TW201300177A - Ultraviolet irradiation device - Google Patents

Abstract

According to the present invention, the gas replacement efficiency in the casing in which the ultraviolet lamp is housed is improved, the gas replacement time is shortened, and the amount of gas used in the replacement is reduced. The ultraviolet irradiation device of the present invention includes an ultraviolet lamp 2 that irradiates the workpiece W with ultraviolet rays, a case 3 that houses the ultraviolet lamp 2, an opening 31 that forms an opening facing the workpiece W, and a gas supply mechanism 4 that supplies the gas. To the inside of the casing 3, and on the inner surface or the inner space of the casing 3, a circulation guide surface 3x for circulating the gas supplied from the gas supply mechanism 4 in one direction around the ultraviolet lamp 2 is provided.

Description

Ultraviolet irradiation device

The present invention relates to an ultraviolet irradiation device.

Conventionally, in order to purify the surface of a workpiece such as a substrate, an ultraviolet irradiation device that irradiates the surface of the workpiece with ultraviolet rays to oxidize and decompose the organic substances on the surface has been used.

Here, ultraviolet rays such as 172 nm emitted from an ultraviolet lamp are absorbed by oxygen molecules in the environment. Specifically, ultraviolet rays having a wavelength of 172 nm are only about 2 mm in the atmosphere, that is, attenuated by about 30% to 40%. Therefore, as shown in Patent Document 1 and Patent Document 2, the casing (light box) in which the ultraviolet lamp is housed is filled with an inert gas such as nitrogen (N ₂ ), and the inert gas is used to fill the gap between the ultraviolet lamp and the workpiece. . By filling the surrounding environment of the ultraviolet lamp with an inert gas in this manner, the attenuation of the ultraviolet light emitted from the ultraviolet lamp is prevented, and the irradiation efficiency of the ultraviolet light to the workpiece is improved, thereby improving the cleaning efficiency of the workpiece.

However, in the ultraviolet irradiation device described in Patent Document 1 and Patent Document 2, there is a problem in that an inert gas is supplied downward from the upper surface of the casing which is formed in a substantially rectangular parallelepiped shape, or is supplied in the lateral direction from the side of the light box. Gas, so replacing the inert gas in the light box takes time. Further, in the above-described ultraviolet irradiation device, it is difficult to replace the gas remaining in the corner portion of the light box, and it is difficult to generate gas replacement in the space on the side opposite to the inert gas introduction port of the ultraviolet lamp until the end of the replacement. The amount of inert gas supplied is also increased.

Further, the ultraviolet irradiation device has a problem that it is necessary to seal the opening provided on the ultraviolet irradiation side of the casing by the light transmission window in order to make the space inside the casing inert, and to make the space between the light transmission window and the workpiece In the inert gas atmosphere, it is necessary to provide a second gas supply mechanism, or to open a gap between the light transmission window and the casing, and to provide a mechanism for introducing the gas in the casing toward the workpiece side, and the number of parts is increased.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open Publication No. 2009-268974

Patent Document 2: Japanese Patent Laid-Open Publication No. 2010-125368

Accordingly, the present invention has been made to solve the above problems in one fell swoop, and its main intended problem is to shorten the gas replacement time and reduce the amount of gas used in the replacement by increasing the gas replacement efficiency in the casing in which the ultraviolet lamp is housed.

In other words, the ultraviolet irradiation device of the present invention includes: an ultraviolet lamp that irradiates the workpiece with ultraviolet rays; a case that houses the ultraviolet lamp, has an opening that opens toward the workpiece, and a gas supply mechanism that supplies the gas The inner surface of the casing or the inner space is provided with a circulation guide surface for circulating a gas supplied from the gas supply mechanism in one direction around the ultraviolet lamp.

In the case of such an ultraviolet ray irradiation device, the gas supplied by the gas supply mechanism circulates along the inner surface or the inner space provided in the casing The guiding surface circulates in one direction around the ultraviolet lamp, so that the gas replacement efficiency in the tank can be improved. Thereby, the gas replacement time in the tank can be shortened, and the amount of gas used can be reduced. Since the amount of gas used can be reduced, it is considered that the operating cost of the ultraviolet irradiation device is considered to be 1/3 to 1/2 of the gas cost.

Further, since the ultraviolet irradiation device of the present invention circulates the gas around the ultraviolet lamp, the gas replacement efficiency of the space between the ultraviolet lamp and the workpiece (the space on the ultraviolet irradiation side of the ultraviolet lamp) can be improved. Thereby, the distance between the ultraviolet lamp and the workpiece can be increased, and the irradiation range of the workpiece using one ultraviolet lamp can be expanded as much as possible.

Further, the ultraviolet irradiation device of the present invention can prevent the white powder from adhering to the ultraviolet lamp by circulating the gas around the ultraviolet lamp. Furthermore, the white powder is produced by the following steps: when various chemicals such as organic solvents, acids, and alkalis are vaporized and atomized and suspended in the environment of the ultraviolet lamp, the above various chemicals are subjected to ultraviolet irradiation to generate ammonium sulfate and the like. The object is caused to adhere to the ultraviolet lamp; in addition, the scattering material generated from the workpiece being irradiated is brought into contact with the lamp to be recrystallized. From the white powder, there is a problem that the ultraviolet light is blocked from passing, and the ultraviolet light intensity is lowered; the white powder is peeled off from the ultraviolet lamp to contaminate the workpiece.

Preferably, the angle formed by the imaginary line along the gas supply direction of the gas supply means and the tangential line at the intersection of the imaginary line and the inner surface of the casing or the circulation guide surface is an acute angle. In this way, after the gas supplied by the gas supply mechanism hits the inner surface of the casing or the circulation guide surface, it is easy to flow along the inner surface or the circulation guide surface in the ultraviolet lamp. The surroundings circulate in one direction. Therefore, the gas replacement efficiency in the tank, the shortening effect of the gas replacement time, and the effect of reducing the amount of gas used can be improved.

Preferably, the gas supply means supplies the gas in the same direction as the gas circulation direction formed in the casing. In this way, the gas supplied by the gas supply mechanism is further circulated in one direction around the ultraviolet ray lamp along the circulation guide surface, thereby further improving the gas replacement efficiency and the gas replacement time in the tank. And the effect of reducing the amount of gas used.

Preferably, the cross section perpendicular to the longitudinal direction of the casing on the circulation guide surface is formed in a substantially partial circular shape, a substantially partial oblong shape, a substantially partial conical shape, or a substantially partial rectangular shape in which the corner portions are arcuate. In this way, the gas can be circulated around the ultraviolet lamp, the gas replacement efficiency in the tank can be improved, the gas replacement time can be shortened, and the amount of gas used in the replacement can be reduced. When the inner surface of the box is substantially partially circular or substantially partially rounded, the entire inner surface of the box becomes a circulation guide surface; when the inner surface of the box is substantially partially oblong (substantially part of a track shape), the box The circular arc portion on both sides of the inner surface of the body serves as a circulation guide surface. When the inner surface of the casing has a substantially rectangular shape in which the corner portion has an arc shape, the arc portion of the corner portion of the inner surface of the casing serves as a circulation guide surface.

Preferably, the ultraviolet lamp has a long cylindrical shape, and the casing forms a long cylindrical shape in which the ultraviolet lamp is housed, and has an opening along a longitudinal direction of the ultraviolet lamp. In this way, since the ultraviolet lamp has a cylindrical shape, it is easy to circulate the gas around the axial direction of the ultraviolet lamp, and the gas replacement efficiency in the casing can be further improved.

Preferably, the gas supply means supplies gas to the casing over substantially the entire length of the casing. In this way, in the case where the ultraviolet lamp having a long cylindrical shape is accommodated, the periphery of the ultraviolet lamp can be efficiently filled with gas.

Preferably, the gas supply means includes: a first supply unit that supplies a gas in a direction opposite to a gas circulation direction formed in the casing in an upper portion of the casing; and a second supply unit in the casing The opening is supplied with gas in the same direction as the circulation direction of the gas supplied from the first supply unit. It is particularly preferable that the second supply unit supplies the gas in a space between the ultraviolet lamp and the workpiece in the same direction as the circulation direction of the gas supplied from the first supply unit. In this way, since the gas is supplied from both the upper side and the lower side of the ultraviolet lamp, the gas circulation around the ultraviolet lamp can be efficiently performed, and the gas replacement efficiency can be improved.

Preferably, the circulation direction of the gas supplied by the gas supply means is a direction along the conveying direction of the workpiece. By aligning the circulation direction with the conveyance direction as described above, the gas circulation can be further promoted without disturbing the gas circulation by conveying the workpiece.

When it is desired to expand the irradiation area of the workpiece of the ultraviolet lamp as much as possible, it is conceivable to increase the distance between the ultraviolet lamp and the workpiece. At this time, it is conceivable to form the opening of the casing so as not to block the ultraviolet irradiation range of the ultraviolet lamp, and to enlarge the distance between the ultraviolet lamp and the casing and the workpiece. At this time, it is difficult to replace the gas in the space between the casing and the workpiece. Therefore, it is preferable to have a cover portion that extends from the opening of the casing toward the workpiece side and that covers the ultraviolet irradiation range that does not block the ultraviolet lamp. Cover the above workpiece.

Further, as the gas supplied to the tank as the gas supply means, an inert gas or a process gas can be considered. Here, the process gas is a gas for suppressing absorption of ultraviolet rays and efficiently processing the workpiece, and is, for example, a mixed gas of an inert gas such as nitrogen gas and oxygen gas.

According to the present invention configured as described above, by increasing the gas replacement efficiency in the casing in which the ultraviolet lamp is housed, the gas replacement time can be shortened, and the amount of gas used in the replacement can be reduced.

An embodiment of the ultraviolet irradiation device of the present invention will be described below with reference to the drawings.

The ultraviolet irradiation device 100 of the present embodiment is used in a substrate cleaning apparatus for irradiating a workpiece such as a glass substrate for a liquid crystal display or a semiconductor substrate for a semiconductor device with ultraviolet rays to clean the surface of the workpiece W.

Specifically, as shown in FIGS. 1 and 2, the ultraviolet irradiation device 100 includes an ultraviolet lamp 2 that irradiates ultraviolet rays to the workpiece W provided below, and a casing 3 that accommodates the ultraviolet lamp 2 and has a direction opposite to the workpiece W. The opening portion 31 having an opening downward is formed; and the gas supply mechanism 4 supplies an inert gas such as nitrogen (N ₂ ) to the inside of the casing 3 along the inner surface of the casing 3. Further, the conveyance mechanism (not shown) is located below the ultraviolet irradiation device 100 along the arrow S of FIG. 1 (the direction orthogonal to the longitudinal direction of the ultraviolet irradiation device 100, and the left side of the paper surface in FIG. 2). The workpiece W is transported in the right direction.

The ultraviolet lamp 2 is, for example, an excimer lamp that emits vacuum ultraviolet rays having a wavelength of 172 nm. Specifically, as shown in FIG. 1 , the ultraviolet lamp 2 is formed into a long cylindrical shape, and as shown in FIG. 2 , is filled in a sealed container made of synthetic quartz glass and having a circular cross section perpendicular to the axial direction. For example, a gas for discharge such as Xenon (Xe) is provided, and the strip electrodes 21 and 22 including a metal thin film are provided on a pair of right and left opposing surfaces as viewed from the axial direction. Further, both end portions of the ultraviolet lamp 2 are fitted and held in a through hole (not shown) provided in the holder 5 inside the casing 3, and the ultraviolet lamp 2 is applied with a voltage by the holder 5 to be lit. The pair of strip electrodes 21 and 22 emit ultraviolet rays upward and downward. Further, ultraviolet rays emitted downward from between the pair of strip electrodes 21 and 22 are irradiated to the workpiece W. Further, in order to effectively use the ultraviolet rays irradiated from the ultraviolet lamp 2, a layer that reflects ultraviolet rays may be provided on the upper side or the upper side of the inner surface of the ultraviolet lamp 2.

The casing 3 is formed into a long tubular shape, and the ultraviolet lamp 2 is housed in the inside of the casing 3 such that the axial direction (longitudinal direction) of the casing 3 is parallel to the axial direction (longitudinal direction) of the ultraviolet lamp 2. Further, the opening 31 formed under the casing 3 is formed along the axial direction of the ultraviolet lamp 2, and is formed so as to obstruct the ultraviolet irradiation range A of the ultraviolet lamp 2 from the axial direction. In addition, as shown in FIG. 2, the ultraviolet irradiation range A of the ultraviolet lamp 2 is a range in which the angle formed by connecting the lower ends of the pair of strip electrodes 21 and 22 and the center of the ultraviolet lamp 2 as a central angle.

And, the inner table of the casing 3 is configured in such a manner as to have the circulation guide surface 3x. The circulation guide surface 3x is for circulating the inert gas supplied from the gas supply mechanism 4 in one direction around the ultraviolet lamp 2. More specifically, as shown in FIG. 2, a cross section perpendicular to the longitudinal direction of the inner surface of the casing 3 forms a substantially partial oblong shape (substantially part of the racetrack shape) having the partial arc portions 3a and 3b at the left and right ends, and the left and right sides. The partial arc portions 3a and 3b at both ends function as the circulation guide surface 3x. Thus, the inner surface of the casing 3 is formed in a smooth structure in which a corner portion such as an inert gas is not retained in a cross section perpendicular to the longitudinal direction.

Further, the casing 3 has cover portions 32a and 32b which extend from the opening portion 31 of the casing 3 toward the workpiece W side, and cover the workpiece so as not to block the ultraviolet irradiation range A of the ultraviolet lamp 2. W. The cover portions 32a and 32b are formed so as to expand outward from the opening portion 31 toward the right and left, and cover the open space on the workpiece W when the distance between the ultraviolet lamp 2 and the workpiece W is enlarged. The ultraviolet irradiation range A is replaced with an inert gas. Further, a small amount of oxygen required to process the workpiece W from the gap between the covering portions 32a and 32b and the workpiece W flows into the casing 3 along with the conveyance of the workpiece W.

The gas supply mechanism 4 supplies an inert gas along the inner surface of the casing 3 over the entire longitudinal direction of the casing 3 at the upper portion of the casing 3. That is, in the cross section perpendicular to the longitudinal direction of the casing 3, the tangential line L2 along the virtual line L1 in the gas supply direction of the gas supply mechanism 4 and the intersection X of the imaginary line L1 and the inner surface of the casing 3 The angle θ formed is an acute angle, and the gas supply mechanism 4 supplies the inert gas in the same direction as the circulation direction R (described later) of the inert gas formed in the casing 3. Specifically, gas supply The mechanism 4 is disposed on one of the right side arc portions 3b of the casing 3 (the right side in FIG. 2), and supplies inert gas to the casing 3 along the tangential direction of the inner surface of the partial arc portion 3b, and includes The gas introduction portion 411 and the gas supply pipe 412 are connected to the partial arc portion 3b and form an opening on the inner surface of the partial arc portion 3b, and the gas supply pipe 412 supplies an inert gas to the gas introduction. The gas supply pipe 412 of the portion 411.

The gas introduction portion 411 is provided in a portion of the circular arc portion 3b of the casing 3 along the longitudinal direction. Further, the gas introduction portion 411 has one opening extending in the longitudinal direction on the inner surface of the partial arc portion 3b by the upper and lower flat plates. In addition to this, the gas introduction portion 411 may be formed as a member having a plurality of openings by connecting a plurality of tubes at equal intervals along the longitudinal direction of the partial arc portion 3b, for example. Further, the gas supply pipe 412 is connected to the gas introduction portion 411, and the inert gas is supplied to the gas introduction portion 411 from an inert gas source (not shown).

The inert gas supplied into the casing 3 by the gas supply mechanism 4 flows along the inner surface of the casing 3. That is, the inert gas supplied from one of the partial arc portions 3b flows along the inner surface of the flat plate portion 3c of the casing 3 toward the other partial arc portion 3a, and flows toward the ultraviolet lamp along the inner surface of the portion of the circular arc portion 3a. 2 ultraviolet light emission side (lower side). Then, the inert gas which has flowed toward the ultraviolet light emitting side of the ultraviolet lamp 2 (the surface along the workpiece W when the workpiece W is present) flows toward one of the partial arc portions 3b, and along the inner surface of the one of the partial arc portions 3b Flows from the lower side to the upper side. In this way, an inert gas that circulates in one direction around the ultraviolet lamp 2 is formed. Body flow R. The circulation direction R of the inert gas is a direction along the conveyance direction S of the workpiece W, and the workpiece W is conveyed to the lower side of the opening 31 of the casing 3 by a conveyance mechanism. That is, in the opening portion 31, the inert gas flows from the left to the right, and the workpiece W flows from the left to the right on the lower side of the opening portion 31.

Next, a simulation result of the inert gas replacement efficiency using the ultraviolet irradiation device 100 configured as described above is disclosed. In addition, as a comparative example, a simulation result of the displacement efficiency in a conventional ultraviolet irradiation device that supplies an inert gas from the upper portion in a box-shaped box body is disclosed. Further, in the present embodiment and the comparative example, the supply flow rate of the inert gas (N ₂ gas) was 1 m/s, and the workpiece was conveyed 10 seconds after the replacement of the N ₂ gas in the tank was started. 3(A) and 3(B) show the nitrogen concentration in the tank 10 seconds after the start of the N ₂ gas replacement (before the workpiece is conveyed), and FIGS. 4(A) and 4(B) show the start of transporting the workpiece. The concentration of nitrogen in the tank.

As shown in Fig. 3 (A) and Fig. 3 (B), in the ultraviolet irradiation device 100 of the present embodiment, the nitrogen concentration is lower (violet irradiation side) than the ultraviolet irradiation lamp, compared with the conventional ultraviolet irradiation device. The rise time is shorter. That is, it is understood that the ultraviolet irradiation device 100 of the present embodiment has improved the replacement efficiency of the N ₂ gas as compared with the conventional ultraviolet irradiation device.

As shown in FIG. 4(A) and FIG. 4(B), in the ultraviolet irradiation device 100 of the present embodiment, the conveyance direction of the workpiece coincides with the circulation direction of the N ₂ gas due to the conveyance of the workpiece. The circulation of the N ₂ gas is promoted, whereby the replacement efficiency of the N ₂ gas on the lower side of the ultraviolet lamp is improved.

According to the ultraviolet irradiation device 100 of the present embodiment configured as described above, the inert gas supplied along the inner surface of the casing 3 is formed around the ultraviolet lamp 2 along the circulation guide surface 3x provided on the inner surface of the casing 3. The circulation in one direction can increase the inert gas replacement efficiency in the tank 3. Thereby, the inert gas replacement time in the casing 3 can be shortened, and the amount of inert gas used can be reduced. Since the amount of use of the inert gas can be reduced, it is possible to reduce the cost of the inert gas which is considered to be 1/3 to 1/2 of the operation cost of the ultraviolet irradiation device 100. In addition, since the inert gas is circulated around the ultraviolet lamp 2, the inert gas replacement efficiency of the space between the ultraviolet lamp 2 and the workpiece W (the space on the ultraviolet irradiation side of the ultraviolet lamp 2) can be improved. Thereby, the distance between the ultraviolet lamp 2 and the workpiece W can be increased, and the irradiation range of the workpiece using one ultraviolet lamp 2 can be expanded as much as possible. Further, by circulating the inert gas around the ultraviolet lamp 2, it is possible to prevent the white powder from adhering to the ultraviolet lamp 2. Further, the ultraviolet lamp 2 can be cooled by circulating the inert gas around the ultraviolet lamp 2.

Furthermore, the present invention is not limited to the above embodiment.

For example, as shown in FIG. 5, the gas supply mechanism 4 may include a first supply unit 41 that supplies gas in the same direction as the circulation direction R of the inert gas formed in the casing 3 in the upper portion of the casing 3; The second supply unit 42 supplies the inert gas to the opening 31 of the casing 3 in the same longitudinal direction as the circulation direction R of the inert gas supplied from the first supply unit 41 over the entire longitudinal direction of the casing 3. Further, the first supply unit 41 has the same configuration as the gas supply unit 4 of the above-described embodiment.

The second supply unit 42 is provided in the other cover portion 32a of the casing 3, The inert gas is supplied from the cover portion 32a to the opening portion 31, and includes a gas introduction portion 421 provided in the other cover portion 32a and having an opening formed in the cover portion 32a, and a gas supply pipe for supplying an inert gas to the gas introduction portion 421. 422.

The gas introduction portion 421 is provided on the covering portion 32a of the casing 3 along the longitudinal direction. In addition, in FIG. 5, similarly to the first supply unit 41, the gas introduction portion 421 is formed by the upper and lower flat plates. However, the gas may be formed by connecting a plurality of tubes to the cover portion 32a at equal intervals, for example. The introduction unit 421. Further, the gas supply pipe 422 is connected to the gas introduction portion 421, and the inert gas is supplied to the gas introduction portion 421 from an inert gas source (not shown).

The inert gas flowing to the opening 31 by the second supply unit 42 flows together with the inert gas supplied from the first supply unit 41 to the ultraviolet light emitting side (lower side) of the ultraviolet lamp 2 . Then, the inert gas supplied from the second supply unit 42 flows along the inner surface of one of the partial arc portions 3a from the lower side to the upper side together with the inert gas supplied from the first supply unit. The periphery of 2 forms an inert gas flow R which circulates in one direction.

Further, the cross-sectional shape of the casing is not limited to the above-described embodiment, and as shown in FIG. 6, it may be formed into a substantially partial circular shape, or as shown in FIG. 7, it may be formed into a substantially partial circular shape. In this case, the entire inner surface of the casing 3 functions as the circulation guide surface 3x, and the gas supply mechanism 4 supplies the inert gas along the tangential direction of the circular inner surface of the casing 3 in the cross section. Further, as shown in FIG. 8, it may be formed in a substantially rectangular shape in which the corner portion has an arc shape. In this case, the inner surface of the case 3 is formed The circular arc portion at the corner portion functions as the circulation guide surface 3x.

Further, as shown in FIG. 9, the cover portion 3 may not be provided with a cover portion, and the first supply portion 41 and the second supply portion 42 may be provided on the left and right partial arc portions 3a and 3b.

Further, in the above embodiment, the case where the circulation guide surface 3x is provided on the inner surface of the casing 3 has been disclosed, but in addition, as shown in Fig. 10, it may be within the internal space 3K of the casing 3. Set the circulation guide surface 3x. Specifically, it is conceivable that the guide surface forming member 300 in which the circulation guide surface 3x is formed on the inner surface is provided around the ultraviolet lamp 2 in the inner space 3K of the casing 3. In this way, the case 3 can be set to the previous configuration, and on the one hand, the gas replacement efficiency in the case, the shortening effect of the gas replacement time, and the effect of reducing the amount of gas used can be obtained. In addition, FIG. 10 shows a case where the gas supply mechanism 4 supplies a gas to the circulation guide surface 3x.

Further, in the above-described embodiment, the inside of the tank is replaced with an inert gas, but a gas (process gas) obtained by mixing a treatment gas (for example, oxygen) effective for surface treatment of the workpiece in an inert gas may be used. The process gas is replaced in the tank. In the case of such a device, it is possible to prevent the surface treatment efficiency of the workpiece from being lowered by completely replacing it with an inert gas.

Further, in the above embodiment, one ultraviolet light lamp is housed in the casing, but a plurality of ultraviolet lamps arranged in parallel with each other may be disposed. In addition to this, the appearance shape of the ultraviolet lamp is not limited to forming a long cylindrical shape, and may have other shapes. Further, the ultraviolet lamp is not limited to a circular shape in cross section, and may be a flat rectangular tube having a rectangular cross section, and Electrodes are provided on a pair of upper and lower flat surfaces of the ultraviolet lamp (the lower electrode is in the form of a mesh).

In addition, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

2‧‧‧UV light

3‧‧‧ cabinet

3a, 3b‧‧‧ part of the arc

3c‧‧‧ flat section

3K‧‧‧Internal space

3x‧‧‧Circular guide surface

4‧‧‧ gas supply mechanism

5‧‧‧ Keeping body

21, 22‧‧‧ strip electrodes

31‧‧‧ openings

32a‧‧‧ Coverage

32b‧‧‧ Coverage

41‧‧‧1st Supply Department

42‧‧‧2nd Supply Department

100‧‧‧UV irradiation device

300‧‧‧ Guide surface forming members

411, 421‧‧‧ gas introduction

412, 422‧‧‧ gas supply piping

A‧‧‧UV exposure range

L1‧‧‧ virtual line

L2‧‧‧ tangent

R‧‧‧Circle direction

S‧‧‧Working direction of the workpiece

W‧‧‧Workpiece

X‧‧‧ intersection

Θ‧‧‧ angle

Fig. 1 is a perspective view showing an ultraviolet irradiation device of the embodiment.

Fig. 2 is a cross-sectional view showing the ultraviolet irradiation device of the embodiment.

3(A) and 3(B) are diagrams showing simulation results 10 seconds after the start of replacement.

4(A) and 4(B) are diagrams showing simulation results after substrate transfer.

Fig. 5 is a cross-sectional view showing an ultraviolet irradiation apparatus according to a modified embodiment.

Fig. 6 is a cross-sectional view showing a first modification of the casing.

Fig. 7 is a cross-sectional view showing a second modification of the casing.

Fig. 8 is a cross-sectional view showing a third modification of the casing.

Fig. 9 is a cross-sectional view showing a fourth modification of the casing.

Fig. 10 is a cross-sectional view showing an ultraviolet irradiation device according to a modified embodiment.

2‧‧‧UV light

3‧‧‧ cabinet

4‧‧‧ gas supply mechanism

5‧‧‧ Keeping body

100‧‧‧UV irradiation device

S‧‧‧Working direction of the workpiece

W‧‧‧Workpiece

Claims (10)

An ultraviolet irradiation device comprising: an ultraviolet lamp that irradiates ultraviolet rays on a workpiece; a case that houses the ultraviolet lamp, has an opening that forms an opening opposite to the workpiece; and a gas supply mechanism that supplies gas to the case And a circulation guide surface for circulating the gas supplied by the gas supply mechanism in one direction around the ultraviolet lamp in the inner surface or the inner space of the casing. The ultraviolet irradiation device according to claim 1, wherein a virtual line along a gas supply direction of the gas supply means, an intersection with the virtual line, an inner surface of the case, or the circulation guide surface The angle formed by the tangent is an acute angle. The ultraviolet irradiation device according to the first or second aspect of the invention, wherein the gas supply means supplies the gas in a direction in the same direction as a gas circulation direction formed in the casing. The ultraviolet irradiation device according to any one of claims 1 to 3, wherein a cross section perpendicular to a longitudinal direction of the casing on the circulation guide surface is a substantially partial circular shape and a substantially partial oblong shape. A substantially partial rectangular shape in which a substantially rounded shape or a corner portion has an arc shape. The ultraviolet irradiation device according to any one of the preceding claims, wherein the ultraviolet lamp is in the shape of a long cylinder, and the casing is in the shape of a long cylinder accommodating the ultraviolet lamp, and has an edge The opening of the ultraviolet lamp in the longitudinal direction is formed. The ultraviolet irradiation device according to claim 5, wherein the gas supply mechanism supplies gas to the casing over substantially the entire length of the casing. The ultraviolet irradiation device according to any one of the preceding claims, wherein the gas supply mechanism includes: a first supply unit that faces the gas formed in the tank at an upper portion of the casing The gas is supplied in the same direction in the circulation direction; and the second supply unit supplies the gas in the same direction as the circulation direction of the gas supplied from the first supply unit in the opening of the casing. The ultraviolet irradiation device according to any one of claims 1 to 7, wherein a circulation direction of the gas supplied by the gas supply means is a direction along a conveying direction of the workpiece. The ultraviolet irradiation device according to any one of the first aspect, wherein the opening of the casing is formed so as not to block an ultraviolet irradiation range of the ultraviolet lamp, and the casing is The opening has a covering portion that extends from the opening toward the workpiece side and covers the workpiece so as not to block the ultraviolet irradiation range of the ultraviolet lamp. The ultraviolet irradiation device according to any one of the preceding claims, wherein the gas is an inert gas or a process gas.