1250275 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種仰視取像結構之視覺檢測裝置，特別 係關於一種量測裝置以機器視覺來自動掃描及檢測一薄型 待測物之尺寸。 【先前技術】 印刷電路板是電子、電腦及通信等產品之主要零組件， 為能因應消費市場上輕、薄、短、小之產品特性，及在高 密度及高可靠性的需求催化下，高階印刷電路板在目前的 發展趨勢已大多使用盲孔（blind hole或via)及埋孔（buried hole)之技術。該種盲孔及埋孔之印刷電路板，是藉由盲孔 將内部幾層之佈線板與表面之佈線連接，不須穿透整個板 子而浪費其他層佈線板之佈局空間，預估可較一般印刷電 路板之體積縮小至20%。因此對電路板而言，無論是半成 品或成品之品質檢測工作都變的非常重要，特別是關於線 、孔徑、孔垂直度、孔真圓度及銅墊尺寸等都需要進行 量測及規格判讀。 圖1係習知可執行二維或三維量測之視覺檢測裝置之示 意圖。该視覺檢測裝置1 〇包含一可置放待測物8 〇之固定平 臺14、一視覺取像模組1 8及一可作二維或三維移動之運動 機構19。一般視覺取像模組丨8至少包括取像單元丨5及光源 16，並固定在運動機構19垂直方向之γ軸移動單元12上。另 運動機構19還包括有水平方向之χ軸移動單元丨丨及承載固 定平臺14之Z軸移動單元13，因此可以自動掃描及檢測待測 丨gC\牧德科技台灣專利\92469\92469.doc 1250275 物80表面之成何尺寸或圖型尺寸，而整個運動機構μ係固 定在一基座17上。 雖」於自動掃描時可利用γ軸移動單元丨2進行待測物8〇 表面聚焦的校正動作，但每次換不同厚度之待測物就需要 重新调技焦距與燈光，因此造成許多時間花費於該項準備 工作。如圖2所示，視覺取像模組18檢測待測物8〇之通孔81 及盲孔82之尺寸。當換成厚度較薄之待測物80,置於固定平 臺14被檢測時，很明顯通孔81及81，之上表面高度不一致， 又盲孔82及82’也發生同樣的問題，因此視覺取像模組以需 要重新調整焦距或照明以便能正確取像。 【發明内容】 本發明之主要目的係提供一種仰視取像結構之視覺檢測 裝置，其中待測物之量測面係緊貼於一透明平臺，取像單 元經過透明平臺而仰視擷取量測所需之影像，因此不會因 待測物之厚度差異而需要調整 本發明之第二目的係提供一 檢測裝置，藉由掃描二維或三 焦距或照明條件。 種可二維或三維量測之視覺 維之運動而自動掃描待測物 之量測面’且根據掃描時擷取之影像分析待測物被加工尺 寸之正確性。 為達成上述目的，本發明揭示一種仰視取像結構之視覺 檢測裝置，其包含一可固定待測物之透明平— 見 如 1 一祝覺取 像模組、—可作二維或三維移動之運動機構及控制運算模 組。該待測物之量測面固定並緊貼於該透明平臺之第:表 面’又該視覺取像模組係設於該透明平臺一 主、罘一表面側。 H:\HiAlgcWiL德科技台灣專利\92469\92469 d〇c 1250275 固定於該運動機構上之該視覺取像模組會發出光線，然後 該待測物之量測面將該光線反射回該第二表面側，並成像 在該視覺取像模組之取像單元内。該控制運算模組根據該 取像單元内產生之影像資料進行運算，並藉由控制該運動 機構之移動途徑以完成該待測物需要量測之項目。 該視覺取像模組所需要之照明光線亦可來自該第一表面 側’如此光線會穿透過該待測物之通孔而成像於該視覺取 像模組内。 【實施方式】 圖3係本發明可執行二維或三維量測之視覺檢測裝置之 示意圖。該視覺檢測裝置30包含一可固定待測物8〇之透明 平臺3 4、一視覺取像模組3 a、一可作三維移動之運動機構 3b及控制運算模組39。該待測物8〇之量測面固定並緊貼於 透明平臺34之第一表面，又視覺取像模組“係設於該透明 平臺34之第二表面側，亦即透明平臺“位於該待測物⑽及 視覺取像模組3a之中間。 ό亥視覺取像模組3a固定於運動機構％上，並至少包括一 取像單7035及一光源36’其中該取像單元35可以是電荷耦 。兀件（CCD)或互補式金屬氧化物半導體（cm〇s)攝影機， 又光源36可以是能產生光線之環狀發光元件，或其他形式 可供照明待測物80之光學元件。該待測物8〇之量測面會將 光線反射回取像單元35所在之第二表面側，並成像在取像 單兀35内。a亥控制運算模組刊根據該取像單元μ内產生之 影像資料進行運算，絲由㈣㈣㈣狀移動途徑以 H:\Hu\lgc\牧德科技台灣專利\92469\92469.doc 1250275 完成該待測物80需要量測之項目。 另運動機構3b包括有水平方向移動之χ軸移動單元31與 承載透明平臺34之2軸移動單元33，以及垂直方向移動之γ 軸移動單元32 ’因此可以自動掃描及檢測待測物⑼表面之 幾何尺寸或圖型尺寸。運動機構3b之X軸移動單元3 1係藉由 兩邊門柱38固疋在—基座37上，此_運動機構％或可稱為 門型結構。 圖4(a) 4(b)係本發明之視覺檢測裝置擷取待測物影像 之不意圖。雖然待測物8〇與8〇，之厚度不相同，但由於量測 面緊貼在透明平臺34第一表面上，因此量測面至視覺取像 模組3a之垂直距離不變，也就是焦距不需要隨量測面位置 之高低而調整。很明顯地，在垂直距離固定之條件下，所 擷取通孔81及8 Γ之影像品質不會因待測物8〇之厚度不相同 而產生變異，又盲孔82及82’之影像品質亦不受厚度之影響。 圖5係本發明視覺檢測裝置之另一實施例之示意圖。與圖 3不同的是運動機構3 b’之配置的方式，其中z軸移動單元33, 係藉由連接壁3 8’直接驅動X軸移動單元3 1，因此透明平臺 34’可直接固定在基座37上。又視覺取像模組3 a，之光源36’ 可以設在透明平臺34之第一表面上方，其所產生之光線可 透過通孔成像於取像單元35内。 本發明之技術内容及技術特點巳揭示如上，然而熟悉本 項技術之人士仍可能基於本發明之教示及揭示而作種種不 背離本發明精神之替換及修飾。因此，本發明之保護範圍 應不限於實施例所揭示者，而應包括各種不背離本發明之 H:\Hu\lgc\牧德科技台灣專利\92469\92469.doc 1250275 替換及修倚，並為以下之φ β击【圖式簡單說明】 執行二維或三維量測之 意圖； 視覺檢測裝置 之示 圖2(a)〜2(b)係習知 意圖； 視覺檢測|置擷取待;則物影像之 圖3係本發明可執行 示意圖； 一維或三維量測之視覺檢測裝置 之 圖4(a)〜4(b)係本發明 之示意圖；以及 之視覺檢測裝置擷取待測物影像 —實施例之示意囷 圖5係本發明視覺檢測裝置之另 【主要元件符號說明】 10 視覺檢測裝置 11 X軸移動單元 12 γ軸移動單元 13 z軸移動單元 14 固定平臺 15 取像單元 16 光源 17 基座 18 視覺取像模組 19 運動機構 30 視覺檢測裝置 31 X軸移動單元 H:\Hu\lgc\ 牧德科技台灣專利\92469\92469.doc 1250275BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a visual inspection device for a bottom view imaging structure, and more particularly to a measurement device for automatically scanning and detecting the size of a thin sample to be tested by machine vision. [Prior Art] Printed circuit boards are the main components of products such as electronics, computers and communications. In order to cope with the characteristics of light, thin, short and small products in the consumer market, and under the catalysis of high density and high reliability, High-order printed circuit boards have mostly used blind hole or via and buried holes in the current development trend. The printed circuit board of the blind hole and the buried hole is connected with the wiring of the inner layer by the blind hole, and the layout space of the other layer wiring board is wasted without penetrating the entire board, and the estimated space can be compared. The size of a typical printed circuit board is reduced to 20%. Therefore, for the circuit board, the quality inspection work of semi-finished products or finished products becomes very important, especially regarding the line, aperture, hole verticality, hole roundness and copper pad size, etc., measurement and specification interpretation are required. . BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of a conventional visual inspection apparatus that can perform two or three dimensional measurements. The visual inspection device 1 includes a fixed platform 14 on which the object to be tested 8 is placed, a visual image capturing module 18, and a moving mechanism 19 movable in two or three dimensions. The general visual image capturing module 8 includes at least the image capturing unit 丨5 and the light source 16, and is fixed to the γ-axis moving unit 12 in the vertical direction of the moving mechanism 19. The other moving mechanism 19 further includes a horizontal axis moving unit 丨丨 and a Z-axis moving unit 13 carrying the fixed platform 14, so that the 待gC\Mudtech Taiwan patent\92469\92469.doc can be automatically scanned and detected. 1250275 The size of the surface of the object 80 or the size of the pattern, and the entire moving mechanism μ is fixed on a base 17. Although the γ-axis moving unit 丨2 can be used to perform the correcting action of the surface of the object to be tested 8 自动 in the automatic scanning, each time the object of different thickness is changed, the focal length and the light need to be re-adjusted, thus causing a lot of time. For the preparation work. As shown in FIG. 2, the visual image capturing module 18 detects the size of the through hole 81 and the blind hole 82 of the object to be tested 8〇. When the test object 80 having a thin thickness is replaced, when the fixed platform 14 is detected, it is obvious that the through holes 81 and 81 have different heights on the upper surface, and the blind holes 82 and 82' also have the same problem, so the vision is The image capture module needs to readjust the focus or illumination so that it can be imaged correctly. SUMMARY OF THE INVENTION The main object of the present invention is to provide a visual inspection device for looking up the image capturing structure, wherein the measuring surface of the object to be tested is closely attached to a transparent platform, and the image capturing unit passes through the transparent platform and looks up at the measuring device. The image is required, so there is no need to adjust the thickness of the object to be tested. The second object of the present invention is to provide a detecting device for scanning two-dimensional or three-focus or lighting conditions. The measurement surface of the object to be tested can be automatically scanned by the movement of the visual dimension in two or three dimensions, and the correctness of the processed size of the object to be tested is analyzed based on the image captured during scanning. In order to achieve the above object, the present invention discloses a visual inspection device for a bottom view imaging structure, which comprises a transparent flat for fixing a test object, such as a dream image capture module, which can be moved in two or three dimensions. Motion mechanism and control computing module. The measuring surface of the object to be tested is fixed and closely attached to the surface of the transparent platform: the visual image capturing module is disposed on a main surface of the transparent platform. H:\HiAlgcWiLTech Taiwan Patent\92469\92469 d〇c 1250275 The visual image capturing module fixed on the moving mechanism emits light, and then the measuring surface of the object to be tested reflects the light back to the second The surface side is imaged in the image capturing unit of the visual image capturing module. The control computing module performs an operation according to the image data generated in the image capturing unit, and controls the moving path of the moving mechanism to complete the item to be measured by the object to be tested. The illumination light required by the visual image capturing module may also be from the first surface side. Thus, light is penetrated through the through hole of the object to be tested and imaged in the visual imaging module. [Embodiment] Fig. 3 is a schematic view showing a visual detecting device capable of performing two-dimensional or three-dimensional measurement according to the present invention. The visual inspection device 30 includes a transparent platform 34 for fixing the object to be tested, a visual image capturing module 3a, a moving mechanism 3b for three-dimensional movement, and a control computing module 39. The measuring surface of the object to be tested 8 is fixed and closely attached to the first surface of the transparent platform 34, and the visual image capturing module is “attached to the second surface side of the transparent platform 34, that is, the transparent platform is located at the The middle of the object to be tested (10) and the visual image capturing module 3a. The image capturing module 3a is fixed to the moving mechanism %, and includes at least one image taking unit 7035 and a light source 36', wherein the image capturing unit 35 can be electrically coupled. A CCD or a complementary metal oxide semiconductor (CMOS) camera, and the light source 36 may be an annular light-emitting element capable of generating light, or other form of optical element for illuminating the object to be tested 80. The measuring surface of the object to be tested 8 reflects the light back to the second surface side where the image capturing unit 35 is located, and is imaged in the image capturing unit 35. The ahai control computing module is calculated according to the image data generated in the image capturing unit μ, and the silk is completed by the (4) (four) (four) moving path by H:\Hu\lgc\Mudtech Taiwan patent\92469\92469.doc 1250275 The object 80 needs to be measured. The other moving mechanism 3b includes a tilting movement unit 31 that moves in the horizontal direction and a 2-axis moving unit 33 that carries the transparent platform 34, and a γ-axis moving unit 32 that moves in the vertical direction. Therefore, the surface of the object to be tested (9) can be automatically scanned and detected. Geometric size or graphic size. The X-axis moving unit 3 1 of the moving mechanism 3b is fixed to the base 37 by the two-sided door post 38. This % of the moving mechanism may be referred to as a gate type structure. Fig. 4 (a) 4 (b) is a schematic view of the visual detecting device of the present invention for capturing an image of an object to be tested. Although the thickness of the object to be tested is 8〇 and 8〇, the thickness is not the same, but since the measuring surface is closely attached to the first surface of the transparent platform 34, the vertical distance of the measuring surface to the visual image capturing module 3a is unchanged, that is, The focal length does not need to be adjusted with the position of the measuring surface. Obviously, under the condition that the vertical distance is fixed, the image quality of the through holes 81 and 8Γ will not be mutated due to the different thickness of the object to be tested, and the image quality of the blind holes 82 and 82'. Also not affected by the thickness. Figure 5 is a schematic illustration of another embodiment of a visual inspection device of the present invention. Different from FIG. 3 is a configuration of the movement mechanism 3 b' in which the z-axis moving unit 33 directly drives the X-axis moving unit 3 1 by the connecting wall 38', so that the transparent platform 34' can be directly fixed to the base. Seat 37. The light source 36' can be disposed above the first surface of the transparent platform 34, and the light generated by the image capturing module 3a can be imaged in the image capturing unit 35 through the through hole. The technical content and technical features of the present invention are disclosed above, but those skilled in the art may still make various substitutions and modifications without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention should not be limited to those disclosed in the embodiments, but should include various types of H:\Hu\lgc\Medtech Taiwan Patent\92469\92469.doc 1250275, which does not deviate from the present invention, and For the following φ β hit [simple description of the schema] the intention of performing two-dimensional or three-dimensional measurement; the visual inspection device diagram 2 (a) ~ 2 (b) is the conventional intent; visual inspection | Figure 3 is an executable view of the present invention; Figure 4 (a) to 4 (b) of the visual inspection device for one-dimensional or three-dimensional measurement are schematic views of the present invention; and the visual inspection device draws the object to be tested BRIEF DESCRIPTION OF THE DRAWINGS FIG. 5 is another main component symbol description of the visual inspection device of the present invention. 10 Vision detecting device 11 X-axis moving unit 12 γ-axis moving unit 13 Z-axis moving unit 14 Fixed platform 15 Image capturing unit 16 Light source 17 Base 18 Visual image capture module 19 Motion mechanism 30 Visual inspection device 31 X-axis mobile unit H:\Hu\lgc\ Mude Technology Taiwan Patent\92469\92469.doc 1250275
32 Y軸移動單元 33 ^ 33! Z軸移動單元 34 > 341 透明平臺 35 > 35! 取像單元 36 ^ 36? 光源 37 基座 38 門柱 39 控制運算模組 3a > 3a? 視覺取像模組 3b、3b’ 運動機構 38? 連接壁 80 待測物 81 > 81? 通孔 82、82f 盲孑L H'.\Hu\lgcWi德科技台灣專利\92469\92469. doc -10-32 Y-axis moving unit 33 ^ 33! Z-axis moving unit 34 > 341 Transparent platform 35 > 35! Image capturing unit 36 ^ 36? Light source 37 Base 38 Door post 39 Control computing module 3a > 3a? Visual imaging Module 3b, 3b' motion mechanism 38? connecting wall 80 object to be tested 81 > 81? through hole 82, 82f blind 孑 L H'.\Hu\lgcWid Technology Taiwan Patent\92469\92469. doc -10-