[go: up one dir, main page]

TW200801507A - Sensor for detecting substance in liquid - Google Patents

Sensor for detecting substance in liquid

Info

Publication number
TW200801507A
TW200801507A TW096107621A TW96107621A TW200801507A TW 200801507 A TW200801507 A TW 200801507A TW 096107621 A TW096107621 A TW 096107621A TW 96107621 A TW96107621 A TW 96107621A TW 200801507 A TW200801507 A TW 200801507A
Authority
TW
Taiwan
Prior art keywords
liquid
sensor
sensing
substance
saw element
Prior art date
Application number
TW096107621A
Other languages
English (en)
Other versions
TWI331216B (en
Inventor
Kenjiro Okaguchi
Takuo Hada
Michio Kadota
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of TW200801507A publication Critical patent/TW200801507A/zh
Application granted granted Critical
Publication of TWI331216B publication Critical patent/TWI331216B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0425—Parallel to the surface, e.g. creep waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
TW096107621A 2006-06-15 2007-03-06 Sensor for detecting substance in liquid TWI331216B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006166112 2006-06-15

Publications (2)

Publication Number Publication Date
TW200801507A true TW200801507A (en) 2008-01-01
TWI331216B TWI331216B (en) 2010-10-01

Family

ID=38831532

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096107621A TWI331216B (en) 2006-06-15 2007-03-06 Sensor for detecting substance in liquid

Country Status (6)

Country Link
US (1) US7762124B2 (zh)
EP (1) EP2028484A1 (zh)
JP (1) JP4702452B2 (zh)
CN (1) CN101467034B (zh)
TW (1) TWI331216B (zh)
WO (1) WO2007145011A1 (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008102577A1 (ja) * 2007-02-19 2010-05-27 株式会社村田製作所 弾性表面波センサー装置
JP5436164B2 (ja) 2009-11-20 2014-03-05 キヤノン株式会社 振動型アクチュエータの駆動回路
KR101711204B1 (ko) 2010-10-29 2017-03-13 삼성전자주식회사 단일입력 다중출력 표면탄성파 디바이스
WO2013143150A1 (zh) * 2012-03-31 2013-10-03 西安交通大学 一种采用压阻式微悬臂梁在线快速测量流体密度的方法
WO2016052679A1 (ja) * 2014-09-30 2016-04-07 京セラ株式会社 センサ装置
ITUA20162704A1 (it) * 2016-04-19 2017-10-19 Bitron Spa Dispositivo sensore per rilevare la presenza di una sostanza elettroconduttiva in una regione spaziale e sue applicazioni.
WO2018057201A1 (en) * 2016-09-20 2018-03-29 Sensor Kinesis Corp. Surface acoustic wave biosensor employing an analog front end and dna encoded libraries to improved limit of detection (lod) with exemplary apparatus of the same
JP6714235B2 (ja) * 2016-11-14 2020-06-24 日本電波工業株式会社 物質検出システム及び物質検出方法
KR20240086375A (ko) 2022-12-09 2024-06-18 삼성전자주식회사 미세먼지 질량 측정 장치 및 이의 동작 방법
CN117055120A (zh) * 2023-08-07 2023-11-14 杭州为峰智能科技有限公司 基于lc振荡电路的接近检测装置及接近开关和位移传感器

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2627645A1 (fr) * 1988-02-18 1989-08-25 Schlumberger Ind Sa Oscillateur, en particulier a ondes acoustiques de surface, asservi en frequence par commande de sa temperature
US5306644A (en) 1988-09-29 1994-04-26 Hewlett-Packard Company Mass sensor method for measuring analytes in a sample
US5138869A (en) * 1990-12-14 1992-08-18 Novapure Corporation In-line detector system for real-time determination of impurity concentration in a flowing gas stream
US5411709A (en) * 1991-03-25 1995-05-02 Fuji Xerox Co., Ltd. Gas detector
JPH05322736A (ja) * 1992-05-15 1993-12-07 Koji Toda 板波超音波デバイスおよび板波超音波粘性センサ
US5455475A (en) * 1993-11-01 1995-10-03 Marquette University Piezoelectric resonant sensor using the acoustoelectric effect
JP3481298B2 (ja) * 1994-03-24 2003-12-22 富士工業株式会社 溶液センサ
JP3488554B2 (ja) * 1995-09-13 2004-01-19 富士工業株式会社 溶液センサシステム
JP3317273B2 (ja) * 1998-08-25 2002-08-26 株式会社村田製作所 表面波共振子、フィルタ、共用器、通信機装置
SG93209A1 (en) * 1999-07-05 2002-12-17 Inst Of Molecular Agrobiology A novel immuno-diagnostic test method for veterinary disease
US6848295B2 (en) * 2002-04-17 2005-02-01 Wayne State University Acoustic wave sensor apparatus, method and system using wide bandgap materials
JP4165347B2 (ja) * 2003-06-25 2008-10-15 セイコーエプソン株式会社 圧電素子の製造方法
JPWO2005003752A1 (ja) * 2003-07-04 2006-08-17 株式会社村田製作所 弾性表面波センサー
CN1239902C (zh) * 2004-01-14 2006-02-01 浙江大学 声表面波阵列传感器液相成份分析仪
JP2006047229A (ja) * 2004-08-06 2006-02-16 River Eletec Kk 表面弾性波デバイスセンサ
JPWO2006027893A1 (ja) * 2004-09-10 2008-05-08 株式会社村田製作所 液中物質検出センサ及びそれを用いた液中物質検出装置
CN100595581C (zh) 2004-09-10 2010-03-24 株式会社村田制作所 液体中物质检测传感器及使用它的液体中物质检测装置
WO2007141972A1 (ja) * 2006-06-08 2007-12-13 Murata Manufacturing Co., Ltd. 液中物質検出方法及び液中物質検出センサ
EP2031384A1 (en) * 2006-06-16 2009-03-04 Murata Manufacturing Co. Ltd. Sensor for detecting substance in liquid

Also Published As

Publication number Publication date
CN101467034B (zh) 2011-07-27
JP4702452B2 (ja) 2011-06-15
CN101467034A (zh) 2009-06-24
US7762124B2 (en) 2010-07-27
TWI331216B (en) 2010-10-01
EP2028484A1 (en) 2009-02-25
US20090113997A1 (en) 2009-05-07
WO2007145011A1 (ja) 2007-12-21
JPWO2007145011A1 (ja) 2009-10-29

Similar Documents

Publication Publication Date Title
TW200801507A (en) Sensor for detecting substance in liquid
US8658097B2 (en) Sensor for detecting substance in liquid
WO2007030756A3 (en) Passive saw-based hydrogen sensor and system
WO2007041280A3 (en) Methods of and apparatuses for measuring electrical parameters of a plasma process
WO2007071383A3 (de) Magnetfeldsensoranordnung und verfahren zur berührungslosen messung eines magnetfeldes
WO2006065770A3 (en) Corrosion sensor and method of monitoring corrosion
WO2009049091A3 (en) Multifunctional potentiometric gas sensor array with an integrated temperature control and temperature sensors
WO2007025002A3 (en) Traffic signal with integrated sensors
DE60123818D1 (de) Nanoelektromechanische vorrichtung zur durchführung biochemischer analysen
WO2009038431A3 (en) Sensor comprising a material which generates an electrical signal in response to elongation
ATE322671T1 (de) Drehmoment-prüfgerät
WO2002103340A3 (en) Method and device for the detection of trace amounts of a substance,using a piezoelectric crystal element
TW200624785A (en) Time-temperature indicating device
DK1698880T3 (da) Densitets- og viskositetssensor
ATE536540T1 (de) Druckaufnehmer mit temperaturkompensation
WO2006103439A3 (en) Cartridge for a fluid sample analyser
SE0950022L (sv) Trycksensoranordning anpassad för explosiva eller korrosiva atmosfärer
WO2006130778A3 (en) Deep-fry oil quality sensor
NO20071365L (no) Gassensor med folsomt getterlag og fremgangsmate for fremstilling av denne.
WO2006111472A8 (en) Sensor for eliminating undesired components and measurement method using said sensor
WO2008120511A1 (ja) 液中物質検出センサー
ITTO20040411A1 (it) Dispositivo di rilevamento di grandezze fisiche, particolarmente di umidita', e relativo metodo di rilevamento.
TW200703898A (en) The acoustic wave sensing-device integrated with micro channels
WO2004074796A3 (en) Pressure measurement with temperature compensation of pressure-conveyance media
TW200727581A (en) Surface acoustic wave bio-chip

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees