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TW200801639A - Optically addressed spatial light modulator and method - Google Patents

Optically addressed spatial light modulator and method

Info

Publication number
TW200801639A
TW200801639A TW96107105A TW96107105A TW200801639A TW 200801639 A TW200801639 A TW 200801639A TW 96107105 A TW96107105 A TW 96107105A TW 96107105 A TW96107105 A TW 96107105A TW 200801639 A TW200801639 A TW 200801639A
Authority
TW
Taiwan
Prior art keywords
layer
disposed over
barrier
light
light modulator
Prior art date
Application number
TW96107105A
Other languages
English (en)
Other versions
TWI428659B (zh
Inventor
Jonathon A Sachs
Jerry M Woodall
Original Assignee
Compound Photonics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compound Photonics filed Critical Compound Photonics
Publication of TW200801639A publication Critical patent/TW200801639A/zh
Application granted granted Critical
Publication of TWI428659B publication Critical patent/TWI428659B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/102—Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources
    • G02B27/1026—Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources for use with reflective spatial light modulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/102—Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources
    • G02B27/1026—Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources for use with reflective spatial light modulators
    • G02B27/1033—Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources for use with reflective spatial light modulators having a single light modulator for all colour channels
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/149—Beam splitting or combining systems operating by reflection only using crossed beamsplitting surfaces, e.g. cross-dichroic cubes or X-cubes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0126—Opto-optical modulation, i.e. control of one light beam by another light beam, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
    • G02F1/1354—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied having a particular photoconducting structure or material
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3102—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
    • H04N9/3105—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying all colours simultaneously, e.g. by using two or more electronic spatial light modulators
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3102—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
    • H04N9/312—Driving therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3141—Constructional details thereof
    • H04N9/315—Modulator illumination systems
    • H04N9/3167—Modulator illumination systems for polarizing the light beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/141—Beam splitting or combining systems operating by reflection only using dichroic mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553—Reflecting elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Light Receiving Elements (AREA)
TW96107105A 2006-03-02 2007-03-02 光定址型空間光調變器及方法 TWI428659B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77870406P 2006-03-02 2006-03-02

Publications (2)

Publication Number Publication Date
TW200801639A true TW200801639A (en) 2008-01-01
TWI428659B TWI428659B (zh) 2014-03-01

Family

ID=38475451

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96107105A TWI428659B (zh) 2006-03-02 2007-03-02 光定址型空間光調變器及方法

Country Status (12)

Country Link
US (1) US7440157B2 (zh)
EP (1) EP1989586B1 (zh)
KR (1) KR101059919B1 (zh)
CN (1) CN101421664B (zh)
AU (1) AU2007224108B2 (zh)
BR (1) BRPI0708720A2 (zh)
CA (1) CA2644283C (zh)
IL (1) IL193789A (zh)
MY (1) MY142754A (zh)
RU (1) RU2438152C2 (zh)
TW (1) TWI428659B (zh)
WO (1) WO2007103274A2 (zh)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5385783B2 (ja) 2006-06-02 2014-01-08 コンパウンド フォトニクス リミティド 光アドレス式グレースケール電荷蓄積型空間光変調器
WO2008042859A2 (en) 2006-09-29 2008-04-10 University Of Florida Research Foundation, Inc. Method and apparatus for infrared detection and display
SG185375A1 (en) 2010-05-24 2012-12-28 Univ Florida Method and apparatus for providing a charge blocking layer on an infrared up-conversion device
US8188501B2 (en) * 2010-07-19 2012-05-29 Li-Lin Chen Optical device to emit polarized light
SG194905A1 (en) 2011-06-06 2013-12-30 Univ Florida Transparent infrared-to-visible up-conversion device
CN103765588B (zh) * 2011-06-06 2016-08-24 佛罗里达大学研究基金会有限公司 集成ir上转换器件和cmos图像传感器的红外成像器件
CN103733355B (zh) 2011-06-30 2017-02-08 佛罗里达大学研究基金会有限公司 用于检测红外辐射的带有增益的方法和设备
JP6669068B2 (ja) * 2014-08-27 2020-03-18 ソニー株式会社 投射型表示装置
EP3308113A4 (en) 2015-06-11 2019-03-20 University of Florida Research Foundation, Incorporated MONODISPERSES, IR ABSORBENT NANOPARTICLES AND RELATED METHODS AND DEVICES
US10126582B2 (en) * 2015-07-07 2018-11-13 B. G. Negev Technologies and Applications, Ltd., at Ben-Gurion University SWIR to visible up-conversion optical system
KR102529893B1 (ko) * 2015-08-10 2023-05-08 삼성전자주식회사 메타 구조체 및 이를 포함하는 가변 광학 소자
US10816855B2 (en) 2015-10-29 2020-10-27 The Hong Kong University Of Science And Technology Composite photoalignment layer
US10747033B2 (en) * 2016-01-29 2020-08-18 Lawrence Livermore National Security, Llc Cooler for optics transmitting high intensity light
US10353210B2 (en) 2016-10-18 2019-07-16 Qualcomm Incorporated Self-aligning travelling collimating lens for sweeping laser
CN106647214B (zh) * 2017-03-17 2019-02-12 京东方科技集团股份有限公司 空间光调制器的寻址方法、全息显示装置及其控制方法
CN106873340B (zh) 2017-03-17 2019-07-05 京东方科技集团股份有限公司 空间光调制器的寻址方法、全息显示装置及其控制方法
US11073646B2 (en) 2017-12-01 2021-07-27 3M Innovative Properties Company Thin multilayer reflector with uniform left bandedge
WO2021251898A1 (en) 2020-06-10 2021-12-16 Agency For Science, Technology And Research Spatial light modulator and method of forming the same
KR102577874B1 (ko) * 2021-12-16 2023-09-13 주식회사 셀코스 공간 광 변조기 및 그의 제조방법

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919335B2 (ja) * 1976-11-26 1984-05-04 富士ゼロツクス株式会社 電子写真法
US4619501A (en) 1985-01-08 1986-10-28 The United States Of America As Represented By The Secretary Of The Air Force Charge isolation in a spatial light modulator
US4787713A (en) * 1987-05-22 1988-11-29 The Mead Corporation Transparent laser-addressed liquid crystal light modulator cell
US5084777A (en) 1989-11-14 1992-01-28 Greyhawk Systems, Inc. Light addressed liquid crystal light valve incorporating electrically insulating light blocking material of a-SiGe:H
US5153761A (en) * 1990-03-20 1992-10-06 Everex Systems, Inc. High performance light valve having double layer photoconductor
US5371399A (en) 1991-06-14 1994-12-06 International Business Machines Corporation Compound semiconductor having metallic inclusions and devices fabricated therefrom
WO1994000803A1 (en) * 1992-06-26 1994-01-06 Hi Tek Illusions Australia Pty. Ltd. A method of producing spectrographic images
US5508829A (en) * 1992-12-18 1996-04-16 International Business Machines Corporation LTG AlGaAs non-linear optical material and devices fabricated therefrom
US5309262A (en) * 1992-12-23 1994-05-03 Xerox Corporation Optically addressed light valve system with two dielectric mirrors separated by a light separating element
US5637883A (en) * 1995-02-27 1997-06-10 The United States Of America As Represented By The Secretary Of The Navy Optically addressed spatial light modulator using an intrinsic semiconductor active material and high resistivity cladding layers
US6025950A (en) 1997-09-22 2000-02-15 Coretek, Inc. Monolithic all-semiconductor optically addressed spatial light modulator based on low-photoconductive semiconductors
JP2000056331A (ja) * 1998-08-04 2000-02-25 Sony Corp 光書き込み型液晶ライトバルブ装置とその製造方法
EP1074863B1 (fr) * 1999-08-04 2015-03-04 Asulab S.A. Dispositif optique à réflexion de Bragg et procédés pour sa fabrication
US6528827B2 (en) 2000-11-10 2003-03-04 Optolynx, Inc. MSM device and method of manufacturing same
US20020149557A1 (en) 2000-12-20 2002-10-17 Sarif, Inc. Digital light valve addressing methods and apparatus and light valves incorporating same
WO2002060189A1 (en) 2001-01-25 2002-08-01 Iljin Diamond Co., Ltd. Image compensation methods and apparatus using correction zones
US7092046B2 (en) * 2001-03-13 2006-08-15 Qinetiq Limited Optically addressed spatial light modulator (OASLM) with dielectric mirror comprising layers of amorphous hydrogenated carbon
DE10318157A1 (de) * 2003-04-17 2004-11-11 Leonhard Kurz Gmbh & Co. Kg Folie und optisches Sicherungselement
US6771410B1 (en) 2003-06-18 2004-08-03 Intel Corporation Nanocrystal based high-speed electro-optic modulator
US7990600B2 (en) 2004-05-24 2011-08-02 Compound Photonics Limited Transmissive, optically addressed, photosensitive spatial light modulators and color display systems incorporating same

Also Published As

Publication number Publication date
TWI428659B (zh) 2014-03-01
WO2007103274A2 (en) 2007-09-13
AU2007224108B2 (en) 2011-04-07
EP1989586A2 (en) 2008-11-12
MY142754A (en) 2010-12-31
BRPI0708720A2 (pt) 2011-06-07
CN101421664A (zh) 2009-04-29
RU2008137378A (ru) 2010-04-10
KR101059919B1 (ko) 2011-08-29
WO2007103274A3 (en) 2008-11-13
EP1989586A4 (en) 2011-08-03
KR20080102278A (ko) 2008-11-24
US20070216985A1 (en) 2007-09-20
CA2644283C (en) 2014-01-07
RU2438152C2 (ru) 2011-12-27
EP1989586B1 (en) 2018-05-09
IL193789A (en) 2011-12-29
CN101421664B (zh) 2011-08-31
AU2007224108A1 (en) 2007-09-13
CA2644283A1 (en) 2007-09-13
HK1130093A1 (zh) 2009-12-18
US7440157B2 (en) 2008-10-21

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