TW201206819A - Set of nano/micro structured objects capable of interlocking each other and structured object thereof - Google Patents
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Description
201206819 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種可交錯固定之奈微米結構件組及其 結構件，特別係關於一種增強組合件間介面之接合強度之 奈微米結構件組及其結構件。 【先前技術】 微型交錯固定結構（micro interlock structure)是在微型 元件封裝技術上係被廣為應用的一項技術，透過此技術可 φ 以有效提升兩物質間介面之接合強度，而其特色在於介面 之接合強度的提升是透過力學機制達成，並不涉及任何化 學反應機制，亦即不需添加或塗佈任何外來的化學物質完 成介面之接合。可以將此技術廣泛使用在多種元件之封裝 製程，透過此微型交錯結構的應用，將可避免任何額外化 學物質或黏著劑造成欲封裝元件之任何損害。 微流體元件、細胞生物檢測晶片、微型燃料電池、微 型光學元件及微機械元件等等，在封裝製程上因有密合精 • 準度、生物反應單一性、電化學特性或光學特性等特殊需 求，故無法再塗佈傳統常用之黏膠、樹脂或是其他化學黏 著劑，因此微型交錯固定結構提供了上述各種元件相關需 求之解決方案。 目前，在國際上已有數篇論文提出微型交錯固定結構 之實施方式，其中Robert W. Messier, Jr.及Suat Gene於1998年發表 題目為 “Intergal Micro-Mechanical Interlock (IMMI) Jopints for Polyner-Matrix Composite StructuresM {Journal of Thermoplastic Composite 201206819 11 200-215)之學術論文提到微型交錯固定結構之多 種扣合模型，及分類不同材質間結合所適合之模型》 此外，Μ P Larsson、R R A Syms及 A G Wojcik於 2005 年發表題 目為 “Improved adhesion in hybrid Si-polymer MEMS via micromechanical interlocking”（《/· Mz’cromec/z. Micraewg·· 15 2074-2082)之論文，及 Chia-Min Lin，Wen-Chih Chen and Weileun Fang於 2007年發表題目為 “Removable fast package technology for MEMS devices using polymer connectors and silicon sockets”（J· Mfcroewg. 17 2461-2468)之
論文均係利用微加工（micro machining)技術在兩個物件接 合之表面分別形成相互扣合之微結構。又M Stubenrauch，Μ Fischer、C Kremin'S Stoebenau、A Albrecht及 O Nagel發表題目為 “Black silicon~~new functionalities inMicrosystems” (·/ M/crawec/i· Mieraewg. 16 S82-S87)之論文係在兩個矽基材表面分別形成奈米等級之密 集的針狀物，兩個矽基材上相對之該等針狀物相互刺入對 方針狀物之間的空隙就可形成良好之摩擦力，從而使兩個 矽基材相互結合。上述部分論文僅藉由形狀互補之結構相 互扣合，並無法提供足夠之結合力（將於后再說明）。或 是僅藉由矽針狀物相互插接，雖能有一定之結合力抵抗外 來拉力，但側向之剪力卻有可能使脆性（brittle)材質之石夕針 狀物很輕易斷裂8 綜上，實需要一種增強組合件間介面之接合強度之奈 微米結構件組及其結構件，不僅介面能提供足夠之結合力 以抵抗外來拉力，尚需要避免平行介面之外來剪力所造成 之破壞。 Γ ο T til 5 201206819 【發明内容】 本發明係提供一種可交錯固定之奈微米結構件組及其 結構件，可增強組合件間介面之接合強度。 /、
綜上所述，本發明係提供-種可交㈣^之奈微米結 構件組，包含-第-組件及—第二組件。該第—組件之底 板第二組件相接觸之表面上設有複數個陣列狀排列之突出 物，同時相對應之第二組件表面設有複數個陣列狀排列之 凹槽’相對應於各零組件之該突出物與凹槽之—部份之截 面積係朝向該底板之方向遞減，且其各該突出物之或該凹 槽之側壁具有複數個奈米等級之針狀物。當該第—組件及 該第二組件結合，各該突出物可插人—該微凹槽且該突 出物上針狀物抵接㈣微凹槽之内壁或該突出物之表面。 本發明係提供-種可交錯固定之奈微米結構件，包含 -底板及複數個突出物或凹槽，該複數個突出物係陣列狀 排列於該底板之n各職出物或凹槽之部分截面積 係朝向該底板之方向遞減，且各該突出物或凹槽之側壁設 有複數個奈米等級之針狀物。 上文已經概略地敍述本揭露之技術特徵及優點，俾使 下文之本揭露詳細描述得以獲得較佳瞭解。構成本揭露之 申請專利賴標的之其它技術特徵及優點將描述於下文。 本揭露所屬技術領域令具有通常知識者應可瞭解，下文揭 示之概念與特定實施例可作為基礎而相當輕易地予以修改 或設計其它結構或製程而實現與本揭露相@之目的。本揭 露所屬技術領域中具有通常知識者亦應可瞭解，這類等效 201206819 的建構並無法脫離後附之申請專利範圍所提出之本揭露的 精神和範圍。 【實施方式】 圖1係本發明一實施例之第一組件之立體示意圖。一第 一組件10包含一底板u及複數個陣列狀排列之突出物12。 該底板11包含一第一表面U1及一第二表面112，又該複數 個突出物12係設於該第-表面⑴上。該底板π及突出物12 之材料可以是石夕晶圓或玻璃等，藉由微機電技術將晶圓之 • 表面形成複數個呈沙漏狀之突出物12。然該突出物12之形 狀並不以此實施例為限，只要滿足各該突出物之上半部之 截面積係朝向該底板之方向遞減之條件即為本發明之保護 範圍。 圖2係本發明一實施例之第二紐件之立體示意圖。一第 二組件20包含一第一平面211及一第二平面212，又複數個 陣列狀排列之微凹槽22係設於該第一平面叫。各該微凹槽 22之形狀可以容納該突出物12插人，其深度可以小於該^ 出物12之高度。該第二組件2()之材料係—具有彈性之高分 子材料，例如：聚全氟树，-因此可以彈性變形以容許沙 漏狀之該突出物12插入該微凹槽22内。然而，該第一組件 和第二組件20之材料不受此實施例之限制，可以將上述 :不之材料對調，亦即該第一組件1〇之材料是具有彈性之 尚分子材料’又該第二組件2〇之材料是矽晶圓或 。 圖;3係本發明一實施例 _ J 乂錯固疋之奈微米結構件 ，，且之剖©不意圖。該奈微米結構件組％包含前述第一組件 201206819 10及第二組件20,各該微凹槽22可以容納該突出物12插入 ，因此彼此間可以有相當之結合力以抵抗分離二者之外力 。當該第二組件20係微型燃料電池之質子交換膜時，若使 用聚全氟磺酸之材料則和矽第一組件間無法親合而容易脫 落，但又不能使用會阻斷質子交換之其他化學黏著劑以結 合該二者，因此本發明係可以解決此一問題。 圖4係圖3中A部分之放大圖。該突出物12之侧壁具有複 數個奈米等級之針狀物12卜@此會刺人並抵接於該微凹槽 籲 21之内壁。該針狀物121係—種奈米線（nanowires)，因此和 該微凹槽21之内壁形成良好且足夠之摩擦力。 圖5A至圖5C係本發明一實施例之第一組件及其突出 物之照片。圖5A顯示第一組件一表面上設有複數個突出之 突出物。又圖5B係單一突出物之剖面之電子顯微照片該 突出物之上半部或上三分之一部份之截面積係朝向下方底 板之方向遞減。放大該突出物之上部可以清楚側壁上具有 複數個奈米等級之針狀物或奈米線β 圖6係本發明一實施例之可交錯固定之奈微米結構件 組之拉伸測試數據圖。相較於先前技術，本發明本確實可 以大幅提昇結合介面之接合強度，甚至增加兩倍以上之拉 應力。 圖7Α〜7D本發明實施例之突出物及微凹槽之剖面示 意圖。圖7Α及7C中突出物（712、712，)均有一部份之截面積 係朝向該底板11之方向遞減，且兩側表面有覆蓋奈米等級 之針狀物（7121、7121，）。圖7Β及7D中微凹槽（722、722·)均 201206819 有一部份之截面積會係朝向要結合之該底板丨！之方向遞減 且兩側表面有覆蓋奈米等級之針狀物（7221、7221，）。 本揭露之技術内容及技術特點已揭示如上，然而熟悉 本項技術之人士仍可能基於本揭露之教示及揭示而作種種 不背離本揭露精神之替換及修飾。因此，本揭露之保護範 圍應不限於實施例所揭示者，而應包括各種不背離本揭露 之替換及修飾，並為以下之申請專利範圍所涵蓋。 【圖式簡單說明】
圖1係本發明一實施例之第一組件之立體示意圖 圖2係本發明一實施例之第二組件之立體示意圖 定之奈微米結構件 圖3係本發明一實施例之可交錯固 組之剖面示意圖； 圖4係圖3中A部分之放大圖； 組件及其突出 圖5 A至圖5 C係本發明一實施例之第一 物之照片；
圖6係本發明一實施例之可交錯固 組之拉伸測試數據圖；以及 疋之奈微米結構件 圖7A〜7D本發明實施例之突出 意圖。 物及微凹槽 之剖面示 【主要元件符號說明】 10 第一組件 11 底板 12 突出物 20 第二組件 22 微凹槽 9 201206819
30 奈微米結構件組 111 第一表面 112 第二表面 121 針狀物 211 第一表面 212 弟二表面 712 突出物 712' 突出物 722 微凹槽 722' 微凹槽 7221 針狀物 722Γ針狀物
Claims (1)
- 201206819 七、申請專利範圍： 1. 一種可交錯固定之奈微米結構件組，包含： -第-組件’包含—底板及設於該底板—表面上 個陣列狀排列之突出物，其中各該突出物之部分截面積係 朝向該底板之方向遞減；以及 -第二組件，該第二組件之一表面上設有複 狀排列之微凹槽； J 其中各該突出物插入一該微凹槽，各該突出物之 或該微凹槽之侧壁設有複數個奈米等級之針狀物，且 狀物抵接於該微凹槽之内壁或該該突出物之表面。 2 根據請求項1所述之可交錯固定之奈微米結構件組’其中 該針狀物係奈米線。 3·根據請求項！所述之可交錯固定之奈微米結構件組， 該突出物係呈沙漏狀。 4·根據請求項1所述之可交錯固定之奈微米結構件組，其中 該第一組件之材料係石夕晶圓或玻璃，又二 係-具有彈性之高分子材料。 午之材科 5.根據請求項1所述之可交錯固定之奈微米結構件組，其中 該第二組件之材料係石夕晶圓或玻璃，又該第-組件之材料 係一具有彈性之高分子㈣。 材抖 6. 一種可交錯固定之奈微米結構件，包含： 一^板’以及複數個突出物，係陣列狀排列於該底板 Si向=其中各該突出物之上部之截面積係朝向該底板 Μ ，且各該突出物之側壁設有複數個奈米等級之 針狀物。 根據請求項6所述之可交錯固定之奈微米結構件，其中該 201206819 該針狀物係奈米線。 8·根據請求項6所述之可交錯固定 突出物係呈沙漏狀。 之奈微米結構件，其中該 9. 根據請求項6所述之可交錯固定少 —, 之奈微米結構件，豆中該 底板及該複數個突出物之材料係石夕晶圓或玻璃。〃 10. 根據請求項9所述之可交錯固定之奈微米結構件，其中該 複數個突出物係藉由微機電技術形成於該矽晶圓表面。12
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| TW099127039A TWI486304B (zh) | 2010-08-13 | 2010-08-13 | 可交錯固定之奈微米結構件組及其結構件 |
| US13/181,809 US20120040129A1 (en) | 2010-08-13 | 2011-07-13 | Set of nano/micro structured objects capable of interlocking with each other and structured object thereof |
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| KR101775449B1 (ko) | 2013-09-18 | 2017-09-06 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 접착제와 인터록킹된 언더컷 특징부를 포함하는 다층 구조체를 갖는 물품, 및 이의 제조 방법 |
| CN105366631B (zh) * | 2014-08-25 | 2017-03-15 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种楔形硅结构阵列的制作方法 |
| US10464282B2 (en) * | 2016-01-21 | 2019-11-05 | GM Global Technology Operations LLC | Systems and processes for joining workpieces robustly using moguls and adhesive |
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