TWI648117B - Machining apparatus - Google Patents

Abstract

A processing device includes an integral module and a focusing component. The integral module is used to regulate the incident beam into a parallel circular shaped beam. The focusing component is disposed beside the integer module, and the focusing component is configured to generate an interference behavior in the axial direction of the optical axis of the parallel annular shaped beam to form an interference beam having a high-order energy suppression.

Description

Processing device

This invention relates to a processing apparatus, and more particularly to a processing apparatus that eliminates the high order energy of a Bessel beam.

The semiconductor industry continues to grow rapidly due to the increasing integration density of various electronic components (such as transistors, diodes, resistors, etc.). In order to improve the performance of large integrated circuit chips and maintain their low power consumption, Three-Dimensional Integrated Circuit (3D IC) is a more reliable solution.

In order to meet the needs of 3D ICs, the Through Glass Via (TGV) process has many advantages over the conventional technology of Through Silicon Via (TSV). In the TGV process, the glass is first modified by laser to improve the etching selectivity ratio between the irradiated area and the unirradiated area, thereby effectively forming a Via having a high aspect ratio.

According to Bessel's beam propagation theory, it is possible to maintain a spot size of several micrometers within a few centimeters of propagation distance. Some people want to use the characteristics of the Bessel beam to achieve high depth and wide. Compared to the Via hole.

However, the Bessel beam generally has a problem of unevenness in the high-order energy, resulting in uneven modification of the glass surface, resulting in low roundness of the perforation after etching. Therefore, how to improve and provide a "processing device" to avoid the problems encountered above, The problem that the industry needs to solve.

The invention provides a processing device capable of suppressing high-order energy of a Bessel beam to achieve a high roundness process structure.

The invention provides a processing apparatus comprising an integral module and a focusing element. The integer module is located on the transmission path of an incident beam, and the integer module is used to regulate the incident beam into a parallel annular shaped beam. The focusing component is disposed beside the integer module, and the focusing component is located on the transmission path of the parallel annular shaped beam, and the focusing component is configured to generate an interference behavior in the axial direction of the optical axis of the parallel annular shaping beam to form a device for suppressing high-order energy. An interference beam.

In an embodiment, the integer module is configured to adjust an energy distribution of the incident beam.

In one embodiment, the integral module is selected from the group consisting of at least one cone lens, at least one spherical lens, at least one aspheric lens, and at least one diffractive element.

In one embodiment, the annular beam within the inner diameter of the parallel annular shaped beam has a first angle with the optical axis, and the annular beam has a second angle to the optical axis outside the outer diameter of the parallel annular shaped beam. The angle between the angle of the annular inner and outer optical axes of the second angle and the second angle is between 0.42 and 1.

In one embodiment, the parallel annular shaped beam has an inner diameter dimension ranging from 0.5 mm to 1 mm.

In one embodiment, the parallel annular shaped beam has an outer diameter dimension ranging from 2.5 mm to 6 mm.

In an embodiment, the parallel annular shaped beam has a width dimension ranging between Between 2mm and 5mm.

In one embodiment, the parallel annular shaped beam of light enters the focusing element in parallel.

In one embodiment, the focusing element is a spherical aberration lens.

In an embodiment, the spherical aberration lens is a plano-convex or double convex spherical mirror.

In an embodiment, the first order energy peak in the interference beam is less than 10% of the zeroth order energy peak.

In an embodiment, the processing device further includes a magnification adjustment module, the magnification adjustment module is disposed beside the focusing component, the magnification adjustment module is located on the transmission path of the interference beam, and the magnification adjustment module is configured to change the diameter of the interference beam. Size or depth of field.

In an embodiment, the processing device further includes a light source for generating an incident light beam.

In an embodiment, the light source is a laser light source or a light source having a homology.

Based on the above, in the processing device proposed by the present invention, the parallel annular shaped beam formed by changing the energy distribution state of the incident beam is transmitted through the integer module, thereby changing the interference state of the parallel annular shaped beam after passing through the focusing element, Forming an interference beam with a high-order energy suppression, the first-order energy peak in the interference beam is less than 10% of the zero-order energy peak, so as to suppress the high-order energy of the Bessel beam, thereby improving the processing of the interference beam. The roundness allows the present invention to obtain a processing result with high roundness.

In order to make the invention more apparent, the following detailed description of the embodiments and the accompanying drawings are set forth below.

100, 200‧‧‧ processing equipment

110‧‧‧Light source

120, 320, 420‧‧‧ integral modules

122‧‧‧First cone lens

124‧‧‧Second cone lens

130‧‧‧ Focusing components

322‧‧‧ cone lens

324‧‧‧Spherical lens

422‧‧‧Diffractive components

424‧‧‧Spherical lens

240‧‧‧ magnification adjustment module

P1‧‧‧ incident beam

P2‧‧‧ parallel annular shaped beam

Ring beam in P21‧‧

P22‧‧‧Outer ring beam

P3‧‧‧ interference beam

P4‧‧‧Processing beam

L‧‧‧ optical axis

h ₁ ‧‧‧Inner diameter of parallel circular shaped beam

h ₂ ‧‧‧The outer diameter of the parallel annular shaped beam

W‧‧‧The width of the parallel annular shaped beam

X1‧‧‧ zero-order energy peak

X2‧‧‧ first-order energy peak

θ ‧‧‧first angle

α ‧‧‧second angle

1 is a schematic view of an embodiment of a processing apparatus of the present invention.

2 to 3 are schematic views of another embodiment of the integrated module of the present invention.

4 is a schematic view of the parallel annular shaped beam and optical axis of FIG. 1.

Figure 5A is a schematic illustration of the axial strength of an interference beam of the present invention.

Figure 5B is a schematic illustration of the radial strength of an interference beam of the present invention.

Figure 6 is a schematic illustration of another embodiment of a processing apparatus of the present invention.

The specific embodiments of the present invention are further described below in conjunction with the drawings and embodiments. The following examples are only used to more clearly illustrate the technical solutions of the present invention, and are not intended to limit the scope of the present invention.

1 is a schematic view of an embodiment of a processing apparatus of the present invention. Please refer to Figure 1 first. In the present embodiment, the processing apparatus 100 includes a light source 110, an integral module 120, and a focusing component 130. The light source 110 is a laser light source or a coherence light source. The light source 110 is used to generate a fixed intensity distribution incident beam P1. The incident light beam P1 may be a laser pulse beam or other non-laser generator (for example, a pulse flash). Or a pulsed beam produced by a pulsed LED.

The integer module 120 is located on the transmission path of the incident light beam P1, the integer module 120 is configured to receive the incident light beam P1, and the integer module 120 is used to adjust the energy distribution of the incident light beam P1, and the integer module 120 is used to The incident beam P1 is modulated into a parallel annular shaped beam P2. The focusing element 130 is disposed beside the integer module 120, the focusing element 130 is located on the transmission path of the parallel annular shaped beam P2, the parallel annular shaped beam P2 is parallel to the focusing element 130, and the focusing element 130 is configured to receive the parallel annular shaped beam. P2, and the focusing element 130 is configured to generate an interference behavior in the axial direction of the optical axis of the parallel annular shaped beam P2 to form an interference beam P3 having an energy of suppressing the high order term. Focusing element 130 It is a spherical aberration lens, and the lens with spherical aberration is a plano-convex or double convex spherical mirror.

In this embodiment, the integer module 120 includes a first cone lens 122 and a second cone lens 124. In other words, the integer module 120 of the embodiment is composed of a double cone lens, and the incident light beam P1 passes through the first After a cone lens 122 and a second cone lens 124, a parallel annular shaped beam P2 is formed. However, the invention is not limited thereto, and the integer module is selected from the group consisting of at least one cone lens, at least one spherical lens, at least one aspheric lens and at least one diffraction element. For example, as shown in FIG. 2, the integer module 320 is composed of a cone lens 322 and a spherical lens 324. In another embodiment, the integer module 320 may be composed of a cone lens and an aspheric lens. . As shown in FIG. 3, the integral module 420 is composed of a diffractive component 422 and a spherical lens 424. In another embodiment, the nematic module 420 can be composed of a diffractive component and an aspherical lens.

In detail, as shown in FIG. 4, FIG. 4 is a schematic view of the parallel annular shaped beam and the optical axis of FIG. The parallel annular shaped beam P2 is composed of an inner annular beam P21 and an outer annular beam P22. The annular beam P21 and the optical axis L have a first angle θ within the inner diameter of the parallel annular shaped beam P2. The annular beam P22 and the optical axis L have a second angle α outside the outer diameter of the parallel annular shaped beam P2. The ratio of the angle between the inner and outer optical axes of the ring As shown in the following mathematical formulas (1) and (2):

In the above mathematical formulas (1) and (2), f is the focal length of the lens with spherical aberration, R is the radius of curvature of the lens with spherical aberration, h ₁ is the inner diameter of the parallel annular shaped beam P2, and h ₂ is parallel The outer diameter of the annular shaped beam P2. In this embodiment, the inner diameter h _{1 of the} parallel annular shaped beam P2 ranges from 0.5 mm to 1 mm, and the outer diameter h _{2 of the} parallel annular shaped beam P2 ranges from 2.5 mm to 6 mm. Therefore, the width W of the parallel annular shaped beam P2 ranges from 2 mm to 5 mm.

5A is a schematic view showing the axial strength of the interference beam of the present invention, and FIG. 5B is a schematic view showing the radial intensity of the interference beam of the present invention. In this embodiment, the ratio of the angle between the inner and outer optical axes of the ring can be calculated through the above mathematical formulas (1) and (2). In this embodiment, the integer module 120 can adjust the energy distribution of the incident light beam P1 such that the ratio of the first angle θ of the parallel annular shaped beam P2 to the annular inner and outer optical axes of the second angle α is The energy can be between 0.42 and 1, thereby changing the interference state of the parallel annular shaped beam P2 after passing through the focusing element 130. The first-order energy peak X2 in the interference beam P1 is less than 10% of the zero-order energy peak X1 (Fig. 5B). Shown), in order to achieve the high-order energy of the Bessel beam, thereby improving the processing roundness of the interference beam P3, so that the invention can obtain a processed laser beam with high roundness (Fig. 5A). Shown).

Figure 6 is a schematic illustration of another embodiment of a processing apparatus of the present invention. Referring to FIG. 6, the processing apparatus 200 of FIG. 6 is similar to the processing apparatus 100 of FIG. 1, in which the same elements are denoted by the same reference numerals and have the same functions and will not be repeatedly described. Only the differences will be described below.

The difference between FIG. 6 and FIG. 1 is that the processing device 200 further includes a magnification adjustment module 240. The magnification adjustment module 240 is disposed beside the focusing component 130, and the magnification adjustment module 240 is located on the transmission path of the interference beam P3. The adjustment module 240 is, for example, a beam expander lens group, which is composed of two spherical lenses. The magnification adjustment module 240 is used to change the diameter of the interference beam P3 or the depth of field. Therefore, the diameter of the interference beam P3 or the depth of field can be adjusted according to the processing application range of different requirements, so that the interference beam P3 size and the interference beam are P3 axial energy distribution will change A processing beam P4 is formed.

In summary, in the processing device proposed by the present invention, the parallel annular shaped beam formed by the energy distribution state of the incident beam is changed by the integer module, thereby changing the interference state of the parallel annular shaped beam after passing through the focusing element. To form an interference beam with a high-order energy suppression, the first-order energy peak in the interference beam is less than 10% of the zero-order energy peak, so as to suppress the high-order energy of the Bessel beam, thereby improving the interference beam. The roundness is processed so that the present invention can obtain a processing result with high roundness.

Furthermore, the ring-shaped integral light system of the present invention enters the focusing element in parallel, and is relatively simple to adjust the optical path.

In addition, since the present invention can achieve the result of suppressing the high-order energy of the Bessel beam, the influence of the cone lens can be reduced, and the desired parallel annular shaped beam can be produced without the difficulty of the process of the cone lens. The processing needs only need to replace the lens in the integral module, thereby improving the overall usability.

In addition, the present invention can adjust the diameter of the interference beam or the depth of field according to the processing application range of different requirements.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

Claims (13)

A processing device includes: an integral module disposed on a transmission path of an incident beam, wherein the integer module is configured to regulate the incident beam into a parallel annular shaped beam, wherein an inner diameter of the parallel annular shaped beam The annular beam has a first angle with the optical axis of the parallel annular shaped beam, and the annular beam outside the outer diameter of the parallel annular shaped beam has a second angle with the optical axis of the parallel annular shaped beam. The angle between the first angle and the annular inner and outer optical axes of the second angle is between 0.42 and 1; and a focusing component disposed adjacent to the integer module, the focusing component is located in the parallel annular shaped beam In the transmission path, the focusing element is configured to cause an interference behavior in the axial direction of the optical axis of the parallel annular shaped beam to form an interference beam having a high order term energy. The processing device of claim 1, wherein the integer module is configured to adjust an energy distribution of the incident beam. The processing device of claim 1, wherein the integer module is selected from the group consisting of at least one cone lens, at least one spherical lens, at least one aspheric lens, and at least one diffraction element. The processing apparatus of claim 1, wherein the inner diameter of the parallel annular shaped beam has a size ranging from 0.5 mm to 1 mm. The processing apparatus of claim 1, wherein the outer diameter of the parallel annular shaped beam has a size ranging from 2.5 mm to 6 mm. The processing apparatus of claim 1, wherein the parallel annular shaped beam has a width dimension ranging from 2 mm to 5 mm. The processing apparatus of claim 1, wherein the parallel annular shaped beam enters the focusing element in parallel. The processing device of claim 1, wherein the focusing element is a spherical aberration lens. The processing device of claim 8, wherein the spherical aberration lens is a plano-convex or biconvex spherical mirror. The processing apparatus of claim 1, wherein the first-order energy peak in the interference beam is less than 10% of the zero-order energy peak. The processing device of claim 1, further comprising: a magnification adjustment module disposed adjacent to the focusing component, wherein the magnification adjustment module is located on a transmission path of the interference beam, and the magnification adjustment module is used Change the diameter of the interference beam or the depth of field. The processing device of claim 1, further comprising: a light source for generating the incident light beam. The processing device of claim 12, wherein the light source is a laser source or a light source having a homology.