TWI399298B - Method for manufacturing roller including micro/nano structure - Google Patents
Method for manufacturing roller including micro/nano structure Download PDFInfo
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- TWI399298B TWI399298B TW98125114A TW98125114A TWI399298B TW I399298 B TWI399298 B TW I399298B TW 98125114 A TW98125114 A TW 98125114A TW 98125114 A TW98125114 A TW 98125114A TW I399298 B TWI399298 B TW I399298B
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- 239000002086 nanomaterial Substances 0.000 title claims description 90
- 238000004519 manufacturing process Methods 0.000 title claims description 75
- 238000000034 method Methods 0.000 title claims description 47
- 239000002105 nanoparticle Substances 0.000 claims description 153
- 239000010410 layer Substances 0.000 claims description 103
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 claims description 102
- 239000000463 material Substances 0.000 claims description 75
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 58
- 229920000642 polymer Polymers 0.000 claims description 55
- 125000004432 carbon atom Chemical group C* 0.000 claims description 51
- 239000000203 mixture Substances 0.000 claims description 49
- -1 Sodium ketone hydroxyethyl ester Chemical class 0.000 claims description 42
- 125000000217 alkyl group Chemical group 0.000 claims description 38
- 239000002904 solvent Substances 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 32
- 239000003795 chemical substances by application Substances 0.000 claims description 24
- 230000005661 hydrophobic surface Effects 0.000 claims description 18
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 13
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims description 13
- 229910052731 fluorine Inorganic materials 0.000 claims description 13
- 239000011737 fluorine Substances 0.000 claims description 13
- 150000001335 aliphatic alkanes Chemical class 0.000 claims description 12
- 229910052736 halogen Inorganic materials 0.000 claims description 12
- 150000002367 halogens Chemical class 0.000 claims description 12
- 238000009832 plasma treatment Methods 0.000 claims description 12
- 125000001424 substituent group Chemical group 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 9
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 8
- 229910010272 inorganic material Inorganic materials 0.000 claims description 8
- 239000011147 inorganic material Substances 0.000 claims description 8
- 239000011368 organic material Substances 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 150000001336 alkenes Chemical class 0.000 claims description 6
- 125000000051 benzyloxy group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])O* 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 239000012948 isocyanate Substances 0.000 claims description 6
- 150000002576 ketones Chemical class 0.000 claims description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 6
- 125000002071 phenylalkoxy group Chemical group 0.000 claims description 6
- 125000003884 phenylalkyl group Chemical group 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910021645 metal ion Inorganic materials 0.000 claims description 5
- 239000002861 polymer material Substances 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- QTKPMCIBUROOGY-UHFFFAOYSA-N 2,2,2-trifluoroethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(F)(F)F QTKPMCIBUROOGY-UHFFFAOYSA-N 0.000 claims description 4
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 claims description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 4
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 claims description 4
- SFPNZPQIIAJXGL-UHFFFAOYSA-N 2-ethoxyethyl 2-methylprop-2-enoate Chemical compound CCOCCOC(=O)C(C)=C SFPNZPQIIAJXGL-UHFFFAOYSA-N 0.000 claims description 4
- WDQMWEYDKDCEHT-UHFFFAOYSA-N 2-ethylhexyl 2-methylprop-2-enoate Chemical compound CCCCC(CC)COC(=O)C(C)=C WDQMWEYDKDCEHT-UHFFFAOYSA-N 0.000 claims description 4
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 claims description 4
- HFCUBKYHMMPGBY-UHFFFAOYSA-N 2-methoxyethyl prop-2-enoate Chemical compound COCCOC(=O)C=C HFCUBKYHMMPGBY-UHFFFAOYSA-N 0.000 claims description 4
- FAVWXKQADKRESO-UHFFFAOYSA-N 2-methylprop-2-enoic acid;prop-1-ene Chemical compound CC=C.CC(=C)C(O)=O FAVWXKQADKRESO-UHFFFAOYSA-N 0.000 claims description 4
- NDWUBGAGUCISDV-UHFFFAOYSA-N 4-hydroxybutyl prop-2-enoate Chemical compound OCCCCOC(=O)C=C NDWUBGAGUCISDV-UHFFFAOYSA-N 0.000 claims description 4
- DXPPIEDUBFUSEZ-UHFFFAOYSA-N 6-methylheptyl prop-2-enoate Chemical compound CC(C)CCCCCOC(=O)C=C DXPPIEDUBFUSEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229920001661 Chitosan Polymers 0.000 claims description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 4
- 229920002472 Starch Polymers 0.000 claims description 4
- 150000002148 esters Chemical class 0.000 claims description 4
- 150000002513 isocyanates Chemical class 0.000 claims description 4
- QNILTEGFHQSKFF-UHFFFAOYSA-N n-propan-2-ylprop-2-enamide Chemical compound CC(C)NC(=O)C=C QNILTEGFHQSKFF-UHFFFAOYSA-N 0.000 claims description 4
- HMZGPNHSPWNGEP-UHFFFAOYSA-N octadecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCCCCCCOC(=O)C(C)=C HMZGPNHSPWNGEP-UHFFFAOYSA-N 0.000 claims description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 4
- 235000019422 polyvinyl alcohol Nutrition 0.000 claims description 4
- 229920000036 polyvinylpyrrolidone Polymers 0.000 claims description 4
- 239000001267 polyvinylpyrrolidone Substances 0.000 claims description 4
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 239000008107 starch Substances 0.000 claims description 4
- 235000019698 starch Nutrition 0.000 claims description 4
- UZLUYHUZUSVCGO-UHFFFAOYSA-N CC(C)(COC(C=C)=O)NCC1=CC=CC=C1.Cl Chemical compound CC(C)(COC(C=C)=O)NCC1=CC=CC=C1.Cl UZLUYHUZUSVCGO-UHFFFAOYSA-N 0.000 claims description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 3
- CNCOEDDPFOAUMB-UHFFFAOYSA-N N-Methylolacrylamide Chemical compound OCNC(=O)C=C CNCOEDDPFOAUMB-UHFFFAOYSA-N 0.000 claims description 3
- 239000011247 coating layer Substances 0.000 claims description 3
- HXTCWLNZDIPLCA-UHFFFAOYSA-N dodecanoic acid;2-methylprop-2-enoic acid Chemical compound CC(=C)C(O)=O.CCCCCCCCCCCC(O)=O HXTCWLNZDIPLCA-UHFFFAOYSA-N 0.000 claims description 3
- 238000007772 electroless plating Methods 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 3
- 229920001002 functional polymer Polymers 0.000 claims description 3
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims description 3
- REPVLJRCJUVQFA-UHFFFAOYSA-N (-)-isopinocampheol Natural products C1C(O)C(C)C2C(C)(C)C1C2 REPVLJRCJUVQFA-UHFFFAOYSA-N 0.000 claims description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 2
- IAXXETNIOYFMLW-COPLHBTASA-N [(1s,3s,4s)-4,7,7-trimethyl-3-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate Chemical compound C1C[C@]2(C)[C@@H](OC(=O)C(=C)C)C[C@H]1C2(C)C IAXXETNIOYFMLW-COPLHBTASA-N 0.000 claims description 2
- QKWFJHPHXLSWRE-UHFFFAOYSA-N [dimethylamino(phenyl)methyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(N(C)C)C1=CC=CC=C1 QKWFJHPHXLSWRE-UHFFFAOYSA-N 0.000 claims description 2
- 229940116229 borneol Drugs 0.000 claims description 2
- CKDOCTFBFTVPSN-UHFFFAOYSA-N borneol Natural products C1CC2(C)C(C)CC1C2(C)C CKDOCTFBFTVPSN-UHFFFAOYSA-N 0.000 claims description 2
- DTGKSKDOIYIVQL-UHFFFAOYSA-N dl-isoborneol Natural products C1CC2(C)C(O)CC1C2(C)C DTGKSKDOIYIVQL-UHFFFAOYSA-N 0.000 claims description 2
- WUHFJBCTCXQXGL-UHFFFAOYSA-N imidazolidin-1-yl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)ON1CCNC1 WUHFJBCTCXQXGL-UHFFFAOYSA-N 0.000 claims description 2
- 229940119545 isobornyl methacrylate Drugs 0.000 claims description 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims description 2
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910052708 sodium Inorganic materials 0.000 claims description 2
- 239000011734 sodium Substances 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 229920001169 thermoplastic Polymers 0.000 claims description 2
- 229920001187 thermosetting polymer Polymers 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 6
- 238000004381 surface treatment Methods 0.000 claims 6
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims 3
- 239000004205 dimethyl polysiloxane Substances 0.000 claims 3
- 230000005611 electricity Effects 0.000 claims 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims 3
- YHJBCRBYDBNEIK-UHFFFAOYSA-N (1-methyldecyl)-Benzene Chemical compound CCCCCCCCCC(C)C1=CC=CC=C1 YHJBCRBYDBNEIK-UHFFFAOYSA-N 0.000 claims 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 1
- 125000003158 alcohol group Chemical group 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 239000012454 non-polar solvent Substances 0.000 description 9
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 8
- 229910003460 diamond Inorganic materials 0.000 description 7
- 239000010432 diamond Substances 0.000 description 7
- 230000002209 hydrophobic effect Effects 0.000 description 6
- 239000002798 polar solvent Substances 0.000 description 6
- 238000001459 lithography Methods 0.000 description 5
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- XTDKZSUYCXHXJM-UHFFFAOYSA-N 2-methoxyoxane Chemical compound COC1CCCCO1 XTDKZSUYCXHXJM-UHFFFAOYSA-N 0.000 description 3
- AJEUTPLLTRJDSH-UHFFFAOYSA-N 2-methyl-2-phenyloxane Chemical compound C=1C=CC=CC=1C1(C)CCCCO1 AJEUTPLLTRJDSH-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 3
- 150000001345 alkine derivatives Chemical class 0.000 description 3
- 230000005660 hydrophilic surface Effects 0.000 description 3
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 3
- QENRKQYUEGJNNZ-UHFFFAOYSA-N 2-methyl-1-(prop-2-enoylamino)propane-1-sulfonic acid Chemical compound CC(C)C(S(O)(=O)=O)NC(=O)C=C QENRKQYUEGJNNZ-UHFFFAOYSA-N 0.000 description 2
- 239000008346 aqueous phase Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 244000147568 Laurus nobilis Species 0.000 description 1
- 235000017858 Laurus nobilis Nutrition 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 235000005212 Terminalia tomentosa Nutrition 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Micromachines (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Description
本發明是有關於一種滾筒之製造方法,且特別是有關於一種具有微奈米結構之滾筒的製造方法。The present invention relates to a method of manufacturing a drum, and more particularly to a method of manufacturing a drum having a micro-nano structure.
一般,欲在壓印滾筒上製造出規則性圖案時,大多採用二種技術。一種技術係採用鑽石刀雕刻方式,以鑽石刀對柱狀體進行連續加工,來形成連續性圖案。然而,此種製作方式既費時又昂貴,而且不易精準控制圖案精準度與尺寸。因此,此種技術逐漸遭到淘汰。In general, when a regular pattern is to be produced on an impression cylinder, two techniques are often used. One technique uses a diamond knife engraving method to continuously process the columnar body with a diamond knife to form a continuous pattern. However, this method of production is time consuming and expensive, and it is not easy to accurately control the accuracy and size of the pattern. Therefore, this technology is gradually being phased out.
另一種製作滾筒的技術則是先以微影蝕刻方式或鑽石刀雕刻方式在平面上定義出圖案結構,再將軟性材料覆蓋在此圖案結構上,藉以複製出軟性母模,然後將此軟性母模貼附於柱狀體上。然而,此種製作方法不僅有不易將母模貼附於柱狀體的問題,而且軟性母模之機械性質較差,耐用度差。Another technique for making a roller is to first define a pattern structure on a plane by means of lithography or diamond knife engraving, and then cover the pattern structure with a soft material, thereby duplicating the soft master and then applying the soft mother. The mold is attached to the columnar body. However, such a manufacturing method not only has a problem that it is difficult to attach the master mold to the columnar body, but also the mechanical properties of the soft master mold are poor and the durability is poor.
此外,將此軟性母模貼附於柱狀體上時,都會產生接縫問題。因此,應用此滾筒進行壓印時,必須將接縫處裁切掉,因而無法利用此滾筒壓印出連續且大面積圖案。而且,若想要壓印出越大可使用面積,就需要越大面積的原始模具。然而,對於大面積的圖案定義,微影蝕刻方式或鑽石刀雕刻方式也會產生不易加工的問題。In addition, when this soft master is attached to the column, seam problems occur. Therefore, when the roller is used for embossing, the seam must be cut off, and thus it is impossible to emboss a continuous and large-area pattern by using the roller. Moreover, if it is desired to emboss a larger usable area, a larger area of the original mold is required. However, for large-area pattern definitions, lithography or diamond knife engraving can also create problems that are difficult to machine.
因此,本發明之一態樣就是在提供一種具有微奈米結構之滾筒的製造方法,可直接以自組裝方式在柱狀體上形成單一且具連續性的微奈米圖案。故,所形成之滾筒模仁沒有接縫問題,而可應用來壓印出連續性圖案。Accordingly, it is an aspect of the present invention to provide a method of manufacturing a roller having a micro-nano structure capable of directly forming a single and continuous micro-nano pattern on a columnar body in a self-assembled manner. Therefore, the formed roller mold has no seam problem and can be applied to imprint a continuous pattern.
本發明之另一態樣是在提供一種具有微奈米結構之滾筒的製造方法,不需使用鑽石刀雕刻製程或微影製程,即可製作出具有微奈米結構之滾筒。因此,可改善圖案均勻度、提高製程良率、縮短工時、降低製作成本。Another aspect of the present invention is to provide a method for manufacturing a roller having a micro-nano structure, and a drum having a micro-nano structure can be produced without using a diamond knife engraving process or a lithography process. Therefore, the pattern uniformity can be improved, the process yield can be improved, the working hours can be shortened, and the manufacturing cost can be reduced.
根據本發明之上述目的,提出一種具有微奈米結構之滾筒的製造方法具有微奈米結構之滾筒的製造方法,包含下列步驟。提供一柱狀體,其中此柱狀體包含一外側面。形成一高分子層覆蓋在柱狀體之外側面上。混合複數個微奈米粒子與一短親油基溶劑而形成一混合物,其中每一微奈米粒子具有疏水表面,且高分子層之厚度小於每一微奈米粒子之直徑。將混合物注入水中,以使微奈米粒子之一部分浮在水之液面上。將柱狀體置入水中。將柱狀體自該水中拉出,以使微奈米粒子之前述部分嵌設在高分子層中。According to the above object of the present invention, a method for producing a drum having a micro-nano structure is proposed, which comprises the following steps. A columnar body is provided, wherein the columnar body includes an outer side. A polymer layer is formed to cover the outer side of the columnar body. A plurality of micro-nanoparticles are mixed with a short lipophilic solvent to form a mixture, wherein each micro-nanoparticle has a hydrophobic surface, and the thickness of the polymer layer is less than the diameter of each micro-nanoparticle. The mixture is poured into water to partially float one of the micro-nano particles on the surface of the water. The columnar body was placed in water. The columnar body is pulled out from the water so that the aforementioned portion of the micro-nanoparticles are embedded in the polymer layer.
依據本發明一實施例,上述之高分子層之材料為水性高分子材料。According to an embodiment of the invention, the material of the polymer layer is an aqueous polymer material.
根據本發明之上述目的,另提出一種具有微奈米結構之滾筒的製造方法,包含下列步驟。提供一中空柱狀體,其中此中空柱狀體包含一內側面。形成一高分子層覆蓋在中空柱狀體之內側面上。混合複數個微奈米粒子與一短親油基溶劑而形成一混合物,其中每一微奈米粒子具有疏水表面,且高分子層之厚度小於每一微奈米粒子之直徑。將混合物注入水中,以使微奈米粒子之一部分浮在水之液面上。將中空柱狀體置入水中。將中空柱狀體自水中拉出,以使微奈米粒子之前述部分嵌設在高分子層中。形成一材料層填滿中空柱狀體,其中材料層覆蓋微奈米粒子之前述部分與高分子層。移除中空柱狀體、高分子層與微奈米粒子之前述部分。According to the above object of the present invention, a method of manufacturing a drum having a micro-nano structure is further provided, which comprises the following steps. A hollow cylindrical body is provided, wherein the hollow cylindrical body includes an inner side. A polymer layer is formed to cover the inner side surface of the hollow columnar body. A plurality of micro-nanoparticles are mixed with a short lipophilic solvent to form a mixture, wherein each micro-nanoparticle has a hydrophobic surface, and the thickness of the polymer layer is less than the diameter of each micro-nanoparticle. The mixture is poured into water to partially float one of the micro-nano particles on the surface of the water. The hollow columnar body was placed in water. The hollow columnar body is pulled out from the water so that the aforementioned portion of the micro-nanoparticles are embedded in the polymer layer. A material layer is formed to fill the hollow columnar body, wherein the material layer covers the aforementioned portion of the micro-nanoparticles and the polymer layer. The aforementioned portions of the hollow columnar body, the polymer layer, and the micro-nanoparticles are removed.
依據本發明一實施例,上述具有微奈米結構之滾筒的製造方法更包含在將中空柱狀體自水中拉出之步驟與形成材料層之步驟之間,形成一金屬層覆蓋在微奈米粒子之上述部分與高分子層上。According to an embodiment of the invention, the method for manufacturing a roller having a micro-nano structure further comprises forming a metal layer covering the micro-nano between the step of pulling the hollow column body from the water and the step of forming the material layer. The above part of the particle is on the polymer layer.
根據本發明之上述目的,又提出一種具有微奈米結構之滾筒的製造方法,包含下列步驟。提供一柱狀體,其中此柱狀體包含金屬外側面;混合複數個微奈米粒子與一短親油基溶劑而形成一混合物,其中每一微奈米粒子具有疏水表面。將混合物注入一水中,以使微奈米粒子之一部分浮在水之液面上。將柱狀體置入水中。將柱狀體自水中拉出,以使微奈米粒子之前述部分附著在金屬外側面上。形成一金屬層填充於微奈米粒子之前述部分與金屬外側面間。移除微奈米粒子之前述部分。According to the above object of the present invention, a method of manufacturing a drum having a micro-nano structure is further provided, which comprises the following steps. A columnar body is provided, wherein the columnar body comprises a metal outer side surface; a plurality of micro-nanoparticles are mixed with a short lipophilic solvent to form a mixture, wherein each of the micro-nanoparticles has a hydrophobic surface. The mixture is poured into a water so that a portion of the micro-nano particles float on the surface of the water. The columnar body was placed in water. The columnar body is pulled out from the water so that the aforementioned portion of the micro-nanoparticles adhere to the outer side surface of the metal. A metal layer is formed to be filled between the aforementioned portion of the micro-nanoparticles and the outer side of the metal. The aforementioned portion of the micro-nanoparticles is removed.
依據本發明一實施例,上述之柱狀體為金屬柱狀體,或者柱狀體包含一金屬覆蓋層或吸附金屬離子層包覆於此柱狀體外。According to an embodiment of the invention, the columnar body is a metal columnar body, or the columnar body comprises a metal coating layer or an adsorbed metal ion layer coated on the columnar body.
根據上述實施例,本揭示之一優點為可直接以自組裝方式在柱狀體上形成單一且具規則性與連續性的微奈米圖案。因此,運用本揭示所形成之滾筒模仁沒有接縫問題,而可壓印出連續性圖案。According to the above embodiment, one of the advantages of the present disclosure is that a single, regular and continuous micro-nano pattern can be formed on the column body directly in a self-assembled manner. Therefore, the roller mold core formed by the present disclosure has no seam problem, and the continuous pattern can be imprinted.
根據上述實施例,本揭示之另一優點為可不需使用鑽石刀雕刻製程或微影製程來製備模仁。因此,不僅可大幅提高製程良率與圖案均勻度,更可縮短工時,降低製作成本。According to the above embodiment, another advantage of the present disclosure is that the mold core can be prepared without using a diamond knife engraving process or a lithography process. Therefore, not only can the process yield and pattern uniformity be greatly improved, but also the working time can be shortened and the production cost can be reduced.
請參照第1A圖至第1C圖,其係繪示依照本發明第一實施方式的一種具有微奈米結構之滾筒的製程剖面圖。在本實施方式中,製作具有微奈米結構之滾筒時,可先提供柱狀體100。柱狀體100可為圓柱體,亦可為非圓柱體,例如橢圓柱體與角柱體等。柱狀體100包含一外側面,例如弧狀之外側面102,如第1A圖所示。Referring to FIGS. 1A to 1C, a cross-sectional view showing a process of a roller having a micro-nano structure according to a first embodiment of the present invention is shown. In the present embodiment, when a roller having a micron structure is produced, the columnar body 100 can be provided first. The columnar body 100 may be a cylinder or a non-cylindrical body, such as an elliptical cylinder and a corner cylinder. The columnar body 100 includes an outer side surface, such as an arcuate outer side surface 102, as shown in FIG. 1A.
接著,如第1B圖所示,利用例如塗布方式,形成高分子層104覆蓋在柱狀體100之外側面102上。在一實施例中,高分子層104之材料為可溶於或分散於水相之水性高分子材料。在一示範實施例中,高分子層104之材料可例如為水性壓克力、水性異氰酸酯、澱粉、聚乙烯醇、聚乙烯吡咯烷酮、幾丁聚醣、丙烯酰氨基-2-甲基-1-丙磺酸、丙烯酸-2-羥乙基酯及丙烯酸-2-羥內基酯、甲基丙烯酸咪唑烷基酮羥乙酯、甲基丙烯酸異丁烷基乙酯、丙烯酸二甲基-芐基胺基乙酯氯化物、甲基丙烯酸二甲胺基乙酯、甲基丙烯酸二甲胺芐基乙酯、甲基丙烯酸丙烯酯、丙烯酸甲氧基乙酯、甲基丙烯酸乙氧基乙酯、甲基丙烯酸丁氧基二甘醇酯、甲基丙烯酸雙環戊烯乙氧基酯、甲基丙烯酸三氟乙酯、甲基丙烯酸-2-乙基已酯、丙烯酸異辛酯、甲基丙烯酸月桂酸、甲基丙烯酸硬脂酯、丙烯酸高級酯、甲烯酸異冰片酯、甲基丙烯酸異丙冰片酯、丙烯酸-4-羥丁酯、N-異丙基丙烯酰胺、N-羥甲基丙烯酰胺、或上述材料之混合物。Next, as shown in FIG. 1B, the polymer layer 104 is formed on the outer surface 102 of the columnar body 100 by, for example, a coating method. In one embodiment, the material of the polymer layer 104 is an aqueous polymer material that is soluble or dispersible in the aqueous phase. In an exemplary embodiment, the material of the polymer layer 104 may be, for example, aqueous acrylic, aqueous isocyanate, starch, polyvinyl alcohol, polyvinylpyrrolidone, chitosan, acrylamido-2-methyl-1- Propanesulfonic acid, 2-hydroxyethyl acrylate and 2-hydroxyl lactone, imidazolidinyl methacrylate, isobutylalkyl methacrylate, dimethyl-benzyl acrylate Aminoethyl chloride, dimethylaminoethyl methacrylate, dimethylaminobenzyl methacrylate, propylene methacrylate, methoxyethyl acrylate, ethoxyethyl methacrylate, Butoxy diglycol methacrylate, dicyclopentene ethoxylate methacrylate, trifluoroethyl methacrylate, 2-ethylhexyl methacrylate, isooctyl acrylate, methacrylic acid laurel Acid, stearyl methacrylate, higher ester of acrylic acid, isobornyl isocyanate, isopropanol methacrylate, 4-hydroxybutyl acrylate, N-isopropyl acrylamide, N-methylol propylene An amide, or a mixture of the above materials.
接下來,提供數個微奈米粒子106。如第1C圖所示,這些微奈米粒子106之直徑110大於高分子層104之厚度108。在一實施例中,微奈米粒子106之粒徑可例如介於實質0.01微米至與實質100微米之間。這些微奈米粒子106的形狀可例如為圓球型、空心圓球、方形、棍型、長條型或三角形。微奈米粒子106之材料可為無機材料、有機材料、或有機材料與無機材料之混合物。每個微奈米粒子106具有疏水之表面116。在一示範實施例中,這些微奈米粒子106與水之接觸角大於60度。Next, several micro-nanoparticles 106 are provided. As shown in FIG. 1C, the diameter 110 of the micro-nanoparticles 106 is greater than the thickness 108 of the polymer layer 104. In one embodiment, the particle size of the micro-nanoparticles 106 can be, for example, between substantially 0.01 microns and substantially 100 microns. The shape of these micro-nanoparticles 106 can be, for example, a sphere, a hollow sphere, a square, a stick, a strip, or a triangle. The material of the micro-nanoparticles 106 may be an inorganic material, an organic material, or a mixture of an organic material and an inorganic material. Each micro-nanoparticle 106 has a hydrophobic surface 116. In an exemplary embodiment, the contact angle of the micro-nanoparticles 106 with water is greater than 60 degrees.
在一實施例中,微奈米粒子106本身可由疏水材料,例如聚二甲基矽氧烷、聚甲基氫矽氧烷、聚二乙基矽氧烷、甲基苯基矽氧烷、聚矽酸鹽、聚甲基倍半矽氧烷或其混合物所組成。In one embodiment, the micro-nanoparticles 106 themselves may be composed of a hydrophobic material such as polydimethyl methoxyoxane, polymethylhydroquinone, polydiethyl decane, methyl phenyl oxane, poly It consists of citrate, polymethylsesquioxane or a mixture thereof.
在另一實施例中,微奈米粒子106本身之材料可為非疏水材料,但微奈米粒子106之材料可為經矽烷類處理劑處理後之物質。在進行矽烷類處理劑處理之前,可先利用例如紫外線、電漿或酸鹼物質來對這些微奈米粒子106之表面116進行表面處理。In another embodiment, the material of the micro-nanoparticles 106 may be a non-hydrophobic material, but the material of the micro-nanoparticles 106 may be a material treated with a decane-based treating agent. The surface 116 of these micro-nanoparticles 106 may be surface treated with, for example, ultraviolet light, plasma or acid-base materials prior to the treatment with the decane treating agent.
在一示範實施例中,上述之矽烷類處理劑可為矽烷化合物,且此矽烷化合物具有通式R1 R2 R3 R4 Si,其中R1 、R2 、R3 及R4 為相同或不同之基團,且此基團為鹵素、具4到22個碳原子之直鏈或支鏈之烷基、OR5 、苯基、苯烷氧基、苯甲氧基、或苯烷基,其中R5 為H或具1至6個碳原子之烷基,且矽烷化合物包含有1至3個鹵素與具4到22個碳原子之直鏈或支鏈之烷基、或OR5 取代基與具4到22個碳原子之直鏈或支鏈之烷基。In an exemplary embodiment, the above decane-based treating agent may be a decane compound, and the decane compound has the formula R 1 R 2 R 3 R 4 Si, wherein R 1 , R 2 , R 3 and R 4 are the same or a different group, and the group is a halogen, a linear or branched alkyl group having 4 to 22 carbon atoms, OR 5 , phenyl, phenylalkoxy, benzyloxy, or phenylalkyl, Wherein R 5 is H or an alkyl group having 1 to 6 carbon atoms, and the decane compound contains 1 to 3 halogens and a linear or branched alkyl group having 4 to 22 carbon atoms, or an OR 5 substituent And a linear or branched alkyl group having 4 to 22 carbon atoms.
在另一示範實施例中,上述之矽烷類處理劑可為矽烷化合物,且此矽烷化合物具有通式R1 R2 R3 R4 Si,其中R1 、R2 、R3 及R4 分別為相同或不同之基團,且此基團係OR5 、1至22個碳原子之直鏈或支鏈之烷基,其中R5 為H或具1至6個碳原子之烷基,且矽烷化合物含有1至3個OR5 取代基。In another exemplary embodiment, the above decane-based treating agent may be a decane compound, and the decane compound has the formula R 1 R 2 R 3 R 4 Si, wherein R 1 , R 2 , R 3 and R 4 are respectively The same or different groups, and this group is a straight or branched alkyl group of OR 5 , 1 to 22 carbon atoms, wherein R 5 is H or an alkyl group having 1 to 6 carbon atoms, and decane The compound contains from 1 to 3 OR 5 substituents.
在又一實施例中,微奈米粒子106之表面116可利用例如電漿處理方式來進行疏水化處理。在此電漿處理過程中,所利用之電漿氣體可例如為含氟類氣體、含矽烷、1至10個碳原子之烷類、1至10個碳原子之烯類、1至10個碳原子之炔類或其混合物。在一示範實施例中,微奈米粒子106之疏水表面116可例如包含含氟材料。In yet another embodiment, the surface 116 of the micro-nanoparticles 106 can be hydrophobized using, for example, a plasma treatment. In the plasma treatment process, the plasma gas used may be, for example, a fluorine-containing gas, a decane-containing, an alkane of 1 to 10 carbon atoms, an olefin of 1 to 10 carbon atoms, and 1 to 10 carbons. Alkyne or a mixture thereof. In an exemplary embodiment, the hydrophobic surface 116 of the micro-nanoparticles 106 can comprise, for example, a fluorine-containing material.
接著,將這些微奈米粒子106與短親油基溶劑,而形成混合物。短親油基溶劑可為1~10碳之醇、烷、酮類溶劑或上述溶劑之混合物,例如丁醇或環己醇。然後,將微奈米粒子106與短親油基溶劑所混合而成的混合物注入水中。藉由包覆在微奈米粒子106之表面116上的短親油基溶劑與水的動態交換,這些微奈米粒子106中的一部分可浮在水與空氣之界面上,亦即水之液面上。Next, these micro-nanoparticles 106 are combined with a short lipophilic solvent to form a mixture. The short lipophilic solvent may be a 1 to 10 carbon alcohol, an alkane, a ketone solvent or a mixture of the above solvents such as butanol or cyclohexanol. Then, a mixture of the micro-nanoparticles 106 and a short lipophilic solvent is injected into the water. By the dynamic exchange of the short lipophilic solvent coated on the surface 116 of the micro-nanoparticles 106 with water, a portion of these micro-nanoparticles 106 can float at the interface of water and air, ie, the liquid of water. On the surface.
在另一實施方式中,這些微奈米粒子可具有親水之表面,且微奈米粒子與極性溶劑先混合後,再將所形成之混合物注入非極性溶劑中。藉由包覆在微奈米粒子之表面上的極性溶劑與非極性溶劑的動態交換,這些微奈米粒子的一部分可浮在非極性溶劑與空氣之界面上。In another embodiment, the micro-nanoparticles may have a hydrophilic surface, and the micro-nanoparticles are first mixed with a polar solvent, and the resulting mixture is injected into a non-polar solvent. By the dynamic exchange of a polar solvent coated on the surface of the micro-nanoparticles with a non-polar solvent, a portion of these micro-nanoparticles can float at the interface between the non-polar solvent and the air.
在本實施方式中,接著將柱狀體100浸入水中。接著,將柱狀體100自水中拉出,由於注入水中的大部分微奈米粒子106朝水之液面移動,因此這些微奈米粒子106例如可藉由毛細現象而附著在高分子層104上。由於高分子層104可略為溶於或分散於水中,因而這些附著在高分子層104上的微奈米粒子106可嵌設在高分子層104中。由於高分子層104之厚度108小於微奈米粒子106之直徑110,因此微奈米粒子106並未完全嵌設在高分子層104中。如此,可在柱狀體100之外側面102上形成凸狀之微奈米結構114,而完成具有微奈米結構114之滾筒112的製作,如第1C圖所示。In the present embodiment, the columnar body 100 is then immersed in water. Next, the columnar body 100 is pulled out from the water, and since most of the micro-nanoparticles 106 injected into the water move toward the liquid surface of the water, the micro-nanoparticles 106 can be attached to the polymer layer 104 by, for example, capillary phenomenon. on. Since the polymer layer 104 can be slightly dissolved or dispersed in water, the micro-nanoparticles 106 adhering to the polymer layer 104 can be embedded in the polymer layer 104. Since the thickness 108 of the polymer layer 104 is smaller than the diameter 110 of the micro-nanoparticles 106, the micro-nanoparticles 106 are not completely embedded in the polymer layer 104. Thus, a convex micro-nanostructure 114 can be formed on the outer side 102 of the columnar body 100, and the fabrication of the roller 112 having the micro-nanostructure 114 can be accomplished, as shown in FIG. 1C.
在一示範實施例中,微奈米粒子106可為直徑4.5微米的二氧化矽粒子,短親油基溶劑可為丁醇,且高分子層104可為甲基丙烯酸異丁烷基乙酯層。In an exemplary embodiment, the micro-nanoparticles 106 may be cerium oxide particles having a diameter of 4.5 micrometers, the short oleophilic solvent may be butanol, and the polymer layer 104 may be an isobutylalkyl methacrylate layer. .
請參照第2A圖至第2E圖,其係繪示依照本發明第二實施方式的一種具有微奈米結構之滾筒的製程剖面圖。在本實施方式中,製作具有微奈米結構之滾筒時,可先提供中空柱狀體200。中空柱狀體200可為中空圓柱體,亦可為中空非圓柱體,例如中空橢圓柱體與中空角柱體等。柱狀體200包含內側面202,如第2A圖所示。Referring to FIGS. 2A-2E, a cross-sectional view showing a process of a roller having a micro-nano structure according to a second embodiment of the present invention is shown. In the present embodiment, when a roller having a micron structure is produced, the hollow columnar body 200 can be provided first. The hollow columnar body 200 may be a hollow cylinder or a hollow non-cylindrical body, such as a hollow elliptical cylinder and a hollow corner cylinder. The columnar body 200 includes an inner side 202 as shown in Figure 2A.
接著,如第2B圖所示,利用例如塗布方式,形成高分子層204覆蓋在中空柱狀體200之內側面202上。高分子層204之材料為可溶於或分散於水相之水性高分子材料。在一示範實施例中,高分子層204之材料可例如為水性壓克力、水性異氰酸酯、澱粉、聚乙烯醇、聚乙烯吡咯烷酮、幾丁聚醣、丙烯酰氨基-2-甲基-1-丙磺酸、丙烯酸-2-羥乙基酯及丙烯酸-2-羥內基酯、甲基丙烯酸咪。坐烷基酮羥乙酯、甲基丙烯酸異丁烷基乙酯、丙烯酸二甲基-芐基胺基乙酯氯化物、甲基丙烯酸二甲胺基乙酯、甲基丙烯酸二甲胺芐基乙酯、甲基丙烯酸丙烯酯、丙烯酸甲氧基乙酯、甲基丙烯酸乙氧基乙酯、甲基丙烯酸丁氧基二甘醇酯、甲基丙烯酸雙環戊烯乙氧基酯、甲基丙烯酸三氟乙酯、甲基丙烯酸-2-乙基已酯、丙烯酸異辛酯、甲基丙烯酸月桂酸、甲基丙烯酸硬脂酯、丙烯酸高級酯、甲烯酸異冰片酯、甲基丙烯酸異丙冰片酯、丙烯酸-4-羥丁酯、N-異丙基丙烯酰胺、N-羥甲基丙烯酰胺、或上述材料之混合物。Next, as shown in FIG. 2B, the polymer layer 204 is formed on the inner side surface 202 of the hollow columnar body 200 by, for example, a coating method. The material of the polymer layer 204 is an aqueous polymer material which is soluble or dispersible in the aqueous phase. In an exemplary embodiment, the material of the polymer layer 204 can be, for example, aqueous acrylic, aqueous isocyanate, starch, polyvinyl alcohol, polyvinylpyrrolidone, chitosan, acrylamido-2-methyl-1- Propanesulfonic acid, 2-hydroxyethyl acrylate, 2-hydroxyl acrylate, methacrylic acid. Sodium ketone hydroxyethyl ester, isobutyl alkyl methacrylate, dimethyl-benzylaminoethyl acrylate chloride, dimethylaminoethyl methacrylate, dimethylamine benzyl methacrylate Ethyl ester, propylene methacrylate, methoxyethyl acrylate, ethoxyethyl methacrylate, butoxy diglycol methacrylate, dicyclopentene ethoxylate methacrylate, methacrylic acid Trifluoroethyl ester, 2-ethylhexyl methacrylate, isooctyl acrylate, lauric acid methacrylate, stearyl methacrylate, higher ester of acrylic acid, isobornyl methacrylate, isopropyl methacrylate Borneol ester, 4-hydroxybutyl acrylate, N-isopropyl acrylamide, N-methylol acrylamide, or a mixture of the above.
接下來,提供數個微奈米粒子208。如第2C圖所示,這些微奈米粒子208之直徑210大於高分子層204之厚度206。在一實施例中,微奈米粒子208之粒徑可例如介於實質0.01微米至與實質100微米之間。這些微奈米粒子208的形狀可例如為圓球型、空心圓球、方形、棍型、長條型或三角形。微奈米粒子208之材料可為無機材料、有機材料、或有機材料與無機材料之混合物。這些微奈米粒子208均具有疏水之表面218。在一示範實施例中,這些微奈米粒子208與水之接觸角大於60度。Next, several micro-nanoparticles 208 are provided. As shown in FIG. 2C, the diameter 210 of the micro-nanoparticles 208 is greater than the thickness 206 of the polymer layer 204. In one embodiment, the particle size of the micro-nanoparticles 208 can be, for example, between substantially 0.01 microns and substantially 100 microns. The shape of these micro-nanoparticles 208 can be, for example, a sphere, a hollow sphere, a square, a stick, a strip, or a triangle. The material of the micro-nanoparticles 208 may be an inorganic material, an organic material, or a mixture of an organic material and an inorganic material. These micro-nanoparticles 208 each have a hydrophobic surface 218. In an exemplary embodiment, the contact angle of the micro-nanoparticles 208 with water is greater than 60 degrees.
在一實施例中,微奈米粒子208本身可由疏水材料,例如聚二甲基矽氧烷、聚甲基氫矽氧烷、聚二乙基矽氧烷、甲基苯基矽氧烷、聚矽酸鹽、聚甲基倍半矽氧烷或其混合物所組成。In one embodiment, the micro-nanoparticles 208 may themselves be composed of a hydrophobic material such as polydimethyl methoxyoxane, polymethylhydroquinone, polydiethyl decane, methyl phenyl oxane, poly It consists of citrate, polymethylsesquioxane or a mixture thereof.
在另一實施例中,微奈米粒子208本身之材料可為非疏水材料,但微奈米粒子208之材料可為經矽烷類處理劑處理後之物質。在進行矽烷類處理劑處理之前,可先利用例如紫外線、電漿或酸鹼物質來對這些微奈米粒子208之表面218進行表面處理。In another embodiment, the material of the micro-nanoparticles 208 itself may be a non-hydrophobic material, but the material of the micro-nanoparticles 208 may be a material treated with a decane-based treating agent. The surface 218 of these micro-nanoparticles 208 may be surface treated with, for example, ultraviolet light, plasma or acid-base materials prior to the treatment with the decane treating agent.
在一示範實施例中,上述之矽烷類處理劑可為矽烷化合物,且此矽烷化合物具有通式R1 R2 R3 R4 Si,其中R1 、R2 、R3 及R4 為相同或不同之基團,且此基團為鹵素、具4到22個碳原子之直鏈或支鏈之烷基、OR5 、苯基、苯烷氧基、苯甲氧基、或苯烷基,其中R5 為H或具1至6個碳原子之烷基,且矽烷化合物包含有1至3個鹵素與具4到22個碳原子之直鏈或支鏈之烷基、或OR5 取代基與具4到22個碳原子之直鏈或支鏈之烷基。In an exemplary embodiment, the above decane-based treating agent may be a decane compound, and the decane compound has the formula R 1 R 2 R 3 R 4 Si, wherein R 1 , R 2 , R 3 and R 4 are the same or a different group, and the group is a halogen, a linear or branched alkyl group having 4 to 22 carbon atoms, OR 5 , phenyl, phenylalkoxy, benzyloxy, or phenylalkyl, Wherein R 5 is H or an alkyl group having 1 to 6 carbon atoms, and the decane compound contains 1 to 3 halogens and a linear or branched alkyl group having 4 to 22 carbon atoms, or an OR 5 substituent And a linear or branched alkyl group having 4 to 22 carbon atoms.
在另一示範實施例中,上述之矽烷類處理劑可為矽烷化合物,且此矽烷化合物具有通式R1 R2 R3 R4 Si,其中R1 、R2 、R3 及R4 分別為相同或不同之基團,且此基團係OR5 、1至22個碳原子之直鏈或支鏈之烷基,其中R5 為H或具1至6個碳原子之烷基,且矽烷化合物含有1至3個OR5 取代基。In another exemplary embodiment, the above decane-based treating agent may be a decane compound, and the decane compound has the formula R 1 R 2 R 3 R 4 Si, wherein R 1 , R 2 , R 3 and R 4 are respectively The same or different groups, and this group is a straight or branched alkyl group of OR 5 , 1 to 22 carbon atoms, wherein R 5 is H or an alkyl group having 1 to 6 carbon atoms, and decane The compound contains from 1 to 3 OR 5 substituents.
在又一實施例中,微奈米粒子208之表面218可利用例如電漿處理方式來進行疏水化處理。在此電漿處理過程中,所利用之電漿氣體可例如為含氟類氣體、含矽烷、1至10個碳原子之烷類、1至10個碳原子之烯類、1至10個碳原子之炔類或其混合物。在一示範實施例中,微奈米粒子208之疏水表面218可例如包含含氟材料。In yet another embodiment, the surface 218 of the micro-nanoparticles 208 can be hydrophobized using, for example, a plasma treatment. In the plasma treatment process, the plasma gas used may be, for example, a fluorine-containing gas, a decane-containing, an alkane of 1 to 10 carbon atoms, an olefin of 1 to 10 carbon atoms, and 1 to 10 carbons. Alkyne or a mixture thereof. In an exemplary embodiment, the hydrophobic surface 218 of the micro-nanoparticles 208 can comprise, for example, a fluorine-containing material.
接著,將這些微奈米粒子208與短親油基溶劑,而形成混合物。短親油基溶劑可為1~10碳之醇、烷、酮類溶劑或上述溶劑之混合物,例如丁醇或環己醇。然後,將微奈米粒子208與短親油基溶劑所混合而成的混合物注入水中。藉由包覆在微奈米粒子208之表面218上的短親油基溶劑與水的動態交換,這些微奈米粒子208中的一部分可浮在水之液面上。Next, these micro-nanoparticles 208 are combined with a short lipophilic solvent to form a mixture. The short lipophilic solvent may be a 1 to 10 carbon alcohol, an alkane, a ketone solvent or a mixture of the above solvents such as butanol or cyclohexanol. Then, a mixture of the micro-nanoparticles 208 and the short lipophilic solvent is injected into the water. A portion of these micro-nanoparticles 208 can float on the surface of the water by dynamic exchange of the short lipophilic solvent overlying the surface 218 of the micro-nanoparticles 208 with water.
在另一實施方式中,這些微奈米粒子可具有親水之表面,且微奈米粒子與極性溶劑先混合後,再將所形成之混合物注入非極性溶劑中。藉由包覆在微奈米粒子之表面上的極性溶劑與非極性溶劑的動態交換,這些微奈米粒子的一部分可浮在非極性溶劑與空氣之界面上。In another embodiment, the micro-nanoparticles may have a hydrophilic surface, and the micro-nanoparticles are first mixed with a polar solvent, and the resulting mixture is injected into a non-polar solvent. By the dynamic exchange of a polar solvent coated on the surface of the micro-nanoparticles with a non-polar solvent, a portion of these micro-nanoparticles can float at the interface between the non-polar solvent and the air.
在本實施方式中,接著將中空柱狀體200浸入水中。接著,將中空柱狀體200自水中拉出。由於注入水中的大部分微奈米粒子208朝水之液面移動,因此這些微奈米粒子208例如可藉由毛細現象而附著在高分子層204上。此外,由於高分子層204可略為溶於或分散於水中,因而這些附著在高分子層204上的微奈米粒子208可嵌設在高分子層204中。由於高分子層204之厚度206小於微奈米粒子208之直徑210,因此微奈米粒子208並未完全嵌設在高分子層204中。故,中空柱狀體200之內側面202上形成有由微奈米粒子208所構成之凸狀微奈米結構215,如第2C圖所示。In the present embodiment, the hollow columnar body 200 is then immersed in water. Next, the hollow columnar body 200 is pulled out from the water. Since most of the micro-nanoparticles 208 injected into the water move toward the liquid surface of the water, the micro-nanoparticles 208 can adhere to the polymer layer 204 by capillary action, for example. Further, since the polymer layer 204 can be slightly dissolved or dispersed in water, the micro-nanoparticles 208 adhering to the polymer layer 204 can be embedded in the polymer layer 204. Since the thickness 206 of the polymer layer 204 is smaller than the diameter 210 of the micro-nanoparticles 208, the micro-nanoparticles 208 are not completely embedded in the polymer layer 204. Therefore, a convex micro-nanostructure 215 composed of micro-nanoparticles 208 is formed on the inner side surface 202 of the hollow columnar body 200, as shown in Fig. 2C.
接著,形成材料層212,以填滿中空柱狀體200。如第2D圖所示,材料層212覆蓋住中空柱狀體200之內側面202上的微奈米粒子208與高分子層204,亦即覆蓋在凸狀微奈米結構215上。在一實施例中,材料層212之材料可例如包含熱塑性塑膠、熱固性樹脂、光固化性樹脂、或上述材料之混合物。在另一實施例中,材料層212之材料可例如包含含矽官能基高分子或含氟官能基高分子。Next, a material layer 212 is formed to fill the hollow columnar body 200. As shown in FIG. 2D, the material layer 212 covers the micro-nanoparticles 208 and the polymer layer 204 on the inner side surface 202 of the hollow columnar body 200, that is, overlying the convex micro-nanostructures 215. In one embodiment, the material of material layer 212 may comprise, for example, a thermoplastic plastic, a thermosetting resin, a photocurable resin, or a mixture of the foregoing. In another embodiment, the material of material layer 212 may comprise, for example, a ruthenium containing functional polymer or a fluoro functional based polymer.
由於材料層212覆蓋住中空柱狀體200之內側面202上的微奈米結構215上,因此微奈米結構215之圖案會轉移至材料層212上,而在材料層212上形成與微奈米結構215互補之凹狀微奈米結構216。於是,如第2E圖所示,在移除中空柱狀體200、高分子層204與微奈米粒子208之後,即可形成具有凹狀微奈米結構216之滾筒214。Since the material layer 212 covers the micro-nano structure 215 on the inner side surface 202 of the hollow cylindrical body 200, the pattern of the micro-nano structure 215 is transferred to the material layer 212, and the material layer 212 is formed on the material layer 212. The concave structure of the rice structure 215 is complementary to the concave micro-nano structure 216. Then, as shown in FIG. 2E, after the hollow columnar body 200, the polymer layer 204, and the micro-nanoparticles 208 are removed, the roller 214 having the concave micro-nano structure 216 can be formed.
在一示範實施例中,微奈米粒子208可為聚苯乙烯粒子,短親油基溶劑可為環己醇,且高分子層204可為甲基丙烯酸異丁烷基乙酯層。In an exemplary embodiment, the micro-nanoparticles 208 may be polystyrene particles, the short lipophilic solvent may be cyclohexanol, and the polymer layer 204 may be a layer of isobutylalkyl methacrylate.
在另一實施方式中,可在形成上述第二實施方式的第2C圖所示之結構後,先於中空柱狀體200中插入實心柱狀體228,如第3A圖所示。接著,如第3B圖所示,將材料層212填滿中空柱狀體200,以使材料層212接合在實心柱狀體228與中空柱狀體200之內側面202之間。而後,移除中空柱狀體200、高分子層204與微奈米粒子208,即可形成具有凹狀微奈米結構216之滾筒230。In another embodiment, after the structure shown in FIG. 2C of the second embodiment described above is formed, the solid columnar body 228 is inserted into the hollow columnar body 200 as shown in FIG. 3A. Next, as shown in FIG. 3B, the material layer 212 is filled with the hollow columnar body 200 such that the material layer 212 is joined between the solid columnar body 228 and the inner side surface 202 of the hollow columnar body 200. Then, the hollow columnar body 200, the polymer layer 204 and the micro-nanoparticles 208 are removed to form a drum 230 having a concave micro-nanostructure 216.
在又一實施方式中,可在形成上述第二實施方式的第2C圖所示之結構後,先選擇性地利用例如蒸鍍方式、濺鍍方式或吸附金屬離子方式,形成晶種層226覆蓋在中空柱狀體200之內側面202上的微奈米粒子208與高分子層204上。接著,利用例如電鍍(Electroplating)或無電鍍(Electroless Plating)方式,形成金屬層220覆蓋在中空柱狀體200內之微奈米粒子208與高分子層204上的晶種層226上,如第4A圖所示。In still another embodiment, after forming the structure shown in FIG. 2C of the second embodiment, the seed layer 226 can be selectively formed by, for example, a vapor deposition method, a sputtering method, or an adsorption metal ion method. The micro-nanoparticles 208 and the polymer layer 204 on the inner side surface 202 of the hollow columnar body 200. Next, the metal layer 220 is formed on the seed layer 226 on the micro-nanoparticles 208 and the polymer layer 204 in the hollow column 200 by, for example, electroplating or electroless plating. Figure 4A shows.
接著,如第4B圖所示,將材料層212填滿中空柱狀體200,以使材料層212覆蓋住金屬層220。接下來,移除中空柱狀體200、高分子層204與微奈米粒子208,即可形成具有凹狀微奈米結構224之滾筒222。在滾筒222中,微奈米結構224係由晶種層226與金屬層220所構成。因此,滾筒222之微奈米結構224的強度較高,可延長滾筒222之使用壽命。Next, as shown in FIG. 4B, the material layer 212 is filled with the hollow column 200 so that the material layer 212 covers the metal layer 220. Next, the hollow columnar body 200, the polymer layer 204, and the micro-nanoparticles 208 are removed to form a roller 222 having a concave micro-nanostructure 224. In the drum 222, the micro-nano structure 224 is composed of a seed layer 226 and a metal layer 220. Therefore, the strength of the micro-nano structure 224 of the drum 222 is high, and the service life of the drum 222 can be extended.
請參照第5A圖至第5D圖,其係繪示依照本發明第五實施方式的一種具有微奈米結構之滾筒的製程剖面圖。在本實施方式中,製作具有微奈米結構之滾筒時,可先提供柱狀體300。柱狀體300可為圓柱體,亦可為非圓柱體,例如橢圓柱體與角柱體等。柱狀體300包含一金屬外側面,例如弧狀之金屬外側面302,如第5A圖所示。柱狀體300可例如為金屬柱狀體,或者柱狀體300可包含金屬覆蓋層或吸附金屬離子層包附在柱狀體300之外側,以使柱狀體300具有金屬外側面302。5A to 5D are cross-sectional views showing a process of a roller having a micro-nano structure according to a fifth embodiment of the present invention. In the present embodiment, when a roller having a micron structure is produced, the columnar body 300 can be provided first. The columnar body 300 may be a cylinder or a non-cylindrical body such as an elliptical cylinder and a corner cylinder. The columnar body 300 includes a metal outer side, such as an arcuate metal outer side 302, as shown in Figure 5A. The columnar body 300 may be, for example, a metal columnar body, or the columnar body 300 may include a metal coating layer or an adsorbed metal ion layer attached to the outer side of the columnar body 300 such that the columnar body 300 has a metal outer side surface 302.
接下來,提供數個微奈米粒子304。在一實施例中,微奈米粒子304之粒徑可例如介於實質0.01微米至與實質100微米之間。這些微奈米粒子304的形狀可例如為圓球型、空心圓球、方形、棍型、長條型或三角形。微奈米粒子304之材料可為無機材料、有機材料、或有機材料與無機材料之混合物。每個微奈米粒子304具有疏水之表面312。在一示範實施例中,這些微奈米粒子304與水之接觸角大於60度。Next, several micro-nanoparticles 304 are provided. In one embodiment, the particle size of the micro-nanoparticles 304 can be, for example, between substantially 0.01 microns and substantially 100 microns. The shape of these micro-nanoparticles 304 can be, for example, a sphere, a hollow sphere, a square, a stick, a strip, or a triangle. The material of the micro-nanoparticles 304 may be an inorganic material, an organic material, or a mixture of an organic material and an inorganic material. Each micro-nanoparticle 304 has a hydrophobic surface 312. In an exemplary embodiment, the contact angle of the micro-nanoparticles 304 with water is greater than 60 degrees.
在一實施例中,微奈米粒子304本身可由疏水材料,例如聚二甲基矽氧烷、聚甲基氫矽氧烷、聚二乙基矽氧烷、甲基苯基矽氧烷、聚矽酸鹽、聚甲基倍半矽氧烷或其混合物所組成。In one embodiment, the micro-nanoparticles 304 themselves may be composed of a hydrophobic material such as polydimethyl methoxyoxane, polymethylhydroquinone, polydiethyl decane, methyl phenyl oxane, poly It consists of citrate, polymethylsesquioxane or a mixture thereof.
在另一實施例中,微奈米粒子304本身之材料可為非疏水材料,但微奈米粒子304之材料可為經矽烷類處理劑處理後之物質。在進行矽烷類處理劑處理之前,可先利用例如紫外線、電漿或酸鹼物質來對這些微奈米粒子304之表面304進行表面處理。In another embodiment, the material of the micro-nanoparticles 304 itself may be a non-hydrophobic material, but the material of the micro-nanoparticles 304 may be a material treated with a decane-based treating agent. The surface 304 of these micro-nanoparticles 304 may be surface treated with, for example, ultraviolet light, plasma or acid-base materials prior to the treatment with the decane treating agent.
在一示範實施例中,上述之矽烷類處理劑可為矽烷化合物,且此矽烷化合物具有通式R1 R2 R3 R4 Si,其中R1 、R2 、R3 及R4 為相同或不同之基團,且此基團為鹵素、具4到22個碳原子之直鏈或支鏈之烷基、OR5 、苯基、苯烷氧基、苯甲氧基、或苯烷基,其中R5 為H或具1至6個碳原子之烷基,且矽烷化合物包含有1至3個鹵素與具4到22個碳原子之直鏈或支鏈之烷基、或OR5 取代基與具4到22個碳原子之直鏈或支鏈之烷基。In an exemplary embodiment, the above decane-based treating agent may be a decane compound, and the decane compound has the formula R 1 R 2 R 3 R 4 Si, wherein R 1 , R 2 , R 3 and R 4 are the same or a different group, and the group is a halogen, a linear or branched alkyl group having 4 to 22 carbon atoms, OR 5 , phenyl, phenylalkoxy, benzyloxy, or phenylalkyl, Wherein R 5 is H or an alkyl group having 1 to 6 carbon atoms, and the decane compound contains 1 to 3 halogens and a linear or branched alkyl group having 4 to 22 carbon atoms, or an OR 5 substituent And a linear or branched alkyl group having 4 to 22 carbon atoms.
在另一示範實施例中,上述之矽烷類處理劑可為矽烷化合物,且此矽烷化合物具有通式R1 R2 R3 R4 Si,其中R1 、R2 、R3 及R4 分別為相同或不同之基團,且此基團係OR5 、1至22個碳原子之直鏈或支鏈之烷基,R5 為H或具1至6個碳原子之烷基,且矽烷化合物含有1至3個OR5 取代基。In another exemplary embodiment, the above decane-based treating agent may be a decane compound, and the decane compound has the formula R 1 R 2 R 3 R 4 Si, wherein R 1 , R 2 , R 3 and R 4 are respectively The same or different groups, and this group is a straight or branched alkyl group of OR 5 , 1 to 22 carbon atoms, R 5 is H or an alkyl group having 1 to 6 carbon atoms, and a decane compound Contains 1 to 3 OR 5 substituents.
在又一實施例中,微奈米粒子304之表面312可利用例如電漿處理方式來進行疏水化處理。在此電漿處理過程中,所利用之電漿氣體可例如為含氟類氣體、含矽烷、1至10個碳原子之烷類、1至10個碳原子之烯類、1至10個碳原子之炔類或其混合物。在一示範實施例中,微奈米粒子304之疏水表面312可例如包含含氟材料。In yet another embodiment, the surface 312 of the micro-nanoparticles 304 can be hydrophobized using, for example, a plasma treatment. In the plasma treatment process, the plasma gas used may be, for example, a fluorine-containing gas, a decane-containing, an alkane of 1 to 10 carbon atoms, an olefin of 1 to 10 carbon atoms, and 1 to 10 carbons. Alkyne or a mixture thereof. In an exemplary embodiment, the hydrophobic surface 312 of the micro-nanoparticles 304 can comprise, for example, a fluorine-containing material.
接著,將這些微奈米粒子304與短親油基溶劑,而形成混合物。短親油基溶劑可為1~10碳之醇、烷、酮類溶劑或上述溶劑之混合物,例如丁醇或環己醇。然後,將微奈米粒子304與短親油基溶劑所混合而成的混合物注入水中。藉由包覆在微奈米粒子304之表面312上的短親油基溶劑與水的動態交換,這些微奈米粒子304中的一部分可浮在水之液面上。Next, these micro-nanoparticles 304 are mixed with a short lipophilic solvent to form a mixture. The short lipophilic solvent may be a 1 to 10 carbon alcohol, an alkane, a ketone solvent or a mixture of the above solvents such as butanol or cyclohexanol. Then, a mixture of the micro-nanoparticles 304 and the short lipophilic solvent is injected into the water. A portion of these micro-nanoparticles 304 can float on the surface of the water by dynamic exchange of the short lipophilic solvent coated on the surface 312 of the micro-nanoparticles 304 with water.
在另一實施方式中,這些微奈米粒子可具有親水之表面,且微奈米粒子與極性溶劑先混合後,再將所形成之混合物注入非極性溶劑中。藉由包覆在微奈米粒子之表面上的極性溶劑與非極性溶劑的動態交換,這些微奈米粒子的一部分可浮在非極性溶劑與空氣之界面上。In another embodiment, the micro-nanoparticles may have a hydrophilic surface, and the micro-nanoparticles are first mixed with a polar solvent, and the resulting mixture is injected into a non-polar solvent. By the dynamic exchange of a polar solvent coated on the surface of the micro-nanoparticles with a non-polar solvent, a portion of these micro-nanoparticles can float at the interface between the non-polar solvent and the air.
在本實施方式中,接著將柱狀體300浸入水中。接著,將柱狀體300自水中拉出,由於注入水中的大部分微奈米粒子304朝水之液面移動,因此這些微奈米粒子304例如可藉由毛細現象而附著在柱狀體300之金屬外側面302上,如第5B圖所示。In the present embodiment, the columnar body 300 is then immersed in water. Next, the columnar body 300 is pulled out from the water, and since most of the micro-nanoparticles 304 injected into the water move toward the liquid surface of the water, the micro-nanoparticles 304 can be attached to the columnar body 300 by, for example, capillary phenomenon. The metal outer side 302 is as shown in Fig. 5B.
接著,如第5C圖所示,利用例如電鍍或無電鍍方式,從柱狀體300之金屬外側面302與微奈米粒子304之交界處,沿著微奈米粒子304之形狀,而形成與微奈米粒子304形狀相反之凹型金屬層306。金屬層306填充於微奈米粒子304與金屬外側面302之間。Next, as shown in FIG. 5C, the shape of the micro-nanoparticles 304 is formed from the boundary between the metal outer side surface 302 of the columnar body 300 and the micro-nanoparticles 304 by, for example, electroplating or electroless plating. The micro-nanoparticles 304 have oppositely shaped concave metal layers 306. Metal layer 306 is filled between micro-nanoparticles 304 and metal outer side 302.
接著,移除微奈米粒子304,而在在柱狀體300之金屬外側面302上形成凹狀之微奈米結構310。如此,即可完成具有微奈米結構310之滾筒308的製作,如第5D圖所示。Next, the micro-nanoparticles 304 are removed, and a concave micro-nanostructure 310 is formed on the metal outer side 302 of the columnar body 300. Thus, the fabrication of the roller 308 having the micro-nanostructure 310 can be accomplished as shown in FIG. 5D.
由上述實施方式可知,本揭示之一優點為可直接以自組裝方式在柱狀體上形成單一且具規則性與連續性的微奈米圖案。因此,運用本揭示所形成之滾筒模仁沒有接縫問題,而可壓印出連續性圖案。As can be seen from the above embodiments, one of the advantages of the present disclosure is that a single, regular and continuous micro-nano pattern can be formed directly on the columnar body by self-assembly. Therefore, the roller mold core formed by the present disclosure has no seam problem, and the continuous pattern can be imprinted.
由上述實施方式可知,本揭示之另一優點為可不需使用鑽石刀雕刻製程或微影製程來製備模仁。因此,不僅可大幅提高製程良率與圖案均勻度,更可縮短工時,降低製作成本。It can be seen from the above embodiments that another advantage of the present disclosure is that the mold core can be prepared without using a diamond knife engraving process or a lithography process. Therefore, not only can the process yield and pattern uniformity be greatly improved, but also the working time can be shortened and the production cost can be reduced.
雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,任何在此技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。The present invention has been disclosed in the above embodiments, and is not intended to limit the present invention. Any one of ordinary skill in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
100...柱狀體100. . . Columnar body
102...外側面102. . . Outer side
104...高分子層104. . . Polymer layer
106...微奈米粒子106. . . Micronanoparticle
108...厚度108. . . thickness
110...直徑110. . . diameter
112...滾筒112. . . roller
114...微奈米結構114. . . Micron structure
116...表面116. . . surface
200...中空柱狀體200. . . Hollow column
202...內側面202. . . Inner side
204...高分子層204. . . Polymer layer
206...厚度206. . . thickness
208...微奈米結構208. . . Micron structure
210...直徑210. . . diameter
212...材料層212. . . Material layer
214...滾筒214. . . roller
215...微奈米結構215. . . Micron structure
216...微奈米結構216. . . Micron structure
218...表面218. . . surface
220...金屬層220. . . Metal layer
222...滾筒222. . . roller
224...微奈米結構224. . . Micron structure
226...晶種層226. . . Seed layer
228...實心柱狀體228. . . Solid column
230...滾筒230. . . roller
300...柱狀體300. . . Columnar body
302...外側面302. . . Outer side
304...微奈米粒子304. . . Micronanoparticle
306...金屬層306. . . Metal layer
308...滾筒308. . . roller
310...微奈米結構310. . . Micron structure
312...表面312. . . surface
為讓本發明之上述和其他目的、特徵、優點與實施例能更明顯易懂,所附圖式之說明如下:The above and other objects, features, advantages and embodiments of the present invention will become more apparent and understood.
第1A圖至第1C圖係繪示依照本發明第一實施方式的一種具有微奈米結構之滾筒的製程剖面圖。1A to 1C are cross-sectional views showing a process of a roller having a micro-nano structure according to a first embodiment of the present invention.
第2A圖至第2E圖係繪示依照本發明第二實施方式的一種具有微奈米結構之滾筒的製程剖面圖。2A to 2E are cross-sectional views showing a process of a roller having a micro-nano structure according to a second embodiment of the present invention.
第3A圖至第3C圖係繪示依照本發明第三實施方式的一種具有微奈米結構之滾筒的部分製程剖面圖。3A to 3C are partial cross-sectional views showing a drum having a micro-nano structure according to a third embodiment of the present invention.
第4A圖至第4C圖係繪示依照本發明第四實施方式的一種具有微奈米結構之滾筒的部分製程剖面圖。4A to 4C are cross-sectional views showing a part of a process of a roller having a micro-nano structure according to a fourth embodiment of the present invention.
第5A圖至第5D圖係繪示依照本發明第五實施方式的一種具有微奈米結構之滾筒的製程剖面圖。5A to 5D are cross-sectional views showing a process of a roller having a micro-nano structure according to a fifth embodiment of the present invention.
100...柱狀體100. . . Columnar body
102...外側面102. . . Outer side
104...高分子層104. . . Polymer layer
106...微奈米粒子106. . . Micronanoparticle
108...厚度108. . . thickness
110...直徑110. . . diameter
112...滾筒112. . . roller
114...微奈米結構114. . . Micron structure
116...表面116. . . surface
Claims (59)
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| TW527696B (en) * | 2002-09-27 | 2003-04-11 | Nat Science Council | Nanometer particle deposition method |
| TWI221826B (en) * | 2003-12-26 | 2004-10-11 | Ind Tech Res Inst | Mold core preparation method by using chemical self-assembly process |
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| TWI221826B (en) * | 2003-12-26 | 2004-10-11 | Ind Tech Res Inst | Mold core preparation method by using chemical self-assembly process |
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