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TW552687B - Passivation packaging method of organic EL device and its structure - Google Patents

Passivation packaging method of organic EL device and its structure Download PDF

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Publication number
TW552687B
TW552687B TW90101069A TW90101069A TW552687B TW 552687 B TW552687 B TW 552687B TW 90101069 A TW90101069 A TW 90101069A TW 90101069 A TW90101069 A TW 90101069A TW 552687 B TW552687 B TW 552687B
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Taiwan
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organic
month
layer
barrier
scope
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TW90101069A
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Chinese (zh)
Inventor
Jui-Ming Ni
Chin-Pei Hwang
Hsuch-Wen Chen
Kuang-Jung Chen
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Windell Corp
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Publication of TW552687B publication Critical patent/TW552687B/en

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Abstract

In order to extend the lifetime of organic EL device, it is necessary to directly plate a passivation structure on the surface of the layered organic EL device to fully isolate the organic layer material and electrode layer material from contacting the external environment. When the evaporation of the organic layer and electrode material is completed, air-blocking inorganic material is selectively plated on the surface of the device to preliminarily protect the cathode, and then polymer passivation material is directly coated on the device by spraying or screen printing. After thermal curing or UV curing, the polymer layer is able to provide the device surface with filling and planarization capability and eliminate the step effect of the gap between the device and rib, so as to easily achieve the densification of passivation structure in plating the passivation material such as dielectric and/or metal, thereby completely isolating the organic EL device from the external. Finally, the whole passivation surface is coated and sealed by packaging material to provide the final protection for the EL device.

Description

552687 i號 90101069552687 i 90101069

五、發明說明(1) 發明所屬之技術領域】 本發明係有關一種於有機發光二極體(OLED)元件中, 為確保元件内部不受外界環境所影響,所發展出來的一種 以喷塗或網版印刷的方式塗佈高分子層,而於該有機發光 二極體(OLED )元件中,達到保護所形成於基板上之該有機 EL元件的目的,而所開發出來的技術。 【先前技術】 有機EL元件為具有層狀結構之元件,各層材料對於外 界環境均有極大的敏感性。為有利於電子的注入,陰極採 用低功函數的材料,然而使用低功函數的材料,會有容易 被氧化的困擾’而且陰極材料的氧化,將會大大降低該元 件的效率。此外’該元件之螢光有機固體所形成的發光層 及使用有機材料所形成的電子、電洞的注入層、輸送層, 對於水氣、氧氣及其他環境變化的因素極為敏感,容易使 該元件中的有機物結晶化,造成該有機材料層與該陰極間 有分離的現象產生,即所謂的黑點出現;所以在沒有完善 的封裝以保護該元件内部之各材料層的情況下,傳統的有 機EL兀件僅具有極短的發光壽命。因此,為了增加有機乩 元件的使用壽命,該元件中陰極及有機層應受更嚴密的保 濩,以免於爻水氣、氧氣等其他外在環境的影響。V. Description of the invention (1) The technical field to which the invention belongs] The present invention relates to an organic light emitting diode (OLED) element. In order to ensure that the inside of the element is not affected by the external environment, a type developed by spraying or A technology developed by coating a polymer layer by screen printing, and achieving the purpose of protecting the organic EL element formed on a substrate in the organic light emitting diode (OLED) element. [Prior art] Organic EL elements are elements with a layered structure, and the materials of each layer are extremely sensitive to the external environment. In order to facilitate the injection of electrons, the cathode uses a material with a low work function. However, if a material with a low work function is used, it will be easily troubled by oxidation 'and the oxidation of the cathode material will greatly reduce the efficiency of the element. In addition, the light-emitting layer formed by the fluorescent organic solid of the device, and the injection layer and transport layer of electrons and holes formed by using organic materials are extremely sensitive to moisture, oxygen, and other environmental changes, which makes it easy to make the device. The organic material in the crystallized, causing the phenomenon of separation between the organic material layer and the cathode, the so-called black spots appear; so in the absence of a perfect package to protect the material layers inside the element, the traditional organic The EL element has only a very short luminous lifetime. Therefore, in order to increase the service life of the organic tritium element, the cathode and the organic layer in the element should be more closely protected to prevent the influence of other external environments such as tritium gas, oxygen, and the like.

552687 案號 901010fig 五、發明說明(2) 广^ ^ \現象產生’然而層狀的有機層與肋材 (^b)間存在許多階梯狀及凹穴狀之表面,因此在進行 隔(passivation)封裝之製作技術上有相當之困難性。 能夠提高有機EL元件對水氣、氧氣的阻絕性,i可 於 有機EL兀件的封裝,必須發明緻密性高的阻隔 、 (Γ=νΓίοη〆)結構的鑛著方式’以改善目前有機EL元件 ί Ζίϊ PaSS1VaU〇n)製程,並且免去傳統技藝中 使用金屬或玻璃封裝罐的設計;&外提高有機1件限隔 (paSSlvatl〇n)結構的效能,避免元件曝 環境下,以達延長操作壽命。 仕奴大虱的 習知有機EL元件封 有下列之缺點: 1 · 一般使用金屬或 時,其金屬封裝罐在製 重等缺點;玻璃封裝罐 工、易碎、體積大、重 裝罐與基板黏合處平整 件之氣密性不佳,而且 限,以及金屬或玻璃封 2 · —般使用之多層 、旋轉塗佈、浸鍍等方 長,且成本、設備費用 錢著時,該有機EL元件 生產的方式處理,花費 敦及其阻隔(PaSSi Vat i〇n)結構具 罐來阻 向成本 具在製 點。另 差,以 的乾燥 訴求等 中,其 其中之 中使用 個塗著552687 Case No. 901010fig V. Description of the invention (2) Wide ^ ^ \ Phenomena occur 'However, there are many stepped and cavity-shaped surfaces between the layered organic layer and the ribs (^ b), so it is undergoing isolation There are considerable difficulties in manufacturing the package. Can improve the resistance of organic EL elements to moisture and oxygen, i can be used in the packaging of organic EL elements, must invent a highly dense barrier, (Γ = νΓίοη〆) structure mining method to improve the current organic EL elements ί Τίϊ PaSS1VaUon) process, and eliminate the design of metal or glass packaging cans used in traditional techniques; & improve the efficiency of the organic 1-piece barrier (paSSlvatl0n) structure, avoiding exposure of the components to the environment, to extend Operating life. The conventional organic EL element seals of Shilu Dalice have the following disadvantages: 1 · When using metal or general, its metal packaging cans are weighing and other disadvantages; glass packaging canners, fragile, bulky, heavy cans and substrates The airtightness of the flat part of the bonding place is not good, and it is limited, and the metal or glass seal 2-generally used multilayer, spin coating, dip plating, etc., and the cost of the organic EL element is high, and the organic EL element The production method is dealt with, and it takes cost and its barrier (PaSSi Vat) structure to stop the cost to the manufacturing point. In addition, among the dry demands, the use of

第7頁 玻璃封裝 造上具有 在製造上 量重等缺 性的精度 封裝罐内 裝罐環保 阻隔結構 式鍍著; 馬昂,其 需一個一 時間長。 隔外在環 、易被氧 造上具有 外,金屬 致於使得 劑之吸濕 存在多種 南分子層 蒸鑛法所 旋轉塗佈 ,無法以 境的影響 化、重量 不易加 或玻璃封 有機EL元 效果有 限制。 以熱蒸錢 花費時間 及浸鍍法 一貫連續 552687 五、發明說明(3) 用之多層阻隔結構中,其虬元件及肋材 阻隔屉:致之階梯效應(steP effect),會造成鍍著 服階梯霜塞:=隔層的覆蓋性差;而且以CVD方式雖可克 本ίΠΓ 缺點,然而其時間花費長,且其生產成 的方ί 2 2 i知技藝的缺點,本發明提供一種封裝el元# 祐^,二結構’直接錢著多層防水、氧穿透的阻隔層, 等材=二Γ層封裝材封裝該虬元件,用以取代金屬或玻每 作程序f /裝罐,除了可以節省封裝罐空間及重量外,案 #。可免去封装對位問題,因此較使用封裝罐程序辩 1¾ ϋ麻發明之方法係於有機乩元件為透明基板上形成1 το 來’於陽極層上以蒸鍍或塗佈的方式形成有機薄膜, 塗佑古5工作函數的陰極層後,以喷塗或網版印刷的方3 拍同刀子層’除可填補元件與肋材(r i b )間的間隙外, ,'供表面平坦性以免除覆蓋時之階梯效應(step ef fec-’以利於介電與金屬等阻隔材料在鍍著時,達到阻隔 passivation)結構的緻密性,使元件在多層阻隔材料之 保護下與外界環境完全隔絕。 本發明所揭露之阻隔(passivation)結構與鍍著方式 除可減低元件重量及適合可撓曲顯示器外,且具有下列僧 « ·Page 7 Glass packaging has the precision of lack of weight in manufacturing. Encapsulation cans. Environmental protection. Canning structure. Plating; Ma Ang, it takes a long time. The outer ring is easy to be formed by oxygen, and the metal causes spin-coating of a variety of south molecular layer vaporization methods due to the moisture absorption of the agent. The effect is limited. It takes time to spend steam and dip plating method continuously. 552687 V. Description of the invention (3) In the multilayer barrier structure, the barrier elements and rib barrier drawers: the resulting SteP effect, which will cause the coating service Step frost plug: = poor coverage of the interlayer; and although the CVD method can overcome the shortcomings of ΓΓΓ, it takes a long time and the disadvantages of the known technology, and the present invention provides a package el # 友 ^ , 二 结构 'Directly with a multi-layer waterproof, oxygen-permeable barrier layer, etc. Material = two Γ-layer packaging materials to encapsulate the plutonium element, instead of metal or glass, f / canning, in addition to saving Outside the packaging tank space and weight, case #. It can avoid the problem of package alignment, so it is better to use the package can procedure to argue 1¾ The method of ramie invention is to form 1 το on the organic substrate with a transparent substrate to form an organic film on the anode layer by evaporation or coating. After applying the cathode layer of the working function of Youyou 5 and spraying or screen printing the same 3 layers with the knife layer 'except to fill the gap between the element and the rib (rib),' for surface flatness to avoid The step effect (cover ef fec- ') in the cover is good for the compactness of the barrier material such as dielectric and metal when plated, so that the component is completely isolated from the external environment under the protection of the multilayer barrier material. In addition to the passivation structure and plating method disclosed in the present invention, in addition to reducing the weight of the device and being suitable for a flexible display, it has the following features:

552687 ------塞號 90101069_年月 曰 你π:__ 五、發明說明(P ' — 方式進行阻隔(passivation)結構製作,並導入一貫化夺 產) 、王 3 ·因免除使用金屬或玻璃封裝罐,可減輕產品重量及 厚度’縮小體積,且可撓性佳,可將適用於塑膠基板的有 機EL元件,更適合應用於攜帶式通訊等儿電子產品。 4·噴塗或網版印刷的方式,可整片塗著高分子阻隔 層’簡便快速,提高生產效率,適合量產。 5 ·可改善因元件與肋材(r i b )間結構不平整導致阻隔 材料鍍著時的階梯效應。 【發明内容】 本發明係用於有機EL顯示器所開發出來的阻隔 (passivation)結構及其鍍(塗)著製程的結合技術。其以 夕層防水、軋阻隔結構概念為基礎加以運用,並實際考量 EL元件與肋材(rib)表面結構,提供適合量產的鍍(塗)著£ 製程方式,亦大大改進與外界環境之阻絕效果。最後以封 裝材料塗著密封整個阻隔(passivation)表面,取代封裝’ 罐的設計,以提供E L元件最後保護。 為達到以上之目的本發明提供一種有機EL元件之阻隔 (passivation)封裝方法及其結構,包括: 提供一透明基板,該透明基板上係已形成一複數個 有 機EL元件畫素’且具有一複數個肋材(ri b); 鍍著一保護層,係於該有機EL元件晝素表面鍍著一552687 ------ Serial No. 90101069_Year Month: π__ V. Description of the invention (P '-way to make the passivation structure and introduce consistent production) KING 3 · Exempt from using metal Or glass packaging cans can reduce product weight and thickness, reduce volume, and have good flexibility. Organic EL elements suitable for plastic substrates are more suitable for electronic products such as portable communications. 4. The method of spraying or screen printing, which can be coated with polymer barrier layer ′ is simple and fast, which improves production efficiency and is suitable for mass production. 5 · It can improve the step effect when the barrier material is plated due to the uneven structure between the component and the rib (r i b). [Summary of the Invention] The present invention is a combination technology of a passivation structure and a plating (coating) process developed for an organic EL display. It is based on the concept of waterproofing and rolling barrier structure, and practically considers the EL element and the surface structure of the rib. It provides a plating (coating) process suitable for mass production. It also greatly improves the connection with the external environment. Blocking effect. Finally, the entire barrier surface is sealed with a packaging material to replace the design of the package 'can to provide final protection of the EL element. In order to achieve the above object, the present invention provides a passivation packaging method and structure of an organic EL element, including: providing a transparent substrate on which a plurality of organic EL element pixels have been formed and having a plurality of pixels; A rib (ri b); a protective layer is plated, and the organic EL element is plated with a

第9頁 保 552687 ---塞號 90101069 年月 a____ 五、發明說明(5) " ' ' 護層,且該保護層係為一無機材料; 錢著一層或一層以上之阻隔(passivati〇n)材料層, 6亥阻隔材料層是直接形成於該有機E L元件畫素或該保護層 塗者始、封整個阻隔(passivation)材料層表面,係以 封裝材料塗著覆蓋以封裝該阻隔材料層。 【實施方式】 本發明之實施例,如第一圖〜第四圖所示,為一種有 機EL元件之阻隔(passivati〇n)封裝方法: 如第一圖所示,為提供一透明基板丨〇1步驟,該透明 基板101上係已形成一複數個有機EL元件晝素1〇2 ,且具有 一複數個肋材(rib)103;透明基板1〇1與有機EL元件畫素 102間具有一 IT0陽極層1 〇4作為該有機EL元件畫素1 02之陽 極,且該有機EL元件畫素102上表面具有一陰極層105,該 肋材(rib)103的設計在於防止元件^。^ talk現象產生。 如第二圖所示,為形成一保護層步驟,係於該有機EL 元件畫素102表面鍍著一陰極保護層1〇6,且該保護層1〇6 係為一無機材料;且形成該保護層1 〇 6係以一低溫化學氣 相沈積方式鑛著,該保護層的膜厚可控制在1至100Q0A之 間,該保護層1 〇 6之材質可為S i 0X、S i Nx、S i 0X Ny、T i 0X、Page 9 Bao 552687 --- September 90101069 a____ V. Description of the invention (5) " 'Protective layer, and the protective layer is an inorganic material; one or more layers of barrier (passivati0n) ) Material layer, the barrier material layer is directly formed on the surface of the organic EL element pixel or the protective layer, and seals the entire surface of the barrier material layer, and is coated with a sealing material to encapsulate the barrier material layer. . [Embodiment] As shown in the first to fourth figures, the embodiment of the present invention is a passivating method for packaging organic EL elements. As shown in the first figure, a transparent substrate is provided. In one step, a plurality of organic EL elements 102 are formed on the transparent substrate 101, and a plurality of ribs 103 are formed on the transparent substrate 101. A transparent substrate 101 and an organic EL element pixel 102 have a The IT0 anode layer 104 is used as an anode of the organic EL element pixel 102, and an upper surface of the organic EL element pixel 102 has a cathode layer 105. The rib 103 is designed to prevent the element ^. ^ The talk phenomenon occurs. As shown in the second figure, in order to form a protective layer, a surface of the organic EL element pixel 102 is plated with a cathode protective layer 106, and the protective layer 106 is an inorganic material; and The protective layer 10 is deposited in a low-temperature chemical vapor deposition method. The film thickness of the protective layer can be controlled between 1 and 100Q0A. The material of the protective layer 106 can be S i 0X, S i Nx, S i 0X Ny, T i 0X,

A10X等無機材料。 Υ XA10X and other inorganic materials. Υ X

552687 案號 90101069 曰 修正 五、發明說明(6) 如第二(A)圖所示,為鑛著一層或一層以上之阻隔 (passivation)材料層步驟,其中該阻隔(passivati 〇n)材 料層107,至少一層為高分子層,該阻隔材料層1〇7是直接 填補於該有機EL元件畫素1〇2與該肋材丨〇3間,或形成於該 保護層106上;然而層狀的有機EL元件畫素1〇2與肋材1〇3 (r 1 b)間存在許多階梯狀及凹穴狀之表面,因此在進行阻 隔(pass i vat ion)封裝之製作技術上有相當之困難性。所 以本發明使用至少一層高分子層材料,以喷塗結合幕罩圖 樣(Mask Pattern)或網版印刷等方式塗著於該有機EL元件 晝素上’除可填補有機EL元件畫素1 〇2與肋材l〇3(r ib)間 的間隙外’並提供表面平坦性以免除覆蓋時之階梯效應( step effect) ’以利於其它之介電材質1〇8及(或)金屬材 質109等阻隔材料在鍍著時,如第三(B)圖所示,達到阻隔 (passivation)結構的緻密性,其中該阻隔(paSsivati〇n) 材料層之高分子層材料,可為一熱固性、uv固化、無溶劑 型oligomer、sol-gei或有機/無機混成等材料所形成之高 分子層’且該高分子層膜厚,以不低於肋材(r i b)的高度 ’並控制在1至lOOOvm之間。另外,如第五(A)圖〜第五 (B)圖所示’該喷塗或網版印刷的幕罩圖樣(Mask Pattern )511個數與該透明基板5〇上所形成之該有機EL元件區域 501個數相同且位置相對,且其幕罩圖樣(Mask Pat tern )511尺寸須大於有機^^元件區域5〇1尺寸,其中該噴塗之 Mask或網版51上之對位符號512,於喷塗或印刷時需對準 該透明基板50上之對位符號502,其中該有機EL元件區域552687 Case No. 90101069 Amendment V. Description of the invention (6) As shown in the second (A) diagram, it is a step of depositing one or more layers of passivation material, wherein the passivating material layer 107 At least one layer is a polymer layer, and the barrier material layer 107 is directly filled between the organic EL element pixel 102 and the rib material 103, or is formed on the protective layer 106; however, it is layered There are many stepped and cavity-shaped surfaces between the organic EL element pixels 102 and the ribs 103 (r 1 b), so it is quite difficult to make a pass i vat ion packaging technology Sex. Therefore, the present invention uses at least one polymer layer material, which is coated on the organic EL element by spraying, combining with a mask pattern or screen printing, and the like, in addition to filling organic EL element pixels 1 〇 2 And the gap between rib 103 and rib '' and provide surface flatness to avoid step effect when covering '' to facilitate other dielectric materials 108 and / or metal materials 109, etc. When the barrier material is plated, as shown in FIG. 3 (B), the denseness of the barrier structure is achieved, wherein the polymer layer material of the barrier material layer may be a thermosetting, UV curing Polymer layer made of materials such as solvent-free oligomer, sol-gei, or organic / inorganic hybrid, and the film thickness of the polymer layer is not less than the height of the rib, and is controlled between 1 and 1000 vm. between. In addition, as shown in the fifth (A) to fifth (B) drawings, the number of 511 mask patterns (Mask Patterns) sprayed or screen-printed and the organic EL formed on the transparent substrate 50 The number of element areas 501 is the same and the positions are opposite, and the size of the mask pattern 511 must be larger than the size of the organic ^ element area 501. The sprayed Mask or the alignment symbol 512 on the screen 51, The alignment symbol 502 on the transparent substrate 50 needs to be aligned when spraying or printing, wherein the organic EL element area

Μ 5526^7 修正Μ 5526 ^ 7 correction

1 號 901_ftQ 五、發明說明(7) 501中包括數千個以上的有機阢元件畫素5〇3。 最後,如第四圖所示,為塗著密封整個阻隔 pass^tion)材料層表面步驟係以一封 枓 110 係以EP〇xy 膠、Acrylic 膠、Silic 固,、”膠等封裝材料。特別…於本方法膠二各鑛式熱二 保護層步驟中所鍍著陰極保護層106,及鍍著一層以上之 = = i=ssi_vati0n)材料層步驟中之介電材質108與金屬材 質i等阻隔材料,可視其實際之實施需求,以選擇性使 用該步驟。 此外本發明也更揭露了一種有機EL元件之阻隔 (passivation)封裝結構,如第六(A)圖所示,包括: 一 一透明基板6〇1,該透明基板601上具一複數個有機EL 兀件畫素602,且具有一複數個肋材(rib)6〇3;該透明基 板601表面與該有機EL元件晝素6〇2間具有一IT〇陽極層6〇4 ’作為該有機EL元件畫素6〇2之陽極,且該有機el元件畫 素602上表面具有一陰極層6〇5。 一保護層,該保護層6 〇 6係位於該有機EL元件畫素6 〇 2 表面,係於該有機EL元件晝素60 2表面鍍著一陰極保護層 6 〇 6,且該保護層6 〇 6係為一無機材料。 一層或一層以上之阻隔(passivation)材料層607、 6〇8、6〇9 ’其中該阻隔(passivation)材料層,至少一層 $ ^分子層6 0 7,且該阻隔材料層之高分子層6 0 7是直接形No. 1 901_ftQ V. Description of the invention (7) 501 includes thousands of organic pixel elements 503. Finally, as shown in the fourth figure, the step of coating and sealing the entire surface of the barrier layer is coated with a seal of 110 and sealed with EP 0xy, Acrylic, Silicon, and other sealing materials. In particular, … The cathodic protection layer 106 is plated in the step of each of the two thermally-protected layers of the rubber type 2 of this method, and the dielectric material 108 and the metal material i in the material layer step are blocked by more than one layer = = i = ssi_vati0n). The material can be selectively used according to its actual implementation requirements. In addition, the present invention also discloses a passivation packaging structure of an organic EL element, as shown in the sixth (A) diagram, including: one to one transparent A substrate 601. The transparent substrate 601 is provided with a plurality of organic EL elements 602 and has a plurality of ribs 603. The surface of the transparent substrate 601 and the organic EL element are 602. Two have an IT0 anode layer 604 'as the anode of the organic EL element pixel 602, and the organic el element pixel 602 has a cathode layer 605 on the upper surface. A protective layer, the protective layer The 〇6 system is located on the surface of the pixel 〇2 of the organic EL element. The surface of the organic EL element is coated with a cathodic protection layer 6 0 6, and the protection layer 6 0 6 is an inorganic material. One or more layers of passivation material layers 607, 6 0, 6 0 9 'wherein the barrier material layer, at least one molecular layer 6 0 7, and the polymer layer 6 7 of the barrier material layer is directly shaped

第12頁 552687 SS__901〇l〇69 五、發明說明(8) 曰 修正 f填補於該有機虬元件晝素6〇2與該肋材6〇3間,或形成於 該保護層60 6上;之後再形成其它之介電材質6〇8與金屬材 質6 0 9等阻隔材料。 一封裝材料層6 1 0,係塗著密封整個阻隔 (Passivation)材料層 60 7、608、60 9 表面。 其中’該保護層與該阻隔(passivation)材料層608、 田然疋可以選擇性使用於該阻隔(pa s s i v a t i ο η)封裝 結構中,如第六(B)圖〜第六(D)圖所示。Page 12 552687 SS__901〇l〇69 V. Description of the invention (8) The correction f is filled in between the organic tritium element 602 and the rib 603, or formed on the protective layer 60 6; Then other barrier materials such as dielectric material 608 and metallic material 609 are formed. A packaging material layer 6 10 is coated to seal the entire surface of the barrier material layer 60 7, 608, 60 9. Among them, the protective layer and the passivation material layer 608, Tian Ranyu can be selectively used in the barrier (pa ssivati ο η) packaging structure, as shown in FIG. 6 (B) to FIG. 6 (D). Show.

有機EL元件畫素6〇2的阻隔(passivation)層、608 、609組成為在透明基板601上形成有機EL元件畫素60 2後 )選擇性錄著無機材於有機EL元件畫素6〇2表面以初步保 濩疋件,該保護層6 〇 6目的為防止高分子6 〇 7殘留溶劑或固 化後產生化子物知餘有機E l元件畫素6 〇 2。再以喷塗或網 版印刷方式直接鍍著高分子6〇7阻隔材料在元件上,經熱 固化或uv固化,使高分子層6〇7能提供元件表面的填補性 及平坦化,並免除元件與r i b間間隙的階梯效應,以利於 介電60 8及(或)金屬60 9等阻隔材料在鍍著時,達到阻隔 (passi vatiorO結構的緻密性,使有機乩元件畫素6〇2完全 與外界隔絕。最後封裝結構以封裝材料6丨〇塗著密封整個 阻隔(passivation)表面,以提供有機乩元件畫素6〇2最後 因此,本發明之『一種有機EL元件之阻隔 (passivation)封裳方法及其結構』,確能藉所揭露之技The organic EL element pixel 602 passivation layer, 608, and 609 are composed of organic EL element pixels 60 formed on a transparent substrate 601. 2) The inorganic material is selectively recorded on the organic EL element pixels 602. The surface is preliminarily protected. The purpose of the protective layer 606 is to prevent the residual solvent of the polymer 607 or the curing of the chemical substance CHIYO organic EL element pixel 602 after curing. The polymer 607 barrier material is directly plated on the element by spraying or screen printing, and then heat-cured or UV-cured, so that the polymer layer 607 can provide filling and flattening of the surface of the element, and eliminate The step effect of the gap between the element and the rib is beneficial to the barrier materials such as dielectric 60 8 and / or metal 60 9 when they are plated to achieve the compactness of the passi vatiorO structure, which makes the organic element element pixel 602 completely. It is isolated from the outside world. Finally, the packaging structure is coated with a sealing material 6 丨 〇 to seal the entire passivation surface to provide an organic element element pixel 602. Finally, according to the present invention, a "passivation seal for an organic EL element" Method and structure "can indeed use the techniques disclosed

Η 第13頁 552687 _案號90101069_年月曰 修正_ 五、發明說明(9) 藝,達到所預期之目的與功效,符合發明專利之新穎性, 進步性與產業利用性之要件。 惟,以上所揭露之圖式及說明,僅為本發明之較佳實 施例而已,非為用以限定本發明之實施,大凡熟悉該項技 藝之人士其所依本發明之精神,所作之變化或修飾,皆應 涵蓋在以下本案之申請專利範圍内。13 Page 13 552687 _Case No. 90101069_ Year Month Amendment _ V. Description of the invention (9) The technology can achieve the expected purpose and effect, which meets the requirements of novelty, advancement and industrial utilization of invention patents. However, the drawings and descriptions disclosed above are only preferred embodiments of the present invention, and are not intended to limit the implementation of the present invention. Any person familiar with the technology will make changes based on the spirit of the present invention. Or modifications should be covered by the scope of patent application in the following case.

第14頁 552687 ——-复號 90in|j^ 弍簡單說% ^ 【圖式簡單說明】 第一圖為一已穿 ^ ^ w 成有機EL元件之透明基板示意圖 第一 ®為^ 一保護層示意圖 =二圖為錢著随隔材料層示意圖 第:圖為圖舍為^著介電/金屬材質示意圖 第圖為塗者封裴材料示意圖 第五(A)圖為噴塗或網版印刷的幕罩圖樣示意圖 =⑻圖為該透明基板上所形成之該有機el元件區域示 第六(A)圖〜第六(D)圖為本發明 (Passivation)封裝結構示意圖 種有機EL元件之阻隔 【圖號說明】 101 1〇2 1〇3 1 〇4 105 1 06 1 07 透明基板 有機EL元件畫素 肋材(r ib) IT 0陽極層 陰極層 保護層 高分子阻隔(passivation)材料層Page 14 552687 ——No. 90in | j ^ 弍 Simply say% ^ [Simplified illustration of the figure] The first picture is a transparent substrate that has been worn ^ ^ w into an organic EL element. The first ® is ^ a protective layer. Schematic diagram = The second diagram is the schematic diagram of the layer of the material with the spacer. The picture is the diagram of the dielectric / metal material. The diagram is the schematic diagram of the coating material of the sealer. The fifth (A) is the screen of spraying or screen printing. Schematic diagram of the cover pattern = ⑻ The diagram shows the organic el element area formed on the transparent substrate. The sixth (A) to sixth (D) diagrams are schematic diagrams of the packaging structure of the Passivation of the present invention. Description of number] 101 1〇2 1〇3 1 〇4 105 1 06 1 07 transparent substrate organic EL element pixel rib (r ib) IT 0 anode layer cathode layer protection layer polymer barrier material layer

第15頁 ---— 552687 _案號90101069 年月日 修正 圖式簡單說明 阻隔(passivation)材料層介電材質 丨〇8 阻隔(passivation)材料層金屬材質 ι〇9 封裝材料 11() 透明基板 50 有機EL元件區域 501 透明基板上之對位符號 502 有機EL元件畫素 503 喷塗之Mask或網版 51 幕罩圖樣(Mask Pattern) 511 喷塗之Mask或網版上之對位符號 512 透明基板 601 有機EL元件晝素 602 肋材(rib) 603 IT0陽極層 陰極層 605 保護層 606 南分子阻隔(passivation)材料層 607 介電材質阻隔(passivation)材料層 608 金屬材質阻隔(passivation)材料層 609 封裝材料層 610Page 15 ----- 552687 _ Case No. 90101069 Revised diagram Brief description of the passivation material layer dielectric material 丨 〇8 Passivation material layer metal material 〇09 Encapsulation material 11 () Transparent substrate 50 Organic EL element area 501 Registration mark on transparent substrate 502 Organic EL element pixel 503 Sprayed Mask or screen 51 Mask pattern 511 Sprayed mask or screen 512 Transparent Substrate 601 Organic EL element 602 Rib 603 IT0 Anode layer Cathode layer 605 Protective layer 606 South molecular barrier material layer 607 Dielectric material barrier material layer 608 Metal barrier material layer 609 Packaging material layer 610

第16頁Page 16

Claims (1)

552687 __索號90101069__年 月曰 倐炎_ 六、申請專利範圍 1. 一種有機EL元件之阻隔(passivation)封裝方法,包 括: 提供一透明基板,該透明基板上係已形成一複數個有 機EL元件畫素,且具有一複數個肋材(rib); 形成一保護層,係於該有機EL元件晝素表面鍍著一保 護層,且該保護層係為一無機材料; 鑛著一層或一層以上之阻隔(passivation)材料層, 其中該阻隔(passivation)材料層,至少一層為高分子 層’且該阻隔材料層是直接形成填補於該有機E L元件畫素 與該肋材間,或形成於該保護層上; 塗著密封整個阻隔(pas si vat ion)材料層表面,係以 封裝材料塗著覆蓋以封裝該阻隔材料層。 法如^^利範圍第1項所述之有機EL元件之阻隔封裝方 、中5亥保護層,係以一低溫化學氣相沈積方式鍍著形 法,^ ^ ^利範圍第1項所述之有機EL元件之阻隔封裝方 A1〇x等無二層之材質可為^〜、SiNx、Si〇A、Ti〇x、 4 ·如申請專利 ~ 法,其中該,圍第1項所述之有機EL元件之阻隔封裝方 Λ “ 4層的膜厚控制在1至1〇〇〇〇八之間。552687 __ 索 号 90101069__ 年月 说 倐 炎 _ 6. Scope of patent application 1. A method for passivation packaging of an organic EL element, comprising: providing a transparent substrate on which a plurality of organics have been formed; An EL element is a pixel and has a plurality of ribs; a protective layer is formed on the surface of the organic EL element and a protective layer is plated, and the protective layer is an inorganic material; a layer or One or more passivation material layers, wherein at least one of the passivation material layers is a polymer layer, and the barrier material layer is directly formed to fill a gap between the organic EL element pixel and the rib material, or to form On the protective layer; coating and sealing the entire surface of the barrier material layer, and coating and covering the barrier material layer with a sealing material. The protective encapsulation method of the organic EL element described in item ^^ 1 of the scope, and the protective layer of the middle layer, is a low temperature chemical vapor deposition plating method, as described in item 1 of the scope of ^^ The material of the organic EL element that has no two layers, such as A10x, can be ^ ~, SiNx, SiOA, Ti〇x, 4 · As for the patent application method, which is described in item 1 The film thickness of the barrier encapsulation side Λ "of the organic EL element is controlled between 1 and 1,000. 552687 ___案號90101069__年月日__ 六、 申請專利範圍 5.如申請專利範圍第1項所述之有機EL元件之阻隔封裝方 法,其中該阻隔(passivation)材料層之高分子層材料’ 可為一熱固性、UV固化、無溶劑型oligomer、sol- gel或 有機/無機混成等材料所形成之高分子層。 6·如申請專利範圍第1項所述之有機EL元件之阻隔封裝方 法,其中該阻隔(passivation)材料層之高分子層材料, 係以喷塗結合幕罩圖樣(Mask Pattern)或網版印刷等方式 塗著於該有機E L元件晝素上。 7·如申請專利範圍第6項所述之有機EL元件之阻隔封裝方 法’其中該噴塗或網版印刷的幕罩圖樣(Mask Pattern)個 數與該透明基板上所形成之該有機EL元件區域個數相同且 位置相對,且其幕罩圖樣(Mask Pattern)尺寸須大於有機 EL元件區域尺寸。 8·如申請專利範圍第1項所述之有機EL元件之阻隔封裝方 ^ 其中邊阻隔(passivation)材料層之南分子層膜厚, 係以不低於肋材(r i b)的高度,並控制在1至1 0 0 0 // m之 間。 、·如申請專利範圍第1項所述之有機EL元件之阻隔封裝方 法’其中該一層以上之阻隔(passivation)材料層之材 料’可為一介電材質或金屬材質等阻隔材料。552687 ___Case No. 90101069__Year Month Date__ VI. Scope of Patent Application 5. The method for barrier packaging of organic EL elements as described in item 1 of the scope of patent application, wherein the polymer layer material of the passivation material layer 'It can be a polymer layer formed from materials such as thermosetting, UV curing, solvent-free oligomer, sol-gel, or organic / inorganic hybrid materials. 6. The barrier packaging method for the organic EL element according to item 1 of the scope of the patent application, wherein the polymer layer material of the passivation material layer is spray-bonded with a mask pattern or screen printing Coated on the organic EL element in such a manner. 7. The barrier packaging method of the organic EL element as described in item 6 of the scope of the patent application, wherein the number of mask patterns sprayed or screen-printed and the area of the organic EL element formed on the transparent substrate The number is the same and the positions are opposite, and the mask pattern size must be larger than the organic EL element area size. 8 · The barrier packaging method for the organic EL element as described in the first item of the scope of patent application ^ wherein the thickness of the south molecular layer of the passivation material layer is not less than the height of the rib and is controlled. Between 1 and 1 0 0 0 // m. The barrier packaging method of the organic EL element described in item 1 of the scope of the patent application, wherein the material of the one or more layers of the passivation material layer may be a barrier material such as a dielectric material or a metal material. 552687 修正 案號 90101069 六、申請專利範圍 10·如申請專利範圍第1項所述之有機el元件之阻隔封裝方 .法’其中該封裝材料,係以Ε ρ ο X y膠、A c r y 1 i c膠、 Si 1 i cone膠或各式熱固化、UV膠等封裝材料。 11 括 種有機E L元件之阻隔(p a s s i v a t i ο η)封裝結構,包 一透明基板,該透明基板上具一複數個有機EL元件畫 素,且具有一複數個肋材(rib); 一保護層,該保護層係位於該有機EL元件畫素表面, 且該保護層係為一無機材料; 一層或一層以上之阻隔(passivation)材料層,其中 該阻隔(passivation)材料層,至少一層為高分子層,且 該阻隔材料層是直接形成填補於該有機EL元件畫素與該肋 材間,或形成於該保護層上; 一封裝材料層,係塗著密封整個阻隔(p a s s i v a t i ο η) 材料層表面。 12.如申請專利範圍第11項所述之有機EL元件之阻隔封裝 結構,其中該保護層係以一低溫化學氣相沈積方式鍍著形 成。 13·如申請專利範圍第11項所述之有機EL元件之阻隔封裝 結構,其中該保護層之材質可為S i 0X、S i Nx、S i 0X Ny、T i 0552687 Amendment No. 90101069 6. Application for Patent Scope 10 · The barrier packaging method for organic el elements described in item 1 of the scope of application for patent. Method 'where the packaging material is Ερ ο X y glue, A cry 1 ic Glue, Si 1 i cone glue or various kinds of heat curing, UV glue and other packaging materials. 11 A passivati packaging structure including an organic EL element, including a transparent substrate, the transparent substrate having a plurality of organic EL element pixels, and having a plurality of ribs; a protective layer, The protective layer is located on the pixel surface of the organic EL element, and the protective layer is an inorganic material; one or more layers of a passivation material layer, wherein at least one of the passivation material layer is a polymer layer And the barrier material layer is directly formed to fill the space between the organic EL element pixel and the rib material, or formed on the protective layer; a packaging material layer is coated to seal the entire surface of the barrier (passivati) material layer surface . 12. The barrier packaging structure of the organic EL element according to item 11 of the scope of the patent application, wherein the protective layer is formed by plating in a low-temperature chemical vapor deposition method. 13. The barrier packaging structure of the organic EL element according to item 11 of the scope of the patent application, wherein the material of the protective layer may be S i 0X, S i Nx, S i 0X Ny, T i 0 第19頁 552687 ---案號 901010M_年月日____ 六、申請專利範圍 x、A 1 Ox等無機材料。 14·如申請專利範圍第丨丨項所述之有機EL元件之阻隔封裝 結構’其中該保護層的膜厚控制在1至1 0000A之間。 15·如申請專利範圍第11項所述之有機EL元件之阻隔封裝 結構’其中該阻隔(pass i vat ion)材料層之高分子層材料 ’可為一熱固性、UV固化、無溶劑型〇1 igomer、sol-gei 或有機/無機混成等材料所形成之高分子層。 1 6·如申請專利範圍第11項所述之有機EL元件之阻隔封裝 結構’其中該阻隔(p a s s i v a t i 〇 η )材料層之高分子層材料 ’係以噴塗結合幕罩圖樣(Mask Pat tern)或網版印刷等方 式塗著於該有機乩元件畫素上。 17·如申請專利範圍第16項所述之有機EL元件之阻隔封裝 結構’其中該喷塗或網版印刷的幕罩圖樣(Mask Pattern) 個數與透明基板上所形成有機E L元件區域個數相同且位置 相對’且其幕罩圖樣(Mask Pattern)尺寸須大於有機ELS 件區域尺寸。 18·如申請專利範圍第丨丨項所述之有機EL元件之阻隔封裝 結構,其中該阻隔({)&5以"1:丨〇11)材料層之高分子層膜厚 ’係以不低於肋材(r i b)的高度,並控制在1至1 〇 〇 〇 # m之Page 19 552687 --- Case No. 901010M_Year Month Date____ Sixth, the scope of patent application x, A 1 Ox and other inorganic materials. 14. The barrier packaging structure of the organic EL element according to item 丨 丨 of the scope of application for patent, wherein the film thickness of the protective layer is controlled between 1 and 10,000A. 15. The barrier packaging structure of the organic EL element according to item 11 of the scope of the patent application, wherein the polymer layer material of the pass i vat ion material layer may be a thermosetting, UV curing, solvent-free type. Polymer layer made of igomer, sol-gei or organic / inorganic hybrid materials. 16. The barrier packaging structure of the organic EL element as described in item 11 of the scope of the patent application, wherein the polymer layer material of the passivati material layer is spray-bonded with a mask pattern (Mask Pat tern) or Screen printing or the like is applied to the organic element element pixels. 17. The barrier packaging structure of the organic EL element according to item 16 of the scope of the patent application, wherein the number of mask patterns of the spray coating or screen printing and the number of organic EL element regions formed on the transparent substrate The size of the mask pattern must be larger than the size of the organic ELS device. 18. The barrier packaging structure of the organic EL element as described in item 丨 丨 of the scope of the patent application, wherein the polymer layer film thickness of the barrier ({) & 5 to " 1: 丨 〇 11) material layer is based on Not less than the height of ribs, and controlled between 1 and 100 #m 第20頁 552687 ---tE 90101QRQ_年月日 六、申請專利範圍 間0 1 9·如申請專利範圍第11項所述之有機EL元件之阻隔封裝 結構’其中該一層以上之阻隔(pass丨vat i〇n)材料層之材 料’可為一介電材質或金屬材質等阻隔材料。 20·如申請專利範圍第11項所述之有機EL元件之阻隔封裝 結構’其中該封裝材料,係以Ep0xy膠、Acry η c膠、 Silicone膠或各式熱固化、UV膠等封裝材料。 21. —種有機EL元件之阻隔(passivati〇n)封裝方法,包 括: 提供一透明基板,該透明基板上係已形成一複數個有 機EL元件畫素,且具有一複數個肋材(rib); ,著一層或一層以上之阻隔(passivati〇n)材料層, 其中该阻隔(Passivation)材料層,至少一層為高分子 層’且遠阻隔材料層是直接形成填補於該有機E L元件畫素 與該肋材間,或形成於該保護層上; 塗著达、封整個阻隔(P a S S i V a t i 〇 n )材料層表面,係以 一封裝材料塗著覆蓋以封裝該阻隔材料層。 2 2 ·如申凊專利範圍第2 1項所述之有機e l元件之阻隔封裝 方法,其中該阻隔(passivation)材料層之高分子層材料 ,可為一熱固性、UV固化、無溶劑型〇i ig〇mer、s〇卜gelPage 20 552687 --- tE 90101QRQ_year, month and day 6. Between the scope of patent application 0 1 9 · The barrier packaging structure of organic EL elements as described in item 11 of the scope of patent application, where one or more layers of barrier (pass 丨The material 'of the material layer' may be a barrier material such as a dielectric material or a metal material. 20. The barrier packaging structure of the organic EL element according to item 11 of the scope of the patent application, wherein the packaging material is made of Ep0xy glue, Acry η c glue, Silicone glue, or various types of heat curing, UV glue and other packaging materials. 21. A passivating packaging method for an organic EL element, comprising: providing a transparent substrate on which a plurality of organic EL element pixels have been formed, and having a plurality of ribs A layer of one or more passivation material layers, wherein at least one layer of the passivation material layer is a polymer layer, and the far-off barrier material layer is directly formed to fill the organic EL element pixels and The ribs are formed on the protective layer; the entire surface of the barrier material layer is coated and sealed, and the barrier material layer is covered by coating with a sealing material. 2 2 · The barrier packaging method for an organic el element as described in item 21 of the patent application, wherein the polymer layer material of the passivation material layer may be a thermosetting, UV curing, solvent-free type. ig〇mer 、 s〇 卜 gel 552687 _案號 90101069_ 年月日_修正___ 六、申請專利範圍 或有機/無機混成等材料所形成之高分子層。 2 3 ·如申請專利範圍第2 1項所述之有機E L元件之阻隔封裳 方法,其中該阻隔(pass i vat ion)材料層之高分子層材料 ,係以喷塗結合幕罩圖樣(M a s k P a 11 e r η)或網版印刷等方 式塗著於該有機EL元件畫素上。 24·如申請專利範圍第23項所述之有機EL元件之阻隔封裝 方法,其中該喷塗或網版印刷的幕罩圖樣(Mask Pa t tern) 個數與該透明基板上所形成之該有機EL元件區域個數相同 且位置相對,且其幕罩圖樣(Mask Pattern)尺寸須大於有 機EL元件區域尺寸。 2 5·如申請專利範圍第2 1項所述之有機EL元件之阻隔封裝 方法,其中該阻隔(passivation)材料層之高分子層膜厚 ,係以不低於肋材(r i b )的高度,並控制在1至1 0 0 0 V m之 間。 26·如申請專利範圍第21項所述之有機EL元件之阻隔封裴 方法,其中該一層以上之阻隔(passivation)材料層之材 料,可為一介電材質或金屬材質等阻隔材料。 2 7 ·如申請專利範圍第2 1項所述之有機E L元件之阻隔封襄 方法,其中該封裝材料,係以Epoxy膠、Acrylic膠、552687 _Case No. 90101069_ Year Month_ Amendment ___ 6. Scope of patent application or polymer layer formed of materials such as organic / inorganic hybrid materials. 2 3 · The method for blocking and sealing the organic EL element according to item 21 of the scope of patent application, wherein the polymer layer material of the pass i vat ion material layer is spray-bonded with a curtain pattern (M ask P a 11 er η) or screen printing on the organic EL element pixels. 24. The method for barrier packaging of an organic EL element as described in item 23 of the scope of the patent application, wherein the number of mask patterns on the sprayed or screen printing and the organic formed on the transparent substrate The number of EL element regions is the same and the positions are opposite, and the mask pattern size must be larger than the organic EL element region size. 25. The method for barrier packaging of an organic EL device as described in item 21 of the scope of patent application, wherein the polymer layer film thickness of the passivation material layer is not less than the height of the rib, And controlled between 1 and 100 V m. 26. The method for blocking and sealing an organic EL element according to item 21 of the scope of the patent application, wherein the material of the one or more layers of the passivation material layer may be a barrier material such as a dielectric material or a metal material. 2 7 · The method for blocking and sealing organic EL elements as described in item 21 of the scope of patent application, wherein the packaging material is made of Epoxy glue, Acrylic glue, 552687552687 Silicone膠或各式熱固化、uv膠等封裝材料。 28· —種有機EL元件之阻隔(passivati〇n)封裝結構,包 括: 一透明基板’該透明基板上具一複數個有機EL元件晝 素’且具有一複數個肋材(rib); 層或一層以上之阻隔(passivation)材料層,其中 遠阻隔(passivati〇n)材料層,至少一層為高分子層,且 δ亥阻隔材料層是直接形成填補於該有機EL元件晝素與該肋 材間’或形成於該保護層上; 一封裝材料層,係塗著密封整個阻隔(p a s s i ν a t i 〇 η ) 材料層表面。 29·如申請專利範圍第28項所述之有機EL元件之阻隔封裝 、、、°構’其中該阻隔(passivation)材料層之高分子層材料 ’可為一熱固性、UV固化、無溶劑型〇1 i gome r、sol-gei 或有機/無機混成等材料所形成之高分子層。 3〇·如申請專利範圍第28項所述之有機EL元件之阻隔封裝 結構,其中該阻隔(1)335丨口1^〇11)材料層之高分子層材料 ’係以噴塗結合幕罩圖樣(Mask Pat tern)或網版印刷等方 式塗著於該有機EL元件畫素上。 3 1 ·如申請專利範圍第3〇項所述之有機EL元件之阻隔封裝Silicone glue or all kinds of heat curing, UV glue and other packaging materials. 28 · —A passivating package structure of an organic EL element, comprising: a transparent substrate 'the transparent substrate has a plurality of organic EL elements on the substrate' and has a plurality of ribs; a layer or More than one layer of passivation material, of which the passivation material layer is at least one polymer layer, and the delta barrier material layer is directly formed to fill the space between the organic EL element and the rib. 'Or formed on the protective layer; a packaging material layer is coated to seal the entire surface of the barrier (passi ν ati η) material layer. 29. The barrier package of the organic EL element as described in item 28 of the scope of the patent application, wherein the polymer layer material of the passivation material layer may be a thermosetting, UV curing, solvent-free type. 1 i gome r, sol-gei or organic / inorganic hybrid polymer layer. 30. The barrier packaging structure of the organic EL element according to item 28 of the scope of the patent application, wherein the polymer layer material of the barrier (1) 335 丨 port 1 ^ 〇11) material layer is spray-bonded with a curtain pattern (Mask Pat tern) or screen printing on the organic EL element pixels. 3 1 · Barrier packaging of organic EL elements as described in item 30 of the scope of patent application 第23頁 552687 ------90101069_年月曰 修丨下_ 六、申請專利範圍 、结構’其中該喷塗或網版印刷的幕罩圖樣(Mask Pattern) 個數與透明基板上所形成有機EL元件區域個數相同且位置 相對’且其幕罩圖樣(Mask Pattern)尺寸須大於有機£1^元 件區域尺寸。 32·如申請專利範圍第28項所述之有機EL元件之阻隔封裝 結構’其中該阻隔(passivati〇n)材料層之高分子層膜厚 ’係以不低於肋材(r i b )的高度,並控制在1至1 0 0 0 // m之 間0 33·如申請專利範圍第28項所述之有機EL元件之阻隔封敦 結構,其中該一層以上之阻隔(p a s s i v a t i ο η )材料層之材 料,可為一介電材質或金屬材質等阻隔材料。 3 4 ·如申請專利範圍第2 8項所述之有機E L元件之阻隔封裝 結構,其中該封裝材料,係以Ε ρ ο X y膠、A c r y 1 i c膠、 Si 1 i cone膠或各式熱固化、UV膠等封裝材料。Page 23 552687 ------ 90101069_year, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month, month to month to month to month to come to, the scope of application for patent, structure The number of organic EL element areas is the same and the positions are relative, and the mask pattern size must be larger than the organic element area size. 32. The barrier packaging structure of the organic EL element described in item 28 of the scope of the patent application, wherein the polymer layer film thickness of the passivating material layer is not less than the height of the rib, And controlled between 1 and 1 0 0 0 // m 0 33. The barrier structure of the organic EL element as described in item 28 of the scope of patent application, wherein more than one layer of passivati ο η material layer The material can be a barrier material such as a dielectric material or a metal material. 3 4 · The barrier packaging structure of the organic EL element as described in item 28 of the scope of patent application, wherein the packaging material is made of ε ρ ο X y glue, A cry 1 ic glue, Si 1 i cone glue or various types Thermal curing, UV glue and other packaging materials. 第24頁Page 24
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8723413B2 (en) 2009-04-21 2014-05-13 Industrial Technology Research Institute Touch-sensing display apparatus and fabricating method thereof
CN106252255A (en) * 2015-06-15 2016-12-21 台湾积体电路制造股份有限公司 UV solidification equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8723413B2 (en) 2009-04-21 2014-05-13 Industrial Technology Research Institute Touch-sensing display apparatus and fabricating method thereof
CN106252255A (en) * 2015-06-15 2016-12-21 台湾积体电路制造股份有限公司 UV solidification equipment
US10157759B2 (en) 2015-06-15 2018-12-18 Taiwan Semiconductor Manufacturing Co., Ltd. Curing apparatus and method using the same
CN106252255B (en) * 2015-06-15 2019-07-16 台湾积体电路制造股份有限公司 UV solidification equipment

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