1332599 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種大型防護膠膜組件收 造半導體裝置、印刷基板或液晶顯示器等產、' =其用於在製 的微影用防護膝膜組件上，特別是用在液晶^示夺器使用 【先前技術】 在對晶圓或液晶用玻璃原板照射光線 用的光罩或者是’若所使 會遮住或減級，_财轉印的%附者有灰塵，則該灰塵 因此，該等作業通常在無塵室内進 法吾人採用在光罩表面貼附二膠= 印。該防護膠膜組件構造如下 件框架，在該框架的上端面塗:方成防護膠膜組 =風乾接著於該防護膠膜組件框的丄 '二專 者是用環氧樹脂（參照專利文獻2、直别々針i ：；、寻^文獻υ，或 ::樹件框架的下端設置s著:η: 黏接層，以“茲接二r脂等㈣所構成的 又，當防護膠膜組件貼附於光罩時，為 :===部:i壓差.，遂在部分防護膠膜組 空氣侵1^ °又置過濾态防止異物從小孔所流通移動的 使用防護膠敵件時非得獅隔離部（墊片）以露出黏接層不 6 1332599 [專利文獻5]特開2GG4-361647號公報 【發明内容】 發明所欲解法的問題 有鐘於上述事情，本發明的 收納容器，當吾人從防護勝膜供—種防護膠膜組件 時，隔離邱萨忠入乡、、牛收納谷器取出防護移膜组件 與防護膠膜組件分離。 番τΐϊ明if護膠臈組件收納容器其特徵為：隔離部的外月-置了複數之具有貫通孔的突出部分，將 外周设 收納容器托盤上。 如將_部岭於防護膠膜組件 在將隔離部固定於防護膠膜组件收 以有細隔離部固定機構的其 納防;=的】時’宜 防護膠膜組件收納容器托盤上為佳機件固定於 ，離侧定於防護咖崎收納容器上咖定呈 有—個地方係設置在距離防護膠膜組件框架角落部i以 發明的效果 Ϊ依本發明，則當吾人從㈣咖組件收納容11取出防雜 =，，，隔離部便會與光罩黏接層剝離分開。由 動作π成刖隔離部會就這樣固定在防護膠膜組件收納容般 上，故能防止其與防護膠膜接觸，亦較無異物附著之虞？七盤 中 1332599 【實施方式】 以下，參照圖面説明本發明之實施形態，惟本發明並非限定 於此。1332599 IX. Description of the Invention: [Technical Field] The present invention relates to a large-scale protective film module for manufacturing a semiconductor device, a printed substrate or a liquid crystal display, etc., which is a protective knee pad for lithography The component is used especially in the liquid crystal display device. [Prior Art] The photomask used to illuminate the original glass plate for wafer or liquid crystal is either 'if it is blocked or degraded. The dust attached to the % is dusty, so the work is usually carried out in a clean room, and the second glue is applied to the surface of the reticle. The protective film module is constructed as follows, and is coated on the upper end surface of the frame: a protective film film group = air-drying is followed by an epoxy resin in the frame of the protective film component frame (refer to Patent Document 2) Straight to the needle i:;, find the document υ, or:: the lower end of the tree frame is set s: η: the adhesive layer, with When the component is attached to the reticle, it is: === part: i pressure difference. 遂In the part of the protective film group, the air is invaded by 1^ ° and the filter state is used to prevent the foreign matter from moving through the small hole. In the case of the above-mentioned thing, the storage container of the present invention has the problem that the solution of the invention is solved. [Patent Document 5] JP-A No. 2GG4-361647 When we provide a protective film module from the protective film, we will isolate the Qiu Sazhong into the hometown, and remove the protective film-moving module and the protective film module from the cattle storage tray. The feature is: the outer moon of the isolation portion - a plurality of protruding portions having through holes The outer circumference is set on the storage container tray. If the protective film module is fixed to the protective film module to receive the fine separation portion fixing mechanism, the protective film is suitable. The component storage container tray is fixed to the good machine member, and the side is fixed on the protective kisaki storage container. The place is set at a corner portion of the protective film assembly frame to achieve the effect of the invention according to the invention. Then, when we take out the anti-mite from the (four) coffee component storage capacity 11, the isolation part will be separated from the photo-adhesive bonding layer. The separation part will be fixed on the protective film assembly by the action π. Therefore, it is possible to prevent contact with the protective film and to prevent foreign matter from adhering to it. In the case of the present invention, the embodiment of the present invention is described below with reference to the drawings, but the present invention is not limited thereto.
立㈤圖^系表示本發明一實施形態。圖1(a)係俯視圖以及側面（AA 的峨概略圖’圖1⑹係隔離部固定機構的剖面擴大圖，圖1(c) 係防蠖膠膜組件框架之固定機構的剖面擴大圖。 =蒦膠膜組件框架1〇端面的光罩黏接層12上貼附著隔離部 目祕附近設置了具有貫通孔的凸㈣14a。收納容器 =盤18位於該隔離部之凸片部14a的正下方，其上設置有以螺栓 =固定的螺栓承座15b，且在螺栓承座脱的内部固定有磁石 圍番^ 了 =防止外部塵埃侵入，螺栓承座15b的螺栓孔周 fr”裝設有°型環19。紐，將磁性體製成的固定具 固i之凸片部14a的貫通孔14b以及螺检承座15b内， 15C ^ ^^ ^ 鮮具❿只要是具有適度剛性的磁性體即可，故經 理鐵f:粒鐵系不_可 =通孔心===== = 溝槽__ ’則_具等卫具在裝卸時容 鏰磁ίΐϋϊ別適合使用小型但有很強磁力的祕磁石或钕鐵 的稀土類磁石，惟若考量到防止磁石表面發 :=上=:方塗=冗當 的或空：可二著 逢士裔雜旦打七略螺检承座伽的溥壁部，並用 產生體里乂的黏接劑直接固定於螺栓承座15b孔内。 1332599 ,、利用磁力，除了固定具容易裝卸以外，其固定力亦不會逐年 劣化，具備向度可信賴性。又，因為無化學物質揮發或摩擦發散 塵屑之虞，故能夠維持收納容器内的清淨。 固疋具15a與螺栓承座i5b的間隙，宜在固定具15a能順利The figure (5) shows an embodiment of the present invention. Fig. 1(a) is a plan view and a side view (A schematic view of AA) Fig. 1 (6) is a cross-sectional enlarged view of a spacer fixing mechanism, and Fig. 1 (c) is an enlarged cross-sectional view of a fixing mechanism of a tamper-proof film module frame. A convex portion (four) 14a having a through hole is provided in the vicinity of the mask portion of the mask cover 12 on the end surface of the film module frame. The container container 18 is located directly below the tab portion 14a of the spacer portion. A bolt socket 15b fixed by bolts is provided, and a magnet enclosure is fixed inside the bolt socket. ^Prevention of external dust intrusion, the bolt hole circumference fr" of the bolt socket 15b is provided with a °-shaped ring 19. New Zealand, the through hole 14b of the fixing piece portion 14a of the fixing body made of a magnetic body, and the screw bearing seat 15b, 15C ^ ^^ ^ fresh, as long as it is a magnetic body having moderate rigidity, Therefore, the manager iron f: grain iron is not _ can = through hole heart ===== = groove __ 'then _ with the guards in the loading and unloading capacity ΐϋϊ ΐϋϊ 适合 not suitable for small but strong magnetic secret A rare earth magnet of magnet or bismuth iron, if it is considered to prevent the surface of the magnet from being emitted: = upper =: square coating = redundant or empty: The singularity of the singularity of the singularity of the singularity of the singularity of the singularity of the singularity of the body is directly fixed in the hole of the bolt seat 15b by the adhesive that produces the body. 1332599, using magnetic force, in addition to the easy loading and unloading of the fixture The fixing force does not deteriorate year by year, and it has the reliability of the degree of orientation. Moreover, since there is no chemical substance volatilization or rubbing and diverging dust, it is possible to maintain the cleanness in the storage container. The solid cooker 15a and the bolt socket i5b The gap should be smooth in the fixture 15a
裝卸的範圍内，盡量縮窄為佳。在此，貫通孔撕、固定;^J 以及螺f承座15b其開孔的形狀並無特別限制，即使圓孔以外的 形狀$能達到目的’但若考慮加工容易性或摩擦時的發塵性而 言，逛是以圓孔為佳。 又:隔離部之凸片部14a上所設置的貫通孔大小，宜比固定 a/、插入部分的粗細至少大lmm，特別是大5咖左右為佳。除 3時位置容易對準以外，當從收納容11托盤18拿 =定具❿與凸片部他貫通孔之間的間隙 :磁方移動並相對光罩黏接層12被斜向拉住， 組件==定也固定在防護膠膜 以如防護膠膜組件收納織盤上的方式， 在防，膠膜組件框架1〇外侧面的4個 =組二製::端 機構 開設置’而非透過不安定的隔離部將防護 11 1332599 件容器上’故運送中便不會有防護膠膜組件移動、發散 防伽後’在防護膠膜組件固定機構解除後，若從 ίίί膜件谷11取出防護膠敵件的話，則隔離部會留在 δ夕膜組件收納容ϋ托盤上’如是便能自動_隔離部。 从士又、由於能將防護膠膜組件確實的維持在收納容器托盤上， 巾ί生發散翻情況的疑慮很、，且*於解除防護膠膜 以钳具等間接作業’人手不會接近防護膠膜組件，' 故異物附者的疑慮也很小。 ㈣Ϊ者二由贿護顧組件收納容紅的隔離定具係可以 ϊϊϋ若將防護膠聽件的固定機構與隔離部的固定機構一 ΐ解除的話，便能在不剝離隔離部的情況下從防護膠膜組件收納 容器將防娜雜件取出，進行檢錢，再收时納容器納 心⑷係表示從防護膠膜組件收納容器托盤將防護夥 概=°首先將細_細_ 1 2_銷 =行rif防ΐ膠膜組件框㈣向上絲出。然』t圖2冗 ^的’卩⑽防娜酿件㈣2G的上昇，） 12 1 （未經圖示）之間的間隙部分的距離 =框架20繼續向上方取出時’則如圖2⑹所示的隔離部H 剝離，經過如圖2(C)所示的樣子’最後如圖2⑷所示 2 °要:2有比隔離部的貫通孔更大的粗徑部，故 ，、要插入貝通孔並gU_定具能轉充 離部便不會從EJ定具拔出或_。 '疋刀崎故 圖3(a)、⑹係表示本發明之其他實施形態。圖3( ，31上沿防護膠膜組件長邊增加開孔凸片部犯$ ( )，'、 ，部31能更緊密的固定於收納容器托盤（未經圖示）上 = 恶。當然，此時在防護膠膜組件收納容器托盤上對應開孔凸片部 1332599 、处所，也必須設置螺栓承座、固定具等其他固定機構（圖示省 隔離部固定處所的增加，對於像邊長超過lm的特大型防護 膠膜組件而言，具有在隔離部剝離時使安定度提高的效果。 圖3(b)的實施形態不使開孔凸片部突出一部份，而係使開孔 邛沿者隔離部周圍設置。由於隔離部外周部的形 =以外均是直線，故容易製造。惟缺點在於會增加不必要的隔離 面積。如是，隔離部之凸片部的形狀以及隔離部之固定部的數 ϊΐί據是否能安$的剝離隔離部以及形狀是否儘量簡單的觀點 來/夹即可。 插举，上之凸片部的形成處所’宜至少設置在防護膠膜組件 番罘之角洛部的50刪以内，亦為較佳的的實施形態。若像這樣設 心!!隔離部會從祕附近開始剝離，便能確實滿足在自防護膠 =件收納容器拉開隔離部關時，隔離部的剝離動作也會自動 由於從角落部附近開始剝離，故從黏接層剝離 =巧射b較平順，剝離力㈣太大就足夠，且因為不會對隔 離邛麵加較大的力量或劇烈的動作，故較無發 tMM. 以下’説明本發明之實施例，惟本發明並非限定於此。 *「加= 機械加讀作如® 1(a)所稍朗ls合金製防娜膜也件 =。該防護膠聽件轉丨_卜尺寸為㈣爛麵膜=牛 罢H4x763刪，向度為6刪。又，側面有框架固定用孔10a配 置在長邊側面離各個角落部36咖的4個位置上，豆形 僻 以中性洗滌劑與純水洗淨該防護膠臈組件框 -方的端Φ上塗布以甲苯稀獅魏難黏名' =化學4⑻製)作為防娜難制 稀=魏樹脂織_為光罩黏接層12，並加熱使 -”道’在光罩黏制端面上蘭隔離部14贿護黏接層。 13 1332599 隔離部以厚度125"m的PET薄膜為基材，表面上塗布著氟變性石夕 酮脫模劑（商品名：X-70-201、信越化學工業（股）製）。又，該隔 離部14在4個角落部設置凸片部14a’其具有直徑1〇細的貫通〆孔。 I再以旋轉塗布法將氟系聚合物（商品名以扣口，旭確子(股）公 司製）塗布於850χ1200χ厚度i〇mm的長方形石英基板上並形成薄 膜，待溶媒乾燥後，將其黏接於與基板外形相同形狀的框體上， 再將剝離取狀厚度約4喻護膠獅陳雜娜膜组件框 架上。然後，以切斷器將防護膠膜組件框架周圍 膜、 即製得防歸酿件。 训職切除 ，以真空成形法製作如圖他)所示之剖面形狀的ABS樹脂容 ^整支撑塊17的位置’使固定用插銷16可插入防護膠膜組 | 側面的固^用孔1Qa ’並用黏接劑以及螺栓（未示 連結固定於收納容器托盤18上。 接著’在對應上述隔離部之凸片部14a上所設置之貫通孔的 fT 二螺栓15d連結固定螺栓承座15b。接著將0 6麵、高度 mm、鍍過鎳鍍膜的敍鐵綳磁石插入螺栓承座脱的内部空間。铁 ^在螺检孔周邊配置〇型環19。接著，以機械加工將碳鋼 栓承座15b ’再機械加工成具有直徑16mm之粗徑部的非 後施以鎳鍍膜，以作為固定具⑸。螺检承座脱 為6麵，而固定具15a之尖端圓柱部的外徑為& 8麵，故能 燥最後’該等構件全部用中性絲劑與純 萬ί克司的齒素燈對以上述方法完成的防 ί f ’非常小心的載置純納容器托盤π =i入隔離部之凸片部i4a的貫通孔以及螺栓 承座15b，使其吸附固定於磁石15c上。 亍住 個自ί後22作業員手持防護膠膜組件收納容器托盤18的4 個角洛，將八垂直立起，接著上下顛倒過來，織維持這種上下 接著確::30cm/s，上下行程約3〇cm)， 護膠膜組件框架1〇盘隔離^ ==的情況’結果並未發現防 «膠，件框架1G拔出的位置偏移。再來，肋具從防 離部，梅下方式確認隔 乾燥首ίί ㈡髦f Jff的手套’並以純水徹底洗淨 2始剝離，當抬到5-左右時，隔離部以=== 示)^專用支撐構件(未經圖 膠膜η表面。素燈照射，接著觀察防護 異物附著 發現防護膠膜11表面並未發現有任何損傷或 志品f ’重複ι〇次相同的試驗’發現隔離部均未接觸防嘴政贈 ΐ?;亦無異物附著。又，除了框架機械加工以夕 部在等級1的無塵室9内進行。 乂夕卜±遂作業全 垃較例1 隔離===片的:法製作防護膠膜組件。惟所使用的 又以真工成形法製作出具備如圖1所示之立|_!面报灿从AKe ，方護膠膜組件收納容器，調整支撐塊17的位°丄，使 == ^ 16對應插人上述防護膠膜組件框架側面的固定用孔，並 d以及螺拴（未經圖示）連結固定於收納容器托盤18上。1 用中性洗滌劑與純水洗淨該收納容器並使其徹底乾燥。八， 在暗室内用光量30萬勒克司的齒素燈，檢査以;L 膜ί件’看看防護勝膜上是否有異物後，再非 ;收納容器托盤18上，並將插銷16插入防護膠膜組件框架 15 10側面的孔10a内。 件收納容器:二名員將防護膠膜組 倒的樣子上下搖晃5次（^^綱’紐_這種上下顛 30cm) ^ 架ίο的位置有偏移 G㈣况絲發現防護膠膜組件框 接著，2名作業員戴上腈橡膠製的手套後，用紬太 並使其機’顿防護顧組件鍊1G外 -角落Within the scope of loading and unloading, it is better to narrow as much as possible. Here, the through hole is torn and fixed; the shape of the opening of the through hole 15b is not particularly limited, and even the shape of the hole other than the circular hole can achieve the purpose 'but if the ease of processing or the friction is considered Sexually speaking, it is better to go round. Further, the size of the through hole provided in the tab portion 14a of the partition portion is preferably at least 1 mm larger than the thickness of the fixed portion a/, the insertion portion, and particularly preferably about 5 coffee. In addition to the easy alignment of the 3 o'clock position, when the tray 18 is received from the receiving container 11 , the gap between the tab and the tab portion of the through hole is: the magnetic side moves and is obliquely pulled relative to the mask bonding layer 12, The component == is also fixed in the protective film to cover the woven disk, such as the protective film assembly. In the case of the anti-adhesion film frame, the outer side of the frame is 4 = group 2:: the end mechanism is set to ' instead Through the unstable isolation part, the protection will be 11 1332599 pieces on the container. Therefore, there will be no protective film assembly moving and diverging after the protection. After the protective film assembly fixing mechanism is released, if it is removed from the ίίί film valley 11 If the protective rubber is used, the isolation part will remain on the δ 膜膜 收纳 收纳 收纳 ' 如 如 如 。 。 。 。 。 。. Since Shishi, because the protective film module can be surely maintained on the storage container tray, the doubts about the situation of the towel and the hair loss are very good, and * in the protective film is indirectly operated by the clamps, etc. The film module, 'Therefore, the doubts about the foreign object attachment are also small. (4) The occlusion of the occupant and the occupant of the component of the detachment of the red component can be removed if the fixing mechanism of the protective rubber hearing device is removed from the fixing mechanism of the isolation portion. The film component storage container takes out the anti-naxia miscellaneous pieces, checks the money, and then accepts the container core (4), which means that the protective container assembly container tray will be protected from the protective partner = ° first will be fine _ fine _ 1 2_ pin = line rif anti-mite film component frame (four) straight out. However, Figure 2 (6) shows the distance of the gap between the parts of the gap between the 12 parts (not shown) = the frame 20 continues to be taken upwards. The partition portion H is peeled off and looks like the one shown in Fig. 2(C). Finally, as shown in Fig. 2 (4), 2 ° is required: 2 has a larger diameter portion than the through hole of the partition portion. Therefore, the plug is inserted. The hole and gU_ fixed can not be removed from the EJ or _. '疋刀崎故Fig. 3(a) and (6) show other embodiments of the present invention. Figure 3 (31, along the long side of the protective film module to increase the opening of the tab part of the $ (), ',, the part 31 can be more tightly fixed on the storage container tray (not shown) = evil. Of course, At this time, in the protective film unit storage container tray, corresponding to the opening hole portion 1332599 and the space, other fixing mechanisms such as a bolt socket and a fixing device must be provided (the increase of the fixed portion of the isolation portion is shown, and the length of the image side exceeds The lm's extra large protective film module has the effect of improving the stability when the separator is peeled off. The embodiment of Fig. 3(b) does not cause the opening tab to protrude a part, but the opening 邛It is provided around the partition portion. Since the shape of the outer peripheral portion of the partition portion is straight, it is easy to manufacture. However, the disadvantage is that an unnecessary isolation area is added. If so, the shape of the tab portion of the partition portion and the fixing of the partition portion are fixed. The number of parts can be based on whether the peeling isolation part and the shape of the shape can be as simple as possible. The insertion, the formation of the upper part of the tab should be at least placed at the corner of the protective film assembly Panyu 50 in the Luo Department It is also a preferred embodiment. If the heart is set like this!! The separation portion will be peeled off from the vicinity of the secret, and it is possible to surely satisfy the peeling action of the separation portion when the separation portion is opened by the self-protecting rubber container. It will automatically peel off from the vicinity of the corner, so peeling off from the adhesive layer = smart shot b is smooth, peeling force (four) is too large, and because it does not add a large force or violent action to the isolated jaw surface, The following is a description of the embodiment of the present invention, but the present invention is not limited thereto. * "Plus = mechanically read as a product of the 1 (a) ls alloy anti-film is also =. The protective rubber hearing piece turns _ _ size is (4) rotten mask = cow strike H4x763 deleted, the degree of deletion is 6. In addition, the side frame fixing hole 10a is arranged on the long side of the side from each corner of the 36 coffee position On the top, the bean shape is washed with neutral detergent and pure water. The protective plastic enamel component frame - the end of the square Φ is coated with toluene lion Wei difficult name '=Chemical 4 (8) system) as the anti-Nan Difficulty = Wei Resin _ is the viscous adhesive layer 12, and is heated to make the "way" on the visor adhesive end face 13 1332599 The separator is made of a PET film with a thickness of 125 "m, and the surface is coated with a fluorine denatured ketamine release agent (trade name: X-70-201, Shin-Etsu Chemical Co., Ltd.). The partition portion 14 is provided with a tab portion 14a' having a diameter of 1 〆 through the four corner portions. The fluoropolymer is further coated by a spin coating method (trade name is squid, Asahiko) )) coated on a rectangular quartz substrate of 850 χ 1200 χ thickness i〇mm and formed into a film. After the solvent is dried, it is bonded to the frame of the same shape as the substrate, and then the thickness of the peeling is about 4 On the frame of the rubber lion Chen Na Na membrane module. Then, the membrane around the frame of the protective film module is prepared by a cutter, that is, the anti-branched material is prepared. The position of the ABS resin holding support block 17 of the cross-sectional shape shown in the vacuum forming method is as follows: the fixing plug 16 can be inserted into the protective film group | the side fixing hole 1Qa ' Further, an adhesive and a bolt (not shown and fixed to the storage container tray 18 are used. Next, the fixing bolt holder 15b is connected to the fT two-bolt 15d corresponding to the through hole provided in the tab portion 14a of the partition portion. 0 6-face, height mm, and nickel-plated magnets are inserted into the inner space of the bolt socket. The iron is placed around the screw hole. The carbon steel bolt seat 15b is mechanically machined. 'Re-machined into a non-post-applied nickel-coated film having a diameter of 16 mm to serve as a fixture (5). The screw-on bearing is removed to 6 faces, and the outer diameter of the tip cylindrical portion of the fixture 15a is & 8 Face, so it can dry the last 'all of these components with a neutral silk agent and pure mega gram tooth lamp for the above method to complete the anti-f f 'very careful placement of the pure nano container tray π = i into the isolation a through hole of the tab portion i4a and a bolt socket 15b Attached to the magnet 15c. 亍 个 自 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 22 : 30cm / s, up and down stroke of about 3 〇 cm), the protective film assembly frame 1 隔离 disk isolation ^ = = the case 'Results did not find the anti-glue, the position of the frame 1G pulled out. Then, the ribs are removed from the anti-separation part, and the stalks are confirmed by the method of drying the first ίί (2) fashion f Jff's gloves and thoroughly washed with pure water. When it is lifted to about 5, the partition is === Show) ^Special support member (not shown on the surface of the film η. The lamp is irradiated, and then observed to protect the foreign matter from adhering to the surface of the protective film 11 and found no damage or ambiguity f 'repeated ι〇 the same test' found The isolation department has not been in contact with the anti-mouth policy. There is no foreign matter attached. In addition, the frame machining is carried out in the clean room 9 of the level 1 in the evening. The 乂 卜 遂 遂 遂 遂 遂 遂 遂 遂 遂 遂 遂 隔离 隔离 隔离== Film: The protective film module is made by the method. However, it is made by the actual forming method, which has the stand shown in Figure 1. The _e face can be adjusted from the AKE, the square protective film component storage container, and adjusted. The position of the support block 17 is such that == ^ 16 corresponds to a fixing hole inserted into the side surface of the protective film module frame, and d and a screw (not shown) are fixedly coupled to the storage container tray 18. The storage container is washed with a neutral detergent and pure water and thoroughly dried. Eight, the amount of light used in the dark room 3 0 lux of the tooth lamp, check to; L film ί 'to see if there is any foreign matter on the protective film, no longer; storage container tray 18, and insert the pin 16 into the protective film assembly frame 15 10 side Inside the hole 10a. Piece of storage container: The two members shake the protective film group up and down 5 times (^^纲' New _ this up and down 30cm) ^ The position of the ίο has an offset G (four) condition silk found protective rubber Membrane assembly frame Next, after the two operators put on the gloves made of nitrile rubber, they used the 紬 too and made the machine 'ton protection against the component chain 1G outside - corner
TliTZmT^m：w^v , 丹傻如圖4(a)〜（C)所不的，以鉗且44鉗付 4部（未經圖示）’向下方向邊拉邊使其剝離，並確 樣ίΪί試驗1G次，發現在1G次中有2次，在剝離隔離部時， 與防護膠膜41接觸，進而損傷防護膠膜。又，二 護膠膜組件框架，42係光罩黏接層。 比較例2TliTZmT^m:w^v, Dan is as shown in Fig. 4(a)~(C), and 4 pieces (not shown) are clamped by 44 and clamped in the downward direction to peel off, and Exactly ίΪί Test 1G times, it was found that there were 2 times in 1G times, and when the separator was peeled off, it contacted the protective film 41, thereby damaging the protective film. In addition, the second protective film module frame, 42 series of reticle adhesive layer. Comparative example 2
以真空成形法製作出如圖5所示之剖面形狀的ABS樹脂防護 膠膜組件收納容器。該容器省略上述實施例以及比較例丨中的防 濩膠膜組件框架固定用插銷以及支撑塊（圖1中的16、17)。以中 性洗滌劑與純水洗淨該防護膠膜組件收納容器，並徹底乾燥之。 接著，用與上述實施例同樣的方法製作防護膠膜組件。如圖5 所示的’使用的隔離部54與上述實施例相同’凸片部54a設置於 4個處所，其形狀省略了凸片部的貫通孔。然後，在暗室内以光量 30萬勒克司的鹵素燈，檢査完成的防護膠膜組件，看看防護膠膜 面上是否有異物，並非常小心的載置於收納容器托盤56上。其後， 以幅寬1/2英吋的黏接膠帶55(ALMA公司製商品名：ALMARK膠帶) 將凸片部54a貼附固定於收納容器托盤56上。 16 1332599 . 之後，與上述實施例、比較例完全相同，由2名作 護膠膜組件收納容器托盤56垂直立起，並上下顛倒，再&上下 倒^狀態上下搖晃5 :欠（速度··約3〇cm/s，上下行程約3 接著確認防護膠膜組件框架10的情況。結果發現，上下顛倒搖晃 ，，光罩黏接層52自隔離部54剝離，而防護膠膜組件框架5〇 落了。 ’、 產業上利用柯 本發明提供一種防護膠膜組件收納容器，其就日益大型化之 防護膠膜組件的保管、移動或隔離部的分離而言，非常 對IT製造產業貢獻很大。 碾貫 【圖式簡單說明】 圖1係表示本發明之防護膠膜組件收納容器的一實施形態的 説明圖’圖1(a)係俯視圖以及側面（AA剖面）的概略圖，圖 係隔離部ID賴構關面擴大圖，圖丨⑻伽護賴組件 固定機構的剖面擴大圖。 圖2(a)〜(d)係依順序表示本發明之隔離部剝離步驟的説 圖。 圖3係表示本發明之防護膠膜組件上所貼附的隔離部的其他 ^施形態的説明圖，圖3(a)係增加隔離部之凸片部的實施例（圖示 範例為6個）’圖3(b)係表示隔離部之凸片部設置於防護膠臈組件 全部周圍的實施例。 ' 圖4(a)〜(d)係依順序表示習知技術之隔離部的剝離的概略 說明圖。 圖5係表示習知技術之防護膠膜組件以及防護膠膜組件收納 容器的説明圖。 【主要元件符號說明】 A-A剖面 17 1332599 10防護膠膜組件框架 10a圓孔（防護膠膜組件框架固定用孔) 11防護膠膜 12光罩黏接層 13防護膠膜接著層 14隔離部（墊片） 14a (隔離部）凸片部 14b (隔離部之凸片部的）貫通孔 15a (隔離部）固定具An ABS resin protective film unit storage container having a cross-sectional shape as shown in Fig. 5 was produced by a vacuum forming method. This container omits the tamper-evident film assembly frame fixing plug and the support block (16, 17 in Fig. 1) in the above-described embodiments and comparative examples. The protective film unit storage container is washed with a neutral detergent and pure water, and thoroughly dried. Next, a protective film module was produced in the same manner as in the above embodiment. As shown in Fig. 5, the spacer 54 used is the same as that of the above-described embodiment. The tab portion 54a is provided in four locations, and the through hole of the tab portion is omitted in shape. Then, in the dark room, the finished protective film module was inspected with a light amount of 300,000 lux of halogen lamps to see if there was any foreign matter on the protective film surface, and was placed on the storage container tray 56 with great care. Thereafter, the tab portion 54a is attached and fixed to the storage container tray 56 by an adhesive tape 55 (trade name: ALMARK tape manufactured by ALMA Co., Ltd.) having a width of 1/2 inch. 16 1332599. Then, in the same manner as the above-described embodiment and comparative example, the two holding film container storage container trays 56 stand upright and are turned upside down, and then shake up and down in a state of up and down. 5: Under (speed·· About 3 〇cm/s, the upper and lower strokes were about 3, and then the case of the protective film unit frame 10 was confirmed. As a result, it was found that the squeegee adhesive layer 52 was peeled off from the partition portion 54 while the squeegee adhesive layer 52 was peeled upside down, and the protective film unit frame 5〇 'In the industry, Keben's invention provides a protective film container storage container, which greatly contributes to the IT manufacturing industry in terms of the storage, movement or separation of the protective film module. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an explanatory view showing an embodiment of a protective film unit storage container of the present invention. Fig. 1(a) is a plan view and a side view (AA cross section), and is isolated. FIG. 2(a) to (d) show, in order, a step of peeling off the partition portion of the present invention. FIG. 3 is a view showing an enlarged view of the cross-section of the partitioning mechanism. Representing the invention FIG. 3(a) shows an embodiment in which the tab portion of the spacer portion is increased (the illustrated example is six). FIG. 3(b) is an explanatory view of another embodiment of the spacer attached to the protective film module. An example in which the tab portion of the partition portion is provided around the entire protective capsule assembly is shown. Fig. 4 (a) to (d) are schematic diagrams showing the peeling of the spacer portion of the prior art in order. Description of protective plastic film component and protective film component storage container of the prior art. [Main component symbol description] AA profile 17 1332599 10 protective film component frame 10a round hole (protective film component frame fixing hole) 11 Protective film 12 Mask adhesive layer 13 Protective film Adhesive layer 14 Separator (shield) 14a (Isolation portion) Tab portion 14b (Poliation portion of the spacer portion) Through hole 15a (Isolation portion) Fixture
15b螺栓承座 15c磁石 15d螺栓 16 (框架固定用）插銷 17 (插銷）支撐塊 18 (防護膠膜組件）收納容器托盤 19 0型環 20防護膠膜組件框架 21光罩黏接層 22隔離部（墊片）15b bolt socket 15c magnet 15d bolt 16 (frame fixing) pin 17 (bolt) support block 18 (protective film assembly) storage container tray 19 0 ring 20 protective film assembly frame 21 mask adhesive layer 22 isolation portion (gasket)
23 (隔離部）固定具 24螺栓承座 25防護膠膜組件收納容器托盤 30防護膠膜組件框架 31隔離部（墊片） 32 (隔離部）凸片部 40防護膠膜組件框架 41防護膠膜 42光罩黏接層 43隔離部（墊片） 1332599 44鉗具 50防護膠膜組件框架 51防護膠膜 52光罩黏接層 53膜接著層 54隔離部（墊片） 54a (隔離部）凸片部 55黏接膠帶 56防護膠膜組件收納容器托盤23 (Isolation) Fixing Tool 24 Bolt Bearing 25 Protective Film Assembly Storage Container Tray 30 Protective Film Assembly Frame 31 Isolation (Gasket) 32 (Isolation) Tab 40 Protective Film Assembly Frame 41 Protective Film 42 reticle adhesive layer 43 isolation part (gasket) 1332599 44 clamp 50 protective film assembly frame 51 protective film 52 reticle adhesive layer 53 film adhesive layer 54 isolation part (shield) 54a (isolated part) convex Sheet 55 adhesive tape 56 protective film assembly storage container tray