[go: up one dir, main page]

TW200817592A - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
TW200817592A
TW200817592A TW096116741A TW96116741A TW200817592A TW 200817592 A TW200817592 A TW 200817592A TW 096116741 A TW096116741 A TW 096116741A TW 96116741 A TW96116741 A TW 96116741A TW 200817592 A TW200817592 A TW 200817592A
Authority
TW
Taiwan
Prior art keywords
pump
ductile iron
tempered
rotor
mass
Prior art date
Application number
TW096116741A
Other languages
English (en)
Other versions
TWI504811B (zh
Inventor
Emmanuel Uzoma Okoroafor
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of TW200817592A publication Critical patent/TW200817592A/zh
Application granted granted Critical
Publication of TWI504811B publication Critical patent/TWI504811B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
    • F05C2201/0445—Austempered ductile iron [ADI]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

200817592 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種乾式真空泵。 【先前技術】 乾式真空泵在工業製程中廣泛使用以提供用於製造產品 之清潔及/或低壓環境。應用包括醫藥、半導體及平板製 造工業。此等泵包括一實質上乾式（或無油）泵機構，但通 系亦包括用於驅動泵機構之某些組件（其需要潤滑油以便 係有效的），諸如，軸承及傳送齒輪。乾式泵之實例包括 羅茨（Roors)泵、諾瑟（Northey)(或”爪式。泵、螺桿泵及渦 卷泵。併有羅茨及/或諾瑟轉子組件之乾式泵通常為多級 正排量泵，其包含界定複數個泵腔室之定子組件，該等泵 月二至各自容納一對各別相互嚙合之轉子組件。轉子組件位 於對轉軸上，且在每一腔室中可具有同一類型輪廓或輪廓 可因腔室不同而改變。 鐵鑄件已長期用於製造乾式真空泵之定子及轉子組件。 然而，在半導體工業中，高流動速率之相對較高腐蝕性之 軋體（諸如氣氣、三氯化硼、溴化氫、氟氣及三氟化氣）之 不斷增加的使用已導致嚴重腐蝕，且因此導致鑄鐵定子及 轉子組件之相對較短之使用壽命。除導致與泵或經腐蝕之 零件之更換及隨之發生之製程停機時間相關聯之成本外， 此腐蝕可導致設備故障、製程氣體鴻漏及可能之製程污 染。 鑒於此，藉由在曝露至腐蝕性氣體之組件表面上形成含 120364.d〇i 200817592 鼠聚合物或聚醯亞胺材料之樹脂 護此等組件係已知的。此等塗二5物塗層而被動地保 向，i中泠屏9具有隨時間而降解之傾 氣體。g H 下伏鑄鐵曝露至腐蝕性 且右徉声心“ （抝如，延性耐蝕Ni鑄鐵)或 八有盔良耐腐蝕性之不銹鋼形成 ^ 寺、、且件。然而，耐钱Ni 鉍鐵及不銹鋼係相對較昂貴的且 鑪；a M加工’且因此對於在 轉子及疋子組件之製造中的使用 選擇。 叩並未如供成本有效之 【發明内容】 本發明提供一種乾式真空泵 _ ^ /、匕3 一疋子組件及至少 一轉子組件，其中該定子組 卞叹/或该至少一韓子紐林由 經奥氏回火之延性細彡成。 定子組件可容納第一及第二相互唾合之轉子組件，其適 用於在定子組件内逆轉。在較佳實施例中，轉子組件具有 羅茨輪廓，雖然視需要其可呈右 八J具有諾瑟或螺桿輪廓。 泵可呈多級泵之形式，其中定 T疋千組件界定串聯地配置且 各自容納由經奥氏回火之延性 、『生鐵形成之各別轉子組件的複 數個互連之泵腔室。相互嚙合之轉子組件可位於各別軸 上-中栗包3用於將扭力自一軸傳送至另一軸之齒輪 總成’其中齒輪總成之至少_齒輪較佳由經奥氏回火之延 性鐵形成。 或者，果可呈涡卷果之形式，其中^子崎包含一具有 -端板之固定渦卷部件，該端板具有一自其延伸之第一螺 旋包覆’且該至少一轉子組件包含一具有_端板之回轉式 120364.doc 200817592 渦卷部件，該端板具有—自其延伸以與第—螺旋包覆相互 唾合之第二螺旋包覆。渦卷部件中之每—者較佳由趣形 成。 ADI較佳具有至少9〇%之石墨球化率。 ADI較佳具有針狀鐵素體及碳穩定奥氏體之矩陣。 經奥氏回火之延性鐵較佳包含以下元素中之一或多者： 按質量計總計在3.4至3.5%範圍内之碳；按質量計總計在2 至2·3%範圍内之矽；按質量計總計在〇·〇75至〇·15%範圍内 之錳，按質量計總計在3·4至3·5%範圍内之鉬；按質量計 總计在1·2至1.4%範圍内之鎳；及按質量計總計在〇.75至 〇 · 9 5 %範圍内之銅。 【實施方式】 參看圖1及圖2，多級乾式真空泵1〇包含一較佳由經奥氏 回火之延性鐵（ADI)形成之定子組件12，該定子組件12具 有界疋複數個泵腔室14、16、18、20、22之一系列壁。一 用於輸送氣體以將其泵至入口泵腔室14之入口管道24及一 用於自排放栗腔室22排放所泵之氣體之排放管道26亦形成 於定子12中。形成於定子12中之圓周通道28、3〇、32及34 串聯地連接泵腔室14、16、18、20、22。 定子12容納一第一軸36及與第一軸36隔開且平行於第一 轴36之第二軸38。在定子12之端板42、44中提供用於支擇 軸36、3 8之軸承4〇。軸中之一者36連接至驅動馬達46，軸 藉由定時齒輪47而耦接在一起使得在使用中轴36、38以同 一速度但在相反方向上旋轉，如由圖2中之箭頭48及箭頭 120364.doc 200817592 50指示。附著至泵ι〇之侧面之齒輪箱52含有用於潤滑定時 齒輪47之油54。定時齒輪47可由ADI形成。 在每一泵腔室内，軸36、38支撐亦可由ADI形成之各別 轉子組件56、58。雖然在泵10内可提供羅茨及諾瑟型輪廓 之混合，但在此實施例中，轉子56、58在每一泵腔室内具 有羅茨型輪廓。轉子56、58相對於定子12之内表面而位於 每一泵腔室中使得轉子56、58可以本身已知之相互嚙合之 方式而運轉。 在使用中，氣體經由入口管道24而被推至泵1〇中且傳遞 至入口泵腔至14中。氣體由位於入口果腔室14内之轉子 56、58壓縮，且由通道28饋入至下一泵腔室16中。饋入至 泵腔室16中之氣體類似地由位於其中之轉子％、58壓縮， 且由通道30饋入至下一泵腔室18。類似之氣體壓縮在泵腔 室18、20及22中發生，其中所泵之氣體最終經由排放管道 26自泵10排放。 使用經奥氏回火之延性鐵（ADI)製造泵1〇之定子組件12 及/或轉子組件56、58使得泵1〇尤其適用於泵腐蝕性氣 體，諸如，氯氣 '三氯化硼、溴化氫、氟氣及三氟化氯。 與當前比ADI貴約四至五倍之較昂貴之耐蝕犯材料相比， ADI具有優良硬度、較高比強度比率及可比擬之匕腐蝕敏 感度。此使定子及轉子組件及定時齒輪能夠在關於均等或 改良之效能的降低之組件重量及成本的情況下具有相對較 高之财磨性及耐腐餘性。 作為一實例，用以製造定子組件12及/或轉子組件56、 120364.doc 200817592 58及/或定時齿輪47之經奥氏回火之延性鐵(細)可包括以 下元素（按質量計）： 元素 ---*----- % 碳 3·4 至 3.5 矽 2.0 至 2.3 猛 0.2 至 0.22 鉬 「0.075至 0.15 鎳 1.2 至 1.4 銅 0.75至 0.95 較佳具有至少90%之石墨球化率且較佳具有在15〇至 300/mm範圍内之球墨粒數。ADI較佳具有針狀鐵素體及 碳穩定奥氏體之主要矩陣，其中大體上無碳化物、夾雜物 或孔隙率。ADI之此等特徵使材料能夠滿足半導體處理設
U 備之效能要求，值得注意的是在高溫下之足夠的摩擦特性 及機械特性以及耐腐#性。 【圖式簡單說明】 圖1為通過多級乾式真空泵之橫截面；及 圖2為沿圖1中之線a-Α之視圖。 【主要元件符號說明】 10 泵 12 定子/定子組件 14 泵腔室 16 泵腔室 18 泵腔室 20 泵腔室 120364.doc 200817592 22 24 26 28 30 32 34 36 38 40 42 44 46 47 48 50 52 54 56 58 泵腔室 入口管道 排放管道 圓周通道 圓周通道 圓周通道 圓周通道 抽 軸 軸承 端板 端板 驅動馬達 定時齒輪 箭頭 箭頭 齒輪箱 油 轉子/轉子組件 轉子/轉子組件 120364.doc -10-

Claims (1)

  1. 200817592 申請專利範圍： 1. -種乾式真空果，其包含—定子組件及至少_轉子植 件’其中該定子組件及/或該至少—轉子組㈣由經奥氏 回火之延性鐵形成。 2. 如請求項其中該至少—轉子組件具有—螺桿輪 廓、一羅茨輪廓或一諾瑟輪廊中之一者。 3. :請求項2之泵’其包含適用於在該定子組件内逆轉之 第一及第二相互嚙合之轉子組件。 Γ 4. 如請求項3之泵，其呈一多級乾式真空果之形式，盆 中’該^子組件界定㈣地配置且各自容納—對各別轉 子組件之複數個互連之果腔室，每—轉子組件由經奥氏 回火之延性鐵形成。 5. 如請求項3之系’其中相互妨之轉子組件位於各別轴 上，該系包含-用於將扭力自—軸傳送至另—軸之齒輪 總成’該齒輪總成之至少一齒輪由經奥氏回火之延性鐵 形成。 6·如請求項!之栗，其呈一渦卷泉之形式，其中，該定子 組件包含一具有—端板之固定渦卷部件，該端板具有一 自其延伸之第—螺旋包覆，且該至少-轉子組件包含-具有-端板之回轉式渦卷部件，該端板具有一自其延伸 以與該第-螺旋包覆相互嗔合之第二螺旋包覆。 7. 如前述請求項中任一項之系’其中該經奥氏回火之延性 鐵具有至少90%之石墨球化率。 8. 如請求項⑴中任一項之泵，其中該經奥氏回火之延性 120364.doc 200817592 9. 10. 鐵具有針狀鐵素體及碳穩定奥氏體之一矩陣。 如明求項1至6中任一項之泵，其中該經奥氏回火之延性 鐵包含按質量計總計在3.4至3.5%範圍内之碳。 如哨求項1至6中任一項之泵，其中該經奥氏回火之延性 鐵包含按質量計總計在2至2 3%範圍内之矽。 11·如請求項⑴中任一項之泵，其中該經奥氏回火之延性 鐵包含按質量計總計在〇.075至〇15%範圍内之錳。
    12·如請求項1至6中任一項之泵，其中該經奥氏回火之延性 鐵包含按質量計總計在3.4至3.5%範圍内之錮。 13.如請求項1至6中任一項之泵，其中該經奥氏回火之延性 鐵包含按質量計總計在1.2至1.4%範圍内之鎳。 14·如請求項1至6中任一項之泵，其中該經奥氏回火之延性 鐵包含按質量計總計在0.75至0.95%範圍内之銅。 120364.doc
TW096116741A 2006-05-11 2007-05-11 真空泵 TWI504811B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0609306.6A GB0609306D0 (en) 2006-05-11 2006-05-11 Vacuum pump

Publications (2)

Publication Number Publication Date
TW200817592A true TW200817592A (en) 2008-04-16
TWI504811B TWI504811B (zh) 2015-10-21

Family

ID=36637271

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096116741A TWI504811B (zh) 2006-05-11 2007-05-11 真空泵

Country Status (8)

Country Link
EP (1) EP2016288A1 (zh)
JP (1) JP2009536707A (zh)
KR (1) KR20090010977A (zh)
CN (1) CN101438061B (zh)
GB (1) GB0609306D0 (zh)
SG (1) SG174048A1 (zh)
TW (1) TWI504811B (zh)
WO (1) WO2007132259A1 (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0907298D0 (en) 2009-04-29 2009-06-10 Edwards Ltd Vacuum pump
CN102146919A (zh) * 2010-12-21 2011-08-10 周建强 双转子闭合压缩机
GB2498807A (en) * 2012-01-30 2013-07-31 Edwards Ltd Multi-stage vacuum pump with solid stator
KR101498862B1 (ko) * 2014-09-24 2015-03-05 서중 건식 진공펌프용 로터 및 이의 제조방법
FR3051852B1 (fr) * 2016-05-24 2018-06-15 Pfeiffer Vacuum Stator, arbre rotatif, pompe a vide de type seche et procedes de fabrication associes
JP7472114B2 (ja) 2018-09-28 2024-04-22 ラム リサーチ コーポレーション 堆積副生成物の蓄積からの真空ポンプの保護
CN110374872A (zh) * 2019-08-28 2019-10-25 南通晨光石墨设备有限公司 风机
FR3101921B1 (fr) * 2019-10-14 2022-11-18 Pfeiffer Vacuum Pompe à vide sèche et procédé de fabrication
GB2590663B (en) * 2019-12-23 2022-06-29 Edwards S R O Vacuum pump
KR102893395B1 (ko) 2024-07-08 2025-12-02 (주)메카테크시스템 음료 포장용 접힘 포장박스 공급장치

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01216082A (ja) * 1988-02-25 1989-08-30 Hitachi Ltd 真空ポンプ
JPH01225745A (ja) * 1988-03-03 1989-09-08 Daikin Ind Ltd 摺動部品
US5028281A (en) * 1988-06-14 1991-07-02 Textron, Inc. Camshaft
JP2602907B2 (ja) * 1988-07-25 1997-04-23 株式会社東芝 シーブ材料
JPH02107721A (ja) * 1988-10-17 1990-04-19 Toyota Motor Corp 歯車の製造方法
CN1027548C (zh) * 1989-05-06 1995-02-01 机械电子工业部沈阳铸造研究所 抗磨损腐蚀奥氏体铸铁及制造技术
US5580401A (en) * 1995-03-14 1996-12-03 Copeland Corporation Gray cast iron system for scroll machines
CN1177681A (zh) * 1996-03-29 1998-04-01 阿耐斯特岩田株式会社 无油涡旋真空泵
GB9814460D0 (en) * 1998-07-04 1998-09-02 Bramcote Holdings Limited Improved drive shaft component
JP2000119794A (ja) * 1998-10-14 2000-04-25 Hitachi Metals Ltd 耐水濡れ性に優れるオーステンパ球状黒鉛鋳鉄
JP2000239780A (ja) * 1999-02-25 2000-09-05 Kubota Tekkosho:Kk 球状黒鉛鋳鉄及びこれを用いた歯車等の機械部品
US6258180B1 (en) * 1999-05-28 2001-07-10 Waupaca Foundry, Inc. Wear resistant ductile iron
DE10123548C5 (de) * 2000-06-06 2012-12-20 Sew-Eurodrive Gmbh & Co. Kg Umlaufgetriebe, Baureihe von Umlaufgetrieben und Verwendung eines speziellen Werkstoffes zum Erreichen eines geräuscharmen Betriebs
JP2003184769A (ja) * 2001-12-12 2003-07-03 Hitachi Ltd スクリュー圧縮機及びスクリュー圧縮機用ロータの製作方法
US6796448B1 (en) * 2003-03-04 2004-09-28 Miner Enterprises, Inc. Railcar draft gear housing
JP4029795B2 (ja) * 2003-07-30 2008-01-09 日産自動車株式会社 内燃機関の燃焼制御装置
JP2005098210A (ja) 2003-09-25 2005-04-14 Aisin Seiki Co Ltd 多段ドライポンプ

Also Published As

Publication number Publication date
SG174048A1 (en) 2011-09-29
CN101438061B (zh) 2013-07-24
CN101438061A (zh) 2009-05-20
JP2009536707A (ja) 2009-10-15
WO2007132259A1 (en) 2007-11-22
EP2016288A1 (en) 2009-01-21
GB0609306D0 (en) 2006-06-21
TWI504811B (zh) 2015-10-21
KR20090010977A (ko) 2009-01-30

Similar Documents

Publication Publication Date Title
TW200817592A (en) Vacuum pump
US7942655B2 (en) Advanced scroll compressor, vacuum pump, and expander
KR101227033B1 (ko) 다단식 드라이 펌프
US20130183185A1 (en) Screw rotor for a screw type vacuum pump
US10408268B2 (en) Method of using pressure nitrided stainless steel hybrid bearing with a refrigerant lubricated compressor
EP3521625B1 (en) Gaseous fluid compression device
US20220170462A1 (en) Liquid cooling of a scroll type compressor with liquid supply through the crankshaft
WO2017187137A1 (en) Vacuum pump component
JPS6358273B2 (zh)
CN106893901A (zh) 铝合金材料、涡旋压缩机的十字滑环及其制备方法
US20100178187A1 (en) Vacuum pump
JP5609152B2 (ja) ロータリコンプレッサ
JP2009013832A (ja) ポンプロータ及びそれを用いた内接歯車ポンプ
JP2009287483A (ja) 冷媒圧縮機
EP1627150A1 (en) Circumferential piston machines
CN214499415U (zh) 一种涡旋压缩机
CN117738862B (zh) 聚晶金刚石复合片在柱塞泵斜盘和/或配流盘中的应用
JP2009168066A (ja) スラストころ軸受
CN119467332A (zh) 泵体结构、压缩机及制冷设备
GB2418958A (en) Vacuum pump with enhanced exhaust heat transfer to stator
JP5148147B2 (ja) 斜板式コンプレッサ用スラスト軸受
JPH07300650A (ja) 摺動用部材及びその製造方法及び圧縮機
CN114033674A (zh) 涡旋盘、泵体组件和压缩机
RU69587U1 (ru) Насос вакуумный водокольцевой
EP1741930A2 (en) Scroll compressor and compressor unit comprising such a compressor

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees