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TW200801458A - Capacitive ultrasonic transducer and method of fabricating the same - Google Patents

Capacitive ultrasonic transducer and method of fabricating the same

Info

Publication number
TW200801458A
TW200801458A TW095137237A TW95137237A TW200801458A TW 200801458 A TW200801458 A TW 200801458A TW 095137237 A TW095137237 A TW 095137237A TW 95137237 A TW95137237 A TW 95137237A TW 200801458 A TW200801458 A TW 200801458A
Authority
TW
Taiwan
Prior art keywords
electrode
ultrasonic transducer
capacitive ultrasonic
same
fabricating
Prior art date
Application number
TW095137237A
Other languages
English (en)
Other versions
TWI289199B (en
Inventor
Ming-Wei Chang
Tsung-Ju Gwo
Tse-Min Deng
Zhen-Yuan Chung
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Application granted granted Critical
Publication of TWI289199B publication Critical patent/TWI289199B/zh
Publication of TW200801458A publication Critical patent/TW200801458A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
TW095137237A 2006-06-28 2006-10-05 Capacitive ultrasonic transducer and method of fabricating the same TWI289199B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/427,194 US7626891B2 (en) 2006-01-04 2006-06-28 Capacitive ultrasonic transducer and method of fabricating the same

Publications (2)

Publication Number Publication Date
TWI289199B TWI289199B (en) 2007-11-01
TW200801458A true TW200801458A (en) 2008-01-01

Family

ID=39294921

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137237A TWI289199B (en) 2006-06-28 2006-10-05 Capacitive ultrasonic transducer and method of fabricating the same

Country Status (2)

Country Link
US (1) US7626891B2 (zh)
TW (1) TWI289199B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7839722B2 (en) * 2007-09-20 2010-11-23 Siemens Medical Solutions Usa, Inc. Microfabricated acoustic transducer with a multilayer electrode
EP2217151A1 (en) * 2007-12-03 2010-08-18 Kolo Technologies, Inc. Ultrasound scanner built with capacitive micromachined ultrasonic transducers (cmuts)
KR102155695B1 (ko) 2014-02-12 2020-09-21 삼성전자주식회사 전기 음향 변환기
US10315224B2 (en) 2015-05-20 2019-06-11 uBeam Inc. Ultrasonic transducer
US10058892B2 (en) 2015-05-20 2018-08-28 uBeam Inc. Membrane bonding
US10065854B2 (en) * 2015-05-20 2018-09-04 uBeam Inc. Membrane bonding with photoresist
CN110510573B (zh) * 2019-08-30 2023-01-10 中国科学院深圳先进技术研究院 一种电容式微机械超声换能器及其制备方法和应用
TWI714516B (zh) * 2020-07-02 2020-12-21 友達光電股份有限公司 電容式換能裝置及其製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5894452A (en) * 1994-10-21 1999-04-13 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated ultrasonic immersion transducer
US6295247B1 (en) * 1998-10-02 2001-09-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined rayleigh, lamb, and bulk wave capacitive ultrasonic transducers
US6443901B1 (en) * 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US7530952B2 (en) * 2004-04-01 2009-05-12 The Board Of Trustees Of The Leland Stanford Junior University Capacitive ultrasonic transducers with isolation posts
US7251884B2 (en) * 2004-04-26 2007-08-07 Formfactor, Inc. Method to build robust mechanical structures on substrate surfaces
US7470232B2 (en) * 2004-05-04 2008-12-30 General Electric Company Method and apparatus for non-invasive ultrasonic fetal heart rate monitoring

Also Published As

Publication number Publication date
TWI289199B (en) 2007-11-01
US20070153632A1 (en) 2007-07-05
US7626891B2 (en) 2009-12-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees