilt correction condition is within the allowable range of light irradiation.

Although in the above embodiment, when the optical axis adjustment step 170 is performed, the optical axes of the lens L and the sensor S are oriented in a vertical direction, but the present invention is not limited thereto, and the optical axes may also be oriented in a horizontal direction. Hereinafter, the camera module assembling equipment 4 that "performs the optical axis adjustment to the optical axis in the horizontal direction" will be described with reference to FIGS. 10 to 13. The description of the camera module assembling equipment 4 is only for parts different from the above-mentioned embodiment, and the same components and parts are denoted by the same drawing numbers, and detailed descriptions thereof are omitted.

The camera module assembly equipment 4 includes a mounting platform 10, a sensor unit transfer device 20, a platform transfer device 30, a coating device 40, a lens unit transfer device 50, an optical axis adjustment device 60, an irradiation device 70, and a laser displacement. A meter 95, a posture switching device 200 for switching the posture of the 6-axis calibration unit 62, and a controller 80 that outputs specific control signals for controlling each device.

The mounting platform 10 includes a chuck mechanism 16. With the chuck mechanism 16, the holding of the “sensor unit SU placed on the mounting platform 10” and the release of the holding can be performed.

The posture switching device 200 includes a first bracket 201 provided on the sliding member 32, a second bracket 202 provided to be able to slide freely in the Z direction relative to the first bracket 201, and a second bracket 202 provided to face The Y-axis extends and supports a support shaft 203 of the 6-axis calibration unit 62; and a motor 204 for driving the support shaft 203.

The 6-axis calibration unit 62 is formed to support free rotation around the Y-axis by supporting the shaft 203. By rotating the 6-axis calibration unit 62 around the Y-axis, the mounting platform 10 can be switched freely between a horizontal state (please refer to Figs. 10 and 11) and a vertical state (please refer to Figs. 12 and 13). In addition, the 6-axis calibration unit 62 can move freely in the Z direction by the second bracket 202 sliding freely relative to the first bracket 201 (refer to FIGS. 11 and 12).

Next, an example of the assembly sequence of the camera modules in the camera module assembly equipment 4 is shown.

First, in FIG. 10, the sensor unit transporting device 20 transports the sensor unit SU toward the mounting platform 10, and places the sensor unit SU at a specific position on the mounting platform 10 (X-axis On the intersection with the Y axis). The chuck mechanism 16 holds the "sensor unit SU placed on the mounting platform 10." In this way, the sensor unit SU ″ mounted on the mounting platform 10 can be fixed to the mounting platform 10 in a positionally aligned state.

As shown in FIG. 11, the coating device 40 coats the sensor unit SU disposed on the mounting platform 10 with a specific curable resin.

As shown in FIG. 10, the lens unit transfer device 50 uses The first to second arms 51A and 51B hold the lens unit LU, and carry the lens unit LU to the vicinity of the laser displacement meter 95, and perform a reference position detection step and a reference position setting step. After the reference position detection step and the reference position setting step, the lens unit transporting device 50 uses the first to second arms 51A and 51B to separate the lens unit LU from the laser displacement meter 95 (refer to FIG. 11).

The attitude switching device 200 switches the mounting platform 10 from a horizontal state to a vertical state, and the second bracket 202 and the platform transfer device 30 slide the mounting platform 10 in a specific direction. In this way, the mounting platform 10 is transported to the vicinity of the laser displacement meter 95 in a vertical state (refer to FIG. 12). After that, the laser displacement meter 95 measures the "distance H to the sensor surface SC of the sensor unit SU measured by the laser displacement meter 95", and then calculates the inclination of the sensor surface SC. Radius R _X , R _Y.

The platform transfer device 30 transfers the mounting platform 10 to the vicinity of the chart unit 61, and the lens unit transfer device 50 transfers the lens unit LU to the vicinity of the chart unit 61 (refer to FIG. 13). The optical axis adjustment device 60 uses a specific test chart to perform optical axis adjustment between "the lens L provided in the lens unit LU" and "the image sensor S provided in the sensor unit SU".

After the optical axis is adjusted, the irradiation device 70 irradiates a specific light onto the curable resin coated on the sensor unit SU. As a result, the camera unit can be assembled as a result of adhering the lens unit LU to the coating surface of the sensor unit SU.

As described above, since the camera module assembly equipment 4 includes the posture switching device 200 for switching the posture of the 6-axis calibration unit 62, the mounting platform 10 can be in a vertical state, that is, the sensor unit SU and In a state where the optical axis direction of the lens unit LU approaches the horizontal direction of the use state, the optical axis adjustment is performed. Moreover, since the mounting platform 10 has the chuck mechanism 16, even if the direction of the optical axis forms a horizontal direction, the sensor unit SU does not fall off from the mounting platform 10. As a result, the optical axis adjustment can be performed in a horizontal state where the direction of the optical axis is close to the use state, and the lens unit LU which has become the actual use state is in an energized state. In addition, since the element surface of the sensor element SU and the lens surface of the lens unit LU may face a non-horizontal direction, more specifically, a vertical direction, it is possible to suppress dust from adhering to the surface or to allow the temporarily attached dust to fall naturally. And it has the advantage of "can reduce the risk of foreign objects entering the camera module".

In the above embodiment, when the optical axis of the sensor unit SU and the lens unit LU is adjusted, although the direction of the optical axis is a horizontal direction approaching the use state, the present invention is not limited to this. When the sensor When adjusting the optical axis of the unit SU and the lens unit LU, the direction of the optical axis may be an oblique direction crossing the vertical direction.

In addition, in the above-mentioned embodiment, although the correction condition calculation device of the controller 80, the control unit 63, the chart unit 61, and the inclination radius calculation means interlocking with the laser displacement meter 92 are shown separately, these The component is a concept that is integrated into the controller 80. As for the hardware, the component may be configured integrally or distributed.

The invention is not limited to the embodiments described above, It goes without saying that various changes can be added within the scope of the gist of the present invention.

Claims (23)

An optical module manufacturing device is an optical module manufacturing device that obtains an optical module by assembling a lens element having a lens to the optical element. The lens can be retracted at a reference position and from the reference position by inputting power. It is characterized in that it includes: a reference position setting unit that inputs power to the lens element and adjusts the position of the lens toward the reference position; and generates the lens at the reference position by power input. The optical axis of the optical element and the optical axis adjustment unit in a consistent state with the optical axis of the optical element; and a fixing unit that fixes the lens element and the optical element after the consistent state is reached; and an output terminal that outputs The terminal supplies the lens element with power for driving the lens between the reference position and the retracted position. The output terminal is used to adjust at least the position of the lens to the optical axis of the lens and the optical element. During the period of alignment, specific power is supplied to the lens element. The reference position setting unit adjusts the position of the lens toward the reference position, the reference position set point and the optical axis adjustment point where the optical axis adjustment unit generates the consistent state with respect to the optical axis of the lens element. Different from the orthogonal direction, the output terminal moves from the reference position setting point to the optical axis adjustment point together with the lens element in a state where a specific power is supplied to the lens element. According to the optical module manufacturing equipment described in the first item of the patent application scope, the optical axis adjustment unit shifts the posture of the optical element, and forms the aforementioned consistent state with the lens element. The optical module manufacturing equipment according to item 1 of the scope of patent application, wherein the output terminal is from the time when the lens and the optical axis of the optical element are aligned, and the lens element and the optical element are maintained in a consistent state. During the period until the fixing is performed, specific power is supplied to the lens element. The optical module manufacturing equipment according to item 1 or 2 of the patent application scope, wherein the aforementioned optical axis adjustment unit is formed: at the element supply point, the aforementioned optical element can be received from the outside, the aforementioned element supply point, and the optical axis adjustment unit The optical axis adjustment points that cause the consistent state are different, and the optical axis adjustment unit moves the optical element from the element supply point to the optical axis adjustment point. The optical module manufacturing equipment according to item 1 or 2 of the patent application scope, wherein the reference position setting unit has a displacement meter for measuring the position of the lens. The optical module manufacturing equipment according to item 1 or 2 of the scope of patent application, wherein the optical axis adjustment unit generates the optical axis of the lens and the optical axis of the optical element in a state where the optical axis is in a non-vertical direction. Form a consistent state. The optical module manufacturing equipment according to item 6 of the scope of the patent application, wherein the optical axis adjustment unit generates the optical axis of the lens to be consistent with the optical axis of the optical element in a state where the optical axis is oriented horizontally. Consistent status. The optical module manufacturing equipment according to item 6 of the scope of the patent application, wherein the optical axis adjustment unit shifts at least the optical element in which the optical axis is oriented in a vertical direction to shift the optical axis in the non-vertical direction to generate the lens. The optical axis of is in a consistent state with the optical axis of the optical element. The optical module manufacturing equipment according to item 6 of the scope of the patent application, wherein the optical axis adjustment unit shifts at least the optical axis to the lens in a vertical direction, and shifts the optical axis to the non-vertical direction to generate the lens. The optical axis is aligned with the optical axis of the optical element. The optical module manufacturing equipment according to item 1 or 2 of the patent application scope, wherein the optical axis adjustment unit includes a mounting platform for mounting the optical element, and a position and posture for adjusting the mounting platform. A platform adjustment mechanism and a controller for controlling the platform adjustment mechanism, the platform adjustment mechanism includes: an offset unit for moving the mounting platform in a specific direction, and a mechanism for swinging the mounting platform around a specific axis Tilt the unit. A lens element conveying mechanism is a lens element conveying mechanism for conveying a lens element having a lens. The lens can be moved between a reference position and a retreated position retracted from the reference position by inputting electric power. : Equipped with: a reference position set point for setting the position of the lens toward the reference position; and a position different from the reference position set point in a direction perpendicular to the optical axis of the lens element, and performing the foregoing A transport unit that transports the lens element between optical axis adjustment points in which the optical axis alignment between the lens element and the optical element is aligned; and a transport unit that is provided in the transport unit and is provided between the reference position and the retracted position to drive the aforementioned The power output terminal of the lens is provided between the input terminal of the lens element and the output terminal, and is electrically connected at least during transportation from the reference position set point to the optical axis adjustment point. The lens element transfer mechanism according to item 11 of the scope of patent application, wherein the power supply from the output terminal to the input terminal is continuously performed at least during the transfer between the reference position set point and the optical axis adjustment point. . According to the lens element transfer mechanism according to item 11 or 12 of the scope of the patent application, the transfer unit can freely switch between a holding state in which the lens element is held and a hold release state in which the hold state is released, and In the holding state, the input terminal and the output terminal are electrically connected. The lens element transfer mechanism according to item 11 or 12 of the scope of the patent application, wherein the transfer unit includes a pair of arms having the output terminals, and is held in a state where the fixed surface of the lens element with respect to the optical element is opened. The lens element; and an arm moving mechanism for changing a relative position of the pair of arms. A controller for controlling a lens driving device that outputs a specific power to the lens element in order to perform the adjustment of the lens position on a lens element having a lens, and controls the lens element with respect to an optical axis of the lens element. A controller that controls a transport unit that is transported in a right-angle direction, and the lens can be moved between a reference position and a retreated position retracted from the reference position. The feature is that the lens driving device has a specific output to the lens element. A power output unit for electric power, and a power control unit that controls the power output unit. The power control unit is at least in a state from a reference position setting state in which the position of the lens is aligned toward the reference position, and the execution of the lens element and optical element During the period until the optical axis adjustment state of the optical axis alignment is performed, in order to maintain the lens to maintain the reference position and to execute the control of the power output section, the transfer unit is controlled from changing the position of the lens toward the From the reference position setting point of the reference position adjustment, to The reference position set point is located at a different place in a direction orthogonal to the optical axis of the lens element, and the lens element is transported until the optical axis adjustment point of the optical axis alignment between the lens element and the optical element is performed. . The controller according to item 15 of the scope of patent application, wherein the power control unit detects a power condition corresponding to the reference position in the reference position setting state, and at least from the reference position setting state to the light During the period until the axis is adjusted, the control of the power output unit is performed to maintain the power condition corresponding to the reference position. An optical module manufacturing method is directed to a lens element having a lens movable between a reference position and a retreat position retracted from the reference position, performing optical axis adjustment based on the optical element, and manufacturing the lens element and the lens element. The method for manufacturing an optical module of the optical module of the optical element is characterized in that: at a reference position setting point, a reference position setting step of adjusting the position of the lens toward the reference position by inputting the power condition of the lens element; And a step of maintaining the reference position of the lens at the reference position by inputting the power condition of the lens element; and at a different position in a direction perpendicular to the optical axis of the lens element at a set point with respect to the reference position The optical axis adjustment point of is performed together with the reference position maintaining step, and the optical axis adjustment step that becomes the same state as the optical axis of the lens and the optical axis of the optical element; and is performed together with the reference position maintaining step, Transfer the lens element from the reference position set point to Said transfer step until the point of the optical axis adjustment; and in the case of maintaining a consistent state, the lens element to be fixed to the fixing step and the optical element. An optical axis adjustment device is an optical axis adjustment device for performing optical axis adjustment between a first optical component and a second optical component, and is characterized by comprising: a mounting platform for placing the first optical component; And a platform adjustment mechanism for adjusting the position and attitude of the mounting platform, and a controller for controlling the platform adjustment mechanism, the mounting platform is parallel to a mounting surface on which the first optical component is mounted A specific direction of X is defined as X, a direction parallel to the mounting surface and orthogonal to the X is defined as Y, a direction orthogonal to the X and the Y directions is defined as Z, and a direction parallel to the X and the Y The plane is defined as the XY plane. The first optical component is placed on the mounting platform in such a manner that the optical axis is along the Z. The platform adjustment mechanism includes: placing the mounting platform in the plane direction of the XY plane, and The XY plane is an offset unit that moves in the vertical Z-axis direction; and the mounting platform is swung around the X axis parallel to the XY plane and around the Y axis parallel to the XY plane and orthogonal to the X axis The tilt unit, the controller controls the offset unit and the tilt unit so that the optical axis of the first optical component is parallel to the optical axis of the second optical component, and the controller maintains the X-axis tilt radius and The information of the Y-axis tilt radius, the X-axis tilt radius is a length from the reference position of the first optical component to the X-axis, and the Y-axis tilt radius is from the reference position of the first optical component to The length up to the Y-axis and further includes a tilt correction condition calculation unit for calculating a correction angle around the X-axis that makes the optical axis of the first optical component and the optical axis of the second optical component parallel The correction angle around the Y axis; and the X tilt value conversion means, using the correction angle around the X axis and the X axis tilt radius calculated by the tilt correction condition calculation section, to calculate the X axis rotation control value and the X tilt value. Recovery control value. The X-axis rotation control value is used to make the tilting unit shake around the X-axis. The recovery control value when the X-tilt is tilted is the correction around the X-axis. When the angle makes the tilting unit shake, in order to offset the shift amount of the swinging end of the X-axis tilt radius toward the Y-axis direction or the Z-axis direction, the shift unit is caused to move toward the Y-axis direction or the Z-axis. Direction shift; and Y tilt value conversion means, using the correction angle around the Y axis and the Y axis tilt radius calculated by the tilt correction condition calculation unit to calculate the Y axis rotation control value and the recovery control value when Y tilt, The Y-axis rotation control value is used to shake the tilting unit around the Y-axis. The Y-tilt recovery control value is used to offset the Y-axis when the tilting unit is shaken at a correction angle around the Y-axis. The amount by which the swing end of the tilting radius moves toward the X-axis direction or the Z-axis direction, thereby causing the offset unit to move toward the X-axis direction or the Z-axis direction, and according to the X-axis rotation control value and the Y axis By turning the control value, the tilting unit shakes the mounting platform, and according to the recovery control value at the time of X tilt and the recovery control value at the time of Y tilt, the shifting unit causes the mounting The stage is moved toward the XY plane or the Z-axis direction, thereby performing execution based on the X-axis tilt radius and the Y-axis tilt radius in a state where the swing end of the Y-axis tilt radius approaches the reference position to be stationary. Tilt control of the correction angle and the correction angle around the Y axis. According to the optical axis adjustment device described in claim 18, the controller includes: an offset correction condition calculation unit for calculating an optical axis between the first optical component and the optical axis of the second optical component. The specific plane forms a consistent amount of correction movement in the XY plane; the XY offset value conversion means uses the correction movement amount in the XY plane calculated by the offset correction condition calculation unit to calculate the amount of the shift unit in the According to the XY plane movement control value of the movement in the XY plane, according to the XY plane movement control value, the offset unit moves the mounting platform toward the XY plane direction, thereby executing a correction movement amount based on the correction movement amount in the XY plane. Offset control. The optical axis adjustment device according to item 18 or 19 of the patent application scope, wherein the controller includes a tilt radius calculation unit that calculates by measuring a position of a surface of the first optical component mounted on the mounting platform. The X-axis tilt radius and the Y-axis tilt radius. The optical axis adjustment device described in item 18 or 19 of the scope of patent application, wherein the purpose of performing the aforementioned optical axis adjustment is defined, and the conditions for correcting the position or posture of the aforementioned mounting platform are defined as those of the aforementioned mounting platform. In the case of the correction condition, the controller includes a determination unit for determining whether or not the correction condition of the mounting platform is within a movable range of the platform adjustment mechanism, and determines that the correction condition of the mounting platform is the platform adjustment. When the mechanism is out of the movable range, the position or posture of the mounting platform is adjusted within the movable range of the platform adjustment mechanism. The optical axis adjustment device according to item 18 or 19 of the scope of the patent application, further comprising: a platform posture switching mechanism for urging the loading platform and the platform adjustment mechanism to rotate in an angle range of 90 degrees. The optical axis adjustment device according to item 22 of the scope of patent application, further comprising: a state in which the first optical component placed on the mounting platform can be held, and a state in which the holding is released after the holding is released. Chuck mechanism to switch between.